JPS63110809A - Surface acoustic wave propagation element - Google Patents
Surface acoustic wave propagation elementInfo
- Publication number
- JPS63110809A JPS63110809A JP25721586A JP25721586A JPS63110809A JP S63110809 A JPS63110809 A JP S63110809A JP 25721586 A JP25721586 A JP 25721586A JP 25721586 A JP25721586 A JP 25721586A JP S63110809 A JPS63110809 A JP S63110809A
- Authority
- JP
- Japan
- Prior art keywords
- wave propagation
- surface acoustic
- acoustic wave
- interdigital electrode
- comb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims description 18
- 239000000758 substrate Substances 0.000 claims description 2
- 244000126211 Hericium coralloides Species 0.000 description 4
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は不要反射波を減衰及び除去することにより性能
向上をはかった弾性表面波伝播素子に関するものである
。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a surface acoustic wave propagation element whose performance is improved by attenuating and removing unnecessary reflected waves.
従来の技術
従来からある弾性表面波伝播素子について説明する。第
3図において、1は圧電基板、2は弾性表面波を発生又
は受信するための重み付き櫛歯形電極、3は弾性表面波
を発生又は受信するための正規型櫛歯形電極、4は重み
付き櫛歯形電極内における弾性表面波伝播速度を均一に
せしめるため弾性表面波伝播素子では、ダミー電極4か
らの不要反射信号が存在し素子特性を著しく劣化せしめ
ることが知られている。BACKGROUND OF THE INVENTION A conventional surface acoustic wave propagation element will be explained. In Fig. 3, 1 is a piezoelectric substrate, 2 is a weighted comb-shaped electrode for generating or receiving surface acoustic waves, 3 is a regular comb-shaped electrode for generating or receiving surface acoustic waves, and 4 is a weighted comb-shaped electrode. It is known that in a surface acoustic wave propagation device in which the surface acoustic wave propagation velocity within the comb-shaped electrode is made uniform, an unnecessary reflected signal from the dummy electrode 4 is present, which significantly deteriorates the device characteristics.
本発明の目的は、上記の欠点をなくし不要反射波の少な
い良好な素子特性の弾性表面波伝播素子を提供すること
にある。SUMMARY OF THE INVENTION An object of the present invention is to provide a surface acoustic wave propagation device that eliminates the above-mentioned drawbacks and has good device characteristics with few unnecessary reflected waves.
間謳点を解決するための手段
本発明の要点は重み付き櫛歯形電極の櫛歯幅と以下本発
明の弾性表面波伝播素子の実施例を図面を用いて説明す
る。Means for Solving Problems The key point of the present invention is the comb width of the weighted comb-shaped electrode.Examples of the surface acoustic wave propagation element of the present invention will be described below with reference to the drawings.
第1図は、本発明により作成した弾性表面波伝播素子の
上面図である。同図において、5はタンタル酸リチウム
単結晶、6は弾性表面波を発生せしめる入力櫛歯形電極
、7は弾性表面波を電気信号に変換せしめる出力櫛歯形
電極である。又αは上記入力櫛歯形電極6の交叉部分の
櫛歯幅、βは同人力櫛歯形電極6のダミ一部分の櫛歯幅
である。FIG. 1 is a top view of a surface acoustic wave propagation element produced according to the present invention. In the figure, 5 is a lithium tantalate single crystal, 6 is an input comb-shaped electrode that generates surface acoustic waves, and 7 is an output comb-shaped electrode that converts the surface acoustic waves into electrical signals. Further, α is the width of the comb teeth of the intersecting portion of the input comb-shaped electrode 6, and β is the width of the comb teeth of the dummy portion of the input comb-shaped electrode 6.
第2図は、ダミー電極からの不要反射信号レベルの相対
値(α=βの時に対する相対値)とαとβの比との関係
を示す特性図である。FIG. 2 is a characteristic diagram showing the relationship between the relative value of the unnecessary reflected signal level from the dummy electrode (the relative value when α=β) and the ratio of α and β.
本発明より成る先記弾性表面波伝播素子を36MHz帯
域で動作せしめたところ、αとβの比が1・θ付近でダ
ミー電極からの不要反射信号レベルが、約16チ減少し
良好な結果を得た。When the surface acoustic wave propagation device according to the present invention was operated in the 36 MHz band, the level of unnecessary reflected signals from the dummy electrode decreased by about 16 cm when the ratio of α and β was around 1·θ, and good results were obtained. Obtained.
発明の効果
以上述べたように本発明により、ダミー電極からの反射
信号が大幅に抑制され、弾性表面波伝播素子の性能向上
に対する寄与は極めて大きい。Effects of the Invention As described above, according to the present invention, reflected signals from dummy electrodes are significantly suppressed, and the contribution to improving the performance of surface acoustic wave propagation elements is extremely large.
第1図は本発明の一実施例による弾性表面波伝播素子の
構成を示す上面図、第2図は本発明の効果を示すもので
横軸に重み付き櫛歯形電極の交叉部分の櫛歯幅αとダミ
一部分の櫛歯幅βの比を示す図、第3図は従来の弾性表
面波伝播素子を示す上面図である。
6・・・・・・タンタル酸リチウム単結晶、6・・・・
・・入力櫛歯形電極、了・・・・・・出力櫛歯形電極、
α・・・・・・入力櫛歯形電極の交叉部分の櫛歯幅、β
・・・・・・入力櫛歯形電極のダミ一部分の櫛歯幅0
代理人の氏名 弁理士 中 尾 敏 男 ほか1名菓
1 区 タンタル駿すナリム
詳碑も働、へ
第2図
i、u 12 /、4 /、6 l、? lA第3図Fig. 1 is a top view showing the configuration of a surface acoustic wave propagation element according to an embodiment of the present invention, and Fig. 2 shows the effects of the present invention. FIG. 3 is a top view showing a conventional surface acoustic wave propagation element. 6...Lithium tantalate single crystal, 6...
...Input comb-shaped electrode, Output comb-shaped electrode,
α・・・・・・Comb tooth width of the intersection part of the input comb tooth shaped electrode, β
・・・・・・Comb tooth width of part of input comb tooth electrode
1. The detailed stele of Narim, which is in the 1st ward, also works, Figure 2 I, u 12/, 4/, 6 l, ? lA Figure 3
Claims (1)
極及び出力櫛歯形電極を有する弾性表面波伝播素子にお
いて、前記入力櫛歯形電極及び出力櫛歯形電極とそれら
のダミー電極の電極幅が異なることを特徴とする弾性表
面波伝播素子。In a surface acoustic wave propagation element having an input comb-shaped electrode and an output comb-shaped electrode at a predetermined interval on the surface of a piezoelectric substrate, the input comb-shaped electrode and the output comb-shaped electrode and their dummy electrodes have different electrode widths. A surface acoustic wave propagation device characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25721586A JPS63110809A (en) | 1986-10-29 | 1986-10-29 | Surface acoustic wave propagation element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25721586A JPS63110809A (en) | 1986-10-29 | 1986-10-29 | Surface acoustic wave propagation element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63110809A true JPS63110809A (en) | 1988-05-16 |
Family
ID=17303263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25721586A Pending JPS63110809A (en) | 1986-10-29 | 1986-10-29 | Surface acoustic wave propagation element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63110809A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008078885A (en) * | 2006-09-20 | 2008-04-03 | Matsushita Electric Ind Co Ltd | Surface acoustic wave resonator |
JP2008078883A (en) * | 2006-09-20 | 2008-04-03 | Matsushita Electric Ind Co Ltd | Surface acoustic wave resonator |
JP2008078884A (en) * | 2006-09-20 | 2008-04-03 | Matsushita Electric Ind Co Ltd | Surface acoustic wave resonator |
WO2008126614A1 (en) | 2007-03-27 | 2008-10-23 | Murata Manufacturing Co., Ltd. | Elastic wave device |
WO2015064238A1 (en) * | 2013-10-31 | 2015-05-07 | 京セラ株式会社 | Elastic wave element, filter element and communication device |
-
1986
- 1986-10-29 JP JP25721586A patent/JPS63110809A/en active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008078885A (en) * | 2006-09-20 | 2008-04-03 | Matsushita Electric Ind Co Ltd | Surface acoustic wave resonator |
JP2008078883A (en) * | 2006-09-20 | 2008-04-03 | Matsushita Electric Ind Co Ltd | Surface acoustic wave resonator |
JP2008078884A (en) * | 2006-09-20 | 2008-04-03 | Matsushita Electric Ind Co Ltd | Surface acoustic wave resonator |
WO2008126614A1 (en) | 2007-03-27 | 2008-10-23 | Murata Manufacturing Co., Ltd. | Elastic wave device |
EP2128982A1 (en) * | 2007-03-27 | 2009-12-02 | Murata Manufacturing Co. Ltd. | Elastic wave device |
EP2128982A4 (en) * | 2007-03-27 | 2013-07-24 | Murata Manufacturing Co | Elastic wave device |
WO2015064238A1 (en) * | 2013-10-31 | 2015-05-07 | 京セラ株式会社 | Elastic wave element, filter element and communication device |
JP2016140110A (en) * | 2013-10-31 | 2016-08-04 | 京セラ株式会社 | Acoustic wave element, filter element and communication device |
JP6050486B2 (en) * | 2013-10-31 | 2016-12-21 | 京セラ株式会社 | Filter element and communication device |
US10153748B2 (en) | 2013-10-31 | 2018-12-11 | Kyocera Corporation | Acoustic wave element, filter element, and communication device |
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