JPS62285054A - Moisture sensitive element - Google Patents
Moisture sensitive elementInfo
- Publication number
- JPS62285054A JPS62285054A JP12808386A JP12808386A JPS62285054A JP S62285054 A JPS62285054 A JP S62285054A JP 12808386 A JP12808386 A JP 12808386A JP 12808386 A JP12808386 A JP 12808386A JP S62285054 A JPS62285054 A JP S62285054A
- Authority
- JP
- Japan
- Prior art keywords
- sensitive element
- polymer film
- high polymer
- moisture
- organic high
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004094 surface-active agent Substances 0.000 claims abstract description 6
- 229920000620 organic polymer Polymers 0.000 claims description 19
- 238000011282 treatment Methods 0.000 claims description 16
- 239000012528 membrane Substances 0.000 claims description 9
- 229910000510 noble metal Inorganic materials 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 9
- 229910052737 gold Inorganic materials 0.000 abstract description 4
- 230000007774 longterm Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 238000005260 corrosion Methods 0.000 abstract description 2
- 230000007797 corrosion Effects 0.000 abstract description 2
- 230000003647 oxidation Effects 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- 229910052760 oxygen Inorganic materials 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 239000010970 precious metal Substances 0.000 abstract description 2
- 229910052709 silver Inorganic materials 0.000 abstract description 2
- HIFJUMGIHIZEPX-UHFFFAOYSA-N sulfuric acid;sulfur trioxide Chemical compound O=S(=O)=O.OS(O)(=O)=O HIFJUMGIHIZEPX-UHFFFAOYSA-N 0.000 abstract description 2
- 229920006254 polymer film Polymers 0.000 abstract 5
- 229910052789 astatine Inorganic materials 0.000 abstract 1
- 239000012190 activator Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002861 polymer material Substances 0.000 description 3
- 125000000129 anionic group Chemical group 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920005597 polymer membrane Polymers 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000010306 acid treatment Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
〔発明の目的〕
（産業上の利用分野）
本発明は感湿素子に係わり、更に詳しくは感湿素体とし
て有機高分子膜を用いた感湿素子に関する。[Detailed Description of the Invention] 3. Detailed Description of the Invention [Object of the Invention] (Field of Industrial Application) The present invention relates to a moisture-sensitive element, and more specifically to a moisture-sensitive element using an organic polymer film as a moisture-sensitive element. It relates to a humidity sensing element.
（従来の技術）
大気中の湿度を検出する方法は従来から種々提案され、
実用化されている。近年、相対湿度を直接電気的に検出
できる感湿素子が注目を集めている。この感湿素子では
湿度検出で得られる信号をか直接制御用信号として利用
できるため、検出と制御の一体化・組み合わせが可能で
ある。このような感湿素子では感湿素子にセラミックス
材料あるいは有機高分子材料が使われている。セラミッ
クスを材料とした感湿素子では、製造プロセスが煩雑で
、価格も高価となる点から、最近は有機高分子材料を用
いた感湿素子の開発が盛んになってきている。(Prior art) Various methods for detecting atmospheric humidity have been proposed in the past.
It has been put into practical use. In recent years, moisture sensing elements that can directly electrically detect relative humidity have been attracting attention. With this humidity sensing element, the signal obtained by humidity detection can be used directly as a control signal, so detection and control can be integrated and combined. In such a humidity sensing element, a ceramic material or an organic polymer material is used for the humidity sensing element. Moisture sensing elements made of ceramics require a complicated manufacturing process and are expensive, so recently there has been an increase in the development of moisture sensing elements using organic polymer materials.
有機高分子材料を用いた感湿素子として基板を使用せず
にあらかじめ製膜された有機高分子の両主面に電極を取
り付けた感湿素子が提案されている。しかしながらこの
ような感湿素子では、湿度に対する感度が極めて乏しく
検出精度に問題があった。A moisture sensing element using an organic polymer material has been proposed in which electrodes are attached to both main surfaces of an organic polymer film formed in advance without using a substrate. However, such a humidity sensing element has extremely poor sensitivity to humidity and has a problem in detection accuracy.
（奪明が解決しようとする問題点）
以上のように有機高分子膜を感湿素体として用いた従来
の感湿素子は、検出精度が低いという問題点があった。(Problems that Rimei attempts to solve) As described above, conventional moisture sensing elements using organic polymer films as moisture sensing elements have had the problem of low detection accuracy.
本発明はこのような問題点に鑑みなされたものであり、
検出精度が高く、長期信頼性に優れた感湿素子を提供す
ることを目的とする。The present invention was made in view of these problems,
The purpose is to provide a moisture sensing element with high detection accuracy and excellent long-term reliability.
（問題点を解決するための手段と作用）本発明は親水性
処理を施こした多孔性の有機高分子膜と、有機高分子膜
の両本部に設けられた電極層を具備したことを特徴とす
る感湿素子である。(Means and effects for solving the problems) The present invention is characterized by comprising a porous organic polymer membrane subjected to hydrophilic treatment and an electrode layer provided on both sides of the organic polymer membrane. This is a moisture-sensitive element.
本発明で用いられる親水性処理を施こした多孔性の有機
高分子膜としては、多孔性を有する有機高分子膜に一般
に知られている親水性処理を施こしたものであればどの
ようなものであってもよく、格別に限定されるものでは
ない。多孔性を有する有機高分子膜としては、有機高分
子膜で多孔性を有しているものであれば何でもよく、格
別に限定されるものではない。このような有機高分子膜
はその材質に応じて適当な親水性処理を施こす。親水性
処理としては例えば、界面活性剤処理、酸素中での放電
による酸化、発煙硫酸処理等が挙げられる。The porous organic polymer membrane that has been subjected to hydrophilic treatment used in the present invention may be any porous organic polymer membrane that has been subjected to a generally known hydrophilic treatment. It is not particularly limited. The organic polymer membrane having porosity may be any organic polymer membrane having porosity, and is not particularly limited. Such an organic polymer film is subjected to an appropriate hydrophilic treatment depending on its material. Examples of the hydrophilic treatment include surfactant treatment, oxidation by electric discharge in oxygen, and fuming sulfuric acid treatment.
本発明における電極層としては、一般に電極用に用いら
れる材料を層状に形成したものであればよく、格別に限
定されるものではない。貴金属、すなわちＡｕ、Ａｇ、
Ａｔ族（Ｒｕ、Ｒｈ、Ｐｄ、Ｏｓ、Ｉｒ、Ｐｔ）を用い
た場合、耐腐性に優れた感湿素子を作製することができ
る。The electrode layer in the present invention is not particularly limited as long as it is formed into a layer of a material generally used for electrodes. Precious metals, namely Au, Ag,
When At group members (Ru, Rh, Pd, Os, Ir, Pt) are used, a moisture sensitive element with excellent corrosion resistance can be manufactured.
本発明の感湿素子は、多孔性の有機高分子膜に親水性処
理を施こし、両本部に電極層をスパッタ法で形成するこ
とにより作製することができる。The moisture sensitive element of the present invention can be produced by subjecting a porous organic polymer film to hydrophilic treatment and forming electrode layers on both parts by sputtering.
（実施例）
多孔性を有する有機高分子膜としてポリオレフィン系の
高分子膜ハイボアー２０００ （商品名、旭化成製）、
膜厚１００μｍのものを用いた。親水性処理としては、
界面活性剤処理を行なった。(Example) As a porous organic polymer membrane, a polyolefin polymer membrane HiBore 2000 (trade name, manufactured by Asahi Kasei),
A film having a thickness of 100 μm was used. As hydrophilic treatment,
Surfactant treatment was performed.
陰イオン活性剤ＤＢＳＮａ （ドデシルベンセンスルフ
オン酸ナトリウム）を水に溶かし、重量％濃度０．０１
％、０．１％、１．０％の溶液を調製した。これらの溶
液にハイボアー２０００を１分間浸漬した。次に４０℃
の恒温槽で５分間乾燥し、その後スパッタ法で両本部に
金電極層を形成した。金電極層の面積は１ｄとした。The anionic activator DBSNa (sodium dodecylbenzene sulfonate) was dissolved in water to give a weight percent concentration of 0.01.
%, 0.1%, and 1.0% solutions were prepared. Hibore 2000 was immersed in these solutions for 1 minute. Next 40℃
After drying in a constant temperature bath for 5 minutes, a gold electrode layer was formed on both parts by sputtering. The area of the gold electrode layer was 1 d.
このようにして得られた感湿素子の２５℃における湿度
特性を測定した。分流法で一定の湿度に調整された環境
下に素子を放置し、約１５分経過後、ＬＣＲメータで容
量を測定した。又、比較例として親水性処理をしていな
い多孔性高分子膜を用いた感湿素子についても湿度特性
を測定した。実施例および比較例の湿度特性曲線を第１
図に示す。The humidity characteristics of the humidity sensitive element thus obtained at 25°C were measured. The device was left in an environment where the humidity was adjusted to a constant level using a shunting method, and after about 15 minutes, the capacity was measured using an LCR meter. Furthermore, as a comparative example, the humidity characteristics were also measured for a humidity sensitive element using a porous polymer membrane that had not been subjected to hydrophilic treatment. The humidity characteristic curves of Examples and Comparative Examples are
As shown in the figure.
実施例ａ、ｂ、ｃは各々前述のＤＢＳＮａ水溶液の濃度
が０．０１％、０．１％、１．０％の場合である。Examples a, b, and c are cases in which the concentrations of the above-mentioned DBSNa aqueous solution are 0.01%, 0.1%, and 1.0%, respectively.
第１図より明らかなように、本発明の実施例は湿度に対
し優れた感度を示した。また、界面活性剤の濃度が高い
ほど検出感度の高い感湿素子が得られる。このような効
果は界面活性剤処理に限らず、各種の親水性処理でも処
理が進んだものほど検出感度が向上する。As is clear from FIG. 1, the examples of the present invention exhibited excellent sensitivity to humidity. Moreover, the higher the concentration of the surfactant, the higher the detection sensitivity of the moisture-sensitive element can be obtained. Such an effect is not limited to surfactant treatment, but also in various hydrophilic treatments, the detection sensitivity improves as the treatment progresses.
本実施例では陰イオン活性剤を用いたが、陽イオン活性
剤、非イオン活性剤、両性活性剤であっでもよい。Although an anionic activator was used in this example, a cationic activator, a nonionic activator, or an amphoteric activator may be used.
さらに使用する有機高分子膜が多孔性であるこ罎
とにより、浸漬処理を容易に行えるばかりでなく、付着
することで、感湿素体と電極の付着強度も向上させてい
る。Furthermore, the porous nature of the organic polymer membrane used not only facilitates the immersion process, but also improves the adhesion strength between the moisture-sensitive element and the electrode.
本実施例の感湿素子は、製膜された有機高分子膜を浸漬
するだけで、すぐれた感度が得られるため、容易に製造
できる特長もまた備えている。The moisture-sensitive element of this example also has the advantage of being easy to manufacture, since excellent sensitivity can be obtained simply by immersing the formed organic polymer film.
本発明によれば検出精度が高く、長期信頼性に優れた感
湿素子を提供することができる。According to the present invention, it is possible to provide a moisture sensing element with high detection accuracy and excellent long-term reliability.
第１図は本発明の実施例及び比較例の湿度特性を示す曲
線図である。
代理人 弁理士 則 近 憲 佑
同 竹 花 喜久男
第 １ 図FIG. 1 is a curve diagram showing humidity characteristics of an example of the present invention and a comparative example. Agent Patent Attorney Noriyuki Chika Yudo Kikuo Takehana Figure 1
Claims (3)
有機高分子膜の両主面に設けられた電極層を具備したこ
とを特徴とする感湿素子(1) A porous organic polymer membrane subjected to hydrophilic treatment,
A moisture-sensitive element characterized by comprising electrode layers provided on both main surfaces of an organic polymer film.
ことを特徴とする特許請求の範囲第１項記載の感湿素子(2) The moisture-sensitive element according to claim 1, wherein a surfactant treatment is performed as the hydrophilic treatment.
特徴とする特許請求の範囲第１項又は第２項記載の感湿
素子(3) The moisture-sensitive element according to claim 1 or 2, characterized in that an electrode layer made of a noble metal is provided as the electrode layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12808386A JPS62285054A (en) | 1986-06-04 | 1986-06-04 | Moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12808386A JPS62285054A (en) | 1986-06-04 | 1986-06-04 | Moisture sensitive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62285054A true JPS62285054A (en) | 1987-12-10 |
Family
ID=14975988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12808386A Pending JPS62285054A (en) | 1986-06-04 | 1986-06-04 | Moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62285054A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011528113A (en) * | 2008-07-16 | 2011-11-10 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | Capacitive humidity detector using nanoporous hydrophilic dielectric |
-
1986
- 1986-06-04 JP JP12808386A patent/JPS62285054A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011528113A (en) * | 2008-07-16 | 2011-11-10 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | Capacitive humidity detector using nanoporous hydrophilic dielectric |
| US8739622B2 (en) | 2008-07-16 | 2014-06-03 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Capacitive humidity detector with nanoporous hydrophilic dielectric |
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