JPS6334163U - - Google Patents
Info
- Publication number
- JPS6334163U JPS6334163U JP12648386U JP12648386U JPS6334163U JP S6334163 U JPS6334163 U JP S6334163U JP 12648386 U JP12648386 U JP 12648386U JP 12648386 U JP12648386 U JP 12648386U JP S6334163 U JPS6334163 U JP S6334163U
- Authority
- JP
- Japan
- Prior art keywords
- planetary
- annular frame
- shaft
- circular parts
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図ａはこの考案に係るプラネタリの構造の
一例を示す平面図、第１図ｂは第１図ａに示すプ
ラネタリと環状の枠を連結する構造の一例を示す
説明図、第１図ｃは環状の枠に設けたギヤの構造
の一例を示す平面図、第２図ａは従来の真空蒸着
装置におけるプラネタリと該プラネタリの回転に
係る部分の構造の一例を示す説明図、第２図ｂは
第２図ａに示すプラネタリを真空容器外に取り出
した状態を示す説明図、第２図ｃは第２図ａにお
ける個々のプラネタリの形状を示す平面図、第２
図ｄは第２図ａにおけるプラネタリと環状の枠を
連結する構造を示す説明図である。
４…環状の枠、４１…軸受け、４２…ギヤ、６
ａ…プラネタリ、６１…軸、６２ａ…回転する円
形部分、６３…軸、６４…ウオームギヤ。なお各
図中同一符号は同一または相当する部分を示す。
Fig. 1a is a plan view showing an example of the structure of the planetary according to this invention, Fig. 1b is an explanatory view showing an example of the structure connecting the planetary shown in Fig. 1a and the annular frame, Fig. 1c 2 is a plan view showing an example of the structure of a gear provided in an annular frame, FIG. is an explanatory diagram showing the planetary shown in FIG. 2a taken out of the vacuum container, FIG. 2c is a plan view showing the shape of each planetary in FIG. 2a, and FIG.
FIG. d is an explanatory diagram showing a structure for connecting the planetary and annular frame in FIG. 2a. 4... Annular frame, 41... Bearing, 42... Gear, 6
a... Planetary, 61... Shaft, 62a... Rotating circular part, 63... Shaft, 64... Worm gear. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
枠と、該環状の枠に設けた軸受けに中心部に面に
垂直に設けた軸が嵌合して上記環状の枠に連動し
て回転するとともに該環状の枠の軸受けに嵌合し
た軸を支点に自転するプラネタリを備え、該プラ
ネタリの面に接着した物体の表面に金属膜を蒸着
する真空蒸着装置において、上記プラネタリの金
属膜を蒸着する物体を接着する各円形部分を切り
離し、切り離した各円形部分の該プラネタリの中
心部を通る直径線上に設けた軸をウオームギヤ機
構を介して上記環状の枠に連結し、上記プラネタ
リの自転に連動して上記各円形部分を該プラネタ
リの中心部を通る直径を軸に回転させ、該各円形
部分の双方の面に接着した物体の表面に金属膜を
蒸着する構造としたことを特徴とする真空蒸着装
置。 In the vacuum container, there is an annular frame that rotates together with the rotating shaft, and a shaft provided at the center perpendicular to the surface fits into a bearing provided on the annular frame, and rotates in conjunction with the annular frame. At the same time, the metal film of the planetary is vapor-deposited in a vacuum evaporation apparatus that is equipped with a planetary that rotates around a shaft that is fitted into a bearing of the annular frame, and that evaporates a metal film on the surface of an object that is adhered to the surface of the planetary. Each of the circular parts to which the object to be bonded is separated, and a shaft of each of the separated circular parts, which is provided on a diameter line passing through the center of the planetary, is connected to the annular frame via a worm gear mechanism, and is linked to the rotation of the planetary. and rotating each of the circular parts about the diameter passing through the center of the planetary, and depositing a metal film on the surface of an object adhered to both surfaces of each of the circular parts. Vapor deposition equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12648386U JPH0345947Y2 (en) | 1986-08-21 | 1986-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12648386U JPH0345947Y2 (en) | 1986-08-21 | 1986-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6334163U true JPS6334163U (en) | 1988-03-04 |
| JPH0345947Y2 JPH0345947Y2 (en) | 1991-09-27 |
Family
ID=31020324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12648386U Expired JPH0345947Y2 (en) | 1986-08-21 | 1986-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345947Y2 (en) |
-
1986
- 1986-08-21 JP JP12648386U patent/JPH0345947Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0345947Y2 (en) | 1991-09-27 |
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