JPS62290868A - Continuous vacuum deposition device - Google Patents
Continuous vacuum deposition deviceInfo
- Publication number
- JPS62290868A JPS62290868A JP13533286A JP13533286A JPS62290868A JP S62290868 A JPS62290868 A JP S62290868A JP 13533286 A JP13533286 A JP 13533286A JP 13533286 A JP13533286 A JP 13533286A JP S62290868 A JPS62290868 A JP S62290868A
- Authority
- JP
- Japan
- Prior art keywords
- strip
- vapor
- metal
- ports
- guide roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001771 vacuum deposition Methods 0.000 title description 3
- 239000002184 metal Substances 0.000 claims abstract description 36
- 229910052751 metal Inorganic materials 0.000 claims abstract description 36
- 238000007740 vapor deposition Methods 0.000 claims abstract description 7
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 abstract description 6
- 238000001704 evaporation Methods 0.000 abstract description 4
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000011437 continuous method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
（産業上の利用分野）
本発明は、調帯等金属帯板（以下単にストリップという
。）の片面に亜鉛等金属メッキを施すための連続真空蒸
着装置に関するものである。[Detailed Description of the Invention] 3. Detailed Description of the Invention (Field of Industrial Application) The present invention provides a continuous method for applying metal plating such as zinc to one side of a metal strip plate (hereinafter simply referred to as a strip). The present invention relates to a vacuum evaporation device.
（従来の技術）
従来、所定の真空度に圧力調整された蒸着室内に、スト
リップを挟んでストリップ進行方向に沿う平行２枚の板
ガイドを設け、咳仮ガイド先端に設けたガイドにストリ
ップの両端エツジを当接させ、該ストリップ表面にだけ
金属蒸気が付着するようにした連続真空蒸着装置は知ら
れている（特開昭５８−１３３３７５号公報参照）。(Prior art) Conventionally, two parallel plate guides are provided in a vapor deposition chamber whose pressure is adjusted to a predetermined degree of vacuum and run along the strip traveling direction with the strip sandwiched therebetween. A continuous vacuum evaporation apparatus is known in which the edges are brought into contact so that metal vapor adheres only to the surface of the strip (see Japanese Patent Laid-Open No. 133375/1983).
（発明が解決しようとする問題点）
しかし、ストリップの両端部には圧延で発生した波打ち
等が存在しており、装置の稼動中、ストリップの両端エ
ツジをガイドに一定の箇所で線接触させることは不可能
であるから、ガイドはストリップの両端エツジで損傷し
てしまうと共に、これに加えてストリップ両端部の波打
ち等があってガイドとストリップとの間に隙間が必ず発
生し、ガイドによる蒸気シールが不充分となるから、金
属薄気はガイドとストリップとの間から１曳れ、無効装
置が発生し、さらにこの蒸気がメッキを必要としないス
トリップ表面等に付着するという不都合を免れない。(Problem to be Solved by the Invention) However, there are undulations caused by rolling at both ends of the strip, and it is difficult to bring the ends of the strip into line contact with the guide at a certain point during operation of the device. Since this is impossible, the guide will be damaged at both ends of the strip, and in addition to this, there will be undulations at both ends of the strip, which will inevitably create a gap between the guide and the strip, and the guide will not be able to seal the steam. As a result, thin metal vapor is drawn out from between the guide and the strip, creating an ineffective device, and furthermore, this vapor adheres to the surface of the strip, etc., which does not require plating.
（発明の目的）
本発明は、前記従来の問題点を解決するためになしたも
ので、ストリップ表面に限られた幅で金属蒸気を効率良
く付着させることができると共に、無効蒸気の発生及び
ストリップ裏面等への付着を確実に防止できるようにす
ることを目的とする。(Object of the Invention) The present invention has been made to solve the above-mentioned conventional problems, and is capable of efficiently attaching metal vapor to the strip surface in a limited width, and also prevents the generation of ineffective vapor and stripping. The purpose is to reliably prevent adhesion to the back surface, etc.
（問題点を解決するだめの手段）
第１発明の連続真空蒸着装置は、蒸着室内のストリップ
をガイドロールで転向させると共に、ガイドロール上に
巻付いた該ストリップ表面に臣＝ませて開口させ、かつ
、微小間隙をおいて摺接させた金属蒸気口を設けたこと
を特徴とするものである。(Means for solving the problem) The continuous vacuum deposition apparatus of the first invention turns the strip in the deposition chamber with a guide roll, and opens the strip along the surface of the strip wound on the guide roll. Further, the device is characterized in that a metal vapor port is provided in sliding contact with a small gap between the metal vapor ports.
第２発明の連続真空蒸着装置は、蒸着室内のストリップ
をガイドロールで転向させ、ガイドロール上に巻付いた
該ストリップ表面に臨ませて開口させ、かつ、微小間隙
をおいて摺接させた金属蒸気口を設けると共に、該金属
蒸気口に開口横幅調整装置を設けたことを特徴とすると
するものである。In the continuous vacuum deposition apparatus of the second invention, the strip in the deposition chamber is turned around by a guide roll, the strip is opened to face the surface of the strip wound on the guide roll, and the metal is brought into sliding contact with a small gap between the strips. The present invention is characterized in that a steam port is provided and an opening width adjusting device is provided on the metal steam port.
（実施例） 以下本発明の一実施例を図面に沿い説明する。(Example) An embodiment of the present invention will be described below with reference to the drawings.
図中１は蒸着室で、ストリップ２をガイドしつつシール
する差圧式の図示しない真空シール装置によりハウジン
グ３のストリップ入側および出側をシールされると共に
、図示しない真空ポンプによる真空吸引により真空度１
〜１０−’Ｔｏｒｒに圧力調整されている。In the figure, reference numeral 1 denotes a deposition chamber, in which the strip entrance and exit sides of the housing 3 are sealed by a differential pressure type vacuum sealing device (not shown) that guides and seals the strip 2, and the vacuum level is maintained by vacuum suction by a vacuum pump (not shown). 1
The pressure is regulated to ~10-'Torr.
ストリップ２は、この蒸着室１内でガイドロール４の第
１図に示す左側部に巻付けられて側面視くの字状に転向
している。The strip 2 is wound around the left side of the guide roll 4 shown in FIG. 1 in the vapor deposition chamber 1 and turned into a dogleg shape when viewed from the side.
５は蒸発ルツボで、該ルツボ５の上部にはダクト６が接
続され、下部にはハウジング３外の図示しない溶解槽が
ポンプを介して接続されている。Reference numeral 5 denotes an evaporation crucible. A duct 6 is connected to the upper part of the crucible 5, and a dissolution tank (not shown) outside the housing 3 is connected to the lower part via a pump.
ダクト６の先端部は、ガイドロール４上に巻付いたスト
リップ２の表面に臨んで開口しており、上下のダクト壁
先端部内面には、ガイドロール４のロール軸方向に沿う
シール材製ガイドレール７が設けられ、該ガイドレール
７間には、ガイドロール４の表面に沿う断面円弧状の凹
面を表面にもったシール材製蒸気遮蔽板８が左右のダク
ト壁の前を横切って摺動可能に係合されると共に、左右
のダクト壁先端部には、前記ガイドレール７に連結し、
かつ、前記蒸気遮蔽板８の裏面に摺接したシールパー９
が設けられている。さらに、上下ダクト壁先端には、ガ
イドロール４に巻付いたストリップ２の表面に摺接可能
なロール軸方向に沿う入側シール板１０と出側シール板
１１が蒸気遮蔽板８を挟んで設けられている。The tip of the duct 6 is open facing the surface of the strip 2 wound on the guide roll 4, and a guide made of sealing material along the roll axis direction of the guide roll 4 is provided on the inner surface of the tip of the upper and lower duct walls. A rail 7 is provided, and between the guide rails 7, a steam shield plate 8 made of a sealing material and having a concave surface with an arcuate cross section along the surface of the guide roll 4 slides across the front of the left and right duct walls. The end portions of the left and right duct walls are connected to the guide rail 7, and are connected to the guide rail 7.
and a sealer 9 that is in sliding contact with the back surface of the steam shielding plate 8.
is provided. Further, at the tips of the upper and lower duct walls, an inlet seal plate 10 and an outlet seal plate 11 are provided with a steam shielding plate 8 in between, which extend along the roll axis direction and can slide into contact with the surface of the strip 2 wound around the guide roll 4. It is being
蒸気遮薇板８は、該板裏面に突設した支持片１２にて、
左右のダクト壁間に架設したガイドバー１３に摺動可能
に嵌合されると共に、左右のダクト壁にモータ１４等で
回転可能に設けたスクリュネジ１５と螺合しており、該
スクリュネジ１５の正逆回転によりガイドバー１３に沿
い移動しガイドレール７及びシールバー９との摺接シー
ル状態を保持する。The steam shield plate 8 has a supporting piece 12 protruding from the back side of the plate.
It is slidably fitted into a guide bar 13 installed between the left and right duct walls, and is also threadedly engaged with a screw 15 that is rotatably provided on the left and right duct walls by a motor 14 or the like. By reverse rotation, it moves along the guide bar 13 and maintains a sliding sealing state with the guide rail 7 and the seal bar 9.
１６はロールチョ・ツクで、ハウジング３の相対する外
側面に沿って第１図の左右方向にスライド移動可能にス
ライドベース１７上に支持されており、該ロールチョッ
ク１６の第１図に示す右側部（反金属蒸気ロア、８側部
）には固定ナツト１８が内蔵されている。一方、スライ
ドベース１７上には、各ロールチョック１６内の固定ナ
ンド１８と螺合したスクリュネジ１９が軸受２０を介し
て回転可能に支持されており、両スクリュネジ１９は駆
動装置２１により連動機構２２を介して同調回転可能に
連結されている。Reference numeral 16 denotes a roll chock, which is supported on a slide base 17 so as to be able to slide in the left-right direction in FIG. 1 along the opposing outer surfaces of the housing 3. A fixing nut 18 is built into the anti-metal steam lower (8 side part). On the other hand, on the slide base 17 , a screw 19 screwed into the fixed nand 18 in each roll chock 16 is rotatably supported via a bearing 20 . are connected for synchronous rotation.
ガイドロール４は、前記ロールチョック１６に支持され
ており、第１図に示す左側（金属蒸気ロア、８側）に進
退して該ガイドロール４に巻付Ｃノだストリップ２と金
属蒸気ロア、８及びシール板１０．１１との間の隙間２
３を調整可能となっている。The guide roll 4 is supported by the roll chock 16, and advances and retreats to the left side (metal steam lower, 8 side) shown in FIG. and the gap 2 between the seal plate 10.11
3 can be adjusted.
ガイドロール４のかかる移動性を保ちつつ蒸着室１内の
真空を保持するために、ハウジング３とロールチョック
１６との間には図示しないシール装置が設けられている
。A sealing device (not shown) is provided between the housing 3 and the roll chock 16 in order to maintain the vacuum in the deposition chamber 1 while maintaining the movability of the guide roll 4.
尚、本実施例は金属蒸気ロア、８を固定側、ガイドロー
ル４を可動側とした例であったが、反対にガイドロール
４を固定側、金属蒸気ロア、８を可動側としても、スト
リップ２と金属蒸気ロア、８との間の間隙２３を調整で
きる点で同効である。In this embodiment, the metal steam lower 8 is on the fixed side and the guide roll 4 is on the movable side, but on the other hand, if the guide roll 4 is on the fixed side and the metal steam lower 8 is on the movable side, the strip It has the same effect in that the gap 23 between 2 and the metal vapor lower 8 can be adjusted.
（作 用）
蒸着室１内を一定の真空度１〜１０’ Ｔｏｒｒに圧力
調整しであるため、蒸発ルツボ５内の溶融金属は蒸発す
る。この金属蒸気はダクト６により移送されるストリッ
プ２の表面に導かれて該ストリップ表面に付着する。(Function) Since the pressure in the vapor deposition chamber 1 is adjusted to a constant degree of vacuum of 1 to 10' Torr, the molten metal in the evaporation crucible 5 evaporates. This metal vapor is guided by the duct 6 to the surface of the strip 2 and adheres to the surface of the strip.
ダクト６の先端に設けた上下のガイドレール７及び該ガ
イドレール７に案内されて移動可能な左右の蒸気遮蔽板
８は、ストリップ２の表面に対向した金属蒸気口を構成
すると共に、該金属蒸気口の前後には、ストリップ２の
表面に対向した入側、出側シール板１０．１１が設けら
れており、ストリップ２と金属蒸気ロア、８及びシール
板１０．１１との間の間隙２３は駆動装置２１による金
属蒸気ロア、８へのガイドロール４の前進操作で調整で
きるから、この間隙２３を極少に調整しておけば、金属
蒸気は周囲にリークすることなく金属蒸気ロア、８にし
■んだストリップ表面にだけ付着することになる。The upper and lower guide rails 7 provided at the tip of the duct 6 and the left and right steam shielding plates 8 that are movable guided by the guide rails 7 constitute a metal steam port facing the surface of the strip 2, and Inlet and outlet seal plates 10.11 facing the surface of the strip 2 are provided before and after the opening, and the gap 23 between the strip 2, the metal vapor lower 8 and the seal plate 10.11 is Adjustment can be made by moving the guide roll 4 forward toward the metal vapor lower 8 using the driving device 21, so if this gap 23 is adjusted to a minimum, the metal vapor can be moved to the metal vapor lower 8 without leaking to the surroundings. It will stick only to the solder strip surface.
左右の蒸気遮蔽板８をモータ１４によるストリップ幅方
向移動操作でストリップ２の両端位置等に設置して金属
蒸気ロア、８の開口横幅を調整できるから、この開口横
幅調整装置１２〜１４によりストリップ２の板幅寸法に
対応して金属蒸気の付着範囲を適宜調節できることにな
る。The width of the opening of the metal steam lower 8 can be adjusted by installing the left and right steam shielding plates 8 at both ends of the strip 2 by moving them in the strip width direction using the motor 14. The adhesion range of metal vapor can be adjusted as appropriate depending on the plate width dimension.
（発明の効果）
以上の通り本発明は、蒸着室内のストリップをガイドロ
ールで転向させると共に、ガイドロール上に巻付いた該
ストリップ表面にしｎませて開口させた金属蒸気口を設
け、該金属蒸気口をストリップ表面に微小間隙をおいて
摺接させており、ガイドロールによるガイドでストリッ
プがふれないため、ストリップと金属蒸気口との間の前
期微小間隙は変動せず、シール性が安定しているから、
金属蒸気を周囲にリークさせることなく金属蒸気口が臨
んだ該ストリップ表面にだけ効率良く付着させることが
できると共に、従来のような損傷部分は生じず、メンテ
ナンス性を向上させることができる。さらに、金属蒸気
口の開口横幅を調整できるから、ストリップの板幅に確
実に対応できろ。(Effects of the Invention) As described above, the present invention allows the strip in the vapor deposition chamber to be turned around by a guide roll, and also provides a metal vapor port opened at an angle on the surface of the strip wound on the guide roll. The opening is in sliding contact with the strip surface with a small gap, and the strip is guided by guide rolls so that it does not touch, so the small gap between the strip and the metal vapor port does not change, and the sealing performance is stable. Since there,
The metal vapor can be efficiently attached only to the surface of the strip facing the metal vapor port without leaking to the surroundings, and there is no damaged part as in the conventional method, making it possible to improve maintainability. Furthermore, since the width of the opening of the metal steam vent can be adjusted, it can be adapted to the width of the strip.
第１図は本発明の一実施例を示す断面図、第２図、第３
図は第１図のｎ−ｎ綿、 ＩＩＩ−ＩＩＩ線に沿う断面
図、第４図はガイドロール進退機構を示す側面間である
。
１・・蒸着室、２・・ストリップ、３・・ハウジング、
４・・ガイドロール、５・・蒸発ルツボ、６・・ダク１
−３７・・ガイドレール、８・・蒸気遮蔽板、９・・シ
ールバー、１０・・入側シール板、１１・・出側シール
板、１２・・支持片、１３・・ガイドバー、１４・・モ
ータ、１５．１９・・スクリュネジ、１６・・ロールチ
ョック、１７・・スライドヘース、１８・・固定ナツト
、２０・・軸受、２１・・駆動装置、２２・・連動機構
、２３・・間隙。
第１図
第２図
第 ３ 図Figure 1 is a sectional view showing one embodiment of the present invention, Figures 2 and 3 are
The figure is a sectional view taken along line III--III of Figure 1, and Figure 4 is a side view showing the guide roll advancing and retracting mechanism. 1. Deposition chamber, 2. Strip, 3. Housing,
4. Guide roll, 5. Evaporation crucible, 6. Dak 1
-37... Guide rail, 8... Steam shielding plate, 9... Seal bar, 10... Inlet side seal plate, 11... Outlet side seal plate, 12... Support piece, 13... Guide bar, 14...・Motor, 15. 19.. Screw, 16.. Roll chock, 17.. Slide head, 18.. Fixing nut, 20.. Bearing, 21.. Drive device, 22.. Interlocking mechanism, 23.. Gap. Figure 1 Figure 2 Figure 3
Claims (2)
ると共に、ガイドロール上に巻付いた該ストリップ表面
に臨ませて開口させ、かつ、微小間隙をおいて摺接させ
た金属蒸気口を設けたことを特徴とする連続真空蒸着装
置。(1) The strip in the vapor deposition chamber is turned around by a guide roll, and a metal vapor port is provided that opens facing the surface of the strip wound on the guide roll and that slides into contact with it with a small gap. Continuous vacuum evaporation equipment featuring:
、ガイドロール上に巻付いた該ストリップ表面に臨ませ
て開口させ、かつ、微小間隙をおいて摺接させた金属蒸
気口を設けると共に、該金属蒸気口に開口横幅調整装置
を設けたことを特徴とする連続真空蒸着装置。(2) The strip in the vapor deposition chamber is turned around by a guide roll, and a metal vapor port is provided which is opened to face the surface of the strip wound on the guide roll, and which is in sliding contact with a small gap. A continuous vacuum evaporation device characterized in that a metal steam port is provided with an opening width adjustment device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61135332A JPH0696767B2 (en) | 1986-06-11 | 1986-06-11 | Continuous vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61135332A JPH0696767B2 (en) | 1986-06-11 | 1986-06-11 | Continuous vacuum deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62290868A true JPS62290868A (en) | 1987-12-17 |
| JPH0696767B2 JPH0696767B2 (en) | 1994-11-30 |
Family
ID=15149289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61135332A Expired - Lifetime JPH0696767B2 (en) | 1986-06-11 | 1986-06-11 | Continuous vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0696767B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04160159A (en) * | 1990-10-23 | 1992-06-03 | Nkk Corp | Film forming device of steel strip |
| CN107034437A (en) * | 2017-05-27 | 2017-08-11 | 郑州华晶新能源科技有限公司 | A kind of adaptive aluminum metal steam diversion window of width |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6021377A (en) * | 1983-07-15 | 1985-02-02 | Nisshin Steel Co Ltd | Vacuum vapor deposition plating apparatus provided with deposited amount distribution controlling means |
| JPS60197876A (en) * | 1984-03-19 | 1985-10-07 | Mitsubishi Heavy Ind Ltd | Vacuum deposition device |
-
1986
- 1986-06-11 JP JP61135332A patent/JPH0696767B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6021377A (en) * | 1983-07-15 | 1985-02-02 | Nisshin Steel Co Ltd | Vacuum vapor deposition plating apparatus provided with deposited amount distribution controlling means |
| JPS60197876A (en) * | 1984-03-19 | 1985-10-07 | Mitsubishi Heavy Ind Ltd | Vacuum deposition device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04160159A (en) * | 1990-10-23 | 1992-06-03 | Nkk Corp | Film forming device of steel strip |
| CN107034437A (en) * | 2017-05-27 | 2017-08-11 | 郑州华晶新能源科技有限公司 | A kind of adaptive aluminum metal steam diversion window of width |
| CN107034437B (en) * | 2017-05-27 | 2024-01-30 | 郑州华晶新能源科技有限公司 | Width self-adaptive aluminum metal steam guide window |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0696767B2 (en) | 1994-11-30 |
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