JPS61112641U - - Google Patents
Info
- Publication number
- JPS61112641U JPS61112641U JP20076684U JP20076684U JPS61112641U JP S61112641 U JPS61112641 U JP S61112641U JP 20076684 U JP20076684 U JP 20076684U JP 20076684 U JP20076684 U JP 20076684U JP S61112641 U JPS61112641 U JP S61112641U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- substrate storage
- jig
- storage jig
- horizontal reference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の一実施例を示す側断面図、第
２図は半導体基板収納治具の斜視図、第３図は従
来例を示す側断面図である。
１……保持溝、２……水平基準面。
FIG. 1 is a side sectional view showing an embodiment of the present invention, FIG. 2 is a perspective view of a semiconductor substrate storage jig, and FIG. 3 is a side sectional view showing a conventional example. 1... Holding groove, 2... Horizontal reference surface.
Claims (1)
平行に備えた半導体基板収納治具において、各保
持溝を、基板挿入口側から治具本体の水平基準面
に対し下傾姿勢に設けたことを特徴とする半導体
基板収納治具。 A semiconductor substrate storage jig with vertically parallel holding grooves into which semiconductor substrates are inserted and stored, each holding groove being tilted downward from the board insertion opening side with respect to the horizontal reference plane of the jig body. Semiconductor substrate storage jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20076684U JPS61112641U (en) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20076684U JPS61112641U (en) | 1984-12-27 | 1984-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61112641U true JPS61112641U (en) | 1986-07-16 |
Family
ID=30761922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20076684U Pending JPS61112641U (en) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61112641U (en) |
-
1984
- 1984-12-27 JP JP20076684U patent/JPS61112641U/ja active Pending
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