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JPS63208253A - Semiconductor circuit device - Google Patents

Semiconductor circuit device

Info

Publication number
JPS63208253A
JPS63208253A JP4014787A JP4014787A JPS63208253A JP S63208253 A JPS63208253 A JP S63208253A JP 4014787 A JP4014787 A JP 4014787A JP 4014787 A JP4014787 A JP 4014787A JP S63208253 A JPS63208253 A JP S63208253A
Authority
JP
Japan
Prior art keywords
resin
case
envelope
tightening
depletion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4014787A
Other languages
Japanese (ja)
Other versions
JPH0511665B2 (en
Inventor
Ko Saito
洸 斉藤
Takehiko Kobayashi
武彦 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP4014787A priority Critical patent/JPS63208253A/en
Publication of JPS63208253A publication Critical patent/JPS63208253A/en
Publication of JPH0511665B2 publication Critical patent/JPH0511665B2/ja
Granted legal-status Critical Current

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  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

PURPOSE:To improve the yield rate in manufacturing, by providing a depletion part including a gap formed by the thermal deformation of a packaging case between the attaching and tightening part of the packaging case and heat radiating fins, and filling the depletion part and the gap with a resin through a narrow slit. CONSTITUTION:A depletion part 28, which is separated from an attaching hole 27, is provided in an attaching and tightening part 26 of a packaging case 23. The depletion part 28 is filled with a resin 24 through a resin injecting path 29, which is communicated to the inside of the case. The gap between the attaching and tightening part 26 of the packaging case 23 and heat radiating fins 21 is filled so as to withstand tightening pressure. Thus cracking of the packaging case 23 at the time of packaging is prevented. Since the resin injecting path 29 is made narrow, the pressure of the resin, which is inputted in the depletion part 28, is largely decreased in comparison with the pressure at the inlet port of the resin injecting path 29, i.e., the pressure of the resin at the inner wall of the case. Therefore the resin does not leak to the outside through the depletion part 28.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、半導体素子等からなる回路部品を搭載した回
路基板(放熱フィン及び外囲器底板を兼ねる)と外囲器
ケースとを嵌合し、樹脂を充填した主として放熱性を必
要とする半導体回路装置に関するもので、この半導体回
路装置の放熱フィン(回路基板)を外部放熱器等に取り
付けて使用する場合の該回路装置の取付締付部の構造に
係るものであり、主にSSR(ソリッド ステートリレ
ー)等の電力用装置に用いられる。
[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a circuit board (which also serves as a heat dissipation fin and an envelope bottom plate) on which circuit components made of semiconductor elements, etc. are mounted, and an envelope. This relates to a semiconductor circuit device that is fitted with a case and filled with resin and mainly requires heat dissipation, and the circuit is used when the heat dissipation fin (circuit board) of this semiconductor circuit device is attached to an external heat sink, etc. This relates to the structure of the device's mounting and tightening part, and is mainly used in power devices such as SSRs (solid state relays).

〈従来の技術) 電力用に使用される半導体回路装置の外囲器は、一般的
に外囲器底板を兼ねた放熱フィンに外囲器ケースを嵌合
し、ケース内にエポキシ樹脂等を注入し硬化した形状の
ものが多い。 このような回路装置は一般に外部放熱器
等の支持部材に装着されて使用されるので、外囲器に取
付締付部が設けられる。 この取付締付部は(イ)放熱
フィンが外囲器ケースで覆われた形状のものと、(ロ)
ケースで覆われない放熱フィンのみからなるものとある
。 本発明に係る半導体回路装置は前記(イ)項に係る
ものである。 第4図及び第5図はこのような半導体回
路装置の模式的な断面図である。
<Prior art> The envelope of a semiconductor circuit device used for electric power is generally made by fitting an envelope case to heat dissipation fins that also serve as the bottom plate of the envelope, and injecting epoxy resin etc. into the case. Many of them are in hardened form. Since such a circuit device is generally used by being attached to a support member such as an external heat radiator, a mounting and tightening portion is provided in the envelope. This mounting tightening part has two types: (a) the heat dissipation fin is covered with an envelope case, and (b)
It is said to consist only of heat dissipation fins that are not covered by a case. The semiconductor circuit device according to the present invention is related to the above item (A). FIGS. 4 and 5 are schematic cross-sectional views of such semiconductor circuit devices.

放熱フィン1は、外囲器底板及び回路基板を兼ね、セラ
ミック等の絶縁膜を介して内部回路部品2等を搭載する
。 外囲器ケース3は、放熱フィン1と嵌合し、回路部
品や外部端子5等を外囲器ケースに収納し、エポキシ樹
脂4を注入固化する。外囲器ケース3には波線で示す取
付締付部6が設けられ、取付穴7を利用してこの装置は
外部放熱器等にボルト等により取り付けられる。
The radiation fin 1 serves as an envelope bottom plate and a circuit board, and has internal circuit components 2 and the like mounted thereon via an insulating film made of ceramic or the like. The envelope case 3 is fitted with the radiation fins 1, circuit components, external terminals 5, etc. are housed in the envelope case, and the epoxy resin 4 is injected and solidified. The enclosure case 3 is provided with a mounting fastening portion 6 shown by a dotted line, and the device is mounted to an external heat sink or the like with bolts or the like using a mounting hole 7.

このような従来の半導体回路装置の外囲器は製造工程中
の熱工程等により、外囲器ケース3に僅かな変形が起こ
り、特に取付締付部6では、第5図又は部分拡大図の第
6図で示すようにケース3と放熱フィン1との間に隙間
ができ易い。 有機物系の材質のケースを用いる場合に
は、ケースの変形は避けがたい問題である。 このよう
な隙間ができると、半導体回路装置を外部放熱板等に装
着する時、ネジで締め付けるので外囲器ケースが割れる
場合が屡ある。
The envelope of such a conventional semiconductor circuit device undergoes slight deformation in the envelope case 3 due to thermal processes during the manufacturing process, and in particular, the mounting and tightening portion 6 is slightly deformed, as shown in FIG. 5 or a partially enlarged view. As shown in FIG. 6, a gap is likely to be formed between the case 3 and the radiation fins 1. When using a case made of an organic material, deformation of the case is an unavoidable problem. If such a gap is created, when the semiconductor circuit device is attached to an external heat sink or the like, the envelope case often cracks because the screws are tightened.

(発明が解決しようとする問題点) 前記のように従来の半導体回路装置の外囲器は、熱工程
等によりウースが変形し、ケースと放熱フィンとの間に
隙間ができ、これにより装着時、ネジの締付けによりケ
ースが割れ易い。 これは回路装置の信頼性を損なうの
みならず、著しい場合には装置を破壊に至らしめる。
(Problems to be Solved by the Invention) As mentioned above, in the case of a conventional semiconductor circuit device, the woofer is deformed due to heat processing, etc., and a gap is created between the case and the heat dissipation fin, which causes problems during installation. , the case tends to crack when the screws are tightened. This not only impairs the reliability of the circuit device, but also leads to destruction of the device in severe cases.

本発明は、前記半導体回路装置を装着する時、取り付は
締め付けによる外囲器ケースの割れ等の発生をなくし且
つ充填する樹脂が外部に洩れることのない構造の半導体
回路装置を提供することを目的とする。
It is an object of the present invention to provide a semiconductor circuit device having a structure that eliminates the occurrence of cracks in the envelope case due to tightening when mounting the semiconductor circuit device, and prevents the filled resin from leaking to the outside. purpose.

[発明の構成1 (問題点を解決するための手段と作用)本発明は、外囲
器底板と放熱フィンとを兼ねる回路基板に回路部品を搭
載し、外囲器ケースと嵌合し、ケース内に樹脂を充填し
て構成される半導体回路装置において、外囲器ケースの
取付締付部に取付穴と隔離した空乏部を設け、ケース内
部と連通ずる樹脂注入路を介してこの空乏部を樹脂で充
填し、外囲器ケースの取付締付部と放熱フィンとの間の
隙間を埋めて締付圧力に耐えるようにしたもので、これ
により装置装着時の外囲器ケースの割れは防止される。
[Structure 1 of the Invention (Means and Effects for Solving Problems) The present invention provides circuit components that are mounted on a circuit board that also serves as an envelope bottom plate and a heat dissipation fin, and that are fitted with an envelope case. In a semiconductor circuit device configured by filling resin inside the enclosure, a mounting hole is provided in the mounting tightening part of the envelope case, and a void space is isolated from the mounting hole. This is filled with resin to fill the gap between the mounting tightening part of the enclosure case and the heat radiation fins to withstand the tightening pressure, thereby preventing the enclosure case from cracking when the device is installed. be done.

 又樹脂流入路は空乏部より狭くしであるので、空乏部
へ流入した樹脂の圧力は樹脂流入路入口における圧力即
ちケース内壁の樹脂の圧力に比し大幅に低下するので、
空乏部を経て外部に樹脂が洩れることはない。 空乏部
への樹脂の流入量については必ずしも100%入らなく
ても又若干の巣が存在しても締付圧力には十分耐えられ
る。 ただし樹脂で充填される空乏部の部分は、ケース
内壁からの距離がケース内壁から取付穴中心までの距離
に少なくとも等しい部分まで充填されることが望ましい
In addition, since the resin inflow path is narrower than the depletion part, the pressure of the resin flowing into the depletion part is significantly lower than the pressure at the entrance of the resin inflow path, that is, the pressure of the resin on the inner wall of the case.
Resin does not leak to the outside through the depletion area. Even if the resin does not necessarily flow 100% into the void, or even if there are some cavities, the clamping pressure can be sufficiently withstood. However, it is desirable that the portion of the void portion to be filled with resin is filled to a point where the distance from the inner wall of the case is at least equal to the distance from the inner wall of the case to the center of the attachment hole.

(実施例) 前述のように回路部品を搭載した放熱フィンに外囲器ケ
ースを嵌合し樹脂を充填固化した半導体回路装置では、
ケースの取付締付部と放熱フィンとの間にケースの熱変
形による隙間ができる。
(Example) As described above, in a semiconductor circuit device in which an envelope case is fitted to a radiation fin on which circuit components are mounted, and resin is filled and solidified,
A gap is created between the mounting fastening part of the case and the radiation fin due to thermal deformation of the case.

この装置を外部支持部材に取り付ける時、隙間のために
締付圧力により外囲器ケースの割れを生ずる。 本発明
は、この取付締付部の隙間に樹脂を充填してケースの割
れを防止しようとするもので、まずケースの取付締付部
に隙間形成見込領域を含む空乏部をケース内部と直結し
て設け、樹脂を注入させた。 空乏部は樹脂により充填
され、ケースの割れ防止の効果は得られたが、空乏部内
の樹脂圧によりケースと放熱フィンとの接触部分の隙間
から外部への樹脂洩れが比較的発生しやすいという欠点
があった。 そこで空乏部とケース内部とを直結しない
で、手の間に例えばスリット状の樹脂流入路を設け、樹
脂の流入抵抗を大きくして、空乏部内の樹脂圧をケース
内壁の樹脂圧に比し減少させて、前記樹脂洩れを改善し
、本発明を完成させたものである。
When this device is attached to an external support member, the gaps can cause cracking of the envelope case due to clamping pressure. The present invention attempts to prevent the case from cracking by filling the gap between the mounting and tightening parts with resin. First, the void area including the area where a gap is expected to be formed is directly connected to the inside of the case in the mounting and tightening part of the case. and injected the resin. The void was filled with resin, which was effective in preventing the case from cracking, but the drawback was that resin pressure within the void made it relatively easy for resin to leak to the outside through the gap between the case and the heat dissipation fin. was there. Therefore, instead of directly connecting the depletion part and the inside of the case, for example, a slit-shaped resin inflow path is provided between the hands to increase the resin inflow resistance and reduce the resin pressure in the depletion part compared to the resin pressure on the inner wall of the case. In this way, the resin leakage was improved and the present invention was completed.

以下図面を参照し、本発明の半導体回路装置の一実施例
について説明する。 第1図(a)はこの半導体回路装
置の模式的な折れ線△、・A2 ・A3断面図、同図(
b)はその一部破砕平面図である。 回路基板21は放
熱フィンを兼ね、外囲器の底板となる(以下放熱フィン
21と記す)。
An embodiment of the semiconductor circuit device of the present invention will be described below with reference to the drawings. FIG. 1(a) is a schematic cross-sectional view of this semiconductor circuit device using polygonal lines Δ, ・A2 ・A3, and the same figure (
b) is a partially fragmented plan view thereof. The circuit board 21 also serves as a heat dissipation fin and becomes the bottom plate of the envelope (hereinafter referred to as the heat dissipation fin 21).

放熱フィン21上にセラミック溶射膜を介して配線パタ
ーンを形成し、半導体素子を含む内部回路部品22等を
搭載する。 放熱フィン21に外囲器ケース23を嵌合
し、エポキシ樹脂24を充填し、装置の外囲器を形成す
る。 装置を外部支持部材に取り付けるめ、外囲器ケー
ス23には取付締付部26が設けられ、この取付締付部
26と放熱フィン21とを貫通する取付穴27が形成さ
れる。 装置はこの取付穴27にボルト等を挿入して外
部支持部材に取り付は締め付けられる。
A wiring pattern is formed on the radiation fin 21 via a ceramic sprayed film, and internal circuit components 22 including semiconductor elements are mounted thereon. An envelope case 23 is fitted onto the radiation fins 21 and filled with epoxy resin 24 to form an envelope of the device. In order to attach the device to an external support member, the envelope case 23 is provided with a mounting fastening portion 26, and a mounting hole 27 is formed to pass through the mounting fastening portion 26 and the radiation fin 21. The device is attached to the external support member by inserting a bolt or the like into the attachment hole 27 and tightening it.

第2図は取付締付部26の拡大断面図、第3図は取付締
付部26のケース上部を破砕した拡大平面図である。
FIG. 2 is an enlarged cross-sectional view of the mounting and tightening portion 26, and FIG. 3 is an enlarged plan view of the case upper part of the mounting and tightening portion 26 broken away.

本発明においては、放熱フィンに当接する側の取付締付
部の面に、取付穴から隔離して凹部を設置1、この凹部
と放熱フィンとにより空乏部28を形成する。 更に空
乏部28とケース内部とをつなげるための通路となる樹
脂流入路(スリット29と記す)を設け、エポキシ樹脂
24をケース内に充填するとき、このスリット29を経
て空乏部28にも樹脂を流入させる。 スリット29は
空乏部に所要量の樹脂を流入すると共に、空乏部に比し
狭くして空乏部内の樹脂流入圧力を減少させ、樹脂洩れ
がないようにする。 このため本発明においては、空乏
部とスリットとの形状及び樹脂の流入量は重要である。
In the present invention, a recess 1 is provided on the surface of the mounting fastening part on the side that contacts the heat radiation fin, separated from the mounting hole, and a depletion part 28 is formed by this recess and the heat radiation fin. Furthermore, a resin inflow path (referred to as a slit 29) is provided as a passage for connecting the depletion part 28 and the inside of the case, and when filling the case with the epoxy resin 24, the resin is also supplied to the depletion part 28 through the slit 29. Let it flow. The slit 29 allows a required amount of resin to flow into the depletion part, and is made narrower than the depletion part to reduce resin inflow pressure in the depletion part and prevent resin leakage. Therefore, in the present invention, the shapes of the depletion portion and the slit and the amount of resin inflow are important.

 これらは主に樹脂の粘度により変わるので、実際実施
にあたっては、まず始めに充填樹脂を決めなければなら
ない。
These vary mainly depending on the viscosity of the resin, so in actual implementation, the filling resin must be determined first.

本実施例ではエポキシ樹脂の粘度60,000 cps
  のものを使用し、試行により効果的な空乏部とスリ
ットとの形状寸法を決めた。 例えば空乏部28の深さ
d、 = 2.35mm 、スリット29の深さd、。
In this example, the viscosity of the epoxy resin was 60,000 cps.
The effective shape and dimensions of the depletion part and slit were determined through trials. For example, the depth d of the depletion portion 28 = 2.35 mm, and the depth d of the slit 29.

−2mm、幅1=21として、装置装着時のケース割れ
もなく、又外部への樹脂洩れもない良好な結果が得られ
た。 空乏部28への樹脂の流入量は前述のように必ず
しも100%入らなくても又若干の巣が存在しても締付
圧力に十分耐えられるが、第3図に示す取付穴27の中
心を通りケース内壁に平行な直118−8まで少なくと
も充填されることが望ましい。 又取付穴と空乏部との
間のケースと放熱フィンとの接触面の幅は、狭すぎると
空乏部内の樹脂圧力を減じても樹脂洩れを生ずることが
あり、適正値とする必要がある。
-2 mm and width 1=21, good results were obtained with no case cracking when the device was installed and no resin leakage to the outside. As mentioned above, the amount of resin flowing into the cavity 28 does not necessarily have to be 100%, or even if there are some cavities, it can sufficiently withstand the tightening pressure. It is desirable that at least a straight line 118-8 parallel to the inner wall of the case is filled. Furthermore, the width of the contact surface between the case and the radiation fin between the mounting hole and the cavity must be set to an appropriate value, since if it is too narrow, resin leakage may occur even if the resin pressure in the cavity is reduced.

[発明の効果] 本発明の半導体回路装置では、外囲器ケースの取付締付
部と放熱フィンとの間に、ケースの熱変形による隙間を
含む空乏部を設け、これに狭いスリットを経て樹脂を充
填できる構造とした。 これによりケースの締付耐圧は
増加し、使用時の取り付は締め付けによって起こるケー
スの割れはなくなり製品の信頼性向上に大きな効果があ
った。
[Effects of the Invention] In the semiconductor circuit device of the present invention, a void portion including a gap due to thermal deformation of the case is provided between the mounting tightening portion of the envelope case and the heat radiation fin, and the resin is inserted into this void portion through a narrow slit. It has a structure that allows it to be filled with As a result, the tightening pressure of the case increased, and the case no longer cracked due to tightening during use, which had a significant effect on improving the reliability of the product.

又空乏部の樹脂注入圧が減少したので放熱フィンとケー
スの隙間から樹脂が外部に流れ出し製品を不良にしてし
まうことが全くなくなり、製造歩留りを大幅に向上させ
ることができた。
In addition, since the resin injection pressure in the depletion area was reduced, there was no possibility that the resin would flow out from the gap between the heat radiation fin and the case and cause the product to be defective, making it possible to significantly improve the manufacturing yield.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a )及び(b)は本発明の半導体回路装置の
模式的な断面図及び一部破砕平面図、第2図は第1図の
半導体回路装置の取付締付部の拡大断面図、第3図は取
付締付部の一部破砕拡大平面図、第4図及び第5図は従
来の半導体回路装置の模式的な断面図、第6図はその取
付締付部の拡大断ra1図である。 1.21・・・回路基板、(放熱フィン)、 2゜22
・・・(内部回路部品)、 3.23・・・外囲器ケー
ス、 4.24・・・樹脂(エポキシ樹脂)、 6゜2
6・・・取付締付部、 7..27・・・取付穴、 2
8・・・空乏部、 29・・・樹脂流入路(スリット)
。 第1図 第2図 第3図 第4図
1(a) and (b) are schematic cross-sectional views and partially exploded plan views of the semiconductor circuit device of the present invention, and FIG. 2 is an enlarged sectional view of the mounting and tightening portion of the semiconductor circuit device of FIG. 1. , FIG. 3 is a partially fragmented enlarged plan view of the mounting tightening part, FIGS. 4 and 5 are schematic cross-sectional views of a conventional semiconductor circuit device, and FIG. 6 is an enlarged cross-section RA1 of the mounting tightening part. It is a diagram. 1.21...Circuit board, (radiating fin), 2゜22
... (internal circuit parts), 3.23 ... Envelope case, 4.24 ... Resin (epoxy resin), 6゜2
6...Mounting tightening part, 7. .. 27...Mounting hole, 2
8... Depletion part, 29... Resin inflow path (slit)
. Figure 1 Figure 2 Figure 3 Figure 4

Claims (1)

【特許請求の範囲】[Claims] 1 半導体素子を含む回路部品を搭載し外囲器底板を兼
ねる回路基板と、この回路基板と嵌合し且つ取付締付部
を有する外囲器ケースと、この外囲器ケースの取付締付
部と前記回路基板とを貫通する取付穴と、前記回路基板
に当接する側の前記外囲器ケースの取付締付部の面に前
記取付穴から隔離して設ける凹部と前記回路基板とによ
り形成される空乏部と、この空乏部と前記外囲器ケース
内部と連通する樹脂流入路とを具備し、前記外囲器ケー
ス内部と前記回路基板との間及び前記空乏部に樹脂を充
填して成ることを特徴とする半導体回路装置。
1. A circuit board on which circuit components including semiconductor elements are mounted and which also serves as the bottom plate of the envelope, an envelope case that fits with this circuit board and has a mounting fastening part, and a mounting fastening part of this envelope case. and the circuit board, a recess provided on a surface of the mounting fastening part of the envelope case on the side that comes into contact with the circuit board and separated from the mounting hole, and the circuit board. and a resin inflow path that communicates with the interior of the envelope case, and the cavity is filled with resin between the interior of the envelope case and the circuit board and the cavity. A semiconductor circuit device characterized by:
JP4014787A 1987-02-25 1987-02-25 Semiconductor circuit device Granted JPS63208253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4014787A JPS63208253A (en) 1987-02-25 1987-02-25 Semiconductor circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4014787A JPS63208253A (en) 1987-02-25 1987-02-25 Semiconductor circuit device

Publications (2)

Publication Number Publication Date
JPS63208253A true JPS63208253A (en) 1988-08-29
JPH0511665B2 JPH0511665B2 (en) 1993-02-16

Family

ID=12572657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4014787A Granted JPS63208253A (en) 1987-02-25 1987-02-25 Semiconductor circuit device

Country Status (1)

Country Link
JP (1) JPS63208253A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009069308A1 (en) * 2007-11-30 2009-06-04 Panasonic Corporation Heat dissipating structure base board, module using heat dissipating structure base board, and method for manufacturing heat dissipating structure base board

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60244051A (en) * 1984-05-17 1985-12-03 Mitsubishi Electric Corp Semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60244051A (en) * 1984-05-17 1985-12-03 Mitsubishi Electric Corp Semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009069308A1 (en) * 2007-11-30 2009-06-04 Panasonic Corporation Heat dissipating structure base board, module using heat dissipating structure base board, and method for manufacturing heat dissipating structure base board
EP2120263A4 (en) * 2007-11-30 2010-10-13 Panasonic Corp HEAT DISSIPATING STRUCTURE BASE PLATE, MODULE USING HEAT DISSIPATING STRUCTURE BASE PLATE, AND METHOD FOR MANUFACTURING HEAT DISSIPATING STRUCTURE BASE PLATE
US8130499B2 (en) 2007-11-30 2012-03-06 Panasonic Corporation Heat dissipating structure base board, module using heat dissipating structure base board, and method for manufacturing heat dissipating structure base board

Also Published As

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JPH0511665B2 (en) 1993-02-16

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