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JPS6052918A - Magnetic memory medium - Google Patents

Magnetic memory medium

Info

Publication number
JPS6052918A
JPS6052918A JP16076583A JP16076583A JPS6052918A JP S6052918 A JPS6052918 A JP S6052918A JP 16076583 A JP16076583 A JP 16076583A JP 16076583 A JP16076583 A JP 16076583A JP S6052918 A JPS6052918 A JP S6052918A
Authority
JP
Japan
Prior art keywords
layer
magnetic
servo
oxide magnetic
magnetic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16076583A
Other languages
Japanese (ja)
Other versions
JPH0661129B2 (en
Inventor
Hideo Tanaka
英男 田中
Masamichi Tagami
勝通 田上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58160765A priority Critical patent/JPH0661129B2/en
Publication of JPS6052918A publication Critical patent/JPS6052918A/en
Publication of JPH0661129B2 publication Critical patent/JPH0661129B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To obtain a magnetic memory medium which excels in the high density record/reproduction and the S/N of a servo signal by forming the lower servo oxide magnetic and nonmagnetic layers and an upper data oxide magnetic layer on the surface of a nonmagnetic substrate. CONSTITUTION:A servo oxide magnetic layer 2 consisting mainly of gamma-Fe2O2 containing Co with the coercive force set preferably at 1,000-2,000 Oe is formed on the surface of a nonmagnetic substrate 1 made of glass, an Al alloy coated with an Ni-P alloy, etc. A nonmagnetic layer 3 of SiO2, AlO3, etc. is formed on the layer 2 with 0.2-0.8mu thickness. Then a thin film consisting mainly of Fe3O4 containing Co is provided on the layer 3. Then a heat treatment is carried out in the air to obtain an oxide magnetic layer 4 consisting mainly of gamma-Fe2O3 with the coercive force set preferably at 500-1,000 Oe. The data signals can be recorded to the layer 4 with high density. While the servo signals are recorded to the layer 2. Thus it is possible to obtain a magnetic recording medium which has a high SNR, high durability, etc.

Description

【発明の詳細な説明】 本発明は磁気記憶装置に用いられる磁気ディスク等の磁
気記憶体にかかわる。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic storage medium such as a magnetic disk used in a magnetic storage device.

磁気記憶装置における記録密度の向上は斯界の変わらぬ
趨勢であ)、これを実現するためには磁気記録体の薄層
化が不可欠である。
Improving the recording density in magnetic storage devices is a constant trend in this industry), and in order to achieve this, it is essential to make the magnetic recording medium thinner.

従来、磁気ディスクとしては酸化鉄微粒子とバインダー
の混合を基体上に塗布したいわゆるコーティング媒体が
広く用いられてきた。記録密度の増加にともないコーテ
ィング媒体の薄層化がなされているが、この厚さを数千
へ以下にし、しかも均一な記録再生特性を実現すること
はきわめて困難である。
Conventionally, so-called coating media, in which a mixture of iron oxide fine particles and a binder is coated on a substrate, have been widely used as magnetic disks. As recording density increases, coating media are becoming thinner, but it is extremely difficult to reduce the thickness to several thousand or less and to achieve uniform recording and reproducing characteristics.

そこでコーティ・ング媒体に代る高性能磁気記録体とし
て、薄層化が容易な連続薄膜媒体が注目されている。連
続薄膜媒体としてメッキ法により作製されたCo −N
i−Pメッキ磁気記録体が開発されているが、これと同
様に薄膜化が可能な酸化物磁性薄膜の方が磁気特性及び
耐食性、機械的強度等に関し優れている。
Therefore, continuous thin film media, which can be easily made thin, are attracting attention as high-performance magnetic recording media to replace coating media. Co-N prepared by plating method as continuous thin film medium
Although i-P plating magnetic recording bodies have been developed, oxide magnetic thin films, which can be made thin in the same way, are superior in terms of magnetic properties, corrosion resistance, mechanical strength, and the like.

このように磁気ディスク装置の記録密度は年々向上し、
現在装置として線密度についてはおよそ14000FR
PI、トラック密度はl100TPI()ラックピッチ
23.5pm )のものが最高である。従来、ディスク
のトラック上に情報を記録再生するデータヘッドのサー
ボ方式は、データを記録するディスクとは別に、サーボ
信号を記録したディスクを用いるサーボ面サーボ方式が
一般的であるが、サーボ面サーボ方式ではディスク間の
温度差による熱膨張の差の分だけ磁気ヘッドのトラック
位置決め精度が上げられないためにトラック密度の向上
に限界が生じてきている。
In this way, the recording density of magnetic disk devices has improved year by year,
The linear density of the current equipment is approximately 14,000 FR.
The highest PI and track density are those with a rack pitch of 1100 TPI (23.5 pm). Conventionally, the servo system for data heads that records and reproduces information on the tracks of a disk has generally been a servo surface servo system that uses a disk on which servo signals are recorded, separate from the disk on which data is recorded. In this method, the track positioning accuracy of the magnetic head cannot be increased by the difference in thermal expansion caused by the temperature difference between the disks, so there is a limit to the improvement in track density.

近年サーボ面サーボ方式と異なって、γ−Fe s O
S粒子を用いたコーティングディスクにおいて上下2層
の磁性層を使用し、下層にサーボ情報を記録し、上層に
データ情報を記録したデータ面サーボ方式(ベリードサ
ーボ方式)の実験結果が報告されている。
In recent years, unlike the servo surface servo method, γ-Fe s O
Experimental results have been reported on a data surface servo method (buried servo method) in which two magnetic layers, upper and lower, are used in a coated disk using S particles, with servo information recorded in the lower layer and data information recorded in the upper layer.

しかしながらγ−Fe 、0 、コーティングディスク
において磁性膜厚を薄くすることが困難なために(0,
5μmが限界と言われる)記録密度を大幅に増加させる
ことはむずかしく、さらに高密度記録再生時の対信号雑
音比(SNR)が小さいという欠点を有する。
However, since it is difficult to reduce the magnetic film thickness in γ-Fe,0 coating disks (0,
It is difficult to significantly increase the recording density (the limit is said to be 5 μm), and furthermore, the signal-to-noise ratio (SNR) during high-density recording and reproduction is low.

本発明の目的は、これらの問題点を改善して高密度記録
が可能で、かつSNRの良好なデータ面サーボ方式に適
する磁気記憶体を提供することにあり、その基本構成は
スパッタ法を用いた磁気2重層磁気記憶体において、非
磁性層を介して上層のデータ用磁性薄膜及び下層のサー
ボ用磁性膜厚に酸化物連続薄膜を使用したことにあシベ
リードサーボ用磁気記憶体として極めて優れた特性を有
している。
The purpose of the present invention is to improve these problems and provide a magnetic memory body that is capable of high-density recording and has a good SNR and is suitable for a data surface servo system.The basic structure thereof uses a sputtering method. The use of a continuous oxide thin film for the upper data magnetic thin film and the lower servo magnetic film through a non-magnetic layer in the double-layer magnetic storage material made it extremely excellent as a magnetic storage material for secondary read servo. It has certain characteristics.

すなわち本発明によれば非磁性基体と、この基体を被覆
する下層酸化物磁性層と、この酸化物磁性層を被覆する
非磁性層と、この非磁性層を被覆する上層酸化物磁性層
とを含むことを特徴とする磁気記憶体が提供される。
That is, according to the present invention, a nonmagnetic substrate, a lower oxide magnetic layer covering this substrate, a nonmagnetic layer covering this oxide magnetic layer, and an upper oxide magnetic layer covering this nonmagnetic layer are provided. A magnetic storage body is provided, characterized in that it includes:

非磁性基体としては、ガラス、アルマイト被覆アルミニ
ウム合金、またはニッケル・リン合金被覆アルミニウム
合金を表面研摩した基体等が適し、これを被覆する下層
酸化物磁性層としてはCo等の添加物を含むγ−Fe 
s Om を主成分とする、もしくはr−Fe2O2と
Fe、0.の中間組成物を主成分とする酸化鉄磁性層が
適し、これを被株する非磁性層としてはS io、 、
 Al*o、 、 a−Fe、O,等があシ厚さは0.
2〜0.8μmが好ましい。これを被覆する上層酸化物
磁性層はCo等の添加物を含むγ−Fe * 0 。
Suitable non-magnetic substrates include glass, alumite-coated aluminum alloys, or nickel-phosphorus alloy-coated aluminum alloys whose surfaces have been polished, and the lower oxide magnetic layer covering this is γ- containing additives such as Co. Fe
s Om as the main component, or r-Fe2O2 and Fe, 0. An iron oxide magnetic layer containing an intermediate composition as a main component is suitable, and as a non-magnetic layer containing this, S io, ,
Al*o, , a-Fe, O, etc. have a thickness of 0.
2 to 0.8 μm is preferable. The upper oxide magnetic layer covering this is γ-Fe*0 containing additives such as Co.

もしくはγ−Fe、0.とFe、04の中間組成物を主
成分とする酸化鉄磁性層が適する。下層酸化物磁性層に
サーボ信号を上層酸化鉄磁性層にデータ信号が記録され
る。下層酸化物磁性層は、上層酸化物磁性層にデータ信
号が記録される際ヘッド磁界の影響がないように100
0から20000e までの保磁力が好ましく、一方上
層酸化物磁性層はデータ信号が書き易くかつ高密度に記
録できるために500〜10000e が好ましくこれ
によシ高トラック密度時のサーボ信号のSNR及びデー
タ信号のSNRが向上するのでSNHの良好なデータ面
サーボ方式を可能にすることが出来る。
or γ-Fe, 0. An iron oxide magnetic layer mainly composed of an intermediate composition of Fe,04 and Fe,04 is suitable. Servo signals are recorded in the lower oxide magnetic layer and data signals are recorded in the upper iron oxide magnetic layer. The lower oxide magnetic layer has a thickness of 100% so that there is no influence of the head magnetic field when data signals are recorded on the upper oxide magnetic layer.
A coercive force of 0 to 20,000 e is preferable, while a coercive force of 500 to 10,000 e is preferable for the upper oxide magnetic layer because data signals can be easily written and recorded at high density. Since the SNR of the signal is improved, a good data plane servo system for SNH can be realized.

以下本発明による磁気記憶体の特徴を実施例によシ説明
する。
The features of the magnetic storage body according to the present invention will be explained below using examples.

実施例 本実施例の磁気記憶体の構造を図に示した。非磁性基体
1としてアルミニウム合金基板にアルマイト被覆し、そ
れを鏡面研摩したものを用い、この上にコバルトを重量
パーセントで2.0%から40%及び銅を2g6含むF
e、O,をターゲットとし、アルゴン雰囲気中でスパッ
タ圧力4X 10−’Torr 。
Example The structure of the magnetic storage body of this example is shown in the figure. As the non-magnetic substrate 1, an aluminum alloy substrate coated with alumite and mirror-polished was used, and on this was F containing 2.0% to 40% by weight of cobalt and 2g6 of copper.
The sputtering pressure was 4X 10-'Torr in an argon atmosphere using e, O, as a target.

スパッタ電力2.0 KWで膜厚0.2μmから05μ
mのF e * 04を主成分とする酸化鉄磁性薄膜を
形成し、これを大気中300℃で1時間酸化し下層酸化
物磁性層2を得た。これは膜厚がおよそo、25μmま
ではγ−Fe 、0 、を主成分とする酸化鉄磁性薄膜
であったが、それ以上のものはγ−Fe、04とFe 
、04の中間組成物を主成分とする酸化物磁性薄膜でち
りこれらの磁性膜の保持力は100”0−Oeから20
000eであった。
Film thickness from 0.2μm to 05μ with sputtering power 2.0KW
An iron oxide magnetic thin film containing Fe*04 as a main component was formed, and this was oxidized in the atmosphere at 300° C. for 1 hour to obtain a lower oxide magnetic layer 2. This was an iron oxide magnetic thin film whose main component was γ-Fe, 0, up to a film thickness of approximately 0 and 25 μm;
The coercivity of these magnetic films ranges from 100"0-Oe to 20" 0-Oe.
It was 000e.

次に下層酸化物磁性層2の上に非磁性層3として5in
sを膜厚0.2μmから08μm形成し、この上にコバ
ルトを重量パーセントで13%から20%及び銅を29
6含むFe104ターゲツトを用いて、アルゴン雰囲気
中でスパッタ圧力4X10−’Torr、スパッタ電力
1.75KIVで膜厚0.1pmから0.2pmのF 
e s Oaを主成分とする酸化鉄磁性薄膜を形成し、
これを大気中275℃で1時間酸化してγ−FesOs
を主成分とする上層酸化物磁性層4を形成した。
Next, a 5-inch nonmagnetic layer 3 is formed on the lower oxide magnetic layer 2.
s with a thickness of 0.2 μm to 0.8 μm, and on top of this, 13% to 20% by weight of cobalt and 29% of copper.
Using a Fe104 target containing 0.6 to 100% F, a film thickness of 0.1 pm to 0.2 pm was formed in an argon atmosphere at a sputtering pressure of 4 x 10-' Torr and a sputtering power of 1.75 KIV.
Forming an iron oxide magnetic thin film mainly composed of e s Oa,
This was oxidized in the air at 275°C for 1 hour to produce γ-FesOs.
An upper oxide magnetic layer 4 containing as a main component was formed.

この様にして得られた磁気記録体の上層酸化物磁性層4
に記録したデータ信号の記録密度は、磁気ヘッドのギャ
ップ長0.15μmから1.0μmでI)s。
Upper oxide magnetic layer 4 of the magnetic recording body thus obtained
The recording density of the data signal recorded in I)s is when the gap length of the magnetic head is 0.15 μm to 1.0 μm.

(孤立波出力の1/2となる再生出力の記録密度)が2
5〜66 KFRP IでSNRの良好な高密度特性が
得られた。また下層酸化物磁性層2に記録したサーボ信
号のSNRは下層酸化物磁性層2が高保磁力磁性層であ
るためにCo −N i−Pメッキ型磁性媒体に比して
4〜5dB改善出来た。
(Recording density of reproduction output that is 1/2 of solitary wave output) is 2
High density characteristics with good SNR were obtained with 5 to 66 KFRP I. In addition, the SNR of the servo signal recorded in the lower oxide magnetic layer 2 was improved by 4 to 5 dB compared to the Co-N i-P plated magnetic medium because the lower oxide magnetic layer 2 is a high coercive force magnetic layer. .

以上、実施例で示されたように、磁気2重層ディスクに
よシデータ面サーボ方式を実現する時、上層及び下層の
磁性層にコバルトをドープしたγ−Fe、0.をスパッ
タ法によシ作製した磁性媒体を用いることによシデータ
信号の高密度化とサーボ信号の高SNR化が可能となっ
た。
As shown in the examples above, when realizing the lateral servo system on a magnetic double layer disk, the upper and lower magnetic layers are made of γ-Fe doped with cobalt, 0. By using a magnetic medium produced by sputtering, it has become possible to increase the density of the data signal and increase the SNR of the servo signal.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明の実施例で用いた磁気記憶体の断面図である
。 1は非磁性基板で、2はサーボ信号の記録用の下層酸化
物磁性層で、3は非磁性層、4はデータ信号の記録用の
上層酸化物磁性層である。
The figure is a cross-sectional view of a magnetic memory used in an example of the present invention. 1 is a nonmagnetic substrate, 2 is a lower oxide magnetic layer for recording servo signals, 3 is a nonmagnetic layer, and 4 is an upper oxide magnetic layer for recording data signals.

Claims (2)

【特許請求の範囲】[Claims] (1) 非磁性基体と、この基体を被覆する下層酸化物
磁性層と、この酸化物磁性層を被覆する非磁性層と、こ
の非磁性層を被覆する上層酸化物磁性層とを含むことを
特徴とする磁気記憶体。
(1) Includes a non-magnetic substrate, a lower oxide magnetic layer covering this substrate, a non-magnetic layer covering this oxide magnetic layer, and an upper oxide magnetic layer covering this non-magnetic layer. Characteristic magnetic memory.
(2)磁気記憶体の下層酸化物磁性層の保磁力が100
0エルステツドから20000eであシ上層酸化物磁性
層の保磁力が500エルステツドから1000エルステ
ツドの間であることを特徴とする特許請求の範囲第1項
記載の磁気記憶体。
(2) The coercive force of the lower oxide magnetic layer of the magnetic memory is 100
2. A magnetic storage body according to claim 1, wherein the coercive force of the upper oxide magnetic layer is between 500 and 1000 Oe.
JP58160765A 1983-09-01 1983-09-01 Magnetic storage Expired - Lifetime JPH0661129B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58160765A JPH0661129B2 (en) 1983-09-01 1983-09-01 Magnetic storage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58160765A JPH0661129B2 (en) 1983-09-01 1983-09-01 Magnetic storage

Publications (2)

Publication Number Publication Date
JPS6052918A true JPS6052918A (en) 1985-03-26
JPH0661129B2 JPH0661129B2 (en) 1994-08-10

Family

ID=15721969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58160765A Expired - Lifetime JPH0661129B2 (en) 1983-09-01 1983-09-01 Magnetic storage

Country Status (1)

Country Link
JP (1) JPH0661129B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0725062B2 (en) * 1989-08-02 1995-03-22 インターナショナル ペーパー カンパニー Apparatus and method for manufacturing liners for semi-finished diskettes
US9402426B2 (en) 2008-04-10 2016-08-02 Asics Corporation Upper garment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS531505A (en) * 1976-06-28 1978-01-09 Hitachi Ltd High density information recording medium and preparation thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS531505A (en) * 1976-06-28 1978-01-09 Hitachi Ltd High density information recording medium and preparation thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0725062B2 (en) * 1989-08-02 1995-03-22 インターナショナル ペーパー カンパニー Apparatus and method for manufacturing liners for semi-finished diskettes
US9402426B2 (en) 2008-04-10 2016-08-02 Asics Corporation Upper garment

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JPH0661129B2 (en) 1994-08-10

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