JPS6269521A - Cleaner-elevation mechanism of resin sealing equipment for semiconductor - Google Patents

Abstract

PURPOSE:To perform an elevation without irregular movement wherein a guiding in the vertical direction is performed while screw parts are maintaining a horizontal state, by rotating synchronously four screw-shafts with timing belts. CONSTITUTION:One or two timing pulleys 4 are installed on a screw-shaft 6. One pulley 4 is connected with the other pulley 4 installed on the shaft of a geared motor 3 via a timing belt 5. By the rotation of motor 3 as the driving source of elevation, the pulley 4 is rotated, and four screw-shafts are synchronously rotated via belts 5. Then the elevation of a cleaner 1 along the four screw-shafts 4 is performed by female screws 8 fixed on rails 2. The elevation without irregular movement is performed, thereby.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a mechanism for elevating a cleaner of a semiconductor resin encapsulation device at a standby position.

[Conventional technology]

This type of conventional device will be explained with reference to FIGS. 8 and 4.

In the figure, (1) is a cleaner that runs on rails (2). (3) is a geared motor for driving, (4) is a timing pulley that is rotatably driven by this motor (3rd gear directly or via a timing belt (5), (6J is a timing pulley provided on both sides of the rail (21) Screw shaft for book elevation, In is rail (2
) are provided at two locations on one side and at four locations on both sides for elevation, and (8) is a female thread into which the screw shaft (6) is inserted, which is attached to the rail (2). The above timing pulley (4) is connected to the above motor (3).
There are five thin films in total, two on the shaft, one on the threaded shaft (6), and one on the way from the motor shaft to the threaded shaft (6), and the timing belt (5) is applied to these. The two screw shafts (6) can be rotated simultaneously by two motors (31).

Next, the operation will be explained. The cleaner fl is elevated while riding on the rail (2) in the standby position, and the timing belt (5) is driven by the rotation of the geared motor (3) as the drive source for the elevation and the rotation of the timing pulley 141. ) through the screw shaft (
6) The two rotate at the same time, and the cleaner (1) is elevated along the four guides (7) by the female screw (8) fixed to the rail (2).

[Problem that the invention seeks to solve]

Since the conventional Nirevage sun device is constructed as described above, it is necessary to maintain accurate positional relationships between the four guides (7) and the two screw shafts (6), which makes assembly and adjustment difficult. Although this was a good idea, there were some problems such as unevenness in the elevation movement.

This invention was made to solve the above-mentioned problems, and aims to provide an elevation mechanism that allows easy assembly and adjustment and allows for even movement.

[Means for Solving the Problems] The cleaner elevation mechanism of the semiconductor resin sealing device according to the present invention eliminates the conventional four guides and uses two screw shafts.
It consists of four books, guided by screw shafts, and elevated.

[Effect]

In the elevation mechanism according to the present invention, the four screw shafts are rotated synchronously by a timing belt, so that the screw portions can maintain a horizontal state while guiding in the vertical direction, and can perform elevation with even movement.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

In Figure 1, (1) is the cleaner, and the rail (2)
run on top of (3) is a geared motor for driving, 1
41 is a timing pulley, (5) is a timing belt, tfl is an elevation screw shaft, and (8) is a female thread into which the screw shaft (6) is screwed. The screw shaft (6) and female screw (8) are located in two places on one side of the rail (2).
There are 4 membranes on both sides. The screw shaft (6) has 1
One or two timing pulleys 14+ are provided, and these pulleys +41 are connected to the geared motor (3).
The geared motor +31 is connected to a pulley such as a pulley (4) provided on the shaft of the
The rotation of 7-IJ-141% is made to cause all screw shafts +61 to rotate synchronously via 151.

Next, the operation will be explained. Elevation is performed with the cleaner (1) riding on the rail (2) in the standby position, but a gear motor is used as the drive source for the elevation.
When the timing pulley 14) rotates, the four screw shafts (6) simultaneously rotate through the timing bell) +51, and the female screw (8) fixed to the rail (2) rotates the cleaner. (1) is the screw shaft (6) 4
Perform the elevation along the book.

〔Effect of the invention〕

As described above, according to the present invention, since the screw shaft serves as a guide for the elevation mechanism, the structure can be simplified, the device can be manufactured at low cost, and stable operation can be achieved.

[Brief explanation of drawings]

FIG. 1 is a plan view of a route showing an embodiment of the present invention, the second figure is a side view of the route, FIG. 8 is a plan view of the route showing a conventional device, and FIG. 4 is a side view of the route. In the figure, (1) is a cleaner, (2) is a rail, +31 is a drive motor, (4) is a timing pulley, (5I is a timing bell), +61 is a screw shaft, and (8) is a female thread. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

[Claims] In a semiconductor resin enclosing device consisting of two rails and a cleaner that runs on the rails, female screws are installed at two locations on the outside of each of the rails, and a screw shaft is screwed into the female screws to support the rails, A cleaner elevation mechanism for a semiconductor resin encapsulating device, characterized in that the rail and cleaner are elevated by synchronously rotating the four screw shafts by a motor via a pulley and a belt.