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JPS62189749A - High reliability type optical module - Google Patents

High reliability type optical module

Info

Publication number
JPS62189749A
JPS62189749A JP61030967A JP3096786A JPS62189749A JP S62189749 A JPS62189749 A JP S62189749A JP 61030967 A JP61030967 A JP 61030967A JP 3096786 A JP3096786 A JP 3096786A JP S62189749 A JPS62189749 A JP S62189749A
Authority
JP
Japan
Prior art keywords
light emitting
semiconductor light
emitting element
control circuit
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61030967A
Other languages
Japanese (ja)
Inventor
Katsuyuki Imoto
克之 井本
Minoru Maeda
稔 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61030967A priority Critical patent/JPS62189749A/en
Publication of JPS62189749A publication Critical patent/JPS62189749A/en
Pending legal-status Critical Current

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  • Semiconductor Lasers (AREA)
  • Optical Communication System (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

PURPOSE:To reduce the size and the cost of a high reliability type optical module by performing the deterioration detection of a semiconductor light emitting element and automatically driving to switch to a preliminary semiconductor light emitting element, and driving the element by one drive circuit. CONSTITUTION:When a semiconductor light emitting element 1-1 is deteriorated so that an input signal to a control circuit 7 becomes smaller than a value Vs, a signal for driving cooperation switches 8-1, 8-2 is generated at the output of the control circuit 7 to switch to connect a terminal a from 9-1 to 9-2 and a terminal B from 10-1 to 10-2, and second semiconductor light emitting element 2-1 is driven by the same drive circuit 6 when the emitting light intensity is reduced due to the deterioration of the initial element 1-1. The light emitted from one side of the element 1-2 is propagated in a waveguide 4-2 and 4-4 and fed in a direction of an arrow 5. The light emitted from the other side of the element 1-2 is photodetected by a photodetector 2-2, converted to an electric signal, and input to the control circuit 7.

Description

【発明の詳細な説明】 (産業上の利用分野〕 本発明は、半導体発光素子の劣化や故障を補うように構
成した光モジュールに関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an optical module configured to compensate for deterioration or failure of a semiconductor light emitting element.

〔従来の技術〕[Conventional technology]

光フアイバ通信の発展に伴い、情報伝送の大容歇化、高
速化、長距離化の研究開発が活発に行われるようになっ
てきた。この場合、無中継伝送距離には限界があるので
、必ず光中継器が用いられる。特に海底光ケーブル伝送
のように伝送距離が数百−以上におよぶ場合には、光中
継器が数十個以上用いられる。上記光中継器は一度布設
すれば。
With the development of optical fiber communications, research and development into increasing the capacity, speed, and distance of information transmission has become active. In this case, since there is a limit to the non-repeater transmission distance, an optical repeater is always used. In particular, when the transmission distance is several hundred or more, such as submarine optical cable transmission, several dozen or more optical repeaters are used. The above optical repeater can be installed once.

10年以上にわたって信頼性よく動作しなければならな
い。ところが、光源として用いられている半導体レーザ
は寿命が短い。システムの信頼性を確保するために、従
来第3図に示すように、半導体レーザ1−1.1−2を
2個使用して、1個を予備として用いる方法が検討され
ている(伊藤他’ r F S−400M方式海底光中
継器」研究実用化報告第34巻第8号、1985年、p
H63〜pH72) 、第3図の動作は、半導体レーザ
1−1を駆動回路6−1で駆動し、上記半導体レーザ1
−1の出射光を光合波部3を介して矢印5の方向へ伝搬
させるようにしたものである。−そして半導体レーザ1
−1の寿命あるいは劣化にともない、半導体レーザ1−
2を駆動回路6−2で駆動し、光合波部3を介して矢印
5の°方向に伝搬させるものである。
Must operate reliably for more than 10 years. However, the semiconductor laser used as a light source has a short lifespan. In order to ensure system reliability, a method of using two semiconductor lasers 1-1, 1-2 and using one as a spare, as shown in Figure 3, has been considered (Ito et al. ' r F S-400M type submarine optical repeater'' Research and Practical Application Report Vol. 34 No. 8, 1985, p.
In the operation shown in FIG. 3, the semiconductor laser 1-1 is driven by the drive circuit 6-1, and the semiconductor laser 1
-1 output light is propagated in the direction of arrow 5 via optical multiplexer 3. - and semiconductor laser 1
-1 due to its lifespan or deterioration, semiconductor laser 1-
2 is driven by a drive circuit 6-2, and propagated in the direction of arrow 5 via the optical multiplexer 3.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記のような構成では、駆動回路がそれぞれの半導体レ
ーザに用いられているので経済的でなく。
The above configuration is not economical because a drive circuit is used for each semiconductor laser.

また全体のサイズも大形化する。また、システムを10
年以上にわたってほぼ無人で安定に動作させるためには
、半導体レーザの数量もさらに多くしなければならず、
これに伴い、上記構成では駆動回路の数量も同様に増加
するため、ますます大形化してしまうという問題点があ
る。
The overall size also increases. Also, the system is 10
In order to operate stably, almost unattended, for more than a year, the number of semiconductor lasers must be increased.
Along with this, in the above configuration, the number of drive circuits also increases, so there is a problem that the size becomes even larger.

〔問題点を解決するための手段〕[Means for solving problems]

本発明では、半導体発光素子の劣化検知と予備の半導体
発光素子への切換駆動を自動的に行い、しかも1個の駆
動回路を用いてそれぞれの半導体発光素子を駆動するよ
うにした光モジュールを得ようとするものである。
The present invention provides an optical module that automatically detects the deterioration of a semiconductor light emitting element and automatically switches to a spare semiconductor light emitting element, and drives each semiconductor light emitting element using a single drive circuit. This is what we are trying to do.

〔作用〕[Effect]

半導体発光素子と該半導体発光素子の出射光をモニタす
る受光素子とからなる組合せのデバイスを複数組と、該
複数組の半導体発光素子の出射光を合波する光合波部を
用いた構成を設け、1個の駆動回路の出力を、連動スイ
ッチの1つのスイッチを介してそれぞれの半導体発光素
子に供給して駆動する系と、それぞれの受光素子の出力
を上記連動スイッチのもう1つのスイッチを介して、上
記連動スイッチの制御回路に入力させる系とを設けるこ
とによって、上記制御回路の入力端に接続された最初の
受光素子出力信号が所望値以下になった場合に、上記制
御回路の出力に電圧が発生するようにし、上記電圧によ
って連動スイッチが作動し、つぎの受光素子出力端子、
半導体発光素子駆動用入力端子へそれぞれ切換えるよう
にした。
A configuration is provided that uses a plurality of combination devices each consisting of a semiconductor light emitting element and a light receiving element that monitors the light emitted from the semiconductor light emitting element, and an optical multiplexer that combines the light emitted from the plurality of semiconductor light emitting elements. , a system that supplies the output of one driving circuit to each semiconductor light emitting element through one of the interlocking switches to drive it, and a system that supplies the output of each light receiving element to the semiconductor light emitting element through one of the interlocking switches. By providing a system for inputting the input to the control circuit of the interlocking switch, when the output signal of the first light-receiving element connected to the input terminal of the control circuit becomes less than a desired value, the output of the control circuit is A voltage is generated, and the interlocking switch is activated by the above voltage, and the next photodetector output terminal,
The input terminals are respectively switched to input terminals for driving semiconductor light emitting elements.

上記構成により、例えば半導体発光素子、受光素子から
なる組合せのデバイスが多ければ多いほど、長期にわた
り信頼性を高めることができる。
With the above configuration, the reliability can be improved over a long period of time as the number of combined devices including, for example, a semiconductor light emitting element and a light receiving element increases.

〔実施例〕〔Example〕

つぎに本発明の実施例を図面とともに説明する。 Next, embodiments of the present invention will be described with reference to the drawings.

第1図は本発明による高信頼度型光モジュールの一実施
例を示す構成図、第2図は上記実施例に用いる光デバイ
スの構成を示す図である。第1図において、1−1〜1
−3は半導体発光素子(例えば半導体レーザ)、2−1
〜2−3は上記それぞれの半導体発光素子の出射光をモ
ニタするための受光素子、4−1〜4−3は上記半導体
発光素子の出射光をそれぞれ伝搬するための導波路、4
−4はそれぞれの導波路4−1〜4−3内を伝搬してき
た光信号を合波させて矢印5の方向に伝搬させる導波路
で、上記導波路4−1〜4−3と導波路4−4とで光合
波部3を形成している。6は上記半導体発光素子を駆動
するための駆動回路、7は上記受光素子2−1〜2−3
の出力信号の値によって連動スイッチ8−1.8−2を
切換え制御するための制御回路、9−1〜9−3は上記
受光素子2−1〜2−3のそれぞれの出力信号端子。
FIG. 1 is a block diagram showing an embodiment of a highly reliable optical module according to the present invention, and FIG. 2 is a diagram showing the structure of an optical device used in the above embodiment. In Figure 1, 1-1 to 1
-3 is a semiconductor light emitting device (e.g. semiconductor laser), 2-1
- 2-3 are light receiving elements for monitoring the emitted light of each of the semiconductor light emitting devices; 4-1 to 4-3 are waveguides for respectively propagating the emitted light of the semiconductor light emitting devices;
-4 is a waveguide that combines the optical signals propagated in each of the waveguides 4-1 to 4-3 and propagates in the direction of arrow 5, and the waveguides 4-1 to 4-3 and the waveguide 4-4 forms the optical multiplexing section 3. 6 is a drive circuit for driving the semiconductor light emitting device, and 7 is the light receiving device 2-1 to 2-3.
A control circuit for switching and controlling the interlocking switches 8-1 and 8-2 according to the value of the output signal, and 9-1 to 9-3 are output signal terminals of the light receiving elements 2-1 to 2-3, respectively.

10−1〜10−3は上記半導体発光素子1−1〜1−
3を駆動するための入力信号端子である。上記連動スイ
ッチ8−1.8−2の端子A、Bは、最初、Aは9−1
に、Bは10−1の端子に接続されている。そして制御
回路7の出力信号によりAが9−1から9−2へ、Bが
1O−1から10−2へ切換えられる。最後にはAが9
−2から9−3へ、Bが1O−2から10−3へ切換え
られる。光モジュールの動作を第1図により説明する。
10-1 to 10-3 are the semiconductor light emitting devices 1-1 to 1-
This is an input signal terminal for driving 3. Terminals A and B of the interlocking switch 8-1, 8-2 are initially connected, and A is 9-1.
, B is connected to the terminal 10-1. Then, according to the output signal of the control circuit 7, A is switched from 9-1 to 9-2, and B is switched from 1O-1 to 10-2. A is 9 at the end
-2 to 9-3, B is switched from 1O-2 to 10-3. The operation of the optical module will be explained with reference to FIG.

上記のようにAは9−1に、Bはlo−1にそれぞれ接
続され、半導体発光素子1−1が駆ωノ回路6によって
* fJ)+される。そして半導体発光素子1−1(本
実施例では1−1〜1−3は半導体レーザであるとする
)の一方の側からの出射光は導波路4−1および4−4
内を伝搬して、矢印5の方向に送られる。半導体発光素
子L−1の他方の側からの出射光は受光素子2−1で受
光され、電気信号に変換されて制御回路7に入力する。
As described above, A is connected to 9-1 and B is connected to lo-1, respectively, and the semiconductor light emitting element 1-1 is driven *fJ)+ by the ω driving circuit 6. The light emitted from one side of the semiconductor light emitting device 1-1 (in this example, 1-1 to 1-3 are semiconductor lasers) is transmitted through the waveguides 4-1 and 4-4.
It propagates inside and is sent in the direction of arrow 5. The light emitted from the other side of the semiconductor light emitting element L-1 is received by the light receiving element 2-1, converted into an electrical signal, and input to the control circuit 7.

ここで制御回路7は、入力信号がある値Vs以上の場合
には出力信号を生じることなく、連動スイッチ8−1.
8−2はそのままの状態を保つ、上記のような動作の制
御回路は、通常よく知られた電気回路で容易に構成する
ことができる。上記受光索子2−1の出力信号が減少し
たとき、すなわち半導体発光素子1−1が劣化してきて
出射光が減少し、制御回路7への入力信号がVsよりも
小さくなると、制御回路7の出力に連動スイッチ8−1
.8−2を駆動させる信号が発生し、端子Aは9−1か
ら9−2へ、端子Bは10−1から10−2へと切換え
接続され、最初の半導体発光素子1−1の劣化による出
射光強度の減少に伴って、2番目の半導体発光素子l−
2が同じ駆動回路6によって駆動される。そして、上記
半導体発光素子1−2の一方の側からの出射光は導波路
4−2および4−4内を伝搬して矢印5の方向に送られ
る。半導体発光素子1−2の他方の側からの出射光は受
光索子2−2で受光され、電気信号に変換されて制御回
路7に入力される。上記半導体発光素子1−2も長時間
使用すると、徐々に出射光強度が減少してくるが、この
ように寿命によって出射光強度が減少してくると受光素
子2−2の出力信号も減少する。上記と同様に制御回路
7への入力信号がVsよりも小さくなると、制御回路7
の出力に連動スイッチ8−1.8−2を駆動する信号が
発生し、端子Aは9−2から9−3に、端子Bは10−
2から10−3に切換え接続される。そして3番目の半
導体発光素子1−3が同じ駆動回路6によって駆動され
、半導体発光素子1−3の出射光が矢印5の方向に伝搬
される。
Here, the control circuit 7 does not generate an output signal when the input signal is greater than a certain value Vs, and the interlocking switches 8-1.
8-2 maintains the same state. A control circuit for the above-mentioned operation can be easily constructed using a commonly known electric circuit. When the output signal of the light receiving cable 2-1 decreases, that is, when the semiconductor light emitting element 1-1 deteriorates and the output light decreases, and the input signal to the control circuit 7 becomes smaller than Vs, the control circuit 7 Switch 8-1 linked to output
.. A signal to drive 8-2 is generated, terminal A is switched from 9-1 to 9-2, terminal B is switched from 10-1 to 10-2, and due to deterioration of the first semiconductor light emitting element 1-1. As the intensity of the emitted light decreases, the second semiconductor light emitting element l-
2 are driven by the same drive circuit 6. The light emitted from one side of the semiconductor light emitting device 1-2 propagates within the waveguides 4-2 and 4-4 and is sent in the direction of arrow 5. The light emitted from the other side of the semiconductor light emitting element 1-2 is received by the light receiving cable 2-2, converted into an electrical signal, and inputted to the control circuit 7. When the semiconductor light-emitting element 1-2 is used for a long time, the intensity of the emitted light gradually decreases, and as the intensity of the emitted light decreases with the life of the semiconductor light-emitting element 1-2, the output signal of the light-receiving element 2-2 also decreases. . Similarly to the above, when the input signal to the control circuit 7 becomes smaller than Vs, the control circuit 7
A signal to drive interlocking switch 8-1, 8-2 is generated at the output of , terminal A is switched from 9-2 to 9-3, terminal B is switched from 10-
The connection is switched from 2 to 10-3. The third semiconductor light emitting element 1-3 is driven by the same drive circuit 6, and the light emitted from the semiconductor light emitting element 1-3 is propagated in the direction of the arrow 5.

上記のように、半導体発光素子の劣化を自動的に検知し
、予備の半導体発光素子に自動的に切換えて駆動するこ
とができ、しかも半導体発光素子の駆動回路は1個でよ
いため、低コスト、小形、低消費電力にすることができ
る。
As mentioned above, it is possible to automatically detect the deterioration of a semiconductor light emitting element and automatically switch to a spare semiconductor light emitting element to drive it, and since only one semiconductor light emitting element driving circuit is required, the cost is low. , small size, and low power consumption.

なお、本発明では上記のように1個の駆動回路で十分に
機能を果すことが可能であるが、長期間使用に対する上
記駆動回路の寿命を考慮して、本発明は予備の駆動回路
を設けることを制限しない。
In addition, in the present invention, it is possible to sufficiently function with one drive circuit as described above, but in consideration of the life of the drive circuit for long-term use, the present invention provides a spare drive circuit. Don't limit things.

第2図は、本発明の高信頼度型光モジュールの一部分を
示した斜視図である。すなわち、第1図に示した半導体
発光素子1−1〜1−3、受光索子2−1〜2−3、光
合波部3を含んだものである。上記光モジュールは、例
えばInGaAsP/InP系DBR型レーザダイオー
ドアレイおよび受光素子アレイ、光合波部であり、11
はn −InP基板、12はp−InP層、13はn−
InP層で、これらからなる埋込み構造になっており、
14は溝部である。上記のように、最近では半導体レー
ザや受光素子を3〜5個程度アレイ状に形成する製作技
術が開発されているので、上記のようなアレイ状モノリ
シック素子上に、連!1111スイッチ部8−1.8−
2、制御回路7、駆動回路6を集積化して、いわゆる光
電気集積回路(OEIC)を構成すれば、海底光中継器
などのように長期信頼性を要求される個所には、非常に
好適な光モジュールを提供することができる。
FIG. 2 is a perspective view showing a portion of a highly reliable optical module of the present invention. That is, it includes the semiconductor light emitting devices 1-1 to 1-3, the light receiving cables 2-1 to 2-3, and the optical multiplexing section 3 shown in FIG. The optical module is, for example, an InGaAsP/InP DBR type laser diode array, a light receiving element array, and an optical multiplexer, and 11
is an n-InP substrate, 12 is a p-InP layer, and 13 is an n-InP layer.
The InP layer has a buried structure consisting of these.
14 is a groove portion. As mentioned above, recently, manufacturing technology has been developed to form about 3 to 5 semiconductor lasers and photodetectors in an array. 1111 switch section 8-1.8-
2. If the control circuit 7 and drive circuit 6 are integrated to form a so-called opto-electrical integrated circuit (OEIC), it is very suitable for places where long-term reliability is required, such as submarine optical repeaters. Optical modules can be provided.

本発明は上記実施例に制限されない。例えば半導体発光
素子および受光素子の数は、それぞれ2個以上いくらで
もよい。多ければ多い程、長期信頼性が高い光モジュー
ルにすることができる。また、半導体発光素子には半導
体レーザ以外に発光ダイオードでもよく、光合波部3は
グレーティング型の合波素子、方向性結合器型の合波素
子などでもよい。
The invention is not limited to the above embodiments. For example, the number of semiconductor light emitting elements and light receiving elements may be two or more each. The larger the number, the higher the long-term reliability of the optical module. Further, the semiconductor light emitting device may be a light emitting diode other than a semiconductor laser, and the optical multiplexing section 3 may be a grating type multiplexing element, a directional coupler type multiplexing element, or the like.

〔発明の効果〕〔Effect of the invention〕

上記のように本発明による高信頼度型光モジュールは、
半導体発光素子と、該半導体発光素子の出射光をモニタ
する受光素子とを1対のデバイスとする複数対のデバイ
ス、および上記複数対の半導体発光素子の出射光を合波
する光合波部とを有し、1個の駆動回路の出力により、
連動スイッチの1つのスイッチを介してそれぞれの半導
体発光素子をI9AMする系と、それぞれの受光素子の
出力を上記連動スイッチの他の1つのスイッチを介して
、上記連動スイッチの制御回路に入力させる系とを設け
たことにより、上記半導体発光素子の劣化検知と、予備
の半導体発光素子への切換駆動を自動的に行い、かつ1
個の駆動回路で行うことができるので、高信頼性を有し
、小形で低コスト、低消費電力の光モジュールを得るこ
とができる。
As described above, the highly reliable optical module according to the present invention has
A plurality of pairs of devices each including a semiconductor light-emitting element and a light-receiving element that monitors the light emitted from the semiconductor light-emitting element, and an optical multiplexer that combines the light emitted from the plurality of pairs of semiconductor light-emitting elements. With the output of one drive circuit,
A system for I9AMing each semiconductor light emitting element through one switch of the interlocking switch, and a system for inputting the output of each light receiving element to the control circuit of the interlocking switch via another switch of the interlocking switch. By providing the above, deterioration detection of the semiconductor light emitting element and switching drive to a spare semiconductor light emitting element are automatically performed, and 1.
Since this can be performed with a single drive circuit, it is possible to obtain a highly reliable, compact, low cost, and low power consumption optical module.

すなわち、自己信頼性確保型光モジュールであるため、
半導体発光素子を多くすればする程、何十年にもわたっ
て高信頼性を維持することができる。
In other words, since it is a self-reliability optical module,
The more semiconductor light emitting devices are included, the more reliable it can be for decades.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明による高信頼度型光モジュールの一実施
例を示す構成図、第2図は上記実施例に用いる光デバイ
スの構成を示す図、第3図は従来の信頼性確保型光モジ
ュールの構成例を示す図である。 1−1〜1−3・・・半導体発光素子 2−1〜2−3・・・受光素子 3・・・光合波部     6・・・駆動回路7・・・
制御回路
FIG. 1 is a block diagram showing an embodiment of a highly reliable optical module according to the present invention, FIG. 2 is a diagram showing the structure of an optical device used in the above embodiment, and FIG. 3 is a diagram showing a conventional reliable optical module. It is a figure showing an example of composition of a module. 1-1 to 1-3... Semiconductor light emitting elements 2-1 to 2-3... Light receiving element 3... Optical multiplexing section 6... Drive circuit 7...
control circuit

Claims (1)

【特許請求の範囲】 1、半導体発光素子と、該半導体発光素子の出射光をモ
ニタする受光素子とを1対のデバイスとする複数対のデ
バイス、および上記複数対の半導体発光素子の出射光を
合波する光合波部を有し、1個の駆動回路の出力により
、連動スイッチの1つのスイッチを介してそれぞれの半
導体発光素子を駆動する系と、それぞれの受光素子の出
力を上記連動スイッチの他の1つのスイッチを介して、
上記連動スイッチの制御回路に入力させる系とを設けた
高信頼度型光モジュール。 2、上記制御回路は、該制御回路の入力端に接続した受
光素子の出力信号が所望値以下になったときに、上記連
動スイッチを作動させる電圧を出力端に発生することを
特徴とする特許請求の範囲第1項に記載した高信頼度型
光モジュール。 3、上記デバイスは、該デバイスの少なくとも1対が、
同一基板上に形成されていることを特徴とする特許請求
の範囲第1項または第2項に記載した高信頼度型光モジ
ュール。
[Scope of Claims] 1. A plurality of pairs of devices including a semiconductor light emitting element and a light receiving element that monitors the emitted light of the semiconductor light emitting element, and a plurality of pairs of devices that monitor the emitted light of the plurality of semiconductor light emitting elements. It has an optical multiplexing section for multiplexing, and a system that drives each semiconductor light emitting element through one switch of the interlocking switch with the output of one drive circuit, and a system that drives the output of each light receiving element through one switch of the interlocking switch. Through one other switch,
A highly reliable optical module equipped with a system for inputting information to the control circuit of the interlocking switch. 2. A patent characterized in that the control circuit generates a voltage at the output end that activates the interlocking switch when the output signal of the light receiving element connected to the input end of the control circuit becomes less than a desired value. A highly reliable optical module according to claim 1. 3. The above device is characterized in that at least one pair of the devices comprises:
A highly reliable optical module according to claim 1 or 2, characterized in that the optical module is formed on the same substrate.
JP61030967A 1986-02-17 1986-02-17 High reliability type optical module Pending JPS62189749A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61030967A JPS62189749A (en) 1986-02-17 1986-02-17 High reliability type optical module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61030967A JPS62189749A (en) 1986-02-17 1986-02-17 High reliability type optical module

Publications (1)

Publication Number Publication Date
JPS62189749A true JPS62189749A (en) 1987-08-19

Family

ID=12318437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61030967A Pending JPS62189749A (en) 1986-02-17 1986-02-17 High reliability type optical module

Country Status (1)

Country Link
JP (1) JPS62189749A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004193610A (en) * 2002-12-11 2004-07-08 Agilent Technol Inc Transmitter array

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004193610A (en) * 2002-12-11 2004-07-08 Agilent Technol Inc Transmitter array

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