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JPS6111630Y2 - - Google Patents

Info

Publication number
JPS6111630Y2
JPS6111630Y2 JP4978380U JP4978380U JPS6111630Y2 JP S6111630 Y2 JPS6111630 Y2 JP S6111630Y2 JP 4978380 U JP4978380 U JP 4978380U JP 4978380 U JP4978380 U JP 4978380U JP S6111630 Y2 JPS6111630 Y2 JP S6111630Y2
Authority
JP
Japan
Prior art keywords
exhaust system
gas
sealed chamber
test
helium gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4978380U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56149936U (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4978380U priority Critical patent/JPS6111630Y2/ja
Publication of JPS56149936U publication Critical patent/JPS56149936U/ja
Application granted granted Critical
Publication of JPS6111630Y2 publication Critical patent/JPS6111630Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP4978380U 1980-04-10 1980-04-10 Expired JPS6111630Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4978380U JPS6111630Y2 (zh) 1980-04-10 1980-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4978380U JPS6111630Y2 (zh) 1980-04-10 1980-04-10

Publications (2)

Publication Number Publication Date
JPS56149936U JPS56149936U (zh) 1981-11-11
JPS6111630Y2 true JPS6111630Y2 (zh) 1986-04-12

Family

ID=29644747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4978380U Expired JPS6111630Y2 (zh) 1980-04-10 1980-04-10

Country Status (1)

Country Link
JP (1) JPS6111630Y2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017022349A1 (ja) * 2015-08-03 2017-02-09 株式会社ジェイ・イー・ティ センサユニット及び気密性検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017022349A1 (ja) * 2015-08-03 2017-02-09 株式会社ジェイ・イー・ティ センサユニット及び気密性検査装置
US10514315B2 (en) 2015-08-03 2019-12-24 J.E.T. Co., Ltd. Sensor unit and airtightness inspection device

Also Published As

Publication number Publication date
JPS56149936U (zh) 1981-11-11

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