JPS6138615A - Device for flowing clean air from filter frame in filter system suspended from ceiling of whole laminar flow type clean room - Google Patents

Abstract

PURPOSE:To obtain a filter system suspended from the ceiling, having high filter efficiency and less dead space by permitting clean air to flow out of a filter frame as well. CONSTITUTION:A filter frame 6 is constructed by jointing and fixing a frame material 1 having a hollow part 1a and a frame material 3 for attaching an illuminating equipment having an opening 2 on the rear surface with a square space 5 for attaching a whole laminar flow filter 4 left therebetween. On one hand, many small holes 8 are bored on a base plate 7 of the frame material 1. Further, an attaching plate 11 having many small holes 10 bored thereon is fixed to an opening part 2 of the frame material 3 for attaching illuminating equipment to form a hollow space 3a. The hollow space 3a is communicated with an inside hollow space 1a of the frame material 1, respectively, to utilize the hollow spaces 1a, 3a as passage of clean air. At the same time, a stabilizer 12 and an illuminating equipment 13 are fixed respectively to the upper and rear surface of the attaching plate 11, and an air blower means 23 and a filter frame 6 are connected respectively.

Description

Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a ceiling-suspended filter system for a full laminar flow clean room, which includes a frame material constituting a filter frame, and a lighting fixture mounting frame to which a lighting fixture is attached. This relates to the flow of clean air into a clean room through wooden obstacles.

(Conventional technology) As semiconductor technology advances, the requirements for the cleanliness of the clean rooms necessary for semiconductor manufacturing have become considerably stricter.In addition to improving the efficiency of the filter itself, there are also significant requirements such as preventing leaks after the filter is installed. As they become more precise, the issue is how much of a given area the filter can occupy (filter effectiveness rate) as a condition for improving the cleanliness of the entire room.Currently, the filter effectiveness rate is 80-86. %.

That is, as shown in FIGS. 5 and 6, the conventional ceiling-suspended filter system for an all-over laminar flow clean room uses a frame material 31 formed of a hollow rectangular shape and a lighting fixture mounting frame material 32 as filters, respectively. A filter frame 35 formed by joining and fixing a rectangular gap 34 slightly smaller than 33 is suspended from the ceiling so as to be almost in contact with the surrounding wall 36 of the clean room, and a lighting fixture 37 is attached to the bottom surface of the lighting fixture mounting frame 32. are fixedly installed, and a filter 33 is mounted and fixed on each rectangular cavity 34 of the filter frame 35.

(Problems to be Solved by the Invention) However, in the above-mentioned conventional ceiling-suspended filter system, the frame frame material 31 and the lighting fixture mounting frame material a2 that constitute the filter frame 35 are functionally necessary, and therefore 100% There is a problem that it is impossible to achieve a filter effectiveness rate of
Further, as shown in FIG. 6, there is a problem in that a dead space 38 is created in which air does not circulate directly under the frame member 31 and the lighting fixture mounting frame member 32 that constitute the filter frame 35.

(Means for Solving the Problems) The present invention has been made by paying attention to the above problems, and improves the efficiency of the filter by allowing clean air to flow from the filter frame as well, thereby reducing the dead space. The purpose is to try to resolve the points.

In order to achieve the above object, the present invention combines a frame member 1 having a hollow portion 1a and a lighting fixture mounting frame member 3 having an opening 2 on the lower surface into a rectangular void portion 5 in which a laminar flow filter 4 is mounted on the entire surface. are provided and bonded and fixed to form the filter frame 6. On the other hand, a large number of small holes 8 are bored in the bottom plate 7 of the frame frame material 1, and a large number of small holes 10 are also formed in the opening 2 of the lighting equipment mounting frame material 3. A mounting plate 11 having a hole therein is fixed to provide a hollow part 3a@, and the hollow part 3a and the hollow part 1a of the frame material 1 are communicated with each other, so that a flow of clean air can flow through each hollow part 1a, 3a. A ballast 12 and a lighting fixture 13 are fixed to the upper and lower surfaces of the mounting plate 11, respectively, and a blowing means 23 for blowing clean air is connected to the filter frame 6.

(Operation) The operation of the present invention configured as described above is as follows.

Clean air flows into the clean room from the filter 4 installed on the rectangular cavity 5, and at the same time, the air blowing means 23
The clean air from the hollow part 1a of the filter frame 6,
3a and into the clean room through small holes 8.10, thereby reducing dead space and increasing filter efficiency.

(Example) An example of the implementation of the present invention will be described in detail with reference to the drawings. A frame member 1 formed of a rectangular member having a hollow portion 1a, and a rectangular member having an opening 2 on the lower surface side. A filter frame 6 is formed by joining and fixing the lighting equipment mounting frame members 3' with a rectangular gap 5 slightly smaller than the filter 4. And filter frame 6
A large number of small holes 8 are bored across the entire surface of the bottom plate 7 of the frame material 1 constituting the frame material 1, and a large number of small holes 8 are formed in the flange strip 9 that protrudes from the opening 2 of the lighting equipment mounting frame material 3. A hollow part 3a is provided by fixing a mounting plate 11 having small holes 10 formed therein over the entire surface.
Further, the hollow portion 3a of the lighting fixture mounting frame material 3 and the hollow portion 1a of the frame frame material 1 are communicated with each other, and the hollow portions 1a, 3a are connected to each other.
are used as flow paths for clean air, and a ballast 12 and a lighting fixture 13 are fixed to the upper and lower surfaces of the mounting plate 11, respectively.

- A blower 16 is installed in the casing 15 having an opening 14 on the side surface, and a canvas 19 is connected and fixed to connect the blower 16 and a vent 18 provided in the partition plate 17, and further the vent 18 A filter mounting plate 20 is fixed at an appropriate interval in front of the filter mounting plate 2.
A filter 21 is attached to the filter frame 6, and an air outlet 22 is formed in the other side of the casing 14 in front of the filter 21 to form an air blowing means 23. The filter 2 is connected to the end face via a duct 24, and the air blower 16 is connected to the filter 2.
The clean air blown to the filter frame 6 through the filter frame 6 is blown into the clean room through the small holes 8.10 of the filter frame 6.

(Effects of the Invention) Since the present invention is as described above, clean air can be blown into the clean room by the blowing means from the filter frame part which conventionally does not have a clean air blowing function in addition to the filter. The lower part of the filter frame was considered to be a dead space where air does not circulate, but the present invention allows air to circulate, increasing the efficiency of the filter.

[Brief explanation of the drawing]

The figures show an example of the implementation of the present invention, and FIG. 1 is a plan view of a ceiling-suspended filter system, and FIG.
- An enlarged cross-sectional view taken along line A, Figure 3 is an enlarged cross-sectional view taken along line B-B of Figure 1, Figure 4 is an enlarged partially cutaway perspective view of the ventilation means, and Figure 5 is a bottom view of a conventional ceiling-suspended filter system. , FIG. 6 is a longitudinal sectional view of the same. In the figure, 1 is a frame material, 1a is a hollow part, 2 is an opening,
3 is a lighting equipment mounting frame, 3a is a hollow part, 4 is a filter,
5 is a square cavity, 6 is a filter frame, 7 is a bottom plate,
8, 10 is a small hole, 11 is a mounting plate, 12 is a stabilizer, 13
2 is a lighting fixture, and 23 is a ventilation means. Filed on July 31, 1980 Person Kondo Kogyo Co., Ltd. and 1 other person Figure 1 Prisoner Figure 3 Figure 4 Figure 5 Figure 6

Claims (1)

[Claims] A filter frame is formed by joining and fixing a frame material having a hollow part and a lighting equipment mounting frame material having an opening on the lower surface with a rectangular void part for a full-surface laminar flow filter device. A large number of small holes are drilled in the bottom plate,
Furthermore, a mounting plate having a large number of small holes is fixed to the opening of the lighting equipment mounting frame material to form a hollow part, and the hollow part and the hollow part of the frame material are communicated with each other, so that each hollow part is connected to the hollow part of the frame material. The entire laminar airflow system is characterized in that a ballast and a lighting fixture are fixed to the upper and lower surfaces of the mounting plate, respectively, and a filter frame is connected to a blowing means for blowing clean air. A device that flows clean air from the filter frame in a ceiling-suspended filter system in a clean room.