JPS62228102A - Remote displacement detector - Google Patents

Abstract

PURPOSE:To detect the displacement of a matter at a remote area without providing an energy source such as a light source to an article to be measured, by mounting a reflecting body on the article to be measured and detecting the position of reflected beam. CONSTITUTION:The laser beam emitted from the beam source 5 of a measuring device 3 is reflected by a half mirror 7 while the reflected beam is incident to the corner cube 1 mounted on an article to be measured to be reflected to the direction parallel to the incident beam. Then, the reflected beam transmits through the half mirror 7 to be formed into an image on a two-dimensional beam position sensor 11 by a lens 9. The image forming position on the sensor 11 is changed by the movement of the corner cube 1 and the quantity of displacement thereof comes to two times the moving quantity of the corner cube 1 to the direction crossing beam at a right angle. However, the displacement of the image forming position is regardless of the movement or inclination of the corner cube 1 in the optical axis direction and, therefore, the displacement of the article to be measured in the direction crossing beam at a right angle can be detected from the displacement quantity of the reflected beam on the sensor 11.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a remote displacement detection device that uses light to detect displacement, vibration, etc. of an object located at a remote location.

(Prior art) As a conventional remote displacement detection device of this type, for example,
There is something like the one shown in the figure.

That is, a light source 103 is provided on the object to be measured 101, and the light irradiated from the light source 103 is focused on the optical position sensor 107 through the lens 105, so that the object to be measured 101 in the parallel movement direction of the light irradiation direction is Measure the two-dimensional position displacement of.

By the way, in such a conventional remote displacement detection device, the light source 103 is provided on the side of the object to be measured 101,
When the energy source of the light source 103 is exhausted, there is a problem in that the displacement of the object 101 cannot be measured because the object 101 is located at a remote location and it is difficult to replenish energy.

(Problems to be Solved by the Invention) When the light source 103 is provided on the side of the object to be measured 101 as described above, when the energy source of the light source 103 is exhausted, the displacement of the object at a remote location cannot be detected.

This invention was made by focusing on the above-mentioned problems of conventional remote displacement detection devices, and it is possible to detect the displacement of an object at a remote location with a simple configuration without providing an energy source such as a light source on the object to be measured. The purpose is to provide a remote displacement detection device that can perform

[Structure of the Invention] (Means for Solving the Problems) The remote displacement detection device of the present invention includes a light source that irradiates a beam-shaped light, and a light source that is provided on an object to be measured and receives the beam-shaped light in a parallel manner. It is composed of a reflector that reflects light and a light position detection means that detects the position of the reflected light from the reflector in the parallel movement direction.

(Function) In the remote displacement detection device of the present invention, when a beam-shaped light is irradiated from the light source onto the reflector of the object to be measured, parallel reflected light such as the irradiated light is reflected from the reflector, and the optical position detection means is activated. The position of the reflected light from the reflector in the parallel movement direction is detected.

(Example) Examples of the present invention will be described in detail below based on the drawings.

FIG. 1 is a schematic diagram of a remote displacement sensing device according to a first embodiment of the present invention. In FIG. 1, a corner cube 1 as a contrarian is attached to an object to be measured (not shown), and moves along with the movement of the object to be measured. The corner cube 1 reflects the light incident on the reflecting mirror in parallel with the incident light.

The measuring device 3 also includes a light source 5 that emits, for example, a laser beam. A half mirror 7, a lens 9, and a two-dimensional optical position sensor 11 as optical position detection means are provided. The half mirror 7 is inclined by 45 degrees with respect to the direction in which the laser beam is irradiated by the light source 5, and the optical axis of the lens 9 is orthogonal to the direction in which the laser beam is irradiated.

The two-dimensional optical position sensor 11 has a plane in a direction perpendicular to the reflected light, that is, a parallel movement direction of the reflected light.

Next, the action will be explained.

A laser beam emitted from a light source 5 is reflected by a half mirror 7 and enters a corner cube 1 attached to an object to be measured. The light incident on the corner cube 1 is reflected in a direction parallel to this incident light and heads toward the measuring device 3. This reflected light passes through the half mirror 7 of the measuring instrument 3, and is focused on the two-dimensional optical position sensor 11 by the lens 9. The position of the reflected light focused on the two-dimensional optical position sensor 11 is determined by the corner cube. It changes depending on the position of 1. The displacement (2) of the reflected light on the two-dimensional optical position sensor 11 is twice the amount of displacement of the corner cube 1 in the direction perpendicular to the light (parallel movement direction).

That is, as shown in Fig. 2, the corner cube 1 is moved by d from the position (a) where the light irradiated from the light source 5 and reflected by the half mirror 7 and the reflected light are on the same optical axis (b). ), the amount of displacement of the reflected light is 2d. Furthermore, at the position (C) where the corner cube 1 has moved by 2d from the position (a), the displacement position of the reflected light is 4d. Furthermore, the amount of displacement of the reflected light on the two-dimensional optical position sensor 11 is independent of the movement of the corner cube 1 in the optical axis direction, the inclination of the corner cube 1, and the like. That is, the third
As shown in the figure, even if the corner cube 1 moves in the optical axis direction from the position (a) to the position (b), the position of the reflected light on the two-dimensional optical position sensor 11 does not change. Also, as shown in FIG. 4, the corner cue 11 changes from the (a) state to (
b) The position of the reflected light on the two-dimensional front '23t beam 11 does not change even if it is tilted in the state. Therefore, by halving the displacement 1 of the reflected light on the two-dimensional optical position sensor 11, the amount of displacement in the direction perpendicular to the light of the object to be measured can be detected. In this way, the tilt of the object to be measured and the displacement in the optical axis direction of the reflected light are not affected, and the displacement in the parallel direction of the object to be measured can be adjusted using a simple wooden structure without providing a light source on the object to be measured. Amounts can be measured.

Next, another embodiment will be described with the same reference numerals assigned to the same components as those in the first embodiment.

FIG. 5 shows a second embodiment. In this example,
A measuring device 3 is provided on the movable pressure body 13. Movable pressure body 1
3 is housed in a board 15 whose upper part is spaced. A ball 17 is rotatably provided at the bottom of the movable pressure body 13, and the movable pressure body 13 is movable within the substrate 15.

Motors 21 and 23 are provided on the side wall 19 of the substrate 15.

The motor 21 and the movable pressure body 13 are connected by a ball screw (not shown), and the motor 23 and the movable pressure body 13 are connected by a ball screw 25, respectively. The movable pressure body 13 is moved by the motor 21 in the X direction (direction perpendicular to the abrasive surface) by driving the motor 21.
3 to move in the y direction (horizontal direction in the figure).

The two-dimensional optical position sensor 13 is connected to a two-dimensional optical position detection circuit 27. The two-dimensional optical position detection circuit 27 is branched and connected to a control signal calculator 29.31. The control signal calculator 29 sends signals to the motor 21 via the power amplifier 33,
The control signal calculators 31 are connected to the motors 23 via power amplifiers 35, respectively. As described in the first embodiment, the signal detected by the two-dimensional optical position sensor 13 is converted into a displacement signal in the x and y directions by the two-dimensional optical position detection circuit 27. The displacement signal in the X direction is calculated by the control signal calculator 29 so as to enable feedback control using, for example, a servo system. This calculated control signal is amplified by the power amplifier 33 and drives the motor 21.

On the other hand, similarly to the displacement signal in the X direction, the displacement signal in the y direction is calculated by the control signal calculator 31 and sent to the power amplifier 35.
is amplified and drives the motor 23.

In such a configuration, the movable pressure body 13 is controlled so that the reflected light on the two-dimensional optical position sensor 11 forms an image at a predetermined position (calculated by the Fi type actuator 29.31). Moves by following the displacement in the orthogonal direction.

FIG. 6 shows a third embodiment. In this example,
The X-direction displacement signal from the two-dimensional optical position detection circuit 27 is processed by a low-pass filter 37, and the y-direction displacement signal is processed by a control signal calculator 29.31 via a low-pass filter 39. ing.

The low-pass filters 37 and 39 pass only the low frequency components of the signals in the x and y directions and block the high frequency components. Therefore, the movable pressure body 1
3 moves by following only the low frequency component of the displacement in the direction perpendicular to the light of the object to be measured. Furthermore, the displacement signal in the X direction from the two-dimensional optical position detection circuit 27 is supplied to an amplifier 41, and the displacement signal in the y direction is supplied to a displacement signal display device 45 via an amplifier 43. The displacement signal display device 45 displays the displacement of the object to be measured in the form of a waveform, for example, on an oscilloscope.
Or record this displacement.

According to the above configuration, the displacement (vibration) of the high frequency component can be measured by the displacement signal display device 45 while the movable pressure body 13 follows the displacement of the low frequency component of the object to be measured. Therefore, even if the object to be measured moves significantly at low frequencies and leaves the observation range of the two-dimensional optical position sensor 11, it is possible to observe the displacement of the high frequency component while making the movable pressure body 13 follow this movement. can. Therefore, for example, the dawn of flight or '#
It is possible to observe the vibrations of flying objects such as stars while following their movements. Even if the flying object does not have an energy source, if the speaker cone is moved using an energy source such as the voice of the crew member and this vibration is transmitted to the corner cue 77, it can be used even on the ground, etc. Crew voice information can be collected from the ground. In addition, in the same way, it is possible to detect the vibration magnitude (m width) while actually test flying a prototype flying object instead of conducting a wind cylinder experiment.

FIG. 7 shows a fourth embodiment. In this example,
Measuring device 3 is fixed. The low frequency components of the displacement in the x and y directions of the two-dimensional optical position detection circuit 27 are supplied to the anti-tA mirror drive device 47. Opposite 1:) The J8M drive device 47 is composed of a magnetic bearing and a drive head, and a reflecting mirror 51 is attached to the shaft 49. Reflector 51
is directed toward the half mirror 7, and the laser beam irradiated from the light source 5 is reflected by the half mirror 7, further reflected by the reflecting mirror 51, and directed toward the corner cube 1 provided on the object to be measured. The reflected light from the corner cube 1 is reflected again by the reflecting mirror 51, and then transmitted through the half mirror 7 and transmitted through the lens 9 to a two-dimensional light position sensor! Form an image on Su11.

In the above configuration, in addition to the effect of the third embodiment that the displacement of the high frequency component can be measured while making the reflecting mirror 51 follow the displacement of the low frequency component of the object to be measured, the measuring device 3
Since the entire system is not tracked, inertia is reduced, and quick and accurate control can be achieved. Furthermore, since a magnetic bearing with non-contact support and drive functions is used, it is possible to position with high precision in multiple degrees of freedom.

Note that the motor 21.2 of the second embodiment and the third embodiment
3 and the ball screw 25 may be magnetic bearings, in which case noise during movement can be suppressed.

[Effect of the Invention 1] As explained above, according to the present invention, a reflector that reflects the light irradiated from the light source onto the object to be measured in parallel is provided, and the parallel movement of the reflected light from the reflector to the measuring instrument side is achieved. Since the optical position detection means for detecting the position in the direction is provided, the displacement of the object at a remote position can be detected with a simple configuration without providing an energy source such as a light source on the side of the object to be measured.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of a remote displacement detection device according to a first embodiment of the present invention, FIGS. 2 to 4 are diagrams showing the reflection state of a corner cube serving as a reflector, and FIG. 5 is a diagram showing a second embodiment of the remote displacement detection device. FIG. 6 is a schematic diagram of the third embodiment, FIG. 7 is a schematic diagram of the fourth embodiment, and FIG. 8 is a schematic diagram of a conventional remote displacement detection device. 1... Corner cube (reflector) 5... Light source 11... Two-dimensional optical position sensor (light position detection means) 11
2 Figure (a) (b) Figure 3 (Q) (b) Figure 4 Figure 5 6110 Figure 7 Figure 8

Claims (1)

[Claims] A light source that irradiates a beam-shaped light, a reflector provided on an object to be measured that receives the beam-shaped light and reflects it in parallel, and a parallel movement direction of the reflected light from the reflector. 1. A remote displacement detection device comprising: an optical position detection means for detecting a position.