JPS63285715A - Magnetic head - Google Patents

Abstract

PURPOSE:To obtain a magnetic head superior in wear resisting property, by forming a ferromagnetic metallic thin film on the joining face of each of paired magnetic core half bodies made of a ferromagnetic oxide with an Fe-Si thin film composed mainly of Fe in between, and constituting an operating gap by butting the thin films against each other. CONSTITUTION:This magnetic head is constituted of magnetic core half bodies 3a and 3b made of an Mn-Zn ferrite, ferromagnetic metallic thin films 2a and 2b made of sendust, and Fe-Si thin films 6a and 6b for easing distortion which are formed between the half bodies 3a and 3b and thin films 2a and 2b, respectively. The thin films 6a and 6b have a chemical composition of 96% Fe and 4% Si and a film thickness of 1mum. Since the Fe is a ferromagnetic substance, the magnetic reluctance of the core does not increase even if the film thickness is increased and, therefore, the thickness can be increased sufficiently so as to eliminate distortion completely. In addition, since the material is high in hardness, the thin films are superior in wear resisting property. In connection with the thin films 6a and 6b, moreover, it is desirable to set the Si content within a range of 2-6% and film thickness within a range of 2,000Angstrom -5mum, because if the thickness <2,000Angstrom distortion cannot be eased sufficiently and if the thickness if >=5mum the magnetic flux density in the vicinity of the gap 1 drops.

Description

DETAILED DESCRIPTION OF THE INVENTION 0) Fields of application of diagonals The present invention relates to magnetic heads, and in particular, in order to cope with metal tapes with high coercive force, high saturation magnetic flux is applied to the vicinity of the gap of the magnetic core. This article concerns a so-called composite magnetic head in which a ferromagnetic metal thin film is arranged.

(b) Conventional witchcraft In recent years, magnetic recording and reproducing devices such as VTRs (video tape recorders) and DATs (digital audio tape recorders) have been increasing the density of recording signals. As a result, metal tapes with high residual magnetic flux density and high coercive force have come into use. In addition to the high-frequency characteristics and wear resistance of the magnetic core that are normally required for a magnetic head, a magnetic head compatible with this high coercive force metal tape must have a high saturation magnetic flux density near the gap of the magnetic core. is required.

In order to meet the above requirements, as shown in FIG. 10, ferromagnetic metal thin films (2a) (2b) such as sendust or amorphous metal are entirely formed in the vicinity of the working gap Ill, and the magnetic core half (2b) is formed in the other parts. 5a)(3b)' A composite magnetic head formed of a ferromagnetic metal oxide such as 1Mn-Zn ferrite has been proposed. <4) (4) fl The pair of magnetic core halves (3a) (3b) fully bonded glass, (5
) is the winding m groove.

In the above magnetic head, the ferromagnetic metal thin film (2a)
(2b) is formed by depositing the magnetic core halves (3a) (3k))f on the substrate by sputtering. At this time, the adhered particles collide with the substrate with a large amount of thermal energy and kinetic energy, and the temperature rises to several hundred degrees Celsius.
temperature to room temperature. At this time, strain occurs between the substrate and the ferromagnetic metal thin film due to the difference in thermal expansion coefficient υ. , 00 runs may cause cracks in the substrate when processing the winding grooves on the substrate, when glass-milling the substrate, when cutting the core block, etc., or when the ferromagnetic metal #
The film may peel off. Furthermore, even if the above-mentioned cracks occur or the thin film peels off, the magnetic core halves (3a) (3b) and the ferromagnetic metal thin film (2a) are damaged by the above-mentioned insects.
The electromagnetic conversion characteristics of (2b) deteriorate.

For example, JP-A-T which eliminates such drawbacks
5102 film on a ferrite substrate as disclosed in @61-172203 (011B5/127).
1300A deposited and arymts on top.

After the OA deposition, a ferromagnetic metal thin film is coated to form the above 51
02 membrane and Clr1gl? There is a magnetic head that is used as a strain relaxation film.

However, in the above-mentioned magnetic head, magnetic flux lines during recording and reproduction pass through the 810211% and Or films, which are non-magnetic materials, and if the thickness of this thin film is increased in order to obtain sufficient strain relaxation, the magnetic flux decreases. There were some drawbacks.

(c) Problems to be solved by the invention The present invention was born out of the drawbacks of the above-mentioned conventional example.
The overall object of the present invention is to provide a magnetic head that can sufficiently relax the effects that occur between a magnetic core and a ferromagnetic metal thin film without deteriorating magnetic properties such as magnetic permeability.

(E) Effect According to the above configuration, since re, which is the main component of the Fe-Bi based thin film, is a ferromagnetic metal material, the magnetic permeability does not deteriorate even if the film thickness is increased. Sufficient strain relaxation can be performed, and the above-mentioned F-81 series thin g
! (hardness is high), sufficient wear resistance can be obtained.

(F) Embodiment An embodiment of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a perspective view showing the external appearance of the magnetic head of this embodiment, and FIG. 2 is a view showing one fit of the tape sliding contact. The same parts as in FIG. Reference is made to the illustrations.

This magnetic head has Fe-1 for strain relaxation between magnetic core halves (3a) (3b) made of Mn-Zn ferrite and ferromagnetic metal thin films (2a) (2b) made of Sendust.
31 series thin films (6a) (6b) are interposed. Said F
e-Si thin film (6a) (6b)t! F'e is 96%,
The composition is 4% Sl, and the film thickness is 1 μm.

Next, a method of manufacturing this magnetic head will be explained in detail.

First, two substrates (7a) (7b) made of Mn--Zn ferrite cut into desired dimensions and shapes are prepared, and the upper surfaces of the substrates (7a) (7b) are entirely mirror-polished. Then, as shown in FIG. 5, a Fe-81 thin film (Pe 96%, 814%) (6a
) (6b) A film is formed by t-1 μm sputtering, vacuum evaporation, ion grating, etc.

Next, as shown in FIG. 4, ferromagnetic metal thin films (2a) (2
b)? The image is projected for about 5 to 20 μs, and then on the top! 91
Non-magnetic thin film for gap formation such as 02, Aj'203 (
(not shown) A root thickness of t02 to 0.5 μm is deposited.

Next, track width regulating grooves (81 (812) are formed on the upper surfaces of these substrates (7a) and (7b) as shown in FIG.
Glass rod insertion grooves (9) (9) and winding grooves (alt-) are formed so as to be orthogonal to 8).

Next, as shown in FIG.
) (7b) and insert the glass rod insertion groove (
9H9) is inserted into a glass rod (1112), and heat-treated in a vacuum atmosphere while applying pressure (Et')CF)' in an inert gas such as N2 gas or Ar gas. The two substrates (7a) and (7b) are bonded with glass to form a core block.

After that, as shown in FIG. 7, the unstable portions of the core block U are removed by cutting, grinding, etc. along the dashed-dotted line (13), and the tape sliding contact surface is rounded along the dashed-dotted line I. By polishing and slicing along the dashed line (151), the head coreg of this embodiment shown in FIG. 1 is obtained.

Almost equal to the number 115 x 10-'/deP,
This is a substrate (7a) made of Mn-Zn ferrite.
) (7b) thermal expansion coefficient 110-120X10''''/
deP, Fe-Si thin film (6a) (6
1)) and the substrates (7a) (7b), there is no problem due to the difference in coefficient of thermal expansion. In addition, Fe-8L thin film (6
a) (6b) is Fe′f! which is the main component of Sendust. :
Since it contains a large amount, it has good adhesion to the ferromagnetic metal thin films (2a) and (2b) made of sendust. Furthermore, the F
The e-Si thin films (6a) (6b) have Fe as the main component.
Since it is a ferromagnetic metal material, the magnetic resistance of the core does not increase even if the film thickness is increased, and the film thickness can be made sufficiently large to completely eliminate running. In addition, Fe-81 thin film (6a)
(6b) has a higher hardness than 81 and has excellent wear resistance.

The content of the Fe-81 thin film (6a) (6bHIS1) is preferably within the range of 2 to 6%, and if the content is higher than that, the magnetic permeability will become low, and even less. Sufficient wear resistance cannot be obtained.

In addition, the Pa-Si thread thin film (6a) (6b) f120
There is not enough distortion at less than 00 A (also, 5 μm
In order to prevent the gap (nearly 11 &!) magnetic flux and pseudo-gap, a magnetic head has been proposed in which the boundary line between the magnetic core and the ferromagnetic metal thin film is inclined by 50 to 60 degrees with respect to the gap. However, in this head as well, as shown in FIG.
It is possible to have all the type 1 thin films (18a) and (18b) interposed therein.

In manufacturing this magnetic head, a ferrite substrate (1
Inclined groove c! formed on the top surface of 9! When forming the track lIl#i&f'I") regulating groove shown by the dotted line in FIG. 9 beside the txo, the Fe-
By removing the 81 series thin l1l (18a) at the same time, the ferromagnetic metal thin film (17a) (17 films) alone can form the facing part of the operating gap tll as shown in FIG.

In the above-described embodiments, a ferromagnetic metal thin film called Sendust E υ has been described, but the present invention can also be applied to an amorphous metal thin film such as Co--Zr--Nb, and similar effects can be obtained.

(G) Effects of the Invention According to the present invention, the magnetic t#at- such as magnetic permeability can be removed to M' generated between the magnetic core and the ferromagnetic metal thin film without deteriorating, and the wear resistance can also be improved. A collapsed magnetic head can be provided.

[Brief explanation of the drawing]

1 to 9 relate to the present invention, and FIG. 1 shows the outside of the magnetic head. FIG. 2 is a perspective view showing the tape sliding surface of the magnetic head, and FIGS. 5, 4, 5, 6, and 7 show the first manufacturing method of the magnetic head. FIG. 8 is a diagram showing a tape sliding contact surface of another magnetic head, and FIG. 9 is a diagram showing a method of manufacturing the magnetic head. FIG. 10 is a perspective view showing the appearance of a conventional magnetic head.

Claims (1)

[Claims] (1) A ferromagnetic metal thin film is formed on the joint surface of a pair of magnetic core halves made of ferromagnetic oxide through an Fe-Si thin film mainly composed of Fe, and the ferromagnetic metal thin films work together. A magnetic head is formed by forming an operating gap.