JPS6166960A - Coating method of pipe inside - Google Patents
Coating method of pipe insideInfo
- Publication number
- JPS6166960A JPS6166960A JP18942484A JP18942484A JPS6166960A JP S6166960 A JPS6166960 A JP S6166960A JP 18942484 A JP18942484 A JP 18942484A JP 18942484 A JP18942484 A JP 18942484A JP S6166960 A JPS6166960 A JP S6166960A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- solution
- flowed
- alkoxide solution
- metal alkoxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/50—Conditioning of the sorbent material or stationary liquid
- G01N30/56—Packing methods or coating methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/50—Conditioning of the sorbent material or stationary liquid
- G01N30/56—Packing methods or coating methods
- G01N2030/567—Packing methods or coating methods coating
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Chemically Coating (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明はパイプ内面のコーティング方法に関し、特にガ
スクロマ1〜グラフの毛細管カラムの内面のコーティン
グに用いて好適なコーティング方法に関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a method for coating the inner surface of a pipe, and particularly to a coating method suitable for coating the inner surface of a capillary column of Gas Chroma 1 to Graph.
〈従来例〉
毛細管型ガスクロマトグラフのカラムは内径0゜15〜
0.25mm、長さ1D、m程度のものが常用され、材
質は銅、ガラス、ステンレス鋼、ナイロン、アルミニウ
ム等が用いられている。<Conventional example> Capillary gas chromatograph columns have an inner diameter of 0°15~
Those with a diameter of about 0.25 mm and a length of 1D, m are commonly used, and the materials used include copper, glass, stainless steel, nylon, and aluminum.
パイプを毛細管型ガスク[lマドグラフのカラムどして
用いる場合、パイプの内面には吸着剤としての液相を付
着づる必要があるが、前記パイプの材質は不活性であり
、しかもパイプの内径が極めて細く、かつ、長さが長い
ので、液相を均一に付着させるのが難かしいという問題
があった。When a pipe is used as a capillary gas column, it is necessary to attach a liquid phase as an adsorbent to the inner surface of the pipe, but the material of the pipe is inert and the inner diameter of the pipe is small. Since it is extremely thin and long, there is a problem in that it is difficult to apply the liquid phase uniformly.
〈発明の目的〉
本発明は上記従来技術の問題貞に鑑みてなされたもので
、パイプの内面に酸化物の1lFJコーテイングを行な
い活性の高い面とし、液相の付着しやすいパイプを提供
することを目的とする。<Objective of the Invention> The present invention has been made in view of the problems of the prior art described above, and it is an object of the present invention to provide a pipe in which the inner surface of the pipe is coated with 11FJ of oxide to make it a highly active surface, and to which the liquid phase easily adheres. With the goal.
〈発明の構成〉
この目的を達成する本発明の構成は、パイプに金属アル
コキシド溶液を流し、パイプ内面に前記金属アルコキシ
ド溶液を付着さけ、次に前記パイプに水分を含まないガ
スを流し、パイプ内面に付着した金属アルコキシド溶液
を均一に付着させ、次に前記パイプに水蒸気を流し、パ
イプ内面に付プ内面に金属酸化物の薄膜を形成したを構
成上の特徴とするものである。<Configuration of the Invention> The configuration of the present invention to achieve this object is to flow a metal alkoxide solution into a pipe, avoid adhering the metal alkoxide solution to the inner surface of the pipe, and then flow a water-free gas through the pipe to prevent the metal alkoxide solution from adhering to the inner surface of the pipe. The structure is characterized in that the metal alkoxide solution is uniformly deposited on the pipe, and then water vapor is flowed through the pipe to form a thin film of metal oxide on the inner surface of the pipe.
〈実施例〉
第1図〜第4図は本発明の一実施例を示1コーティング
工程を示すものである。第1図に示す第1の工程におい
て、1は例えば石英ガラスからなるパイプであり、この
パイプ1の一端が金属アルコキシド溶液3(例えば△l
(C3H2O)3のアルコール溶液C3H? OH
)が入った容器2の中に浸されている。4はパイプ1の
他端が接続されたトラップ、5はトラップの中を負圧に
引くためのモータである。上記構成の装置によりモータ
5を駆動して容器2から金属アルコキシド溶液3をパイ
プ1中に吸い込む。<Example> Figures 1 to 4 show an example of the present invention and show one coating process. In the first step shown in FIG.
Alcohol solution of (C3H2O)3 C3H? OH
) is immersed in container 2 containing. 4 is a trap to which the other end of the pipe 1 is connected; 5 is a motor for drawing negative pressure inside the trap. The motor 5 is driven by the device configured as described above to suck the metal alkoxide solution 3 from the container 2 into the pipe 1.
第2図は第2の■稈をに示すもので、6は水分を含まな
いN2ガスが入ったボンベである。このボンベ6にパイ
プ1の一端を接続し、バルブ7を調節しながらパイプ内
にN2ガスを徐々に流してパイプ内をパージし、パイプ
内面に付着した金属アルコキシド溶液を均一に付着させ
る。Figure 2 shows the second culm, and 6 is a cylinder containing N2 gas that does not contain water. One end of the pipe 1 is connected to this cylinder 6, and while adjusting the valve 7, N2 gas is gradually flowed into the pipe to purge the inside of the pipe, thereby uniformly depositing the metal alkoxide solution on the inner surface of the pipe.
第3図は第3の工程を示すもので、9は水蒸気が入った
ボイラーである。このボイラー9にパイプの一端を接続
し、バルブ10を調節しながらパイプ1内に水蒸気を流
して金属アルコキシド溶液を加水分解する。Figure 3 shows the third step, where 9 is a boiler containing steam. One end of the pipe is connected to the boiler 9, and steam is flowed through the pipe 1 while adjusting the valve 10 to hydrolyze the metal alkoxide solution.
第4図は第4の工程を示すもので、11は酸素ボンベで
ある。この酸素ボンベ11にパイプの一端を接続しバル
ブ12を調節しながらパイプ1内に酸素を流し、パイプ
全体を3D、〜5D、℃程麿に加熱して脱水を行ない、
パイプの内壁に活性の高いアルミナ110を形成する。FIG. 4 shows the fourth step, and 11 is an oxygen cylinder. One end of the pipe is connected to this oxygen cylinder 11, oxygen is flowed into the pipe 1 while adjusting the valve 12, and the entire pipe is heated to about 3D to 5D degrees Celsius to perform dehydration.
Highly active alumina 110 is formed on the inner wall of the pipe.
この後パイプ内に液相膜を形成してガスクロマドグラフ
のカラムを構成する。After this, a liquid phase film is formed inside the pipe to form a column for a gas chromatograph.
なお、本実施例においては金属アルコキシド溶液の一例
としてAI(C31−1□0)3のアルコール溶液C3
H708を用いたが酸化物の被膜を形成できるものであ
れば他の溶液を用いてもよい。In this example, an alcohol solution C3 of AI(C31-1□0)3 was used as an example of the metal alkoxide solution.
Although H708 was used, other solutions may be used as long as they can form an oxide film.
また、本実施例においては、パイプを一本として図示し
たが本例に限ることなく複数個を同時にコーティング作
業を行なうことも可能である。Further, in this embodiment, although the pipe is illustrated as one, it is not limited to this example, and it is also possible to perform the coating operation on a plurality of pipes at the same time.
〈発明の効果〉
以上、実施例とともに具体的に説明したJ:うに本発明
によれば、内壁を活性の高い酸化被膜でコーティングし
たので、液相が付着し易く、しかも、耐蝕性の高いパイ
プを実現することができる。<Effects of the Invention> According to the present invention, the inner wall of the pipe is coated with a highly active oxide film, so that the liquid phase easily adheres to the pipe and the pipe has high corrosion resistance. can be realized.
第1図〜第4図は本発明の一実施例にお・ノるコーティ
ング工程を示寸もので、第1図はパイプ内面に金属アル
コキシドを付着させる工程、第2図はパイプ内面に付着
した金属アルコキシド溶液を均一に付着させる工程、第
3図はパイプに水蒸気を流し、パイプ内面に付着した前
記金属アルコキシト溶液を加水分解する工程、第4図は
パイプに酸素ガスを流し、加熱してパイプ内面に金属酸
化物の薄膜を形成する工程である。
1・・・パイプ、3・・・金属アルコキシド溶液、6・
・・N2ボンベ、9・・・ボイラー、11・・・酸素ボ
ンベ。
6一
M3図
箪2図
蒐4図Figures 1 to 4 show the coating process according to an embodiment of the present invention. Figure 1 shows the process of depositing metal alkoxide on the inner surface of the pipe, and Figure 2 shows the process of depositing metal alkoxide on the inner surface of the pipe. The process of uniformly depositing the metal alkoxide solution, Figure 3 shows the process of flowing water vapor through the pipe to hydrolyze the metal alkoxide solution adhered to the inner surface of the pipe, and Figure 4 shows the process of flowing oxygen gas through the pipe and heating it. This is the process of forming a thin film of metal oxide on the inner surface of the pipe. 1... Pipe, 3... Metal alkoxide solution, 6.
...N2 cylinder, 9...Boiler, 11...Oxygen cylinder. 61 M3 drawing 2 drawing 4 drawing
Claims (1)
に前記金属アルコキシド溶液を付 着させ、 B、次に前記パイプに水分を含まないガスを流し、パイ
プ内面に付着した金属アルコキシ ド溶液を均一に付着させ、 C、次に前記パイプに水蒸気を流し、パイプ内面に付着
した前記金属アルコキシド溶液を 加水分解し、 D、次に前記パイプに酸素ガスを含むガスを流し、加熱
してパイプ内面に金属酸化物の薄 膜を形成した ことを特徴とするパイプ内面のコーティング方法。[Claims] A. A metal alkoxide solution is flowed through the pipe to cause the metal alkoxide solution to adhere to the inner surface of the pipe. B. Next, a water-free gas is flowed through the pipe to cause the metal alkoxide solution to adhere to the inner surface of the pipe. C. Next, water vapor is flowed through the pipe to hydrolyze the metal alkoxide solution adhering to the inner surface of the pipe. D. Next, a gas containing oxygen gas is flowed through the pipe and heated to form the pipe. A method for coating the inner surface of a pipe, characterized by forming a thin film of metal oxide on the inner surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18942484A JPS6166960A (en) | 1984-09-10 | 1984-09-10 | Coating method of pipe inside |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18942484A JPS6166960A (en) | 1984-09-10 | 1984-09-10 | Coating method of pipe inside |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6166960A true JPS6166960A (en) | 1986-04-05 |
Family
ID=16241017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18942484A Pending JPS6166960A (en) | 1984-09-10 | 1984-09-10 | Coating method of pipe inside |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6166960A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01245126A (en) * | 1988-03-28 | 1989-09-29 | Tosoh Corp | Analysis apparatus for concentration of gas in chlorine |
JPH01248056A (en) * | 1988-03-29 | 1989-10-03 | Tosoh Corp | Hydrogen concentration analyzing device in wet chlorine |
EP1348957A1 (en) * | 2002-03-27 | 2003-10-01 | Büchi Labortechnik AG | Device and process for filling a column with a filling material |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5993879A (en) * | 1982-11-18 | 1984-05-30 | Yokogawa Hokushin Electric Corp | Formation of thin film |
JPS59141064A (en) * | 1983-01-31 | 1984-08-13 | Shimadzu Corp | Column for chromatography |
-
1984
- 1984-09-10 JP JP18942484A patent/JPS6166960A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5993879A (en) * | 1982-11-18 | 1984-05-30 | Yokogawa Hokushin Electric Corp | Formation of thin film |
JPS59141064A (en) * | 1983-01-31 | 1984-08-13 | Shimadzu Corp | Column for chromatography |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01245126A (en) * | 1988-03-28 | 1989-09-29 | Tosoh Corp | Analysis apparatus for concentration of gas in chlorine |
JPH01248056A (en) * | 1988-03-29 | 1989-10-03 | Tosoh Corp | Hydrogen concentration analyzing device in wet chlorine |
EP1348957A1 (en) * | 2002-03-27 | 2003-10-01 | Büchi Labortechnik AG | Device and process for filling a column with a filling material |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3323310B2 (en) | Method and apparatus for cleaning various objects | |
US9011652B2 (en) | Rotary target backing tube bonding assembly | |
Schrader | Ultrahigh-vacuum techniques in the measurement of contact angles. II. Water on gold | |
US3797086A (en) | Method of closing off a heat pipe | |
CN104241069A (en) | Component with yttrium oxide coating layer in plasma device and manufacturing method of component | |
JP3122228B2 (en) | Process equipment | |
JPS6166960A (en) | Coating method of pipe inside | |
US2398449A (en) | Method of making hermetic seals | |
US3253331A (en) | Glass-metallizing technique | |
US3672020A (en) | Method of making a heat pipe having an easily contaminated internal wetting surface | |
WO2024207924A1 (en) | Substrate pretreatment method before micro-channel plate coating | |
US3720535A (en) | Process for applying a non-self-supporting metal layer atop a plate surface | |
US3122450A (en) | Process for depositing thin films of silicon nitride dielectric | |
JPS58223009A (en) | Crystal oscillation type film thickness monitor | |
JPS57142485A (en) | Manufacture of heat pipe | |
Crane et al. | A High Potential Porcelain X‐Ray Tube | |
JPS5916975A (en) | Sputtering apparatus | |
US3038243A (en) | Silicon nitride dielectric | |
CN209127356U (en) | Raw material storage tank and semiconductor equipment | |
JPS57161648A (en) | Column of chromatography | |
JPS56113377A (en) | Rotary coater | |
JPS6394635A (en) | Device for manufacturing semiconductor | |
JPS5598443A (en) | Manufacturing method for cathode ray tube | |
SU778468A1 (en) | Method for making reference leakage devices | |
JPS56121945A (en) | Heat pipe type solar heat collector |