JPS6079829U

JPS6079829U - piezoelectric vibrator

Info

Publication number: JPS6079829U
Application number: JP17125183U
Authority: JP
Inventors: 正喜岡崎
Original assignee: 日本電波工業株式会社
Priority date: 1983-11-07
Filing date: 1983-11-07
Publication date: 1985-06-03

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図ａは厚みすべり水晶振動片の斜視図、第１［ｆｆ
１ｂは第１図ａの厚みすべり水晶振動片による周波数−
アドミッタンス特性図である。第２図は板面に負荷質量
を施した水晶振動片の平面図である。第３図ａは本考案
を説明するための蒸着マスクの平面図、第３図すは第３
図ａの蒸着マスクを厚みすべり水晶板に被せ、前記水晶
板面に励振電極及び金属膜を形成する状態を示す断面図
である。第４図は第３図の蒸着マスクにより板面に励振
電極及び金属膜の形成された本考案の厚みすべり水晶振
動板である。第５図ａは第４図の金属膜上に負荷質量を
施した本考案の厚みすべり水晶振動板、第５図すは第５
図ａの断面図である。第６図は本考案の他の実施例であ
る。４．１２・・・負荷質量、５・・・厚みすべり水晶板、
６・・・蒸着マスク、７・・・励振電極形成孔、８・・
・金属膜形成孔、９・・・励振電極、１０・・・金属膜
、１１゜７１３・・・厚みすべり水晶振動板。Figure 1a is a perspective view of a thickness-shear crystal vibrating piece;
1b is the frequency of the thickness-shear crystal vibrating piece in Figure 1a.
It is an admittance characteristic diagram. FIG. 2 is a plan view of a crystal vibrating piece with a load mass applied to the plate surface. Figure 3a is a plan view of a vapor deposition mask for explaining the present invention;
FIG. 4 is a cross-sectional view showing a state in which the vapor deposition mask of FIG. FIG. 4 shows a thickness-shear crystal diaphragm of the present invention in which an excitation electrode and a metal film are formed on the plate surface using the vapor deposition mask of FIG. Figure 5a shows the thickness-shear crystal diaphragm of the present invention in which a load mass is applied on the metal film shown in Figure 4;
Figure a is a cross-sectional view of figure a; FIG. 6 shows another embodiment of the present invention. 4.12... Load mass, 5... Thickness sliding crystal plate,
6... Vapor deposition mask, 7... Excitation electrode formation hole, 8...
- Metal film forming hole, 9... Excitation electrode, 10... Metal film, 11°713... Thickness sliding crystal diaphragm.

Claims

[Scope of utility model registration request]

An excitation electrode and a metal film indicating the suppression position of the secondary vibration i are formed on the piezoelectric plate surface at the same time when the excitation electrode is formed, and a load mass is applied on the metal film indicating the suppression position of the secondary vibration i. Features a piezoelectric vibrator.