JPS63236520A - Harmful exhaust gas removing agent - Google Patents
Harmful exhaust gas removing agentInfo
- Publication number
- JPS63236520A JPS63236520A JP62068099A JP6809987A JPS63236520A JP S63236520 A JPS63236520 A JP S63236520A JP 62068099 A JP62068099 A JP 62068099A JP 6809987 A JP6809987 A JP 6809987A JP S63236520 A JPS63236520 A JP S63236520A
- Authority
- JP
- Japan
- Prior art keywords
- removing agent
- earth metal
- alkaline earth
- exhaust gas
- metal compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 22
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910000077 silane Inorganic materials 0.000 claims abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 17
- 150000001341 alkaline earth metal compounds Chemical class 0.000 claims abstract description 13
- 150000001875 compounds Chemical class 0.000 claims abstract description 7
- -1 diborane Chemical compound 0.000 claims abstract description 6
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910000058 selane Inorganic materials 0.000 claims abstract description 4
- 229910010276 inorganic hydride Inorganic materials 0.000 claims description 3
- 239000004480 active ingredient Substances 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 11
- 239000007789 gas Substances 0.000 abstract description 11
- 229910001873 dinitrogen Inorganic materials 0.000 abstract description 7
- 239000000920 calcium hydroxide Substances 0.000 abstract description 4
- 229910001861 calcium hydroxide Inorganic materials 0.000 abstract description 4
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 abstract description 3
- 239000000843 powder Substances 0.000 abstract description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000003518 caustics Substances 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 5
- 239000002912 waste gas Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000003513 alkali Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000012286 potassium permanganate Substances 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 2
- 239000000383 hazardous chemical Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 150000004760 silicates Chemical class 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 241000206761 Bacillariophyta Species 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 244000025254 Cannabis sativa Species 0.000 description 1
- 239000005909 Kieselgur Substances 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910001860 alkaline earth metal hydroxide Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 229940081330 tena Drugs 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、ＩＣ，ＬＳＩの製造工程で発生するガス状有
害化合物の除去剤に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an agent for removing gaseous harmful compounds generated during the manufacturing process of ICs and LSIs.
（従来の技術およびその問題点）
近年、めざましい成長ととげてきた半導体工業における
、ＩＣ，ＬＳＩＩ造工程において発生するシラン、ジボ
ラン、セレン化水素等の揮発性無機水素化物は、強い毒
性を有し、特にシランは空気中の酸素と激しく反応し、
発火する性質を持っている。そのため、半導体製造工程
より生ずる廃ガスから前記の有害物質を安全かつ完全に
除去することが要求されている。(Prior art and its problems) Volatile inorganic hydrides such as silane, diborane, and hydrogen selenide generated in the IC and LSII manufacturing process in the semiconductor industry, which has experienced remarkable growth in recent years, are highly toxic. , especially silane, which reacts violently with oxygen in the air,
It has the property of igniting. Therefore, it is required to safely and completely remove the above-mentioned harmful substances from waste gas generated from semiconductor manufacturing processes.
これらの有害物質の除去には、従来より種々の方法が提
案されているが、一般には、苛性アルカリ水溶液に有害
成分を含む廃ガスを自流接触させ。Various methods have been proposed to remove these harmful substances, but generally, waste gas containing harmful components is brought into direct contact with a caustic aqueous solution.
有害成牧を苛性アルカリに吸収除去させる湿式法によっ
ている。しかし、この方法は、苛性アルカリが比較的安
価であるという特徴を有するものの、装置の大型化、複
雑化、苛性アルカリの腐蝕作用によるメンテナンスの困
難さ、およびアルカリ廃液の廃棄処理の困難さ等から、
乾式の除去方法が望まれていた。A wet method is used in which harmful adult grass is absorbed and removed by caustic alkaline. However, although this method has the characteristic that caustic alkali is relatively inexpensive, it has problems such as increased size and complexity of the equipment, difficulty in maintenance due to the corrosive effect of caustic alkali, and difficulty in disposing of alkaline waste liquid. ,
A dry removal method was desired.
乾式の除去方法としては、特開昭５８−１２８１４６号
公報、特開昭５９−４９８２２号公報、特開昭６０−１
８７３３５号公報、特開昭５７−９１７１９号公報、特
開昭６０−１７５５２２号公報等に開示される如く、ケ
イソウ上等の多孔質ケイ酸塩にアルカリ水溶液および／
または酸化剤水溶液を担持させる方法がある。Dry removal methods include JP-A-58-128146, JP-A-59-49822, and JP-A-60-1.
As disclosed in JP-A No. 87335, JP-A No. 57-91719, JP-A No. 60-175522, etc., porous silicates such as diatoms are treated with an aqueous alkaline solution and/or
Alternatively, there is a method of supporting an oxidizing agent aqueous solution.
しかし、これらの方法において、粉末状担体を用いたも
のは、水溶液を担持することにより著しく通気抵抗が増
大し、実用に耐えない。一方、粒状担体を用いたものは
、付着水分量が多い場合、多孔体細孔は水に埋めつくさ
れ、有効な表面が小さくなり、はとんど有害物質捕集能
を示さない。However, in these methods, those using a powdered carrier have a marked increase in ventilation resistance due to carrying an aqueous solution, and are not practical. On the other hand, when a particulate carrier is used, when the amount of attached water is large, the pores of the porous material are filled with water, the effective surface area becomes small, and the carrier hardly exhibits the ability to trap harmful substances.
これに対し、付着水分を適量に減じたものは、使用に伴
い、接触ガスによってしだいに乾燥し、遂にはまったく
有害物質捕集能を示さなくなる。そのため、実際に有害
物質捕集装置として用いる場合、廃ガスを有害物質捕集
塔に導入する前に、廃ガスを加湿する装置を設けること
が不可欠となり、装置が複雑になるため、乾式のメリッ
トが失われていた。On the other hand, when the adhering moisture is reduced to an appropriate amount, as it is used, it gradually dries out due to contact gas, and eventually shows no ability to trap harmful substances at all. Therefore, when actually used as a hazardous substance collection device, it is essential to install a device to humidify the waste gas before introducing it into the hazardous substance collection tower, which complicates the device. was lost.
（発明の目的）
本発明は、前記欠点を解決し、大がかりな加湿装置を必
要とすることなく、かつ捕集速度の高い有害廃ガス除去
剤を提供することを目的とする。(Objective of the Invention) An object of the present invention is to solve the above-mentioned drawbacks and provide a harmful waste gas removing agent that does not require a large-scale humidifying device and has a high collection rate.
（問題点を解決するための技術的手段）本発明は、水分
を含有したアルカリ土類金属化合物を有効成分とするガ
ス状有害化合物の除去剤に関する。(Technical Means for Solving the Problems) The present invention relates to a gaseous harmful compound remover containing a water-containing alkaline earth metal compound as an active ingredient.
アルカリ土類金属化合物としては、マグネシウム、カル
シウム、ストロンチウム、バリウムから選ばれるいずれ
か一種の金属の酸化物および／または水酸化物が用いら
れる。特に、価格、塩基度から、カルシウムの酸化物お
よび／または水酸化物が最も適している。As the alkaline earth metal compound, an oxide and/or hydroxide of any metal selected from magnesium, calcium, strontium, and barium is used. In particular, calcium oxide and/or hydroxide are most suitable from the viewpoint of price and basicity.
水分の含有量は、アルカリ土類金属化合物に対して１〜
２５重豊％が望ましい、この水分に溶解したアルカリ土
類金属化合物によりガス状有害化合物が捕集される。し
たがって、水分が少なすぎると捕集能力が十分でなくな
るので好ましくない。The water content is 1 to 1 for the alkaline earth metal compound.
Gaseous harmful compounds are collected by the alkaline earth metal compound dissolved in this water, preferably 25% by weight. Therefore, if the water content is too low, the collection ability will not be sufficient, which is not preferable.
ガス状有害化合物としては、シラン、ジボラン、セレン
化水素等の揮発性無機水素化物が挙げられる。Gaseous harmful compounds include volatile inorganic hydrides such as silane, diborane, and hydrogen selenide.
本発明の除去剤は、以下の製法により得られる。The removing agent of the present invention can be obtained by the following manufacturing method.
まず、アルカリ土類金属化合物に水を加え、混合、３ｈ
粒り、１４燥する。この際、苛性アルカリ水溶液を添加
してもよい、苛性アルカリ水溶液の添加により、除去剤
の塩基性度を上げ、捕集効果を増大させることができる
。First, add water to the alkaline earth metal compound and mix for 3 hours.
Grain grain, dry for 14 days. At this time, an aqueous caustic alkali solution may be added. By adding an aqueous caustic alkaline solution, the basicity of the removing agent can be increased and the collection effect can be increased.
次いで、乾燥物を３００〜７００℃の温度で焼成する。Next, the dried product is fired at a temperature of 300 to 700°C.
温度が３００℃より低いと吸水した際に、粒子が崩壊し
やすく、また７００℃より高いと吸湿によりアルカリ土
類金属の水酸化物を生じにくいので好ましくない８次い
で、焼成物に水分を１〜２５重量％含有させることによ
り本発明の除去剤が得られる。水分を含有させる方法と
しては、例えば、焼成物にスチームを含んだ窒素ガスを
流通することにより行われ′る。If the temperature is lower than 300°C, the particles tend to disintegrate when water is absorbed, and if the temperature is higher than 700°C, it is difficult to generate alkaline earth metal hydroxides due to moisture absorption, which is undesirable. By containing 25% by weight, the removing agent of the present invention can be obtained. A method for incorporating moisture is, for example, by passing nitrogen gas containing steam through the fired product.
（実施例） 以下実施例において、本発明を説明する。(Example) The present invention will be explained in the following examples.
実施例１
水酸化カルシウム粉末に水を加え、造粒後、５乾燥した
。乾燥物を５００℃で３時間焼成し、直径２ＩＩＩ１１
程度の塊状の除去剤を得た。この除去剤にスチームを含
んだ窒素ガスを流通し、水分を１ａ５重量％吸湿させた
。この除去剤を内径２５ｍのカラムに５備詰め、シラン
ガスを４ｖ０１％含む窒素ガスを流速１ ｃｘａ ／
Ｓｅｃで流通させた。カラム上部にＫＭｎ Ｏ４水溶液
を担持した・インジケーターを置き、ＫＭｎＯ４が紫よ
り茶色に変色し始める点を破過点として、ガスを採集し
、シランガス濃度を測定したところ、４０分後にＫＭｎ
Ｏ４の一部に変色が認められ、その時のシランガス出
口濃度は５０ｐｐｍ以下であった。Example 1 Water was added to calcium hydroxide powder, granulated, and then dried for 5 minutes. The dried product was baked at 500℃ for 3 hours, and the diameter was 2III11.
A somewhat lumpy removal agent was obtained. Nitrogen gas containing steam was passed through this remover to absorb 5% by weight of moisture. Five of these removal agents were packed in a column with an inner diameter of 25 m, and nitrogen gas containing 4v01% of silane gas was added at a flow rate of 1 cxa/
It was distributed under Sec. An indicator supporting a KMnO4 aqueous solution was placed at the top of the column, and the breakthrough point was the point at which KMnO4 began to change color from purple to brown. Gas was collected and the silane gas concentration was measured. After 40 minutes, KMnO4
Discoloration was observed in a part of O4, and the silane gas outlet concentration at that time was 50 ppm or less.
実施例２
水酸化カルシウム粉末に１０ｖｔ％水酸化ナトリウム水
溶液を加え、造粒後、乾燥した。乾燥物分５００℃で３
時間焼成し、直径２ｍ程度の塊状の除去剤と得た。この
除去剤にスチームを含んだ窒素ガスを流通し、水分を２
０．５重量％吸湿させた。Example 2 A 10vt% aqueous sodium hydroxide solution was added to calcium hydroxide powder, granulated, and then dried. Dry matter: 3 at 500℃
After baking for a period of time, a block of removal agent with a diameter of about 2 m was obtained. Steam-containing nitrogen gas is passed through this remover to remove moisture.
0.5% by weight of moisture was absorbed.
また、二の除去剤は水酸化ナトリウムを６重量％角有１
−ていな７この除去剤を用いて、実施例１と同様にして
シラン捕集試験を行った結果、破過時間は６１分で、そ
の時のシランガス出口濃度は５０ｐｐｍ以下であつな。In addition, the second removing agent contains 6% by weight of sodium hydroxide.
- Tena 7 Using this remover, a silane collection test was conducted in the same manner as in Example 1. As a result, the breakthrough time was 61 minutes, and the silane gas outlet concentration at that time was 50 ppm or less.
実施例３
実施例１と同様にして得られた除去剤を実施例１と同様
にカラムに詰め、乾燥窒素ガスを流速５ｃｓ ／ Ｓｅ
ｃで４８時間流通させた。窒素流通後の除去剤の水分量
は５重量％であった。この除去剤を用いて、実施例１と
同様にしてシラン捕集試験を行った結果、捕集能の低下
はまったく認められなかった。Example 3 A removing agent obtained in the same manner as in Example 1 was packed in a column in the same manner as in Example 1, and dry nitrogen gas was supplied at a flow rate of 5 cs/Se.
It was allowed to circulate for 48 hours at c. The moisture content of the removing agent after nitrogen flow was 5% by weight. Using this removal agent, a silane collection test was conducted in the same manner as in Example 1, and as a result, no decrease in collection ability was observed.
比較例１
ケイソウ±１５ｇに１０Ｗ【％水酸化ナトリウム水溶液
を担持させ得られた除去剤と用いて、実施例１と同様に
してシラン捕集試験を行った結果、破過時間は４分で、
その時のシランガス出口濃度は３．５％であった。Comparative Example 1 A silane collection test was conducted in the same manner as in Example 1 using a removing agent obtained by supporting 10 W [% sodium hydroxide aqueous solution on ±15 g of diatomaceous material. As a result, the breakthrough time was 4 minutes.
The silane gas outlet concentration at that time was 3.5%.
比較例２
比較例１で得られた除去剤２２ｇを実施例１と同様にカ
ラムに詰め、乾燥２素ガスを流速５ａ−／ＳｅＣで４８
時間流通させた。窒素流通後の除去剤の水分量は０．８
重量％であった。この除去剤を用いて、実施ＰＡ１．と
同様してシラン捕集試験を行った結果、はとんど捕集能
を示さなかった。Comparative Example 2 22 g of the removing agent obtained in Comparative Example 1 was packed into a column in the same manner as in Example 1, and dry diatomic gas was added at a flow rate of 5a-/SeC to 48 g.
Time passed. The moisture content of the remover after nitrogen flow is 0.8
% by weight. Using this removing agent, perform PA1. As a result of conducting a silane collection test in the same manner as above, it showed almost no collection ability.
比較例３
実施例２において、除去剤にスチームを含んだ窒素ガス
を流通せず、水分を吸湿させることなく、実施例１と同
様してシラン捕集試験を行った結果、すぐに破過してほ
とんど捕集能を示さなかった。Comparative Example 3 In Example 2, a silane collection test was conducted in the same manner as in Example 1 without passing nitrogen gas containing steam through the remover and without absorbing moisture, and as a result, the silane collection test was immediately broken through. It showed almost no collection ability.
（発明の効果）
本発明の除去剤は、アルカリ土類金属化合物自体が、担
体としての機能を果たしており、したがって、シラン等
により、含有水分中のアルカリ土類金属化合物が消費さ
れてもすぐに補給される。(Effects of the Invention) In the remover of the present invention, the alkaline earth metal compound itself functions as a carrier, so even if the alkaline earth metal compound in the moisture content is consumed by silane etc., the alkaline earth metal compound itself functions as a carrier. will be replenished.
また、本発明の除去剤は吸着水を含有しており、この吸
着水は、ケイソウ土等の多孔質ケイ酸塩に比べて、強固
に吸着されているので、乾燥により放出されにくい、そ
のため、乾燥した廃ガスを長時間流通しても、安定した
捕集能力を示す。In addition, the remover of the present invention contains adsorbed water, and this adsorbed water is more strongly adsorbed than porous silicates such as diatomaceous earth, so it is difficult to be released by drying. It exhibits stable collection ability even when dry waste gas is circulated for a long time.
Claims (3)
分とするガス状有害化合物の除去剤。(1) A gaseous harmful compound remover containing a water-containing alkaline earth metal compound as an active ingredient.
化水素等の揮発性無機水素化物である特許請求の範囲第
１項記載の除去剤。(2) The removal agent according to claim 1, wherein the gaseous harmful compound is a volatile inorganic hydride such as silane, diborane, or hydrogen selenide.
化合物に対して１〜２５重量％である特許請求の範囲第
１項記載の除去剤。(3) The removing agent according to claim 1, wherein the amount of water contained in the removing agent is 1 to 25% by weight based on the alkaline earth metal compound.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62068099A JPS63236520A (en) | 1987-03-24 | 1987-03-24 | Harmful exhaust gas removing agent |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62068099A JPS63236520A (en) | 1987-03-24 | 1987-03-24 | Harmful exhaust gas removing agent |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63236520A true JPS63236520A (en) | 1988-10-03 |
| JPH0416211B2 JPH0416211B2 (en) | 1992-03-23 |
Family
ID=13363953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62068099A Granted JPS63236520A (en) | 1987-03-24 | 1987-03-24 | Harmful exhaust gas removing agent |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63236520A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005072853A1 (en) * | 2004-01-29 | 2005-08-11 | Taiyo Nippon Sanso Corporation | Exhaust gas treating agent, method for treating exhaust gas and apparatus for treating exhaust gas |
| WO2016132574A1 (en) * | 2015-02-19 | 2016-08-25 | 三菱重工業株式会社 | Method for selenium analysis |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5684619A (en) * | 1979-12-12 | 1981-07-10 | Seitetsu Kagaku Co Ltd | Nonpolluting method of gas for semiconductor |
| JPS5719699A (en) * | 1980-07-11 | 1982-02-01 | Hitachi Ltd | Pipe system of atomic power plant |
| JPS5834178A (en) * | 1981-08-21 | 1983-02-28 | Nisshin Steel Co Ltd | Chromate treatment for plated steel plate |
| JPS61293545A (en) * | 1985-06-22 | 1986-12-24 | Toyo C C I Kk | Exhaust gas purifying agent |
-
1987
- 1987-03-24 JP JP62068099A patent/JPS63236520A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5684619A (en) * | 1979-12-12 | 1981-07-10 | Seitetsu Kagaku Co Ltd | Nonpolluting method of gas for semiconductor |
| JPS5719699A (en) * | 1980-07-11 | 1982-02-01 | Hitachi Ltd | Pipe system of atomic power plant |
| JPS5834178A (en) * | 1981-08-21 | 1983-02-28 | Nisshin Steel Co Ltd | Chromate treatment for plated steel plate |
| JPS61293545A (en) * | 1985-06-22 | 1986-12-24 | Toyo C C I Kk | Exhaust gas purifying agent |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005072853A1 (en) * | 2004-01-29 | 2005-08-11 | Taiyo Nippon Sanso Corporation | Exhaust gas treating agent, method for treating exhaust gas and apparatus for treating exhaust gas |
| JPWO2005072853A1 (en) * | 2004-01-29 | 2007-09-06 | 大陽日酸株式会社 | Exhaust gas treatment agent, exhaust gas treatment method, and exhaust gas treatment apparatus |
| KR100815594B1 (en) | 2004-01-29 | 2008-03-20 | 다이요 닛산 가부시키가이샤 | Exhaust gas treating agent, method for treating exhaust gas and apparatus for treating exhaust gas |
| JP4711831B2 (en) * | 2004-01-29 | 2011-06-29 | 大陽日酸株式会社 | Exhaust gas treatment agent, exhaust gas treatment method, and exhaust gas treatment apparatus |
| WO2016132574A1 (en) * | 2015-02-19 | 2016-08-25 | 三菱重工業株式会社 | Method for selenium analysis |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0416211B2 (en) | 1992-03-23 |
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