JPS63178331U - - Google Patents
Info
- Publication number
- JPS63178331U JPS63178331U JP6983787U JP6983787U JPS63178331U JP S63178331 U JPS63178331 U JP S63178331U JP 6983787 U JP6983787 U JP 6983787U JP 6983787 U JP6983787 U JP 6983787U JP S63178331 U JPS63178331 U JP S63178331U
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- wafer
- suction section
- transfer device
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は、本考案の一実施例の断面図、第２図
ａ，ｂは、搬送状況を説明する平面図、第３図ａ
，ｂは、従来のウエハー搬送装置を示す平面図、
側面図である。
尚、図中１１は搬送アームの支持部、１２は吸
着部、１３は吸引パイプ、１４はリニアーベアリ
ング、１５は戻しスプリング、１６はストツパー
、Ｗはウエハーである。
Figure 1 is a sectional view of an embodiment of the present invention, Figures 2a and b are plan views explaining the conveyance situation, and Figure 3a is a
,b are plan views showing a conventional wafer transfer device,
FIG. In the figure, reference numeral 11 is a support portion of the transfer arm, 12 is a suction portion, 13 is a suction pipe, 14 is a linear bearing, 15 is a return spring, 16 is a stopper, and W is a wafer.
Claims (1)
を吸着して搬送するウエハー搬送装置において、
前記吸着部を搬送アームに対し、搬送方向に摺動
自在に支持するとともに、同吸着部を搬送方向に
付勢するスプリングを介装してなることを特徴と
するウエハー搬送装置。 In a wafer transfer device that sucks and transfers a wafer to a vacuum suction unit provided on a transfer arm,
A wafer transfer device, characterized in that the suction section is slidably supported in the transfer direction with respect to the transfer arm, and a spring is interposed for biasing the suction section in the transfer direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6983787U JPS63178331U (en) | 1987-05-11 | 1987-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6983787U JPS63178331U (en) | 1987-05-11 | 1987-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63178331U true JPS63178331U (en) | 1988-11-18 |
Family
ID=30910923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6983787U Pending JPS63178331U (en) | 1987-05-11 | 1987-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63178331U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02291144A (en) * | 1989-05-01 | 1990-11-30 | Nidek Co Ltd | Wafer conveyance apparatus |
| JPH02292196A (en) * | 1989-04-28 | 1990-12-03 | Nidek Co Ltd | Wafer transfer device |
-
1987
- 1987-05-11 JP JP6983787U patent/JPS63178331U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02292196A (en) * | 1989-04-28 | 1990-12-03 | Nidek Co Ltd | Wafer transfer device |
| JPH02291144A (en) * | 1989-05-01 | 1990-11-30 | Nidek Co Ltd | Wafer conveyance apparatus |