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JPS6155683U - - Google Patents

Info

Publication number
JPS6155683U
JPS6155683U JP14118984U JP14118984U JPS6155683U JP S6155683 U JPS6155683 U JP S6155683U JP 14118984 U JP14118984 U JP 14118984U JP 14118984 U JP14118984 U JP 14118984U JP S6155683 U JPS6155683 U JP S6155683U
Authority
JP
Japan
Prior art keywords
rod
cold storage
locking portion
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14118984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14118984U priority Critical patent/JPS6155683U/ja
Publication of JPS6155683U publication Critical patent/JPS6155683U/ja
Pending legal-status Critical Current

Links

JP14118984U 1984-09-17 1984-09-17 Pending JPS6155683U (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14118984U JPS6155683U (es) 1984-09-17 1984-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14118984U JPS6155683U (es) 1984-09-17 1984-09-17

Publications (1)

Publication Number Publication Date
JPS6155683U true JPS6155683U (es) 1986-04-14

Family

ID=30699531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14118984U Pending JPS6155683U (es) 1984-09-17 1984-09-17

Country Status (1)

Country Link
JP (1) JPS6155683U (es)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724985B2 (es) * 1973-06-18 1982-05-27
JPS5828269B2 (ja) * 1974-04-27 1983-06-15 ツエ ハ− ベ−リンガ− ゾ−ン シンキナフエニルアルキルアミンルイ オヨビ ソレノサンフカエンルイノセイゾウホウホウ
JPH086178B2 (ja) * 1987-03-25 1996-01-24 日本真空技術株式会社 薄膜形成装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724985B2 (es) * 1973-06-18 1982-05-27
JPS5828269B2 (ja) * 1974-04-27 1983-06-15 ツエ ハ− ベ−リンガ− ゾ−ン シンキナフエニルアルキルアミンルイ オヨビ ソレノサンフカエンルイノセイゾウホウホウ
JPH086178B2 (ja) * 1987-03-25 1996-01-24 日本真空技術株式会社 薄膜形成装置

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