JPS626555U - - Google Patents
Info
- Publication number
- JPS626555U JPS626555U JP9715085U JP9715085U JPS626555U JP S626555 U JPS626555 U JP S626555U JP 9715085 U JP9715085 U JP 9715085U JP 9715085 U JP9715085 U JP 9715085U JP S626555 U JPS626555 U JP S626555U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- stage main
- stage
- balancer
- synchronization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Fluid-Damping Devices (AREA)
Description
第１図及び第２図は、それぞれ本考案の実施に
使用して好適なステージ装置の実施例を説明する
ための要部斜視図、第３図は、本考案の実施に使
用する空気ばね支持装置の一例を説明するための
側断面図である。
１０……空気ばね装置、２０……ステージ装置
、２１……ステージ本体、２２，２５……送りね
じ、２３，２６……ガイドロツド、２４……バラ
ンサ。
1 and 2 are perspective views of main parts for explaining an embodiment of a stage device suitable for use in implementing the present invention, respectively, and FIG. 3 is an air spring support used in implementing the present invention. It is a side sectional view for explaining an example of a device. DESCRIPTION OF SYMBOLS 10... Air spring device, 20... Stage device, 21... Stage main body, 22, 25... Feed screw, 23, 26... Guide rod, 24... Balancer.
Claims (1)
ための駆動機構と、前記ステージ本体と略同じ質
量のバランサとを有し、該バランサを前記ステー
ジ本体と同期して該ステージ本体と逆方向に移動
させるようにしたことを特徴とするステージ装置
。 It has a stage main body, a drive mechanism for moving the stage main body, and a balancer having approximately the same mass as the stage main body, and is configured to move the balancer in a direction opposite to the stage main body in synchronization with the stage main body. A stage device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9715085U JPS626555U (en) | 1985-06-26 | 1985-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9715085U JPS626555U (en) | 1985-06-26 | 1985-06-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS626555U true JPS626555U (en) | 1987-01-16 |
Family
ID=30963790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9715085U Pending JPS626555U (en) | 1985-06-26 | 1985-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS626555U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09131633A (en) * | 1995-11-10 | 1997-05-20 | Sony Precision Technol Inc | Positioning device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5748401A (en) * | 1980-09-03 | 1982-03-19 | Hitachi Seiko Ltd | Super-high precision lathe |
| JPS5911781A (en) * | 1982-07-12 | 1984-01-21 | Kansai Electric Power Co Inc:The | Control device for ac/dc converter |
-
1985
- 1985-06-26 JP JP9715085U patent/JPS626555U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5748401A (en) * | 1980-09-03 | 1982-03-19 | Hitachi Seiko Ltd | Super-high precision lathe |
| JPS5911781A (en) * | 1982-07-12 | 1984-01-21 | Kansai Electric Power Co Inc:The | Control device for ac/dc converter |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09131633A (en) * | 1995-11-10 | 1997-05-20 | Sony Precision Technol Inc | Positioning device |