JPS62297702A - Slider for measuring variation in floating quantity - Google Patents
Slider for measuring variation in floating quantityInfo
- Publication number
- JPS62297702A JPS62297702A JP14004486A JP14004486A JPS62297702A JP S62297702 A JPS62297702 A JP S62297702A JP 14004486 A JP14004486 A JP 14004486A JP 14004486 A JP14004486 A JP 14004486A JP S62297702 A JPS62297702 A JP S62297702A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- disk
- electrode
- floating quantity
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 abstract description 9
- 239000002184 metal Substances 0.000 abstract description 9
- 230000005291 magnetic effect Effects 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 5
- 238000007747 plating Methods 0.000 abstract description 4
- 229910003962 NiZn Inorganic materials 0.000 abstract description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- 239000004020 conductor Substances 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract description 2
- 229910000859 α-Fe Inorganic materials 0.000 abstract description 2
- 229910020630 Co Ni Inorganic materials 0.000 abstract 1
- 229910002440 Co–Ni Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
〔産業上の利用分野〕
本発明は磁気ディスク装置のヘッド浮上量変動をディス
ク面との間の静電容量変化を検出して測定するためのス
ライダの改良に関するものである。[Detailed Description of the Invention] 3. Detailed Description of the Invention [Field of Industrial Application] The present invention is a method for measuring fluctuations in the flying height of a magnetic disk device by detecting changes in capacitance between the head and the disk surface. This relates to improvements to the slider.
ヘッドとディスクの間の静電容量を検出してヘッドの浮
上量を測定する方法は、アイ・イー・イー・イー１、ト
ランザクション オン マグネティックス、セプテンバ
ー、１９７１ 第４１８頁から第４２１頁（Ｉ Ｅ
Ｅ Ｅ、 Ｔｒａｎｓ、Ｍａｇｎｅｔ＋ｃｓ、５ｅｐｔ
。A method of measuring the flying height of the head by detecting the capacitance between the head and the disk is described in IE 1, Transactions on Magnetics, September, 1971, pp. 418 to 421 (I E
E E, Trans, Magnet+cs, 5ept
.
１９７１、 ｐ４１８−４２１） 及び特開昭５７−
６０５６６に記載されているように従来から考えられて
いた。1971, p418-421) and Japanese Unexamined Patent Publication No. 1971-
60566, it has been considered in the past.
しかし、この方法で測定する場合、電極にキャリア信号
として電圧を加える必要があるためディスク基板上に、
酸化物磁性粉を絶縁体の樹脂で固めて塗布する塗布型デ
ィスクでは問題ないが、基板面に金属をスパッタリング
あるいはメッキによって形成するタイプのディスクでは
、極めて狭いスペーシングの領域で測定する場合には、
電極と媒体面の間で放電を起し測定不能になるという問
題が有った。However, when measuring with this method, it is necessary to apply a voltage to the electrode as a carrier signal, so
There is no problem with coated disks in which oxide magnetic powder is hardened and applied with an insulating resin, but with disks in which metal is formed on the substrate surface by sputtering or plating, it may be difficult to measure in extremely narrow spacing areas. ,
There was a problem in that a discharge occurred between the electrode and the medium surface, making measurement impossible.
本発明の目的は上記従来技術の問題点を解決しメタル媒
体ディスク面上で放電を起すこと無く浮上量変動を測定
するヘッドスライダを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a head slider that solves the above problems of the prior art and measures flying height fluctuations without causing discharge on the surface of a metal medium disk.
上記目的は、スライダ表面したがって電極表面に一定の
厚さのスペーサ膜を形成することによシ達成される。The above object is achieved by forming a spacer film of a certain thickness on the slider surface and therefore on the electrode surface.
スライダ表面に形成したスペーサ膜で電極とメタル媒体
面ケ離し、放１！’ｅ防止する。A spacer film formed on the slider surface separates the electrode from the metal medium surface, allowing you to release 1! 'e prevent.
以下第１図に従って本発明の実施例について説明する。 Embodiments of the present invention will be described below with reference to FIG.
ＮｉＺｎフェライト材製のスライダ１にはステンレス製
電極２が埋め込まれディスク上に空気力によって浮上し
ている。ディスクはアルミ製基板３上にＮ ｉ ””
Ｐ ｓの下地メッキ４が施されその上にＣｏ−Ｎｉの磁
性膜が形成されている。基板はスピンドル軸を通してア
ースに接続されている。電極２にはキャリア信号として
Ｉ ＭＨｚ ５ Ｖの電圧が加えられている。スライダ
の表面には厚さ０．３〜０．５μｍのアルミナのスペー
サ膜６が蒸着されている。A slider 1 made of NiZn ferrite material is embedded with an electrode 2 made of stainless steel and floated above the disk by air force. The disk is placed on an aluminum substrate 3.
A Ps base plating 4 is applied, and a Co--Ni magnetic film is formed thereon. The board is connected to ground through the spindle shaft. A voltage of I MHz 5 V is applied to the electrode 2 as a carrier signal. An alumina spacer film 6 having a thickness of 0.3 to 0.5 μm is deposited on the surface of the slider.
本発明によればスライダとディスクが接触した状態でも
電極と導電体のメタル磁性膜の間には０、３μｍのすき
間が有るため放電が生じなくなシメタル媒体においても
浮上量変動測定を良好に行なうことができる。またこの
スペーサ膜は、摩耗し易い金属の電極の保護膜の役目も
果している。According to the present invention, even when the slider and the disk are in contact, there is a gap of 0.3 μm between the electrode and the metal magnetic film of the conductor, so no discharge occurs, and flying height fluctuation measurements can be performed satisfactorily even on metal media. be able to. This spacer film also serves as a protective film for the metal electrode, which is prone to wear.
第１図は本発明の一実施の横断面図である。
１・・・スライダ、２・・・電極、３・・・基板、４・
・・下地メッキ、５・・・磁性膜、６・・・スペーサ膜
。FIG. 1 is a cross-sectional view of one implementation of the invention. 1...Slider, 2...Electrode, 3...Substrate, 4...
... Base plating, 5... Magnetic film, 6... Spacer film.
Claims (1)
の間の静電容量変化を検出してヘッドの浮上量変動を測
定するためのスライダであって、そのディスク対向面に
スペーサ膜を形成した事を特徴とする浮上量変動測定用
スライダ。1. A slider for measuring fluctuations in head flying height by embedding electrodes in the slider and detecting changes in capacitance between the electrodes and the disk, with a spacer film formed on the surface facing the disk. A slider for measuring flying height fluctuations.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14004486A JPS62297702A (en) | 1986-06-18 | 1986-06-18 | Slider for measuring variation in floating quantity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14004486A JPS62297702A (en) | 1986-06-18 | 1986-06-18 | Slider for measuring variation in floating quantity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62297702A true JPS62297702A (en) | 1987-12-24 |
Family
ID=15259672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14004486A Pending JPS62297702A (en) | 1986-06-18 | 1986-06-18 | Slider for measuring variation in floating quantity |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62297702A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001235329A (en) * | 2000-02-23 | 2001-08-31 | Tokimec Inc | Gyro device |
-
1986
- 1986-06-18 JP JP14004486A patent/JPS62297702A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001235329A (en) * | 2000-02-23 | 2001-08-31 | Tokimec Inc | Gyro device |
| JP4583538B2 (en) * | 2000-02-23 | 2010-11-17 | 東京計器株式会社 | Gyro device |
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