JPS615551U - Fine movement mechanism - Google Patents
Fine movement mechanismInfo
- Publication number
- JPS615551U JPS615551U JP8862584U JP8862584U JPS615551U JP S615551 U JPS615551 U JP S615551U JP 8862584 U JP8862584 U JP 8862584U JP 8862584 U JP8862584 U JP 8862584U JP S615551 U JPS615551 U JP S615551U
- Authority
- JP
- Japan
- Prior art keywords
- movement mechanism
- fine movement
- movable block
- block
- fixed block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【図面の簡単な説明】
図面はこの考案の一実施例を示し、第１図は微動機構の
断面図、第２図は第１の■一■線矢視断面図、第３図は
変位した状態を示す微動機構の断面図、第４図は従来例
の微動機構を示す断面図である。
１・・・固定ブロック、２・・・可動ブロック、３・・
・バネ性部材、１２・・・試料台。[Brief Description of the Drawings] The drawings show one embodiment of this invention, and Fig. 1 is a sectional view of the fine movement mechanism, Fig. 2 is a sectional view taken along the line 1 and 3 of the first displacement mechanism, and Fig. 3 is a sectional view of the fine movement mechanism. FIG. 4 is a sectional view showing a conventional fine movement mechanism. 1...Fixed block, 2...Movable block, 3...
- Spring member, 12... sample stand.
Claims (1)
ックとを複数のバネ性部材で連結する一方、前記可動ブ
菊ツクの固定ブロック側への変位にのみ追従する試料台
を該可動ブロックに連動させた 、微動機構。[Claims for Utility Model Registration] A fixed block and a movable block arranged at a predetermined distance are connected by a plurality of spring members, and the movable block follows only the displacement of the movable block toward the fixed block. A fine movement mechanism that links the sample stage to the movable block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8862584U JPS615551U (en) | 1984-06-14 | 1984-06-14 | Fine movement mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8862584U JPS615551U (en) | 1984-06-14 | 1984-06-14 | Fine movement mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS615551U true JPS615551U (en) | 1986-01-14 |
Family
ID=30641938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8862584U Pending JPS615551U (en) | 1984-06-14 | 1984-06-14 | Fine movement mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS615551U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993009911A1 (en) * | 1991-11-15 | 1993-05-27 | Yotaro Hatamura | Feed screw device and precisely positioning micromotion feed system |
-
1984
- 1984-06-14 JP JP8862584U patent/JPS615551U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993009911A1 (en) * | 1991-11-15 | 1993-05-27 | Yotaro Hatamura | Feed screw device and precisely positioning micromotion feed system |
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