JPS61139075A - Manufacture of photoelectric conversion element - Google Patents
Manufacture of photoelectric conversion elementInfo
- Publication number
- JPS61139075A JPS61139075A JP59261630A JP26163084A JPS61139075A JP S61139075 A JPS61139075 A JP S61139075A JP 59261630 A JP59261630 A JP 59261630A JP 26163084 A JP26163084 A JP 26163084A JP S61139075 A JPS61139075 A JP S61139075A
- Authority
- JP
- Japan
- Prior art keywords
- work function
- electrodes
- electrode
- metal
- continuously
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 238000006243 chemical reaction Methods 0.000 title claims description 13
- 239000004065 semiconductor Substances 0.000 claims abstract description 27
- 239000000049 pigment Substances 0.000 claims abstract description 21
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims description 9
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 3
- 239000002985 plastic film Substances 0.000 abstract description 4
- 229920006255 plastic film Polymers 0.000 abstract description 4
- 238000007493 shaping process Methods 0.000 abstract 2
- 210000000988 bone and bone Anatomy 0.000 description 8
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- -1 polyethylene Polymers 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
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- 239000007772 electrode material Substances 0.000 description 3
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- 239000002904 solvent Substances 0.000 description 3
- UBOXGVDOUJQMTN-UHFFFAOYSA-N 1,1,2-trichloroethane Chemical compound ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 2
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- 239000000463 material Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 2
- 229920002285 poly(styrene-co-acrylonitrile) Polymers 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
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- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000005033 polyvinylidene chloride Substances 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- NGQSLSMAEVWNPU-UHFFFAOYSA-N 1,2-bis(2-phenylethenyl)benzene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1C=CC1=CC=CC=C1 NGQSLSMAEVWNPU-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- OCJBOOLMMGQPQU-UHFFFAOYSA-N 1,4-dichlorobenzene Chemical compound ClC1=CC=C(Cl)C=C1 OCJBOOLMMGQPQU-UHFFFAOYSA-N 0.000 description 1
- PYSRRFNXTXNWCD-UHFFFAOYSA-N 3-(2-phenylethenyl)furan-2,5-dione Chemical compound O=C1OC(=O)C(C=CC=2C=CC=CC=2)=C1 PYSRRFNXTXNWCD-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- 235000000177 Indigofera tinctoria Nutrition 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- 229920000147 Styrene maleic anhydride Polymers 0.000 description 1
- RCTGMCJBQGBLKT-UHFFFAOYSA-N Sudan IV Chemical compound CC1=CC=CC=C1N=NC(C=C1C)=CC=C1N=NC1=C(O)C=CC2=CC=CC=C12 RCTGMCJBQGBLKT-UHFFFAOYSA-N 0.000 description 1
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- MRQIXHXHHPWVIL-UHFFFAOYSA-N chembl1397023 Chemical compound OC1=CC=C2C=CC=CC2=C1N=NC1=CC=CC=C1 MRQIXHXHHPWVIL-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000008280 chlorinated hydrocarbons Chemical class 0.000 description 1
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229940117389 dichlorobenzene Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- YLQWCDOCJODRMT-UHFFFAOYSA-N fluoren-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C2=C1 YLQWCDOCJODRMT-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229940097275 indigo Drugs 0.000 description 1
- COHYTHOBJLSHDF-UHFFFAOYSA-N indigo powder Natural products N1C2=CC=CC=C2C(=O)C1=C1C(=O)C2=CC=CC=C2N1 COHYTHOBJLSHDF-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229940035429 isobutyl alcohol Drugs 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 1
- 229930014626 natural product Natural products 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- WCPAKWJPBJAGKN-UHFFFAOYSA-N oxadiazole Chemical compound C1=CON=N1 WCPAKWJPBJAGKN-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002102 polyvinyl toluene Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- KAKZBPTYRLMSJV-UHFFFAOYSA-N vinyl-ethylene Natural products C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/108—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the Schottky type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
【発明の詳細な説明】
夜亙光乱
本発明は有機半導体層を有する光電変換素子に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a photoelectric conversion element having an organic semiconductor layer.
災來1拵
最近になり、低コスト化が期待出来ること、大面積化が
可能ということで、有機材料を用いた光電変換素子の研
究、開発が各方面で活発に行なねれている。その多くは
有機材料とフェルミ準位の差(仕事関数の差)の大きい
金属との整流性接触を利用したショットキー障壁型のも
のである。Recently, research and development of photoelectric conversion elements using organic materials has been actively conducted in various fields because of the potential for lower costs and the possibility of increasing the area. Most of them are of the Schottky barrier type, which utilize rectifying contact between an organic material and a metal with a large difference in Fermi level (difference in work function).
ショットキー障壁型の光電変換素子における半導体層は
その動作原理上、膜厚が薄いことが望ましい。また障壁
を形成する側より光を入射させる為、いわゆるフロント
電極は可能な限り薄い方が好ましい。Due to its operating principle, it is desirable that the semiconductor layer in a Schottky barrier type photoelectric conversion element be thin. Furthermore, in order to allow light to enter from the side where the barrier is formed, it is preferable that the so-called front electrode be as thin as possible.
すなわち、フロント電極を通過した光が半導体層に吸収
され、半導体とフロント電極形成金属との接触で形成さ
れた障壁層でキャリアが生成し、例えばホールは半導体
層を通過して外部へ流れるわけであり、半導体層の膜厚
が厚くなるとその分、抵抗が高くなり、不利である。In other words, light passing through the front electrode is absorbed by the semiconductor layer, and carriers are generated in the barrier layer formed by the contact between the semiconductor and the metal forming the front electrode.For example, holes pass through the semiconductor layer and flow to the outside. However, as the thickness of the semiconductor layer increases, the resistance increases accordingly, which is disadvantageous.
従って電極にリード線を接着させ、光起電力を取出す場
合、二つの電極がクロスして重なっている部分に接着さ
せると、接着に使用する導電性塗料のしみ込み、機械的
負荷等により、電極同志が短絡してしまい、光起電力が
取出せなくなる。従来より文献等で報告されている光電
変換素子の形状を見ると(例えば、真空第26巻第1号
山下等、電気学会論文誌A、101巻6号工藤等)、基
体としてスライドガラスの様な小片を用い、その172
位の面積に一方の電極ELをマスキングしながら設けた
り、全面に設けた後、エツチング、機械的除去により、
電極の有る部分、無い部分を形成している。そしてその
上に半導体層Sを設け、さらにもう一方の電極を設け、
電極同志が短絡しない様にリード線を接着させている。Therefore, when attaching a lead wire to an electrode and extracting photovoltaic power, if the lead wire is attached to the area where two electrodes cross and overlap, the conductive paint used for adhesion may seep in, mechanical load, etc. The comrades become short-circuited and photovoltaic power cannot be extracted. Looking at the shapes of photoelectric conversion elements that have been previously reported in literature (e.g., Vacuum Vol. 26, No. 1, Yamashita et al., IEEJ Transactions A, Vol. 101, No. 6, Kudo et al.), the substrate is like a slide glass. Using a small piece, 172
After one electrode EL is provided on the same area while masking or provided on the entire surface, it is etched or mechanically removed.
It forms parts with and without electrodes. Then, a semiconductor layer S is provided thereon, and another electrode is provided,
The lead wires are glued to prevent short circuits between the electrodes.
この形成で本質的に問題は無いが、あくまでもバッチ生
産でのみ採用し得る方法であり、どうしても品質のバラ
ツキは避けられない。また大量生産、大面積化には適さ
ない。Although there is essentially no problem with this formation, it is a method that can only be adopted in batch production, and variations in quality are unavoidable. Also, it is not suitable for mass production or large-area production.
豆−一一煎
本発明は従来の欠点を解決するためになされたものであ
って、連続的大量生産に適し、品質が一定しており、後
工程が容易であり、かつ大面積化が容易な光電変換素子
の製造法を提供するとことを目的とする。The present invention was made to solve the drawbacks of the conventional method, and is suitable for continuous mass production, has constant quality, is easy to perform post-processing, and can be easily expanded to a large area. The purpose of the present invention is to provide a method for manufacturing a photoelectric conversion element.
1−一一腹
本発明はこの目的を達成するため鋭意研究した結果、
(a) 透光性のプラスチックフィルム上に金属M2
(仕事関数φM 1)の層を幅方向に間隔を空けて薄い
半透明な電極E1を連続的に形成する工程(第1−a図
);
(b) 前記電極E□上に有機光導電性顔料(仕事関
数φS)を主成分とする層を塗布により連続的もしくは
間欠的に設けて半導体層Sを形成する工程(第1−b図
);
(c) 前記半導体層上に金属M2(仕事関数φMz
)の層を連続的もしくは間欠的に設けて電極E2を形
成する工程(第1−c図);及び
(d) 前記電極E1及び前記電極E2に回路をつく
るためのリード線を電極E1及び電極E2が交叉して重
なっていない部分より接続して設ける工程を有し、前記
仕事関数の関係がφM、<φSくφM2もしくはφM、
>φS〉φM2であることを特徴とする光電変換素子の
製造法を提供することによって前記目的が達成できるこ
とを見出した。1-1 The present invention has been made as a result of intensive research to achieve this objective. (a) Metal M2 on a translucent plastic film
(Figure 1-a); (b) forming an organic photoconductive layer on the electrode E; A step of forming a semiconductor layer S by continuously or intermittently providing a layer containing a pigment (work function φS) by coating (Fig. 1-b); Function φMz
) to form the electrode E2 by continuously or intermittently providing the layer (FIG. 1-c); and (d) connecting lead wires for forming a circuit to the electrode E1 and the electrode E2 to the electrode E1 and the electrode E2. E2 has a step of connecting and connecting from the non-overlapping portions where E2 intersects and is not overlapped, and the work function relationship is φM, <φS, φM2 or φM,
It has been found that the above object can be achieved by providing a method for manufacturing a photoelectric conversion element characterized in that >φS>φM2.
本発明で使用される基板としては、透光性の良いプラス
チックフィルム、例えばポリエチレンフィルム、ポリプ
ロピレンフィルム、ポリ塩化ビニルフィルム、ポリ液化
ビニリデンフィルム、ポリカーボネートフィルム、ポリ
エステルフィルム、アセテートフィルム、ポリアミドフ
ィルム等が挙げられる。Examples of the substrate used in the present invention include plastic films with good light transmission, such as polyethylene film, polypropylene film, polyvinyl chloride film, polyliquefied vinylidene film, polycarbonate film, polyester film, acetate film, and polyamide film. .
次に仕事関数φM1の金属もしくは合金、金属酸化物を
幅方向に間隔を空けて半透明状に連続的に蒸着、スパッ
タリング等で設け、電極E工とし、フロント電極として
使用する。Next, a metal, an alloy, or a metal oxide having a work function φM1 is continuously deposited in a translucent manner at intervals in the width direction by vapor deposition, sputtering, etc. to form an electrode E, which is used as a front electrode.
次に1種類もしくは数種類の有機顔料を必要ならば結着
剤とともに溶剤に分散もしくは熔解し、適当な塗工方法
で電極E1上に塗布、乾燥し、半導体層を形成する。Next, one type or several types of organic pigments are dispersed or dissolved in a solvent together with a binder if necessary, and applied onto the electrode E1 by an appropriate coating method and dried to form a semiconductor layer.
有機顔料としては例えばシーアイピグメントブルー25
〔カラーインデックス(CI)21180〕、シーアイ
ピグメントレッド41 (CI21200)、シーアイ
ジッドレッド52(CI45100)、シーアイベーシ
ックレッド3 (CI45210)の他にカルバゾール
骨核を有するアゾ顔料(特開昭53−95033号公報
に記載)、スチリルスチルベン骨核を有するアゾ顔料(
特開昭53−138229号公報に記載)、トリフェニ
ルアミン骨核を有するアゾ顔料(特開昭53−1325
47号公報に記載)、ジベンゾチオフェン骨核を有する
アゾ顔料(特開昭54−21728号公報に記載)、オ
キサジアゾール骨核を有するアゾ顔料(特開昭54−1
2742号公報に記載)、フルオレノン骨核を有するア
ゾ顔料(特開昭54−22834号公報に記載)、ビス
スチルベン骨核を有するアブ顔料(特開昭54−177
33号公報に記載)、ジスチリルオキサジアゾール骨核
を有するアゾ顔料(特開昭54−2129号公報に記載
)、ジスチリルカルバゾール骨核を有するアゾ顔料(特
開昭54−17734号公報に記載)、カルバゾール骨
核を有するトリスアゾ顔料(特開昭57−195767
号公報、同57−195758号公報に記載)等、更に
はシーアイピグメントブルー16 (CI74100)
等のフタロシアニン系顔料、シーアイバットブラウン5
(CI73410)、シーアイバットダイ(CI73
030)等のインジゴ系顔料、アルゴスカーレットB(
バイオレット社製)、インダンスレンスカーレットR(
バイエル社!I)等のペリレン系顔料等が効果的である
。Examples of organic pigments include CI Pigment Blue 25.
[Color Index (CI) 21180], C.I. Pigment Red 41 (CI21200), C.I. Gid Red 52 (CI45100), C.I. Basic Red 3 (CI45210), as well as azo pigments with carbazole bone cores (Japanese Patent Laid-Open No. 53-95033) (described in the official publication), an azo pigment with styrylstilbene bone core (
(described in JP-A No. 53-138229), azo pigments having triphenylamine bone cores (described in JP-A-53-1325)
47), an azo pigment having a dibenzothiophene bone core (described in JP-A No. 54-21728), an azo pigment having an oxadiazole bone core (described in JP-A-54-1988)
2742), an azo pigment having a fluorenone bone core (described in JP-A-54-22834), an ab pigment having a bisstilbene bone core (JP-A-54-177)
33), an azo pigment having a distyryloxadiazole core (described in JP-A-54-2129), an azo pigment having a distyrylcarbazole core (described in JP-A-54-17734), ), trisazo pigment with carbazole bone core (Japanese Patent Application Laid-Open No. 57-195767
Publication No. 57-195758), and CI Pigment Blue 16 (CI74100).
Phthalocyanine pigments such as Sea Eye Butt Brown 5
(CI73410), Sea Eye Bat Die (CI73
Indigo pigments such as 030), Argo Scarlet B (
Violet Co., Ltd.), Indance Lens Scarlet R (
Bayer company! Perylene pigments such as I) are effective.
また結着剤としては種々の高分子材料例えばポリスチレ
ン、スチレン−アクリロニトリル共重合体、スチレン−
ブタジェン共重合体、スチレン−無水マレイン酸共重合
体、ポリエステル、ポリ塩化ビニル、塩化ビニル−酢酸
ビニル共重合体、ポリ酢酸ビニル、ボリアリレート樹脂
、ポリ塩化ビニリデン、酢酸セルロース、エチルセルロ
ース、ポリビニルブチラール、ポリビニルホルマール、
ポリアミド、ポリ−N−ビニルカルバゾール、ポリビニ
ルトルエン、アクリル樹脂、ポリカーボネート、シリコ
ン樹脂、エポキシ樹脂、メラミン樹脂、ウレタン樹脂、
フェノール樹脂、アルキッド樹脂等の熱可塑性樹脂。As a binder, various polymeric materials such as polystyrene, styrene-acrylonitrile copolymer, styrene-acrylonitrile copolymer, etc.
Butadiene copolymer, styrene-maleic anhydride copolymer, polyester, polyvinyl chloride, vinyl chloride-vinyl acetate copolymer, polyvinyl acetate, polyarylate resin, polyvinylidene chloride, cellulose acetate, ethyl cellulose, polyvinyl butyral, polyvinyl formal,
Polyamide, poly-N-vinylcarbazole, polyvinyltoluene, acrylic resin, polycarbonate, silicone resin, epoxy resin, melamine resin, urethane resin,
Thermoplastic resins such as phenolic resins and alkyd resins.
熱硬化性樹脂、デンプン、ニカワ、カゼイン等の天然物
等の単独もしくは混合で使用しても良い。Thermosetting resins, starch, glue, natural products such as casein, etc. may be used alone or in combination.
また溶剤としてはベンゼン、トルエン、キシレン等の炭
化水素類、アセトン、メチルエチルケトン、メチルイソ
ブチルケトン、シクロヘキサノン等のケトン類、テトラ
ビトロフラン、ジオキサン等のエーテル類、酢酸エチル
、酢酸プロピル、酢酸ブチル等のエステル類、塩化メチ
レン、ジ液化エチレン、1,1.2−トリクロルエタン
、四塩化炭素、モノクロルベンゼン、0−°ジクロルベ
ンゼン等の塩化炭化水素類、n−プロピルアルコール、
イソプロピルアルコール。Examples of solvents include hydrocarbons such as benzene, toluene, and xylene; ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, and cyclohexanone; ethers such as tetravitrofuran and dioxane; and esters such as ethyl acetate, propyl acetate, and butyl acetate. Chlorinated hydrocarbons such as methylene chloride, diliquefied ethylene, 1,1,2-trichloroethane, carbon tetrachloride, monochlorobenzene, 0-° dichlorobenzene, n-propyl alcohol,
Isopropyl alcohol.
n−ブチルアルコール、イソブチルアルコール等のアル
コール類の使用が好ましい。Preferably, alcohols such as n-butyl alcohol and isobutyl alcohol are used.
半導体層の膜厚は10μm以下、好ましくは2゜5μm
以下が適当である。The thickness of the semiconductor layer is 10 μm or less, preferably 2.5 μm.
The following are appropriate.
塗工方法としてはリバースロールコータ−、グラビアコ
ーター、キスロールコーター、カーテンコーター等が適
切である。As a coating method, a reverse roll coater, a gravure coater, a kiss roll coater, a curtain coater, etc. are suitable.
次に該半導体層上に仕事関数φM2の金属M2を蒸着、
スパッタリング等で設け、電極E2とし、バック電極と
して使用する。電極E工及び電極E2に回路をつくる為
のリード線は電極E1及び電極E2がクロスして重なっ
ていない部分より導電性塗料等により接続して設ける。Next, a metal M2 having a work function φM2 is deposited on the semiconductor layer,
It is provided by sputtering, etc., and is used as the electrode E2 as a back electrode. Lead wires for forming a circuit on the electrode E and the electrode E2 are connected by conductive paint or the like from the part where the electrode E1 and the electrode E2 cross and do not overlap.
電極E工からの接続は、場合によっては半導体層Sを溶
剤等で除去し、電極E1を露出させてから接続しても良
い。仕事関数の関係が φM工くφS〈φM2もしくは
φM i>φS〉φM2であり、使用する有機顔料がP
型半導体の場合はφM1<φS<φM2の関係になる様
に電極材料を選択する。また使用する有材顔料がN型半
導体の場合にはφM l >φS〉φM2の関係になる
様に電極材料を選択する。P型半導体の場合は仕事関数
の小さな金属との接合が整流接合であり、N型半導体の
場合は仕事関数の大きい金属との接合が整流接合となり
、整流接合する側をフロント電極として使用する。金属
材料(電極材料)としてはM g r A Q e M
n * F e + Co e N x eCu、Z
n、Nb、Mo、Pd* Agt P ttA u p
I n z Os p ” no、、ITO(インジ
ウム−錫酸化物)等が好ましい。The connection from the electrode E may be made after removing the semiconductor layer S with a solvent or the like to expose the electrode E1, depending on the case. The relationship between the work functions is φM×φS〈φM2 or φM i>φS〉φM2, and the organic pigment used is P
In the case of a type semiconductor, the electrode material is selected so that the relationship φM1<φS<φM2 is satisfied. Further, when the material pigment used is an N-type semiconductor, the electrode material is selected so that the relationship φM l >φS>φM2 is satisfied. In the case of a P-type semiconductor, the junction with a metal with a small work function is a rectifying junction, and in the case of an N-type semiconductor, the junction with a metal with a large work function is a rectifying junction, and the side to which the rectifying junction is made is used as a front electrode. As a metal material (electrode material), M g r A Q e M
n * F e + Co e N x eCu, Z
n, Nb, Mo, Pd* Agt P ttA u p
ITO (indium-tin oxide) and the like are preferred.
本発明をさらに具体的に説明するために下記に実施例を
示すが、本発明はこれに眼定されるものではない。Examples are shown below to further specifically explain the present invention, but the present invention is not limited thereto.
実施例
厚さ75μmのポリエチレンテレフタレートフィルムを
基体とし、純度99.99%のアルミニウムを、波長5
60nmでの透過率が30%になる様に幅100mmで
、間隔を50mra空けて真空蒸着し、フロント電極を
形成し、ロールに巻取った。次にP型半導体である下記
構造式のジスアゾ顔料2部、ブチラール樹脂(■積水化
学製エスレックBX−1)1部、ラトラヒドロフラン2
7部をボールミルポットに取り、24時間ミリングし、
ミルベースを容器に移し、1.5重量%になる様にテト
ラヒドロフランで希釈、攪拌して半導体層塗工液を調整
し、前述のフロント電極、絶縁層上に2本ロールディッ
プコーターにて塗布し、膜厚約0゜5μmの半導体層を
形成した。Example A polyethylene terephthalate film with a thickness of 75 μm was used as the base, and aluminum with a purity of 99.99% was used at a wavelength of 5.
A front electrode was formed by vacuum deposition with a width of 100 mm and an interval of 50 mra so that the transmittance at 60 nm was 30%, and the film was wound onto a roll. Next, 2 parts of a disazo pigment with the following structural formula, which is a P-type semiconductor, 1 part of butyral resin (■ Sekisui Chemical's S-LEC BX-1), and 2 parts of latrahydrofuran.
Place 7 parts in a ball mill pot and mill for 24 hours.
Transfer the mill base to a container, dilute it with tetrahydrofuran to a concentration of 1.5% by weight, stir to prepare a semiconductor layer coating solution, and apply it on the aforementioned front electrode and insulating layer using a two-roll dip coater. A semiconductor layer having a thickness of approximately 0.5 μm was formed.
ジスアゾ顔料
次に前記半導体層上に純度99゜99%の金を真空蒸着
し、バック電極を設けた。以上の様にして作成した光電
変換素子を適尚な大きさに切り出し、電極同志がクロス
して重なっていない部分よりリード線(銅線使用)を銀
ペーストを使用して接着し、光強度10μW/dの白色
タングステン光をフロント電極側より照射し、変換効率
を求めたところ0.11%であった。この方法で製造さ
れる光電変換素子は任意の面積、形状に涌単にデバイス
化出来る。Disazo Pigment Next, gold with a purity of 99.99% was vacuum deposited on the semiconductor layer to provide a back electrode. The photoelectric conversion element created as above was cut out to an appropriate size, and lead wires (copper wires were used) were glued to the parts where the electrodes crossed and did not overlap using silver paste, and the light intensity was 10 μW. /d white tungsten light was irradiated from the front electrode side, and the conversion efficiency was determined to be 0.11%. The photoelectric conversion element manufactured by this method can be easily turned into a device with any area and shape.
効 果 以上述べたように1本発明の方法によれば。effect As described above, according to the method of the present invention.
連続的生産が可能であり、大量生産、大面積化が可能と
なった。Continuous production is possible, making mass production and large area possible.
第1−c図ないし第1−c図は本発明の製造工程を示す
簡略図である。
1・・・透光性プラスチックフィルム基体。
S・・・有機半導体層、 M工・・・フロント電極金属
層。
M2・・・バック電極金属層、
A・・・連続的塗布部分、 B・・・間欠的塗布部分手
続補正書
昭和60年2月22日
1、事件の表示
昭和59年特許願第261630号
2、発明の名称
光電変換素子の製造法
3、補正をする者
事件との関係 特許出願人
東京都大田区中馬込1丁目3番6号
(674)株式会社リ コー
代表者 浜 1) 広
4、代理人
5、補正の対象
6、補正の内容
(1)明細書第5頁第18行: 「ポリ液化ビニリデン
」を「ポリ塩化ビニリデン」に訂正する。
(2) 同、第9頁第1行: 「ジ液化エチレン」を
rジ塩化エチレン」に訂正する。
(3) 同、第11頁第14行:
に訂正する。
以上1-c to 1-c are simplified diagrams showing the manufacturing process of the present invention. 1... Translucent plastic film base. S: Organic semiconductor layer, M: Front electrode metal layer. M2... Back electrode metal layer, A... Continuously coated part, B... Intermittently coated part Procedural amendment dated February 22, 1985 1, Case indication 1982 Patent Application No. 261630 2 , Name of the invention Method for manufacturing photoelectric conversion elements 3, Relationship with the case of the person making the amendment Patent applicant 1-3-6 Nakamagome, Ota-ku, Tokyo (674) Ricoh Co., Ltd. Representative Hama 1) Hiro 4, Agent 5, Subject of amendment 6, Contents of amendment (1) Page 5, line 18 of the specification: "Polyliquefied vinylidene" is corrected to "polyvinylidene chloride." (2) Same, page 9, line 1: "Diliquefied ethylene" is corrected to "r-dichlorinated ethylene." (3) Same, page 11, line 14: Corrected. that's all
Claims (1)
仕事関数φM_1)の層を幅方向に間隔を空けて薄い半
透明な電極E_1を連続的に形成する工程; (b)前記電極E_1上に有機光導電性顔料(仕事関数
φS)を主成分とする層を塗布により連続的もしくは間
欠的に設けて半導体層Sを形成する工程; (c)前記半導体層上に金属M_2(仕事関数φM_2
)の層を連続的もしくは間欠的に設けて電極E_2を形
成する工程;及び (d)前記電極E_1及び前記電極E_2に回路をつく
るためのリード線を電極E_1及び電極E_2が交叉し
て重なっていない部分より接続して設ける工程を有し、
前記仕事関数の関係がφM_1<φS<φM_2もしく
はφM_1>φS>φM_2であることを特徴とする光
電変換素子の製造法。[Claims] 1. In the method for manufacturing a photoelectric conversion element, (a) a metal M_1 (
Step of continuously forming a thin translucent electrode E_1 by spacing layers with work function φM_1) in the width direction; (b) forming an organic photoconductive pigment (work function φS) as a main component on the electrode E_1; step of forming a semiconductor layer S by continuously or intermittently providing a layer of metal M_2 (work function φM_2) on the semiconductor layer;
) forming the electrode E_2 by continuously or intermittently providing a layer; and (d) forming a lead wire for forming a circuit on the electrode E_1 and the electrode E_2 so that the electrode E_1 and the electrode E_2 intersect and overlap. It has a process of connecting and installing from a part that does not exist,
A method for manufacturing a photoelectric conversion element, characterized in that the relationship between the work functions is φM_1<φS<φM_2 or φM_1>φS>φM_2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59261630A JPS61139075A (en) | 1984-12-11 | 1984-12-11 | Manufacture of photoelectric conversion element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59261630A JPS61139075A (en) | 1984-12-11 | 1984-12-11 | Manufacture of photoelectric conversion element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61139075A true JPS61139075A (en) | 1986-06-26 |
Family
ID=17364560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59261630A Pending JPS61139075A (en) | 1984-12-11 | 1984-12-11 | Manufacture of photoelectric conversion element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61139075A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006013456A (en) * | 2004-05-14 | 2006-01-12 | Konarka Technologies Inc | Apparatus and method for manufacturing electronic component having at least one active organic layer |
-
1984
- 1984-12-11 JP JP59261630A patent/JPS61139075A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006013456A (en) * | 2004-05-14 | 2006-01-12 | Konarka Technologies Inc | Apparatus and method for manufacturing electronic component having at least one active organic layer |
JP2013084968A (en) * | 2004-05-14 | 2013-05-09 | Merck Patent Gmbh | Device and method for manufacturing electronic component with at least one active organic layer |
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