JPS6288907U - - Google Patents
Info
- Publication number
- JPS6288907U JPS6288907U JP18058685U JP18058685U JPS6288907U JP S6288907 U JPS6288907 U JP S6288907U JP 18058685 U JP18058685 U JP 18058685U JP 18058685 U JP18058685 U JP 18058685U JP S6288907 U JPS6288907 U JP S6288907U
- Authority
- JP
- Japan
- Prior art keywords
- point
- sample
- sample image
- calculation means
- screen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005672 electromagnetic field Effects 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Description
第１図は本考案の一実施例の構成図、第２図は
本考案を説明するための図である。
１：試料、２：試料ステージ、３：透過電子線
、４：対物レンズ、５：結像系レンズ、６：スク
リーン、７：試料駆動装置、８：演算制御回路、
９：電磁偏向コイル、１０：駆動回路、１１：入
力装置、１２：表示装置。
FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a diagram for explaining the present invention. 1: Sample, 2: Sample stage, 3: Transmitted electron beam, 4: Objective lens, 5: Imaging system lens, 6: Screen, 7: Sample drive device, 8: Arithmetic control circuit,
9: Electromagnetic deflection coil, 10: Drive circuit, 11: Input device, 12: Display device.
Claims (1)
リーンに表示される試料像の視野を移動させて観
察する装置において、前記試料駆動機構又は電磁
視野移動機構により試料像を移動させ、該試料像
の第１の点を前記スクリーンのマークに一致させ
、同様に試料像の第２の点を前記マークに一致さ
せてそれぞれの点の座標を読み取り、この座標情
報と前記試料駆動機構の試料の傾斜を表わす信号
とに基づいて前記第１の点と第２の点との間の距
離を演算する演算手段と、該演算手段の演最結果
に基づいて該第１の点と第２の点との間の距離を
表示する表示手段とを備えたことを特徴とする測
長機能を備えた電子顕微鏡。 In an apparatus for observing a sample image displayed on a screen by moving its field of view using a sample driving mechanism or an electromagnetic field moving mechanism, the sample image is moved by the sample driving mechanism or electromagnetic field moving mechanism, and a first one of the sample image is moved. A point is made to match the mark on the screen, and a second point on the sample image is similarly made to match the mark to read the coordinates of each point, and this coordinate information and a signal representing the sample inclination of the sample drive mechanism are combined. calculation means for calculating the distance between the first point and the second point based on the calculation means; and a distance between the first point and the second point based on the calculation result of the calculation means. An electron microscope equipped with a length measurement function, characterized in that it is equipped with a display means for displaying.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18058685U JPS6288907U (en) | 1985-11-22 | 1985-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18058685U JPS6288907U (en) | 1985-11-22 | 1985-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6288907U true JPS6288907U (en) | 1987-06-06 |
Family
ID=31124675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18058685U Pending JPS6288907U (en) | 1985-11-22 | 1985-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6288907U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6414854A (en) * | 1987-07-08 | 1989-01-19 | Nikon Corp | Electron microscope for length measurement |
| WO2002075246A1 (en) * | 2001-03-16 | 2002-09-26 | Hitachi, Ltd. | Method for measuring dimensions of pattern |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53106163A (en) * | 1977-02-28 | 1978-09-14 | Toshiba Corp | Electron beam meter |
| JPS5434673A (en) * | 1977-08-23 | 1979-03-14 | Hitachi Ltd | Micro-distance measuring device for scan-type electronic microscope |
| JPS58187803A (en) * | 1982-08-26 | 1983-11-02 | Fujitsu Ltd | Pattern size measuring device |
-
1985
- 1985-11-22 JP JP18058685U patent/JPS6288907U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53106163A (en) * | 1977-02-28 | 1978-09-14 | Toshiba Corp | Electron beam meter |
| JPS5434673A (en) * | 1977-08-23 | 1979-03-14 | Hitachi Ltd | Micro-distance measuring device for scan-type electronic microscope |
| JPS58187803A (en) * | 1982-08-26 | 1983-11-02 | Fujitsu Ltd | Pattern size measuring device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6414854A (en) * | 1987-07-08 | 1989-01-19 | Nikon Corp | Electron microscope for length measurement |
| WO2002075246A1 (en) * | 2001-03-16 | 2002-09-26 | Hitachi, Ltd. | Method for measuring dimensions of pattern |
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