JPS6320817A - Manufacture of laminated ceramic parts - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] [Object of the invention 1 (Industrial application field) The present invention relates to a method for manufacturing a laminated ceramic component.

(Prior Art) Conventionally, for example, laminated ceramic capacitors, laminated II boards, piezoelectric and electrostrictive actuators.

The manufacturing method for laminated ceramic varistors involves pouring a slurry obtained by mixing fine ceramic powder and a binder onto a glass plate, plastic carrier film, or steel belt, and moving it while drying using a doctor blade to form a green sheet. After punching into a predetermined shape, an internal 811 m pole pattern is formed on its surface by screen printing or transfer, and then green sheets punched into a predetermined shape as described above are stacked, and an internal electrode pattern is formed on the surface in the same manner as above. Requires a process to do that!
? 181 depending on the number of i layers! Then, a protective sheet is placed on the top and bottom surfaces to form a laminate, the laminate is integrated by applying heat and pressure, and then cut into a size according to the internal electrode pattern, and degreased and fired. , to form external electrodes on both end faces, or to mix ceramic fine powder and a vehicle to create a ceramic paste, or to mix a total bending powder and a vehicle to create an electrode paste, and to mix the ceramic paste and the electrode paste. Repeat the process of alternately printing - drying - printing - drying on the screen as many times as necessary to form a v4 layered body, apply heat and pressure to the laminated body in the same manner as described above to integrate, cut, re-grease, bake and form external electrodes. I was trying to do it.

However, the former method involves peeling, cutting, and stacking the green sheet from the glass plate, carrier film, sujiru belt, etc., which results in poor workability.Also, in order to achieve stacking accuracy as a finished product, the dimensions of the margin part must be increased. The thickness of the sheet itself must be limited to 20 μm, and it is not possible to form a thinner sheet than this, as it is necessary to have a large area around the laminate, and the waste of the green sheet itself is unavoidable, and the green sheet must be peeled off. It was difficult to remove it because there was a risk of damage. Furthermore, in the latter method, if the number of WI layers increases, the printing surface will not be flat and printing will become difficult. Therefore, it was necessary to repeat printing several times in small quantities, which resulted in poor workability and became a practical bottleneck.

(Problems to be Solved by the Invention) As mentioned above, when forming ceramic green sheets using the doctor blade method or the printing method, there are problems in workability as a manufacturing method for laminated ceramic parts, and at the same time, it is not possible to form a ceramic green sheet with high accuracy and It is difficult to obtain a ceramic component having a thickness of 20 μm or less, and it has not been possible to obtain a laminated ceramic component that is smaller in size and has a wider characteristic range.

The present invention aims to solve these problems,
It is an object of the present invention to provide a method for manufacturing a laminated ceramic component that has good workability, is smaller in size, has less variation in characteristics, and has a wider characteristic range.

[Structure of the Invention] (Means for Solving the Problems) The method for manufacturing a laminated ceramic component of the present invention includes a rotating disc and one end attached to an arbitrary location around the disc without interlocking with the disc. A slurry containing a mixture of fine ceramic powder and a solvent is placed on the rotating disc of a sheet forming tool consisting of blades that are fixed and arranged so as to have a space on the disc surface and to be able to move up and down. Dripping or spraying to form a ceramic green sheet on a disk by centrifugal force and a blade, drying the green sheet, stopping the rotation of the disk, and forming an internal electrode pattern on the green sheet - drying repeating the steps several times to heat and pressurize the laminate formed on the disc to integrate it, and cutting the laminate according to the size of the internal electrodes on the same disc. It is characterized by what it does.

(Function) According to the method for manufacturing a laminated ceramic component configured as described above, sheet forming is performed using centrifugal force on a rotating disk, and the thickness is controlled by a blade. Therefore, it is possible to manufacture a V4-layer ceramic component having excellent thickness accuracy and each ceramic layer having a thickness of 10 μm or less, making it possible to expand the characteristic range and at the same time to suppress characteristic variations to a small level. In addition, since the green sheet does not need to be moved, the lamination position is highly accurate and the LA layer misalignment is less than 10% at a pitch of 100μm.
It becomes possible to manufacture parts with a size of μm or less, resulting in miniaturization. Furthermore, since the surface on which the internal electrode pattern is formed is always smooth, highly accurate internal electrodes can be obtained, which, together with the good thickness accuracy of the green sheet, can greatly contribute to improved characteristics.

(Example) Examples of the present invention will be described below with reference to the drawings. That is, as shown in FIG. 1, a disc 2 is placed on a rotating jig 1, and one end is fixed at an arbitrary location around the disc 2 without interlocking with the disc 2. A blade 3 is arranged to have a space with the surface of the disk 2 and to be movable up and down.
For example, (Pb0.958a0.05) [(101/3Nb2/
3) 0.5””1/3 Nb2/3). , 5103
Slurry 5 obtained by mixing fine ceramic powder with a particle size of 0.5 to 2.0 μm by pre-calcining and pulverizing with a ball mill and a solvent consisting of acrylic resin or butyral resin is suitably prepared. Drop or drop.

A protective sheet 6 of a thickness having the function of playing and retaining on the disc 2 as shown in FIG. 2 by centrifugal force and blade 3
form. Then, the rotation of the disk 2 is stopped and the protective sheet 6 is moved together with the disk 2 to dry. Next, as shown in FIG. The internal electrode 7 is formed by forming an electrode pattern by screen printing or transfer using
After drying, the disk 2 is returned to its original position as shown in FIG. 4, and while the disk 2 is being rotated, the slurry 5 is dripped or sprayed to form the ceramic green to the required thickness. The sheet 8 is formed, the rotation of the disk 2 is stopped again, and the disk 2 is moved.-Dry the green sheet 8, and the same means as described above is performed to form the internal electrode 7.-During the drying step, the green sheet 8 molding and internal electrode 7 forming means are repeated as many times as necessary, and finally, a protective sheet 9 having the same thickness as the protective sheet 6 is formed on the top surface as shown in FIG. form 10. Next, the laminate 10
After applying heat and pressure to integrate them, they are cut with a diamond blade or a guillotine shear depending on the size of the internal electrode 7, and then degreased and fired to obtain a laminated ceramic component element. be. Therefore, since there is no need to move the green sheet while it is in the green sheet state, it is possible to form a thinner sheet with high accuracy, there is less variation in properties, and it is possible to make the sheet more compact.

The table below shows an example of a comparison between multilayer ceramic condensers of the same size according to the present invention and those according to a conventional printing method. The Mar body composition in the sample is the aforementioned pb-based composite perovskite type material in both the present invention and the conventional example, and the internal electrode material is 70ACI/30Pd.

(Margins below) As is clear from the above table, the thickness of each layer of the present invention can be reduced to 10 μm or less, so compared to the conventional example, the volume is 4.7 times larger for the same size. , and the 8-hang variation can be significantly suppressed compared to the conventional example, which can greatly contribute to miniaturization of the human body. Furthermore, in terms of withstand voltage characteristics, it not only improves the withstand voltage but also has the advantage of having extremely small variations in withstand voltage compared to conventional examples.

In the above example, a Pb-based composite perovskite material was used as the dielectric composition, and 70Ag/70Ag was used as the internal electrode material.
The explanation was given by exemplifying a multilayer ceramic capacitor using 30Pd.
, multilayer ceramic varistors using Pd, Ni, etc.
Of course, the present invention can be applied to laminated piezoelectric and electrostrictive actuators.

[Effects of the Invention] As described above, according to the present invention, it is possible to obtain a method for manufacturing a laminated ceramic component that has good workability, is small in size, has small characteristic variations, and has a wide characteristic range.

[Brief explanation of drawings]

Figures 1 to 5 relate to the explanation of the method of the present invention, with Figure 1 being a schematic perspective view showing a sheet forming tool, and Figure 2 showing a sheet formed on a disk constituting the sheet forming tool. Front view,
Figure 3 is a front view showing the state in which internal electrodes are formed on a sheet, Figure 4 is a front view showing a state in which the sheet and internal electrodes are layered on a disk, and Figure 5 is a front view showing a state in which the internal electrodes are formed on a disk. It is a front view showing a layered product. 1... Rotating jig 2... Disc 3.
...Blade 4 ... Sheet forming tool 5 ... Slurry 7 ... Internal electrode 8 ... Ceramic green sheet patent
Applicant: Marukon Electronics Co., Ltd.' - Tori 73rd 1st figure 1 gate rebellion 11:', 1st figure 1, green 1 [Iko 2 upper convex figure 2nd figure] Figure 5 Procedures Amendment (Voluntary) 1982
February 12th

Claims (1)

[Claims] a disc, one end of which is fixed at an arbitrary location around the disc without interlocking with the disc, and a space is provided above the disc with the disc surface;
Using a sheet forming tool consisting of a blade arranged to be able to move up and down, the slurry is dripped or sprayed onto the disc while the disc is being rotated, and the slurry is applied onto the disc by centrifugal force and the blade. A means for forming and drying a ceramic green sheet, a means for stopping the rotation of the disk, and a means for forming and drying an internal electrode pattern on the green sheet are repeated several times, and the formed laminate is heated and pressurized to integrate. A method for manufacturing a laminated ceramic component, characterized in that the means for cutting the laminated body and the means for cutting the laminated body are performed on the same disk.