JPS6052281A - Method of operating carrying box - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a transportation box for storing semiconductor wafers, etc.
It relates to a method of operating the lid, such as opening and closing.

[Technical background of the invention and its problems]

The semiconductor device manufacturing process will be explained as an example.

To transport the semiconductor wafers to each of the above manufacturing processes, a carrier box with a liner is used to store the semiconductor wafers due to the need for dustproofing. Conventionally, transporting the transport boxes and opening and closing the lids had to be done manually. However, as the degree of integration increases, the demand for a dust-free working environment increases, and in order to save labor and prevent operational errors, it is necessary to automate operations such as transporting the transport boxes. For this automation, operation by a robot could be considered, but it was necessary to achieve automation through simple movements of a robot hand.

[Purpose of the invention]

An object of the present invention is to provide an operation method that allows a transport box to be suitably operated by simple movements of a robot.

[Summary of the invention]

Press the concave tip from both sides against a pair of levered stops formed on both sides of the lid of the transport box until the end surfaces of both protrusions following the concave part of the tip are released until the above-mentioned stops are released. The tip is formed so as to come into close contact with the outer surface of the lid, making it easier for a robot hand to operate the lid of a transport box, for example.

[Embodiments of the invention]

The present invention will be explained based on drawings showing one embodiment.

In FIG. 1, (1) is a transport box main body (hereinafter abbreviated as container main body) for semiconductor wafers (2), and (3) is a lid of this container main body (1). A flange portion (4) is formed around the opening of the container body (1). In addition, the lid part (3
) has a covering part (5) formed on the peripheral edge thereof in contact with and covering the flange part, as shown in FIG. (6a) and (6b) are a pair of lever-equipped stops (hereinafter abbreviated as stops) that are provided opposite both sides of the lid (3) and integrally with the lid (3); A cutout (5a) formed by cutting out the covering portion (5) is formed at the installation location. In addition, these stops (6a), (6
b) is integrated with the covering part (5), and is made elastic by pressing the lever part (7) of the stopper (6a), (6b) using a part of the covering part (5) as a fulcrum. 1'1i after tilting to
-J is designed to do so. The above stopper (6a), (6
The lid part (3) is fixed to the container body (]) by locking the hook (8) to the flange ↑'11 ((4)). (9
a) and (9b) are robot hands having an angular cross-section and are attached to the arm end (10a) of the arm θO), and are driven to move toward and away from each other by a drive source (not shown).

Plate-shaped tip tools αI) are attached to their tips so as to face each other. As shown in FIG. 3, a recess θ which is slightly larger than the width of the stoppers (6a) and (6b) is formed. Recessed part (12)
The height of the protruding part 03), which is also the depth of 1, is 1, and the 4 parts are inserted into the stops (6a) and (6b) and pressed against them, and the hook (8) is As it comes off the flange portion (4), the tip end surface is brought into contact with the outer surface of the ring portion (3). (14) is the arm end (il
1) is a position detection sensor attached to the back side of the device. Note that this is a semiconductor wafer contained in the o511'i container body (1).

Next, a case will be described in which the container body (1) and the lid (3) are assembled and installed at a predetermined position, and the lid is automatically opened by a robot.

As shown in FIGS. 1 and 3 above, the position sensor (1
Based on the signal of 4), the tip (+1) hooks (6a),
Robot hand (9a) facing (6b),
(9b) is located at the location indicated by P1 in the figure. Next, close the robot hands (9a) and (9b) and move the recess (12) close to the stopper (6a) as shown in Figure 4.
), (6b) and press it as it is. Due to this pressing, the lever part (7) tilts around the covering part (5), and these hooks (8) are engaged with the flange part (4).
). Continuing the above pressing, insert the tip tool (1υ
Press the protrusion (1) against the side surface of the lid (3), and grip the lid (3) with the tip (II).

Therefore, after the above gripping, the robot hand (9a).

If (9b) is raised, only the lid part (3) can be removed.In this case, the opening tool (6a), (6b)
Since it is in elastic contact with the fourth part (9), it will not slip down during lifting or transport.

The operation of assembling the lid part (3) with the main body (1) is basically the reverse of the operation of opening the lid part (3) described above, but
) to the main body (1) from top to bottom.

In addition, in order to lift and transfer the assembled Fuyu (1) and lid (3), move the tip (8) to P2 as shown in Figure J1.
It can be transferred by placing the robot hands (9a) and (9b) close to the position and pressing the main body (1) with the tip (113 inserted into the notch (5a).
It is difficult for the tip of the tip (11) to get caught on the flange (4) and the container body (1) to fall during transfer by fitting into the container (a).

FIG. 5 is an example of a stopper (+7) according to another embodiment of the present invention, in which the upper part of the lever of the stopper is formed into an L-shaped bent part (+6). By transferring this folded portion f16) in a state where it is folded to the tip (II), an effect is obtained in which no pressing force is applied to the lid portion (3).

[Effect of lightening]

By operating a simple robot hand that can move toward and away from the robot and by changing its operating position, it has been possible to automatically open and close the lid of the transport box and transport the entire box.

[Brief explanation of drawings]

FIG. 1 is a diagram illustrating an embodiment of the present invention.
Figure 2 is a side view of the transport box, Figure 3 is an XF' plane view showing an embodiment of the tip, Figure 4 is a sectional view of the main part showing the opening operation of the lid, and Figure 5 is a side view of the transport box. FIG. 7 is a sectional view of a main part showing another embodiment of the present invention. (11... Transport box body (3)... Lid part (6a)
, (6b)...Stopper (8)...Hook (9a
); (9b)...Robot hand (9)...4 Part (11)...Tip tool agent Patent attorney Noriyuki Norichika (and 1 other person) Figure 1 Figure 2 Figure 3 Whistle 4 figure? Figure 5

Claims (2)

[Claims] (1) a container body having a flange portion at the opening; a lid portion having a covering portion covering the flange portion and mating with the container;
A pair of lever-equipped clasps are provided opposite to the notched portion of the sheathing portion, are supported so as to be elastically tilted and returned to the above-mentioned state, and when the above-mentioned return occurs, a pair of lever-equipped hooks are attached to the lower part of the flange portion. In preparation for this, the lever part of the pair of levered locking tools is pressed by the pair of concave tip tools from both sides, or the pressing is released to open/close and transfer the lid part or the notched part of the covering part. A method of operating a transport box, in which the container body or the lid portion transfers the container body by locking the pair of concave tip tools. (2) The transport box operating method according to claim 1, characterized in that the lunch for one portion of the lever is carried out using four parts of the concave tip tool.