JPS6263230U - - Google Patents
Info
- Publication number
- JPS6263230U JPS6263230U JP15374285U JP15374285U JPS6263230U JP S6263230 U JPS6263230 U JP S6263230U JP 15374285 U JP15374285 U JP 15374285U JP 15374285 U JP15374285 U JP 15374285U JP S6263230 U JPS6263230 U JP S6263230U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- detection plate
- utility
- transfer device
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は、本考案の実施例を示す平面図、第２
図は、拡大側面図の一部断面図である。
１……ウエハ搬送装置、３……アーム部、７…
…検出板、８……石英ボード。
Figure 1 is a plan view showing an embodiment of the present invention, Figure 2 is a plan view showing an embodiment of the present invention;
The figure is a partially sectional view of an enlarged side view. 1... Wafer transfer device, 3... Arm section, 7...
...Detection board, 8...Quartz board.
Claims (1)
の真下に、停止用スイツチの検出板を設け、該検
出板をアーム部に連結したことを特徴とするウエ
ハ搬送装置。 ２ アーム部は、その頭部にチヤツクを備えてい
ることを特徴とする実用新案登録請求の範囲第１
項記載のウエハ搬送装置。 ３ 検出板は、アーム部の投影形状とほぼ合同で
あることを特徴とする実用新案登録請求の範囲第
１項記載のウエハ搬送装置。[Claims for Utility Model Registration] 1. A wafer transfer device characterized in that a detection plate for a stop switch is provided directly below a vertically movable arm that supports a quartz boat, and the detection plate is connected to the arm. . 2 Claim No. 1 for Utility Model Registration characterized in that the arm is provided with a chuck on its head.
The wafer transport device described in Section 1. 3. The wafer transfer device according to claim 1, wherein the detection plate is substantially congruent with the projected shape of the arm portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15374285U JPS6263230U (en) | 1985-10-09 | 1985-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15374285U JPS6263230U (en) | 1985-10-09 | 1985-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6263230U true JPS6263230U (en) | 1987-04-20 |
Family
ID=31072895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15374285U Pending JPS6263230U (en) | 1985-10-09 | 1985-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6263230U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02291144A (en) * | 1989-05-01 | 1990-11-30 | Nidek Co Ltd | Wafer conveyance apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4877561A (en) * | 1972-01-21 | 1973-10-18 |
-
1985
- 1985-10-09 JP JP15374285U patent/JPS6263230U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4877561A (en) * | 1972-01-21 | 1973-10-18 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02291144A (en) * | 1989-05-01 | 1990-11-30 | Nidek Co Ltd | Wafer conveyance apparatus |