JPS6069847A - Photomagnetic recording medium - Google Patents
Photomagnetic recording mediumInfo
- Publication number
- JPS6069847A JPS6069847A JP17676983A JP17676983A JPS6069847A JP S6069847 A JPS6069847 A JP S6069847A JP 17676983 A JP17676983 A JP 17676983A JP 17676983 A JP17676983 A JP 17676983A JP S6069847 A JPS6069847 A JP S6069847A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- recording medium
- usually
- forming
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
- G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
Abstract
Description
【発明の詳細な説明】 本発明は光磁気記録媒体に関する。[Detailed description of the invention] The present invention relates to a magneto-optical recording medium.
光磁気記録は、垂直磁気記録の一種であり、光を磁性体
に照射してキューリ一点又は補償点以上の温度に加熱す
ることにより書き込みを行ない１．一方、光を磁性体に
照射して、その反射光又は透過光の偏光面の回転を検出
することにより、況み出しを行なう方式である。すなわ
ち、光を用いて一非接触的に消去、再書き込みできる市
否反記録方式として期待されている。Magneto-optical recording is a type of perpendicular magnetic recording in which writing is performed by irradiating a magnetic material with light and heating it to a temperature above the Curie point or compensation point.1. On the other hand, this is a method of irradiating a magnetic material with light and detecting the rotation of the polarization plane of the reflected or transmitted light. In other words, it is expected to be a non-contact recording method that can be erased and rewritten in a non-contact manner using light.
この光磁気記録の媒体として、ＭｎやＢｊが最初に提案
され、その後生として化学的な不安定さく酸化されやす
い）を改良するため、Ｃｕ等を添加する等の便覧がなさ
れている。Mn and Bj were first proposed as media for this magneto-optical recording, and subsequently, in order to improve their chemical instability and oxidation tendency, efforts were made to add Cu and the like.
このＭｎ ＋ Ｃｕ −Ｂｉ等の系の媒体は、：Ｕｌ’
、み出し出力が犬きく、化学的に安定であり、使用する
温度範囲で相転位がないという利点を有するが、形成し
た薄膜の熱処理により生じた結晶粒界の影響を受けやす
ぐ、媒体ノイズが生じやすい（Ｓ ／ Ｎ比が低下）と
いう難点をイＪする。This Mn + Cu - Bi etc. system medium is: Ul'
, it has the advantage of having a high protrusion output, being chemically stable, and having no phase dislocation in the temperature range used, but it is affected by the grain boundaries caused by the heat treatment of the formed thin film, and it easily causes media noise. However, the disadvantage is that it is easy for this to occur (reducing the S/N ratio).
本発明者らはこのような難点を改良し、さらに好適な光
磁気記録媒体を得るべく、神々検問し、本発明に到達し
た。The inventors of the present invention conducted extensive research in order to improve upon these difficulties and obtain a more suitable magneto-optical recording medium, and finally arrived at the present invention.
すなわち本発明は、基板上にＭｎ 、 Ｉｌｉ −Ｔｅ
及びＸ（ＸはＣｕ−Ｎｉ、Ｐｄ又はＲｈを表わす）を含
む薄膜を形成させてなる光磁気記録媒体にある。That is, the present invention provides Mn, Ili-Te on a substrate.
and X (X represents Cu--Ni, Pd, or Rh).
以下、本発明の詳細な説明する。The present invention will be explained in detail below.
寸ず、本発明に係る記録媒体における基板としては、特
に制限されず、ガラス、プラスチック（たとえば、アク
リル樹脂、ポリカーボネート佃脂）、金属（アルミニウ
ム）が用いられる。The substrate in the recording medium according to the present invention is not particularly limited, and glass, plastic (eg, acrylic resin, polycarbonate resin), and metal (aluminum) can be used.
本発明においては、これらの基板に、Ｍｎ、Ｂｉ＋Ｔｅ
及びｘ（ｘはＣｕ、 Ｎｉ −Ｐｄ、又はＲｈを表わす
）を含む薄膜を形成させる。In the present invention, Mn, Bi+Te are added to these substrates.
and x (x represents Cu, Ni-Pd, or Rh).
イオンブレーティング法等が採用される。Ion brating method etc. are adopted.
薄膜形成に際しては、上記Ｍｎ 、 Ｘ 、Ｂｉ、Ｔｅ
を同時に形成する方法、順次形成する方法のいずれを
も採用できる。When forming a thin film, the above Mn, X, Bi, Te
Either a method of forming them simultaneously or a method of forming them sequentially can be adopted.
Ｃｕ−Ｎｉ 、Ｐｄ及びＲｈは通常、一種類が用いられ
るが、二棟以上全混合、あるいは固溶体として、用いる
こともできる。One type of Cu--Ni, Pd, and Rh is usually used, but two or more of them can be mixed together, or they can also be used as a solid solution.
また、これらの成分に加えて、他の成分、たとえば−■
、Ｔ１等を添加することもできる。In addition to these ingredients, other ingredients such as -■
, T1, etc. can also be added.
Ｍｎ、Ｘ及びＢ１の組成比は、通常、化学量論的に決定
される。The composition ratio of Mn, X and B1 is usually determined stoichiometrically.
すなわち、ＸがＣｕのとき３ニゲニゲ（原子比）−Ｘが
Ｎｉ、Ｐｄ又はＲｈのときＳ：２ニゲ（原子比）程度が
選ばれる。That is, when X is Cu, the ratio is about 3 (atomic ratio) - when X is Ni, Pd, or Rh, S: 2 (atomic ratio) is selected.
Ｔｅは、Ｂｉに対し通常７〜１０原子係、好ましくけλ
〜７原子％程度から選定される。Te is usually 7 to 10 atoms relative to Bi, preferably λ
The content is selected from approximately 7 atomic %.
Ｍｎ ＋ ｘ−’Ｂｉ −Ｔｅからなる薄膜の厚みは、
通常１００Ｘ〜１ｓｏｏ久、好ましくば３００〜１００
０Ｘ程度から選ばれる。The thickness of the thin film made of Mn + x-'Bi-Te is
Usually 100X~1soo long, preferably 300~100
Selected from around 0X.
得られたＭｎ 、 Ｘ 、 Ｂｉ ｅ Ｔｅ 薄Ｊｇ上
には、好ましくは保護膜を常法により形成させる。A protective film is preferably formed on the obtained Mn, X, Bie Te thin Jg by a conventional method.
この保護膜としては、たとえば二酸化ケイ素、−酸化ケ
イ素等が挙げら扛、厚みは通常７００久〜／μ程度から
選ばれる。Examples of this protective film include silicon dioxide and silicon oxide, and the thickness is usually selected from about 700 μm to 1 μm.
得られた薄膜は、真空又は水素もしくは窒素等の非酸化
性雰囲気中で結晶化温度（たとえばＸ ： ＣｕＯとき
２ ｆ ５ ℃） 〜’ｄ ００℃ 程度で熱処理する
ことにより、結晶化、さらには含イ］成分の拡散による
均質化を図ることができる。The obtained thin film is subjected to a heat treatment in vacuum or in a non-oxidizing atmosphere such as hydrogen or nitrogen at a crystallization temperature (for example, 2 f 5 °C when [Contains (a)] It is possible to achieve homogenization by diffusion of the components.
本発明に係る光磁気記録媒体は、結晶粒界が小さく−特
に組成比が化学量論量より比較的はずれた場合でも結晶
粒界が犬きくならず、Ｔｅを含まない媒体に比して、Ｓ
／ Ｎ比において著しい差異がみられる。The magneto-optical recording medium according to the present invention has small grain boundaries - in particular, the grain boundaries do not become sharp even when the composition ratio is relatively far from the stoichiometric amount, and compared to a medium that does not contain Te. S
/ There is a significant difference in the N ratio.
すなわち、微視的スケールにおける均質性が大きいので
、媒体ノイズを著しく低減することができる。That is, since the homogeneity on the microscopic scale is large, media noise can be significantly reduced.
以下、実施例により本発明をさらに詳細に説明する。Hereinafter, the present invention will be explained in more detail with reference to Examples.
実施例１
水冷したスライドガラスを基板とし、その上にターゲッ
トとしてＣｕ円板を用い、その上に（Ｍｎチップ（約／
Ｃ１ｎ ）を数装置いて、Ｍｎ、Ｃｕを同時に高周波
スパッタリング（グ。ｗ、２×１Ｏ−６Ｐａ −Ａｒ圧
２ Ｐａ ） シ、膜厚、ｙｏｏＸ のＭｎ３Ｃｕ４薄
膜を形成させ、ついで旧円板上にＴｅテップ（５卿）を
数個おき、Ｂ１とＴｅ （Ｂｉ に対しＳ原子％）をさ
らにスパッタリング（２゜Ｗ＋、 ２ Ｘ ／ ０−”
Ｐａ 、 Ａｒ圧２ Ｐａ ） ｌ、、薄膜を形成さ
せた（ Ｂｉ 、 Ｔｅ膜厚３ｏｏＸ ）。Example 1 A water-cooled glass slide was used as a substrate, a Cu disk was used as a target on top of the substrate, and a (Mn chip (approx.
A thin Mn3Cu4 film with a film thickness of yooX was formed by simultaneous high-frequency sputtering (G, w, 2×1O-6Pa - Ar pressure 2 Pa) of Mn and Cu, and then a Te After several Teps (5 Lords) were placed, B1 and Te (S atomic % relative to Bi) were further sputtered (2°W+, 2X/0-"
A thin film was formed at a Pa, Ar pressure of 2 Pa) l (Bi, Te film thickness of 3ooX).
１％ ラレタ？ｖ１１！、￥（膜厚Ａ ００ Ａ ）
ＶＣｌ５１０２円板を用いてスパッタリング（Ａｒ圧、
２Ｐａ、ＪＸｌｏ−’ｐＨ６！ ＯＷ、／ ５分間、；
其＃＝１；、立件≠嘔ついでｉｏｏｗ−ｇｏ分間）し、
膜厚３０００′Ａの５ｉ０２保護膜を形成させた。1% Lareta? v11! , ¥ (film thickness A 00 A )
Sputtering (Ar pressure,
2Pa, JXlo-'pH6! OW, / 5 minutes;
It #=1;, filing a case ≠ vomiting ioow-go minutes),
A 5i02 protective film with a thickness of 3000'A was formed.
ついで水素雰囲気下に熱処理（３り。℃、７時間）した
。Then, heat treatment was performed under a hydrogen atmosphere (3°C, 7 hours).
得られた記録媒体のファラーデー回転角（θＦ〕は／グ
０（）＝乙ＪＪｎｍ）であった。The Faraday rotation angle (θF) of the obtained recording medium was /g0()=JJnm).
また、光学顕微鏡および電子顕徴税により観察したとこ
ろ、各成分がほぼ一様に分布していることがわかった。Furthermore, when observed using an optical microscope and electron microscope, it was found that each component was almost uniformly distributed.
なお、比較のために、Ｔｅ を添加しないで、実施例／
と同様の方法で得られた媒体（よ、大きな結晶粒界がみ
られた。For comparison, Example 2 was prepared without adding Te.
A medium obtained in the same manner as (large grain boundaries were observed).
実施例コ
実施例１におけるＣｕＯ代わりに、Ｎ１を使用した以外
は、実施例／と同様にしてＴｅ を含有するＭｎ５Ｎｉ
２Ｂ＋４ 薄膜（膜厚ｇｏｏＸ）を形ＩＪＬ サせた。Example Mn5Ni containing Te was prepared in the same manner as in Example 1, except that N1 was used instead of CuO in Example 1.
A 2B+4 thin film (thickness gooX) was applied to the IJL type.
ファラーデー回転角は。灯０（λ＝Ａ３Ｊｎｍ ）であ
った。What is the Faraday rotation angle? The light was 0 (λ=A3Jnm).
出願人 三菱化成工業株式会社 代理人 弁理士 長谷用 − ほか／名Applicant: Mitsubishi Chemical Industries, Ltd. Agent Patent Attorney Hase - Others/names
Claims (1)
Ｎｉ、Ｐｄ又はＲｈを表わす）を含む薄膜を形成させて
なる光磁気記録媒体。(1) Mn, old, Te and x (x, Cu,
A magneto-optical recording medium formed by forming a thin film containing Ni, Pd or Rh.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17676983A JPS6069847A (en) | 1983-09-24 | 1983-09-24 | Photomagnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17676983A JPS6069847A (en) | 1983-09-24 | 1983-09-24 | Photomagnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6069847A true JPS6069847A (en) | 1985-04-20 |
Family
ID=16019499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17676983A Pending JPS6069847A (en) | 1983-09-24 | 1983-09-24 | Photomagnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6069847A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0333205A2 (en) * | 1988-03-18 | 1989-09-20 | Kuraray Co., Ltd. | Optical recording medium |
-
1983
- 1983-09-24 JP JP17676983A patent/JPS6069847A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0333205A2 (en) * | 1988-03-18 | 1989-09-20 | Kuraray Co., Ltd. | Optical recording medium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6180640A (en) | Optical recording medium | |
| JPS6069847A (en) | Photomagnetic recording medium | |
| CN1013324B (en) | Magnetic optical disk memory alloy material and its preparation method | |
| KR900002797B1 (en) | The optical record carrver | |
| JPH01118239A (en) | Magneto-optical recording medium | |
| JPS61153827A (en) | Production of film for magnetic recording medium | |
| JPH09241835A (en) | Sputtering target made of sintered al alloy | |
| JPH04114929A (en) | Fusing glass composition | |
| JP2728715B2 (en) | Garnet-based magnetic material | |
| JP2842683B2 (en) | Soft magnetic thin film material | |
| JP2553145B2 (en) | Magneto-optical recording medium | |
| JPS63281250A (en) | Magnetooptics thin film material and manufacture thereof | |
| JPS62217441A (en) | Production of substrate for optical recording carrier | |
| JPS6394611A (en) | Manufacture of co amorphous magnetic film | |
| JPS6348636A (en) | Magneto-optical recording medium | |
| JPH01240650A (en) | Sputtering target | |
| JPS63317946A (en) | Production of magneto-optical recording medium | |
| JPH02194169A (en) | Production of target for sputtering | |
| JPS61168222A (en) | Thin film alloy target | |
| Rogalla | Hard magnetic two-phase Co-Cu thin films | |
| JPS62195743A (en) | Production of photomagnetic disk | |
| JPH0317825A (en) | Production of magnetic disk substrate made of titanium | |
| JPS62283431A (en) | Optical recording medium | |
| JPH02232837A (en) | Magneto-optical recording medium and its production | |
| JPS63140436A (en) | Composite oxide for thin recording medium film of phase change type optical disk |