JPS61165965A - Highly integrated power source element - Google Patents

Abstract

PURPOSE:To form a highly integrated power source element that can arbitrary high electromotive force by concurrently forming two or more solid electrolyte batteries on the same substrate and performing inter-battery connection. CONSTITUTION:Positive electrodes 2 represented by Pb-PbI2, TiS2, and such are selectively formed on the desired section of an insulating substrate 1 and all surfaces of the positive electrodes are coated with electrolyte 3 represented by Li2O-SiO2-P2P5, LiI, and such. In addition, negative electrodes 4 represented b y Li, Li-Si alloy, and such are applied selectively corresponding to the positive electrodes 2 and the whole is covered with a protective coat 5. Besides, a highly integrated power source element made of two or more solid electrolyte batteries is formed by providing electrodes 7-1-7-4 and connecting them. As a result, two or more batteries can collectively and easily be formed on the same substrate and packaging density can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a solid electrolyte battery, and particularly to a highly integrated solid electrolyte battery in which two or more solid electrolyte batteries are formed on the same substrate.

[Conventional technology]

Conventional batteries are manufactured individually, and when a plurality of batteries are required, only the necessary number of batteries are used. Regarding materials for such batteries, U.S. Pat.
There are issues such as No. 9,052. However, these are only disclosures regarding materials.

[Problem that the invention seeks to solve]

The electromotive force of such an individual battery is around 2V at most, and if a higher electromotive force is required, a method of connecting a plurality of individual batteries in series is used. Alternatively, a stacked battery is used in which individual batteries are stacked in series and housed in one package, but each battery is manufactured individually and is essentially no more than an individual battery.

It is an object of the present invention to significantly alleviate these drawbacks of the prior art.

[Means for solving problems]

In this method, multiple batteries are formed simultaneously on the same substrate, and connections between the batteries are also made. This not only makes it possible to realize any high electromotive force batteries at once, but also greatly improves the packaging density.

That is, in the present invention, Li, Li-3i alloy,
Negative electrode represented by Li-AQ alloy, Pb-PbI2
．． Ti5z, VSe2. Positive electrodes represented by V, P, 3°N, i, PS3, etc., these 1! Li2 caught between the poles
O-3i02-PzPB system, LiI, Lit-AQ 2
A solid electrolyte battery solidified with an electrolyte represented by 03, etc. is selectively deposited on the same substrate, and a positive electrode or a negative electrode is reacted with the electrolyte, such as Sagi, FC alloy, Ni, Ta, Mo, W, etc. An integrated solid electrolyte battery is constituted by connecting connection electrodes made of a material that is difficult to react.

[Effect]

In the present invention, by simultaneously forming a plurality of batteries directly on the same substrate, they can be manufactured all at once, wiring can be easily performed, and high integration is facilitated.

〔Example〕

Hereinafter, the present invention will be explained in detail with reference to Examples.

As shown in FIG. 1, a positive electrode 2 typified by the above-mentioned materials is selectively deposited on an insulating substrate 1. For this, the positive electrode 2 is CV
It is coated on the entire surface using the D method, sputtering method, etc., and then a positive electrode having a predetermined shape is obtained by photoetching or the like. In addition, if you cover unnecessary parts with a glue lift-off material such as Photo 1 nodist, then cover the entire surface with positive electrode 2, and then remove only the lift-off material without dissolving the positive electrode, the positive electrode on the lift-off material can be removed. Then, the positive electrode 2 can be formed in a desired portion.

Thereafter, an electrolyte 3 is deposited on the entire surface, and a negative electrode 4 is selectively deposited in the same manner as the positive electrode. This positive electrode 2. Electrolyte 3. The negative electrode 4 forms a battery. After that, SiO2, PSG is applied by CVD method, sputtering method, etc. to cover the entire area.
, AQ203°Si3N, a protective film 5 typified by a film, etc. is deposited.

Thereafter, through holes 6 reaching the positive electrode 2 and the negative electrode 4 are formed, and connection electrodes 7-1 to 7-4 are selectively attached.

If the method of connecting the electrodes 7-1 to 7-4 is selected, FIG.

High voltage can be obtained as individual cells or in series as shown in FIG.

It is obvious that in the embodiments of the present invention described above, the positive electrode Vi2 and the negative electrode 4 can be formed oppositely to each other. In addition, its thickness and plane area vary depending on the desired amount of power.
There are no restrictions.

Furthermore, the insulating substrate 1 was used in the explanation of the present invention.

Depending on the application, for example, as shown in FIG. 2, if one of the connection electrodes is shared, a common connection electrode may be used as the substrate.

Although FIG. 1 shows an example in which the negative electrode 4 is stacked on the positive electrode 2, as shown in FIG. The battery can be formed in a direction parallel to the substrate 1, and the height of the battery can be reduced, which is advantageous for integration.

〔effect〕

As explained above, according to the present invention, not only can a plurality of batteries be formed on the same substrate at once, and a plurality of power supply sources can be formed at once, but also these batteries can be connected in series. FIGS. 2 and 3 are connection diagrams, and FIG. 4 is a diagram showing another embodiment of the present invention.

■... Insulating substrate, 2... Positive electrode, 3... Electrolyte, 4
...Negative electrode, 5...Protective film, 6...Through hole, 7...
・Connection electrode.

iA　2　Figure Figure 3 Z　　　　　　　　　It

Claims (1)

[Claims] 1. A highly integrated power supply element characterized by forming a plurality of solid electrolyte batteries on the same substrate.