JPS6231892U - - Google Patents
Info
- Publication number
- JPS6231892U JPS6231892U JP12337285U JP12337285U JPS6231892U JP S6231892 U JPS6231892 U JP S6231892U JP 12337285 U JP12337285 U JP 12337285U JP 12337285 U JP12337285 U JP 12337285U JP S6231892 U JPS6231892 U JP S6231892U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- outer cylinder
- temperature sensor
- processing liquid
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 239000002470 thermal conductor Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Control Of Resistance Heating (AREA)
- Resistance Heating (AREA)
Description
第１図は本考案に係る処理液調温用ヒータの実
施例を示す断面図、第２図は第１図の拡大右側面
図である。
１０……外筒、１２……加熱素子、２２……シ
リコン充填材、２６……断熱材。
FIG. 1 is a sectional view showing an embodiment of a heater for controlling the temperature of a processing liquid according to the present invention, and FIG. 2 is an enlarged right side view of FIG. 1. DESCRIPTION OF SYMBOLS 10... Outer cylinder, 12... Heating element, 22... Silicon filler, 26... Heat insulating material.
Claims (1)
た加熱素子と、加熱素子と外筒内周との間に介在
され熱伝導体と、外筒内で加熱素子よりも入口部
方向に加熱素子と離間して配置された温度センサ
と、前記加熱素子と温度センサとの間に充填され
た断熱材と、を有することを特徴とした処理液調
温用ヒータ。 (2) 前記温度センサは前記外筒へ接近させて設
けられていることを特徴とした前記実用新案登録
請求の範囲第(1)項に記載の処理液調温用ヒータ
。[Claims for Utility Model Registration] (1) A metal outer cylinder, a heating element disposed at the bottom of the outer cylinder, a thermal conductor interposed between the heating element and the inner periphery of the outer cylinder, and an outer cylinder. A processing liquid preparation comprising: a temperature sensor disposed further away from the heating element in the direction of the inlet than the heating element; and a heat insulating material filled between the heating element and the temperature sensor. Warm heater. (2) The heater for controlling the temperature of a processing liquid as set forth in claim (1) of the utility model registration, wherein the temperature sensor is provided close to the outer cylinder.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12337285U JPS6231892U (en) | 1985-08-09 | 1985-08-09 | |
| US06/795,137 US4723066A (en) | 1984-11-05 | 1985-11-05 | Apparatus for heating processing liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12337285U JPS6231892U (en) | 1985-08-09 | 1985-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6231892U true JPS6231892U (en) | 1987-02-25 |
Family
ID=31014419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12337285U Pending JPS6231892U (en) | 1984-11-05 | 1985-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6231892U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012020227A (en) * | 2010-07-14 | 2012-02-02 | Horiba Stec Co Ltd | Liquid sample heating vaporizer |
| WO2014148590A1 (en) * | 2013-03-22 | 2014-09-25 | 吉野川電線株式会社 | Electric heater and method for manufacturing electric heater |
-
1985
- 1985-08-09 JP JP12337285U patent/JPS6231892U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012020227A (en) * | 2010-07-14 | 2012-02-02 | Horiba Stec Co Ltd | Liquid sample heating vaporizer |
| WO2014148590A1 (en) * | 2013-03-22 | 2014-09-25 | 吉野川電線株式会社 | Electric heater and method for manufacturing electric heater |
| JPWO2014148590A1 (en) * | 2013-03-22 | 2017-02-16 | 吉野川電線株式会社 | Electric heater and manufacturing method thereof |
| US10194489B2 (en) | 2013-03-22 | 2019-01-29 | Yoshinogawa Electric Wire & Cable Co., Ltd. | Electric heater and method for manufacturing electric heater |