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JPS63110809A - Surface acoustic wave propagation element - Google Patents

Surface acoustic wave propagation element

Info

Publication number
JPS63110809A
JPS63110809A JP25721586A JP25721586A JPS63110809A JP S63110809 A JPS63110809 A JP S63110809A JP 25721586 A JP25721586 A JP 25721586A JP 25721586 A JP25721586 A JP 25721586A JP S63110809 A JPS63110809 A JP S63110809A
Authority
JP
Japan
Prior art keywords
wave propagation
surface acoustic
acoustic wave
interdigital electrode
comb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25721586A
Other languages
Japanese (ja)
Inventor
Koichiro Murasawa
浩一郎 村澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP25721586A priority Critical patent/JPS63110809A/en
Publication of JPS63110809A publication Critical patent/JPS63110809A/en
Pending legal-status Critical Current

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To attenuate or remove an unnecessary reflected wave and to improve performance by differing an input interdigital electrode, an output interdigital electrode and widths of their dummy electrodes. CONSTITUTION:Such constitution is adapted that the crossing tooth width alphaof the cross part of the input interdigital electrode 6 is different from the crossing tooth width beta of the dummies of the input interdigital electrode 6 and output interdigital electrode 7. As a result reflection signals from the dummy electrodes are substantially reduced to enhance the performance of an elastic surface wave propagation element. Thus the elastic surface wave propagation element can be offered which has few unnecessary reflected waves and an excellent element characteristic.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は不要反射波を減衰及び除去することにより性能
向上をはかった弾性表面波伝播素子に関するものである
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a surface acoustic wave propagation element whose performance is improved by attenuating and removing unnecessary reflected waves.

従来の技術 従来からある弾性表面波伝播素子について説明する。第
3図において、1は圧電基板、2は弾性表面波を発生又
は受信するための重み付き櫛歯形電極、3は弾性表面波
を発生又は受信するための正規型櫛歯形電極、4は重み
付き櫛歯形電極内における弾性表面波伝播速度を均一に
せしめるため弾性表面波伝播素子では、ダミー電極4か
らの不要反射信号が存在し素子特性を著しく劣化せしめ
ることが知られている。
BACKGROUND OF THE INVENTION A conventional surface acoustic wave propagation element will be explained. In Fig. 3, 1 is a piezoelectric substrate, 2 is a weighted comb-shaped electrode for generating or receiving surface acoustic waves, 3 is a regular comb-shaped electrode for generating or receiving surface acoustic waves, and 4 is a weighted comb-shaped electrode. It is known that in a surface acoustic wave propagation device in which the surface acoustic wave propagation velocity within the comb-shaped electrode is made uniform, an unnecessary reflected signal from the dummy electrode 4 is present, which significantly deteriorates the device characteristics.

本発明の目的は、上記の欠点をなくし不要反射波の少な
い良好な素子特性の弾性表面波伝播素子を提供すること
にある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a surface acoustic wave propagation device that eliminates the above-mentioned drawbacks and has good device characteristics with few unnecessary reflected waves.

間謳点を解決するための手段 本発明の要点は重み付き櫛歯形電極の櫛歯幅と以下本発
明の弾性表面波伝播素子の実施例を図面を用いて説明す
る。
Means for Solving Problems The key point of the present invention is the comb width of the weighted comb-shaped electrode.Examples of the surface acoustic wave propagation element of the present invention will be described below with reference to the drawings.

第1図は、本発明により作成した弾性表面波伝播素子の
上面図である。同図において、5はタンタル酸リチウム
単結晶、6は弾性表面波を発生せしめる入力櫛歯形電極
、7は弾性表面波を電気信号に変換せしめる出力櫛歯形
電極である。又αは上記入力櫛歯形電極6の交叉部分の
櫛歯幅、βは同人力櫛歯形電極6のダミ一部分の櫛歯幅
である。
FIG. 1 is a top view of a surface acoustic wave propagation element produced according to the present invention. In the figure, 5 is a lithium tantalate single crystal, 6 is an input comb-shaped electrode that generates surface acoustic waves, and 7 is an output comb-shaped electrode that converts the surface acoustic waves into electrical signals. Further, α is the width of the comb teeth of the intersecting portion of the input comb-shaped electrode 6, and β is the width of the comb teeth of the dummy portion of the input comb-shaped electrode 6.

第2図は、ダミー電極からの不要反射信号レベルの相対
値(α=βの時に対する相対値)とαとβの比との関係
を示す特性図である。
FIG. 2 is a characteristic diagram showing the relationship between the relative value of the unnecessary reflected signal level from the dummy electrode (the relative value when α=β) and the ratio of α and β.

本発明より成る先記弾性表面波伝播素子を36MHz帯
域で動作せしめたところ、αとβの比が1・θ付近でダ
ミー電極からの不要反射信号レベルが、約16チ減少し
良好な結果を得た。
When the surface acoustic wave propagation device according to the present invention was operated in the 36 MHz band, the level of unnecessary reflected signals from the dummy electrode decreased by about 16 cm when the ratio of α and β was around 1·θ, and good results were obtained. Obtained.

発明の効果 以上述べたように本発明により、ダミー電極からの反射
信号が大幅に抑制され、弾性表面波伝播素子の性能向上
に対する寄与は極めて大きい。
Effects of the Invention As described above, according to the present invention, reflected signals from dummy electrodes are significantly suppressed, and the contribution to improving the performance of surface acoustic wave propagation elements is extremely large.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例による弾性表面波伝播素子の
構成を示す上面図、第2図は本発明の効果を示すもので
横軸に重み付き櫛歯形電極の交叉部分の櫛歯幅αとダミ
一部分の櫛歯幅βの比を示す図、第3図は従来の弾性表
面波伝播素子を示す上面図である。 6・・・・・・タンタル酸リチウム単結晶、6・・・・
・・入力櫛歯形電極、了・・・・・・出力櫛歯形電極、
α・・・・・・入力櫛歯形電極の交叉部分の櫛歯幅、β
・・・・・・入力櫛歯形電極のダミ一部分の櫛歯幅0 代理人の氏名 弁理士 中 尾 敏 男 ほか1名菓 
1 区             タンタル駿すナリム
詳碑も働、へ 第2図 i、u 12 /、4 /、6 l、? lA第3図
Fig. 1 is a top view showing the configuration of a surface acoustic wave propagation element according to an embodiment of the present invention, and Fig. 2 shows the effects of the present invention. FIG. 3 is a top view showing a conventional surface acoustic wave propagation element. 6...Lithium tantalate single crystal, 6...
...Input comb-shaped electrode, Output comb-shaped electrode,
α・・・・・・Comb tooth width of the intersection part of the input comb tooth shaped electrode, β
・・・・・・Comb tooth width of part of input comb tooth electrode
1. The detailed stele of Narim, which is in the 1st ward, also works, Figure 2 I, u 12/, 4/, 6 l, ? lA Figure 3

Claims (1)

【特許請求の範囲】[Claims]  圧電基板の表面に所定の間隔をおいて、入力櫛歯形電
極及び出力櫛歯形電極を有する弾性表面波伝播素子にお
いて、前記入力櫛歯形電極及び出力櫛歯形電極とそれら
のダミー電極の電極幅が異なることを特徴とする弾性表
面波伝播素子。
In a surface acoustic wave propagation element having an input comb-shaped electrode and an output comb-shaped electrode at a predetermined interval on the surface of a piezoelectric substrate, the input comb-shaped electrode and the output comb-shaped electrode and their dummy electrodes have different electrode widths. A surface acoustic wave propagation device characterized by:
JP25721586A 1986-10-29 1986-10-29 Surface acoustic wave propagation element Pending JPS63110809A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25721586A JPS63110809A (en) 1986-10-29 1986-10-29 Surface acoustic wave propagation element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25721586A JPS63110809A (en) 1986-10-29 1986-10-29 Surface acoustic wave propagation element

Publications (1)

Publication Number Publication Date
JPS63110809A true JPS63110809A (en) 1988-05-16

Family

ID=17303263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25721586A Pending JPS63110809A (en) 1986-10-29 1986-10-29 Surface acoustic wave propagation element

Country Status (1)

Country Link
JP (1) JPS63110809A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008078885A (en) * 2006-09-20 2008-04-03 Matsushita Electric Ind Co Ltd Surface acoustic wave resonator
JP2008078883A (en) * 2006-09-20 2008-04-03 Matsushita Electric Ind Co Ltd Surface acoustic wave resonator
JP2008078884A (en) * 2006-09-20 2008-04-03 Matsushita Electric Ind Co Ltd Surface acoustic wave resonator
WO2008126614A1 (en) 2007-03-27 2008-10-23 Murata Manufacturing Co., Ltd. Elastic wave device
WO2015064238A1 (en) * 2013-10-31 2015-05-07 京セラ株式会社 Elastic wave element, filter element and communication device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008078885A (en) * 2006-09-20 2008-04-03 Matsushita Electric Ind Co Ltd Surface acoustic wave resonator
JP2008078883A (en) * 2006-09-20 2008-04-03 Matsushita Electric Ind Co Ltd Surface acoustic wave resonator
JP2008078884A (en) * 2006-09-20 2008-04-03 Matsushita Electric Ind Co Ltd Surface acoustic wave resonator
WO2008126614A1 (en) 2007-03-27 2008-10-23 Murata Manufacturing Co., Ltd. Elastic wave device
EP2128982A1 (en) * 2007-03-27 2009-12-02 Murata Manufacturing Co. Ltd. Elastic wave device
EP2128982A4 (en) * 2007-03-27 2013-07-24 Murata Manufacturing Co Elastic wave device
WO2015064238A1 (en) * 2013-10-31 2015-05-07 京セラ株式会社 Elastic wave element, filter element and communication device
JP2016140110A (en) * 2013-10-31 2016-08-04 京セラ株式会社 Acoustic wave element, filter element and communication device
JP6050486B2 (en) * 2013-10-31 2016-12-21 京セラ株式会社 Filter element and communication device
US10153748B2 (en) 2013-10-31 2018-12-11 Kyocera Corporation Acoustic wave element, filter element, and communication device

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