JPS628023A - Diagnosis of rotary machine - Google Patents
Diagnosis of rotary machineInfo
- Publication number
- JPS628023A JPS628023A JP14701285A JP14701285A JPS628023A JP S628023 A JPS628023 A JP S628023A JP 14701285 A JP14701285 A JP 14701285A JP 14701285 A JP14701285 A JP 14701285A JP S628023 A JPS628023 A JP S628023A
- Authority
- JP
- Japan
- Prior art keywords
- vibration level
- pump
- diagnosis
- level
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は回転機械、とくに公共性の高いLNGプラント
、火力発電所その他に設置されるポンプ、送風機などに
適用される回転機械の診断方法に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for diagnosing rotating machinery, particularly applied to pumps, blowers, etc. installed in highly public LNG plants, thermal power plants, and other facilities. It is something.
[従来の技#i]
LNGプラントその他人型プラントまたは設備の中に占
める回転機械の比率は非常に高く、その役割も重要であ
る。これらの回転機械に異常または故障を生じた場合、
経済的損失を生ずることは当然のことながら、事故が拡
大すると大きな社会的問題に発展する。例えば、LNG
プラントは都市ガス、冷熱発電設備などの供給源として
使用されているため、タンクからLNGを圧送するLN
Gポンプが故障するとユーザー側に大きな損失を与える
と共に一般需要者にも被害を及ぼすことになる。[Conventional Technique #i] The proportion of rotating machines in LNG plants and other human-shaped plants or equipment is very high, and their role is also important. If any abnormality or failure occurs in these rotating machines,
Naturally, this causes economic loss, but if the accident spreads, it will develop into a major social problem. For example, LNG
The plant is used as a supply source for city gas, cold power generation equipment, etc., so LNG is pumped out from tanks.
If the G pump breaks down, it will cause a large loss to the user and also cause damage to general customers.
上述の問題を回避するため、本願と同一の出願人によっ
て回転機械の診断方法および診断装置が提案されている
(特願昭57−173636@ないし特願昭57−17
3640号参照)。上記提案の趣旨は、回転機械に加速
度センサを取り付け、回転機械回転中にこのセンサから
得られた信号を処理して加速度または振幅などの撮動レ
ベルまたは振動スペクトルを求め、回転機械が稼動を開
始した時点、すなわち良好な運転状態にあるときに採取
した基準値と比較して回転機械の異常を診断するように
していた。In order to avoid the above-mentioned problems, a diagnostic method and device for rotating machines have been proposed by the same applicant as the present application (Japanese Patent Application No. 57-173636@ or Japanese Patent Application No. 57-17
(See No. 3640). The purpose of the above proposal is to attach an acceleration sensor to a rotating machine, process the signal obtained from this sensor while the rotating machine is rotating, obtain a captured level such as acceleration or amplitude, or a vibration spectrum, and then start the rotating machine. Abnormalities in rotating machinery were diagnosed by comparing them with reference values taken at the time when the machine was in good operating condition.
[発明が解決しようとする問題点]
しかし、一般に回転機械、とくにLNGポンプなとの振
動特性はポンプ流量およびタンク液位(または吸入圧)
なとの運転条件によって大幅に変化するため画一的に基
準値を設定すると正しい診断を行い得ない問題点があっ
た。[Problems to be solved by the invention] However, in general, the vibration characteristics of rotating machines, especially LNG pumps, depend on the pump flow rate and tank liquid level (or suction pressure).
There is a problem in that correct diagnosis cannot be made if standard values are set uniformly because they vary greatly depending on the operating conditions of the car.
上記の事情をざらに詳述するとポンプの振動レベル、例
えば振幅は、一般に第7図に示すようにポンプ流量Qお
よびタンク液位Hの各個の組み合せ、すなわち各運転条
件に対応して三次元的に変化する。従って、運転条件の
変化を無視して成る運転条件下で採取した振幅から基準
値を定め、この基準値に経験的に定めた倍率(例えば2
.5〜5.O)を乗じて診断レベルaを設定し、実際に
検出した振幅がこの診断レベルaを越えるか、越えない
かによって異常の有無を診断しようとすると次のような
不合理を生ずる。すなわち流量およびタンク液位が最小
になる動作点b1における振幅p1を基準にして診断レ
ベルを決めると動作点b2.b3.b4における診断値
(振幅)が異常値を示しても異常を発見できず、また、
流量およびタンク液位が最大になる動作点b4における
振幅p4から診断レベルを決めると動作点b1.b2.
b3における診断値が正常であっても異常と診断してし
まうことになる。To explain the above situation in detail, the vibration level of the pump, for example, the amplitude, generally varies three-dimensionally depending on each combination of pump flow rate Q and tank liquid level H, that is, each operating condition, as shown in Fig. 7. Changes to Therefore, a reference value is determined from the amplitude sampled under operating conditions that ignore changes in operating conditions, and an empirically determined multiplier (for example, 2
.. 5-5. If a diagnosis level a is set by multiplying the amplitude by 0) and the presence or absence of an abnormality is diagnosed based on whether the actually detected amplitude exceeds this diagnosis level a or not, the following absurdity will occur. That is, if the diagnostic level is determined based on the amplitude p1 at the operating point b1 where the flow rate and tank liquid level are minimum, the operating point b2. b3. Even if the diagnostic value (amplitude) in b4 shows an abnormal value, no abnormality can be found, and
When the diagnostic level is determined from the amplitude p4 at the operating point b4 where the flow rate and tank liquid level are maximum, the operating point b1. b2.
Even if the diagnostic value in b3 is normal, it will be diagnosed as abnormal.
[問題点を解決するための手段]
本発明は、前述の問題点を解決するためになしたもので
良好な状態にある回転機械運転中に該回転機械の振動特
性に影響を及ぼす運転条件ごとに加速度を検出して診断
の基準となる基準振動レベルを予め設定し、診断時に検
出した振動レベルを該診断時の運転条件と同じ運転条件
における前記基準振動レベルと比較して異常の有無を判
定するものである。[Means for Solving the Problems] The present invention has been made to solve the above-mentioned problems, and the present invention has been made to solve the above-mentioned problems. A reference vibration level is set in advance to serve as a reference for diagnosis by detecting acceleration at It is something to do.
[作 用]
運転条件に対応して設定した基準レベルに基づいて診断
するので、確実な精度の高い診断が可能になる。[Function] Diagnosis is performed based on the reference level set corresponding to the operating conditions, so reliable and highly accurate diagnosis is possible.
[実 施 例]
以下、本発明の方法をLNGポンプに適用した場合の実
施例につき図面を参照して説明する。[Example] Hereinafter, an example in which the method of the present invention is applied to an LNG pump will be described with reference to the drawings.
第2図に示すようにポンプ駆動部1の下部軸受2に近い
ポンプケーシング3外側に加速度センサ4を取り付け、
LNGポンプが稼動を開始した、良好な運転状態にある
ときに基準データを採取する。As shown in FIG. 2, an acceleration sensor 4 is attached to the outside of the pump casing 3 near the lower bearing 2 of the pump drive unit 1,
The reference data is collected when the LNG pump has started operating and is in good operating condition.
基準データの採取要領は、第1図に示すようにLNGポ
ンプの運転領域全体に亘って流a一定の線およびタンク
液位H(または吸入圧)一定の線を適当な間隔(図では
Qを40m”/h、 Hを5m間隔)で線引し、各線が
交差する各作動点について加速度を測定する。なお、計
測の手順として、計測すべき各タンク液位(5,10、
・・・25m)に対してそれぞれタンク液位に相当する
吸入圧を一定としてポンプ流量Qを最小流量110m”
/hから最大流1330m”/hまで計測するか(第3
図参照)、あるいは、計測すべき各ポンプ流量(110
,130,・・・330111’/h)に対してそれぞ
れポンプ流量を一定としてタンク液位Hを最小液位5m
から最大液位25mまで計測する(第4図参照)。そし
て上記のようにして求めた各振動レベルによって診断の
基準となる基準振動レベル5 (第7図参照)を設定す
る。図示のように基準撮動レベル5はポンプ流mQ1タ
ンク液位H1振動レベルを座標軸とする三次元空間内に
成る拡がりを持った曲面を形成する。As shown in Figure 1, the standard data collection procedure is to draw a line where the flow rate is constant and a line where the tank liquid level H (or suction pressure) is constant over the entire operating range of the LNG pump at appropriate intervals (Q in the figure). 40m"/h, H at 5m intervals), and measure the acceleration at each operating point where each line intersects.In addition, as a measurement procedure, each tank liquid level to be measured (5, 10,
...25 m), the pump flow rate Q is the minimum flow rate of 110 m, with the suction pressure corresponding to the tank liquid level being constant.
/h to a maximum flow of 1330m”/h (3rd
(see figure), or each pump flow rate to be measured (110
, 130, ... 330111'/h), the tank liquid level H is set to a minimum liquid level of 5 m with the pump flow rate constant.
Measurements are taken from to the maximum liquid level of 25 m (see Figure 4). Then, a reference vibration level 5 (see FIG. 7), which serves as a diagnostic standard, is set based on each vibration level obtained as described above. As shown in the figure, the reference imaging level 5 forms an expanding curved surface in a three-dimensional space whose coordinate axes are the pump flow mQ1 tank liquid level H1 vibration level.
ポンプの異常の有無を判断するには、ポンプ振動レベル
を検出し、検出した振動レベルを同じ運転条件の基準振
動レベルで除して基準振動レベルに対する倍率を求め、
この倍率が実験または経験によって定めた数値を越える
かどうかで判定する。また、上記倍率をざらに正常、注
意、異常の3つに区分して具体的な判断を下すようにし
てもよい。To determine whether there is an abnormality in the pump, detect the pump vibration level, divide the detected vibration level by the reference vibration level under the same operating conditions, and calculate the multiplier for the reference vibration level.
It is determined whether this magnification exceeds a numerical value determined by experiment or experience. Further, the magnification may be roughly classified into three categories: normal, caution, and abnormal, and a specific judgment may be made.
なお、上述した各作動点(運転条件)に対応する振動レ
ベルはオーバオールの値を示すもので、この値を周波数
分析すると各作動点ごとに第5図の示すような振動、(
例えば振幅)スペクトル9が得られる。The vibration levels corresponding to each operating point (operating condition) mentioned above indicate the overall value, and when this value is frequency-analyzed, the vibration as shown in Fig. 5 for each operating point, (
For example, an amplitude) spectrum 9 is obtained.
一般にポンプなどの回転機械の振動は、軸系6、軸受2
,7、内部流体8が起振源になって発生しており、軸系
6の異状はポンプ回転数を基本とした整数法の周波数と
なって現われ、軸受2.7、例えば玉軸受の異常はポー
ルの数を基本とした内、外輪の回転速度に関係し、内部
流体8の異常はキャビテーションが主体をなし高い周波
数で現われる。1NGポンプの場合軸系、軸受、内部流
体が発生する振動の周波数は、主として0〜500H7
,500H2〜10KH2,10KH2〜20KH2の
周波数帯域に分布する。従って、運転条件が等しい基準
振動スペクトルと診断時に得られた振動スペクトルとを
対応する周波数帯域ごとに比較することによって診断部
位(軸系、軸受なと)および異常発生の有無を診断する
ことができる。In general, vibrations in rotating machinery such as pumps are caused by the shaft system 6, bearing 2
, 7. The internal fluid 8 is the source of vibration, and abnormalities in the shaft system 6 appear as integer frequencies based on the pump rotation speed, and abnormalities in the bearings 2.7, for example ball bearings. is related to the rotational speed of the inner and outer rings based on the number of poles, and abnormalities in the internal fluid 8 are mainly caused by cavitation and appear at high frequencies. In the case of a 1NG pump, the frequency of vibrations generated by the shaft system, bearings, and internal fluid is mainly 0 to 500H7.
, 500H2 to 10KH2, and 10KH2 to 20KH2. Therefore, by comparing the reference vibration spectrum under the same operating conditions and the vibration spectrum obtained during diagnosis for each corresponding frequency band, it is possible to diagnose the diagnosis part (shaft system, bearing, etc.) and the presence or absence of abnormality. .
なお、スペクトルを比較するには、各周波数帯域内のピ
ークまたは周波数帯域に含まれるすべての波形の平均値
について前述の要領で比較する。Note that to compare the spectra, the peaks within each frequency band or the average values of all waveforms included in the frequency band are compared in the manner described above.
次に、本方法を実施するための装置の一例を第6図につ
いて簡単に説明する。図中、4は振動レベルを検出する
ための加速度センサ、10はセンサ取付部および回転機
械全体の振動など低周波成分を除去するためのフィルタ
、12はA/D変換器、13はマスク・マイクロコンピ
ュータシステム制御部、14は診断時の運転条件および
周波数帯域を指定するための運転条件設定器、15は加
速度センサ4が検出した振動レベルと基準振動レベル5
とを比較し、あるいは振動波形を周波数分析し基準振動
スペクトル9と比較して異常の有無および異常発生場所
を判定する演算プロセッサ、16は運転領域内の各運転
条件に対応したすべての設定値をストアしたメインメモ
リ、17は演算時に利用する補助メモリ、18は診断結
果をタイプアウトまたはCRTに画像表示する診断表示
部、19は異常を知らせる警報装置、20は異常時に機
械を非常停止させるための信号伝達回路、22は診断時
にのみマスク・マイクロコンピュータシステムに通電す
るためのリレー、23は電源である。Next, an example of an apparatus for carrying out the method will be briefly described with reference to FIG. In the figure, 4 is an acceleration sensor for detecting the vibration level, 10 is a filter for removing low frequency components such as vibrations of the sensor mounting part and the entire rotating machine, 12 is an A/D converter, and 13 is a mask micro A computer system control unit; 14 is an operating condition setting device for specifying operating conditions and frequency bands during diagnosis; 15 is a vibration level detected by the acceleration sensor 4 and a reference vibration level 5;
or frequency analysis of the vibration waveform and comparison with the reference vibration spectrum 9 to determine the presence or absence of an abnormality and the location of the abnormality. The stored main memory, 17 is an auxiliary memory used during calculations, 18 is a diagnostic display unit that types out diagnostic results or displays images on a CRT, 19 is an alarm device that notifies you of an abnormality, and 20 is a device that makes an emergency stop of the machine in the event of an abnormality. A signal transmission circuit, 22 is a relay for energizing the mask microcomputer system only during diagnosis, and 23 is a power source.
ざらに、本装置には指定日の指定時刻に診断を自動的に
実施するためメモリおよび時計(いずれも図示せず)な
どを有するスレーブ・マイクロコンピュータシステム2
4が装備されている(詳細は前述の先願を参照)。In general, this device includes a slave microcomputer system 2 having a memory and a clock (none of which are shown) in order to automatically perform diagnosis at a specified time on a specified day.
4 (see the earlier application mentioned above for details).
なお、本発明は前述の実施例にのみ限定されるものでは
なく、例えば本発明をLNGポンプの替わりにボイラ誘
引通風機に適用したり、また、運転条件としてポンプ流
量、吸入圧の替わりに回転体の横振動または捩り振動を
支配する回転軸の回転数を採用してもよいことなど、そ
の飽水発明の要旨を逸脱しない範囲において種々の変更
を加え得ることは勿論である。Note that the present invention is not limited to the above-mentioned embodiments. For example, the present invention may be applied to a boiler induced draft fan instead of an LNG pump, or the operating conditions may be set to rotation instead of pump flow rate or suction pressure. Of course, various changes can be made without departing from the gist of the water-saturated invention, such as the possibility of adopting the rotational speed of the rotating shaft that governs the transverse vibration or torsional vibration of the body.
[発明の効果]
以上に述べたごとく、本発明は次の優れた効果を発揮す
る。[Effects of the Invention] As described above, the present invention exhibits the following excellent effects.
(+) 運転条件に対応させて診断のための基準振動
レベルを設定するので正確に且つ精度の高い診断を行う
ことができる。(+) Since the reference vibration level for diagnosis is set in accordance with the operating conditions, accurate and highly accurate diagnosis can be performed.
(ti) 運転条件ごとに基準となる基準撮動スペク
トルと診断時に検出した振動スペクトルとを比較するこ
とによって診断すべき部位について正確に且つ精度に高
い診断を行うことができる。(ti) By comparing the reference imaging spectrum that serves as a reference for each operating condition with the vibration spectrum detected at the time of diagnosis, it is possible to accurately and accurately diagnose the site to be diagnosed.
第1図は本発明の方法の一実施例を示す診断レベルの斜
視図、第2図はLNGポンプの切断図、第3図および第
4図はそれぞれタンク液位一定またはポンプ流量一定に
しておいてポンプ流量またはタンク液位を変えた場合の
振動レベルの変化を示す説明図、第5図は振動スペクト
ルの説明図、第6図は本発明の方法を実施するだめの装
置の一例を示すブロック図、第7図は従来の診断レベル
の設定方法を示す説明図である。
図中、4は加速度センサ、5は基準撮動レベル、9は基
準振動スペクトルを示す。Fig. 1 is a perspective view at a diagnostic level showing an embodiment of the method of the present invention, Fig. 2 is a cutaway view of an LNG pump, and Figs. Fig. 5 is an explanatory diagram showing the change in vibration level when the pump flow rate or tank liquid level is changed; Fig. 5 is an explanatory diagram of the vibration spectrum; Fig. 6 is a block diagram showing an example of a device for carrying out the method of the present invention. 7 are explanatory diagrams showing a conventional diagnostic level setting method. In the figure, 4 indicates an acceleration sensor, 5 indicates a reference imaging level, and 9 indicates a reference vibration spectrum.
Claims (1)
動特性に影響を及ぼす各運転条件ごとに加速度を検出し
て診断の基準となる基準振動レベルを予め設定し、診断
時に検出した振動レベルを該診断時の運転条件と同じ運
転条件における前記基準振動レベルと比較して異常の有
無を判定することを特徴とする回転機械の診断方法。 2)基準振動レベルを所要の周波数帯に分割して複数の
基準振動レベルを設定し、診断時の振動レベルを前記周
波数帯と同じ周波数帯に分割して、対応する各周波数帯
ごとに前記基準振動レベルと比較する特許請求の範囲第
1)項に記載の回転機械の診断方法。[Claims] 1) During the operation of a rotary machine in good condition, acceleration is detected for each operating condition that affects the vibration characteristics of the rotary machine, and a reference vibration level serving as a diagnostic standard is set in advance. A method for diagnosing a rotating machine, characterized in that the presence or absence of an abnormality is determined by comparing the vibration level detected during diagnosis with the reference vibration level under the same operating conditions as the operating conditions at the time of diagnosis. 2) Divide the reference vibration level into required frequency bands to set a plurality of reference vibration levels, divide the vibration level at the time of diagnosis into the same frequency band as the frequency band, and set the reference vibration level for each corresponding frequency band. A method for diagnosing a rotating machine according to claim 1, in which the vibration level is compared.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14701285A JPS628023A (en) | 1985-07-04 | 1985-07-04 | Diagnosis of rotary machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14701285A JPS628023A (en) | 1985-07-04 | 1985-07-04 | Diagnosis of rotary machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS628023A true JPS628023A (en) | 1987-01-16 |
Family
ID=15420551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14701285A Pending JPS628023A (en) | 1985-07-04 | 1985-07-04 | Diagnosis of rotary machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS628023A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0240524A (en) * | 1988-08-01 | 1990-02-09 | Tokyo Electric Power Co Inc:The | Reference-function determining method in method for diagnosing rotary machine |
JP2016090546A (en) * | 2014-11-11 | 2016-05-23 | 旭化成エンジニアリング株式会社 | Current diagnostic device and current diagnostic method |
JP2017053837A (en) * | 2015-06-30 | 2017-03-16 | ニッキソー クリオ インコーポレーテッド | Cryogenic vibration sensor and insulator pad assembly, and cryopumps including them |
WO2022054197A1 (en) * | 2020-09-10 | 2022-03-17 | 三菱電機エンジニアリング株式会社 | Facility state monitoring device, abnormality determination system, and facility state monitoring method |
JP2022082474A (en) * | 2020-11-17 | 2022-06-02 | 株式会社酉島製作所 | Abnormality diagnosis device and abnormality diagnosis method of vibration machine |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5647719A (en) * | 1979-09-28 | 1981-04-30 | Hitachi Ltd | Diagnosing device for vibration |
JPS58108419A (en) * | 1981-12-23 | 1983-06-28 | Toshiba Corp | Abnormality inspection apparatus |
-
1985
- 1985-07-04 JP JP14701285A patent/JPS628023A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5647719A (en) * | 1979-09-28 | 1981-04-30 | Hitachi Ltd | Diagnosing device for vibration |
JPS58108419A (en) * | 1981-12-23 | 1983-06-28 | Toshiba Corp | Abnormality inspection apparatus |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0240524A (en) * | 1988-08-01 | 1990-02-09 | Tokyo Electric Power Co Inc:The | Reference-function determining method in method for diagnosing rotary machine |
JP2016090546A (en) * | 2014-11-11 | 2016-05-23 | 旭化成エンジニアリング株式会社 | Current diagnostic device and current diagnostic method |
JP2017053837A (en) * | 2015-06-30 | 2017-03-16 | ニッキソー クリオ インコーポレーテッド | Cryogenic vibration sensor and insulator pad assembly, and cryopumps including them |
WO2022054197A1 (en) * | 2020-09-10 | 2022-03-17 | 三菱電機エンジニアリング株式会社 | Facility state monitoring device, abnormality determination system, and facility state monitoring method |
JPWO2022054197A1 (en) * | 2020-09-10 | 2022-03-17 | ||
JP2022082474A (en) * | 2020-11-17 | 2022-06-02 | 株式会社酉島製作所 | Abnormality diagnosis device and abnormality diagnosis method of vibration machine |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6774601B2 (en) | System and method for predicting mechanical failures in machinery driven by an induction motor | |
JP6410572B2 (en) | Current diagnostic device and current diagnostic method | |
WO2006120550A2 (en) | Vehicle vibration analyzer | |
JP2008102107A (en) | Method and system for assessing remaining life of rolling bearing using normal database, and computer program used for remaining life assessment | |
JP2016053308A (en) | Fault diagnosis equipment for hydraulic pump | |
EP3339830B1 (en) | Modeling and visualization of vibration mechanics in residual space | |
JP2020148461A (en) | Signal processing device and signal processing method | |
Gupta | Vibration—A tool for machine diagnostics and condition monitoring | |
JP3624289B2 (en) | Pump vibration monitoring method and apparatus | |
JPS628023A (en) | Diagnosis of rotary machine | |
JPS60195426A (en) | Fault diagnosing method of rotary mechanism | |
JP2695366B2 (en) | Abnormality diagnosis method for low-speed rotating machinery | |
CN114018480A (en) | Real-time diagnosis method for rotor unbalance fault of large-scale rotating machinery | |
EP3929460B1 (en) | Anomaly detection system and anomaly detection method | |
JP3739681B2 (en) | Vibration monitoring method and apparatus | |
JP2005077111A (en) | Diagnostic support device for diagnosing condition of rotary equipment, program therefor, recording medium recorded with program, and condition diagnostic support method | |
JPS628024A (en) | Diagnosis of rotary machine | |
JPS628025A (en) | Diagnosis of rotary machine | |
EP3933355A1 (en) | A method for monitoring operating condition of a rotating equipment | |
CN102788014B (en) | Gear oil pump tooth surface wearing fault diagnosis device and method | |
JPH0875617A (en) | Fault diagnostic method of pump | |
Alekseev et al. | Data measurement system of compressor units defect diagnosis by vibration value | |
JP2002099320A (en) | Method and system for diagnosing rotary machine | |
JPH0743278B2 (en) | Diagnostic equipment for rotating machinery | |
JP2005147669A (en) | Distributed power source vibration diagnosis system |