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JPS6243847A - Photomagnetic recording medium - Google Patents

Photomagnetic recording medium

Info

Publication number
JPS6243847A
JPS6243847A JP18250685A JP18250685A JPS6243847A JP S6243847 A JPS6243847 A JP S6243847A JP 18250685 A JP18250685 A JP 18250685A JP 18250685 A JP18250685 A JP 18250685A JP S6243847 A JPS6243847 A JP S6243847A
Authority
JP
Japan
Prior art keywords
rare earth
recording medium
earth metals
metals
kinds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18250685A
Other languages
Japanese (ja)
Inventor
Shin Funada
舩田 伸
Satoshi Shimokawato
下川渡 聡
Tatsuya Shimoda
達也 下田
Satoshi Nehashi
聡 根橋
Akira Aoyama
明 青山
Mamoru Sugimoto
守 杉本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP18250685A priority Critical patent/JPS6243847A/en
Publication of JPS6243847A publication Critical patent/JPS6243847A/en
Pending legal-status Critical Current

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  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To improve photomagnetic characteristics and to easily manufacture an alloy target for sputtering by adding light rare earth metals Sm, Pr, Nd, Ce and further Pt and Bi in addition to heavy rare earth metals Tb, Gd, Dy and transition metals Fe, Co and Ni thereto. CONSTITUTION:A photomagnetic recording medium is formed of >=1 kinds among the light rare earth metals Sm, Nd, Pr, Ce(LR), >=1 kinds among the heavy rare earth metals Tb, Gd, Dy(HR) and >=1 kinds among the transition metals Fe, Ni, Co(TM) and Pt, Bi. x, y, z are specified to 0.1<=x<=0.8, 0.1<=y<=0.5, 0<z<=0.1 when the compsn. formula is (LR1-xHRx)yTM1-y-z(Pt, Bi)z. The characteristics equal to the characteristics of the photomagnetic recording medium which is hereto used are thus obtd. by the compsn. from which the alloy target can be easily manufactured. The replacement of Tb which is slight in resources with ample Nd is also possible.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光磁気記録媒体、例えば、レーザー光の照射
により書き換えが可能で書きこみ読みたしができる記録
媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magneto-optical recording medium, for example, a recording medium that is rewritable by irradiation with laser light and can be written to and read from.

〔発明の概要〕[Summary of the invention]

本発明は光磁気記録媒体において、従来から用いられて
きた重希土類金属Tb、Gd、Dy、遷移金属We、0
0.Miのほかに、軽希土類金属Sm、Pr、Nd、O
eさらにPt、Biを添加することにより、その光磁気
特性を向上させ、さらにスパッタリング用合金ターゲッ
トの作製を容易に行なえるようにしたものである。
The present invention applies the heavy rare earth metals Tb, Gd, Dy, transition metals We, 0, which have been conventionally used in magneto-optical recording media.
0. In addition to Mi, light rare earth metals Sm, Pr, Nd, O
e Furthermore, by adding Pt and Bi, its magneto-optical properties are improved, and furthermore, it is possible to easily produce an alloy target for sputtering.

〔従来の技術〕[Conventional technology]

従来の光磁気記録媒体は例えば、特開昭57−9494
8のように重希土類金属Tb、()+1゜Dyのうち1
種類以上およびFeまたはaOのうち1種類以上で構成
された非晶質合金薄膜からなる。
Conventional magneto-optical recording media include, for example, Japanese Patent Application Laid-Open No. 57-9494.
Heavy rare earth metal Tb, () + 1°Dy as in 8
It consists of an amorphous alloy thin film composed of one or more of Fe and aO.

垂直磁化膜を得るための条件は公知のようにKu〉2π
M: と書きあられされる。但しKuは磁気異方性エネルギー
(θrg/匡)、M8は飽和磁化(θmu/ω)である
。スパッタリングにより作製された重希土類金属−鉄系
および重希土類金属−コバルト系合金は非晶質であり、
その結晶質合金と同様、7エり磁性体となる。そのため
、残留磁化が小さくなり、保磁力が大きくなる組成から
なる薄膜を光磁気記録媒体として用いてきた。
As is well known, the conditions for obtaining a perpendicularly magnetized film are Ku〉2π
M: It is written as. However, Ku is magnetic anisotropy energy (θrg/匡), and M8 is saturation magnetization (θmu/ω). Heavy rare earth metal-iron alloys and heavy rare earth metal-cobalt alloys produced by sputtering are amorphous;
Like the crystalline alloy, it becomes a 7-edge magnetic material. Therefore, thin films having compositions that have a small residual magnetization and a large coercive force have been used as magneto-optical recording media.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、光磁気記録媒体として用いられるTb、Gd、
Dyは公知のように補償組成付近で遷移金属と金属間化
合物を作りやすく、それらを熔融し鋳造しただけでは割
れやすいという欠点があり、合金ターゲットを作製する
には特殊な技術が必要である。従って、スパッタリング
により薄膜を作製するには複合ターゲットが用いられて
いる。
However, Tb, Gd, which is used as a magneto-optical recording medium,
As is well known, Dy tends to form intermetallic compounds with transition metals near the compensation composition, and simply melting and casting them has the disadvantage of being easily broken, and special techniques are required to produce an alloy target. Therefore, composite targets are used to produce thin films by sputtering.

複合ターゲツト法では ■ 薄膜の組成制御が困難である。In the compound target method ■ It is difficult to control the composition of thin films.

■ 均一な組成の薄膜を得るためには、ペレットの配置
をくふうするなど、煩雑な手続きが必要である。
■ In order to obtain a thin film with a uniform composition, complicated procedures such as carefully arranging the pellets are required.

という欠点を有する。特に上記0項は、薄膜組成の不均
一が再生時のノイズの原因となるため、光磁気記録媒体
のO/N向上のためには克服しなければならない重大な
欠陥である。
It has the following drawback. In particular, the above-mentioned term 0 is a serious defect that must be overcome in order to improve the O/N of the magneto-optical recording medium, since non-uniformity in the thin film composition causes noise during reproduction.

そこで、本発明はこのような問題点を解決するもので、
その目的とするところは均一な組成の膜を作製するため
に必要な合金ターゲットの作製を可能にし、資源的に僅
少な重希土類金属、特にTbを豊富な軽希土類金属で置
換することにより従来のものと比べて安価で高性能な光
磁気記録媒体を提供することにある。
Therefore, the present invention aims to solve these problems.
The purpose is to make it possible to create an alloy target necessary to create a film with a uniform composition, and to replace conventional heavy rare earth metals, especially Tb, which are scarce in terms of resources, with abundant light rare earth metals. The purpose of the present invention is to provide a magneto-optical recording medium that is cheaper and has higher performance than other conventional media.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の光磁気記録媒体は軽希土類金属Sm。 The magneto-optical recording medium of the present invention is made of light rare earth metal Sm.

Nd、Pr、Os(以下、ILRとよぶ。)1種類以上
、および重希土類金PATb、Ga、ny(以下、HR
とよぶ。)1種類以上、および遷移金属Fe、Ni、C
o(以下TMとよぶ。)およびPt、Biのうち1種類
以上からなる。組成式を(LRl−、rHR,r ) 
yTMx−y−z (Pt 、 Bi )Zとしたとき
本発明では1.r、y、zは0・1くxく0.8.0,
1 り3/り0.5 T o(z<o、 1である。X
はより好ましくは、o、2<、x<、0−6゜最も好ま
しく ハ0.3 <、 x <0.5である。またyは
より好ましくは0.25 <、 y <、 0.4 、
最も好ましくは、0.3りy <0.4である。また2
はより好ましくは0.02<、 z りo、 1、最も
好ましくは0.03くZく0.0Bである。
One or more types of Nd, Pr, Os (hereinafter referred to as ILR), and heavy rare earth metals PATb, Ga, ny (hereinafter referred to as HR).
It's called. ) one or more types, and transition metals Fe, Ni, C
(hereinafter referred to as TM), and one or more of Pt and Bi. The composition formula is (LRl-, rHR, r)
When yTMx-y-z (Pt, Bi)Z, in the present invention, 1. r, y, z are 0.1 x x 0.8.0,
1 ri3/ri0.5 T o (z<o, 1.X
More preferably, o, 2<, x<, 0-6°, most preferably Ha0.3<, x<0.5. Moreover, y is more preferably 0.25 <, y <, 0.4,
Most preferably, 0.3<0.4. Also 2
is more preferably 0.02<, z ri o, 1, most preferably 0.03 x 0.0B.

〔実施例〕〔Example〕

実施例により、本発明の効果について述べる。 The effects of the present invention will be described with reference to Examples.

本実施例で示す薄膜はすべてスパッタリングにより作製
した。なお、組成式を ((LR)l−x(HR)、z:)y (TM)t−y
−z(Pt、Bi)zと表わしたとき、x<0.8の薄
膜については、低周波溶解炉で溶解し鋳造したのち、直
径4インチ、厚さ4叫に成形した合金をターゲットとし
て用いた。
All thin films shown in this example were produced by sputtering. In addition, the composition formula is ((LR)l-x(HR),z:)y (TM)ty
-z (Pt, Bi) For thin films with x<0.8 when expressed as z, use an alloy as a target that is melted and cast in a low frequency melting furnace and then formed to a diameter of 4 inches and a thickness of 4 inches. there was.

スパッタリング条件は初期真空度1X 10−’’ro
rr  以下、アルゴン圧5rIL’rorr、基板ノ
ぐイアスOvである。
Sputtering conditions are initial vacuum level 1X 10-''ro
Below, the argon pressure is 5rIL'rorr, and the substrate pressure is Ov.

第1図に(N(lo、4Dyo、6 )o、31i(’
Pe0.7000.3)0.115−z (Pt、Bi
)Z  のカー回転角(以下、θにとよぶ。)の組成依
存性を示す。Pt、Bi、Tiの添加によりカー回転角
は、増大し、その添加効果はBi。
Figure 1 shows (N(lo, 4Dyo, 6)o, 31i('
Pe0.7000.3)0.115-z (Pt, Bi
) The composition dependence of the Kerr rotation angle (hereinafter referred to as θ) of Z is shown. The addition of Pt, Bi, and Ti increases the Kerr rotation angle, and the effect of the addition is that of Bi.

Ptの順に大きい。キュリ一温度はいずれも(NdO,
4Tb0.6 )0.35 (yeo、ycoo、s 
)o、s 5  の約180℃からほとんど変わってい
ない。
It is large in order of Pt. Curie temperature is (NdO,
4Tb0.6 )0.35 (yeo,ycoo,s
) o, s 5 has hardly changed from about 180°C.

第2図に(LRo、4Tb0.3Gt10.3 )0.
35 (?e0.6000.4 )o、as−zBiz
のθにの組成依存性を示す。但し、LR=Nd、Sm。
Figure 2 shows (LRo, 4Tb0.3Gt10.3)0.
35 (?e0.6000.4)o, as-zBiz
The dependence of the composition on θ is shown. However, LR=Nd, Sm.

Oe、Pr  である。Oe, Pr.

第5図に(Ndo、4Tbo、s )o、ss (Pe
t−y(Ni、0o)y)o、a。
Figure 5 shows (Ndo, 4Tbo, s)o, ss (Pe
ty(Ni,0o)y)o,a.

Pto、os  のカー回転角の組成依存性を示す。0
0の添加によるカー回転角の増大には著しいものがある
The composition dependence of the Kerr rotation angle of Pto, os is shown. 0
There is a remarkable increase in the Kerr rotation angle due to the addition of 0.

〔発明の効果〕〔Effect of the invention〕

以上述べたように本発明によれば、合金ターゲットを容
易に作製できる組成で従来用いられてきた光磁気記録媒
体と同等の特性を出すことができる。また資源的に僅少
なTbを豊富なN(iで置換することができるため、将
来、予想される材料の枯渇からも逃れることができると
いう効果を有する。
As described above, according to the present invention, it is possible to obtain properties equivalent to those of conventionally used magneto-optical recording media with a composition that allows easy production of an alloy target. Furthermore, since Tb, which is scarce in terms of resources, can be replaced with abundant N(i), it has the effect of avoiding the depletion of materials expected in the future.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(Nd O,4Dyo、e戸35 (Feo70
0o、s )o、5s−az(Pt、Bi)2 のカー
回転角の2依存性図。 第2図 (LRo4Tbo4Gdo2)o、ss (F
eo、aC!oo4)o、as−zBiz  のカー回
転角の2依存性図。 第3図 (Nao4Tbo、s )0.35 (yet
−y(Nt 、co)y)o、a。 pto、os  のカー回転角のy依存性図。 以上
Figure 1 (Nd O, 4Dyo, e door 35 (Feo70
2 dependence diagram of the Kerr rotation angle of 0o,s)o,5s-az(Pt, Bi)2. Figure 2 (LRo4Tbo4Gdo2) o, ss (F
eo, aC! oo4) 2 dependence diagram of Kerr rotation angle of o, as-zBiz. Figure 3 (Nao4Tbo,s)0.35 (yet
-y(Nt,co)y)o,a. The y dependence diagram of the Kerr rotation angle of pto, os. that's all

Claims (1)

【特許請求の範囲】 軽希土類金属Sm、Nd、Pr、Ceのうち1種類以上
、遷移金属Fe、Ni、Coのうち1種類以上および重
希土類金属Tb、Gd、Dyのうち1種類以上およびP
t、Biのうち1種類以上からなり組成式を {(LR)_1_−_x(HR)_x}_y(TM)_
1_−_y_−_z(Pt、Bi)_zと表わしたとき
、 0.1<x<0.8 0.1≦y≦0.5 0<z<0.1 の範囲にあることを特徴とする光磁気記録媒体。 (但し、LRは上記、軽希土類金属Sm、Pr、Nd、
Ceのうち1種類以上、HRは上記、重希土類金属Tb
、Gd、Dyのうち1種類以上を示す。)
[Scope of Claims] One or more of the light rare earth metals Sm, Nd, Pr, and Ce, one or more of the transition metals Fe, Ni, and Co, one or more of the heavy rare earth metals Tb, Gd, and Dy, and P.
The composition formula is {(LR)_1_-_x(HR)_x}_y(TM)_
When expressed as 1_-_y_-_z(Pt, Bi)_z, it is characterized by being in the range of 0.1<x<0.8 0.1≦y≦0.5 0<z<0.1 Magneto-optical recording medium. (However, LR is the above-mentioned light rare earth metal Sm, Pr, Nd,
One or more types of Ce, HR is the above, heavy rare earth metal Tb
, Gd, and Dy. )
JP18250685A 1985-08-20 1985-08-20 Photomagnetic recording medium Pending JPS6243847A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18250685A JPS6243847A (en) 1985-08-20 1985-08-20 Photomagnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18250685A JPS6243847A (en) 1985-08-20 1985-08-20 Photomagnetic recording medium

Publications (1)

Publication Number Publication Date
JPS6243847A true JPS6243847A (en) 1987-02-25

Family

ID=16119487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18250685A Pending JPS6243847A (en) 1985-08-20 1985-08-20 Photomagnetic recording medium

Country Status (1)

Country Link
JP (1) JPS6243847A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5053287A (en) * 1986-08-22 1991-10-01 Mitsui Petrochemical Industries, Ltd. Magnetooptical recording media and processes for production thereof
JPH04223124A (en) * 1990-04-03 1992-08-13 Werner & Pfleiderer Gmbh Gas bleeding from molten resin in screw injection device and gas bleeding device
US7114758B2 (en) 2004-03-31 2006-10-03 Piolax Inc. Storage apparatus for vehicle

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5053287A (en) * 1986-08-22 1991-10-01 Mitsui Petrochemical Industries, Ltd. Magnetooptical recording media and processes for production thereof
JPH04223124A (en) * 1990-04-03 1992-08-13 Werner & Pfleiderer Gmbh Gas bleeding from molten resin in screw injection device and gas bleeding device
US7114758B2 (en) 2004-03-31 2006-10-03 Piolax Inc. Storage apparatus for vehicle

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