JPS6043486A - Wear-resistant "sendust(r)" alloy and its production - Google Patents
Wear-resistant "sendust(r)" alloy and its productionInfo
- Publication number
- JPS6043486A JPS6043486A JP58148826A JP14882683A JPS6043486A JP S6043486 A JPS6043486 A JP S6043486A JP 58148826 A JP58148826 A JP 58148826A JP 14882683 A JP14882683 A JP 14882683A JP S6043486 A JPS6043486 A JP S6043486A
- Authority
- JP
- Japan
- Prior art keywords
- alloy
- sendust
- diamond
- wear
- sendust alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
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- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Soft Magnetic Materials (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、Fe −5i−AI系高透磁率合金、所謂セ
ンダスト系合金の改良に関し、特(二従来のセンダスト
系合金の表面を耐摩耗性の薄膜で被監することにより、
磁気特性を損うことなく、高度の耐摩耗性を具備せしめ
たものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to the improvement of Fe-5i-AI based high magnetic permeability alloys, so-called sendust alloys, and particularly (2) improving the wear resistance of the surface of conventional sendust alloys. By being supervised by a thin film of
It has a high degree of wear resistance without impairing its magnetic properties.
センダスト系合金は、磁気特性、特に磁束密度が高く、
透磁率にすぐれ高周波における透磁率も大きく、かつ大
気中での耐食性が良好であるという緒特性を有するので
、ステレオやVTRなどにおいて、高度の磁気特性の要
不される電子機器などの磁気ヘッドコア用の好適な杓右
として注目されている。Sendust alloys have high magnetic properties, especially magnetic flux density,
It has excellent magnetic permeability, high magnetic permeability at high frequencies, and good corrosion resistance in the atmosphere, so it is suitable for magnetic head cores in stereos, VTRs, and other electronic devices that do not require high magnetic properties. It is attracting attention as a suitable ladle.
しかしながら、従来のセンダスト系合金は、耐摩耗性に
劣り1例えはセンダスト系合金から成る磁気へラドコア
は磁気テープとの接触により損耗減肉し、接触度の低下
などにより録音・再生感度が悪化し、長期間にわたり良
好な性能を維持することはQJ aであった。特に放送
用VTRなどの場合は磁気テープと磁気ヘッドとの相対
速度が速いため、上記問題が深刻化していた。However, conventional Sendust-based alloys have poor wear resistance, and for example, magnetic helad cores made of Sendust-based alloys are subject to wear and thinning due to contact with the magnetic tape, resulting in poor recording and playback sensitivity due to a decrease in the degree of contact. , QJ a maintained good performance over a long period of time. In particular, in the case of broadcasting VTRs, etc., the relative speed between the magnetic tape and the magnetic head is high, so the above problem becomes more serious.
これに対処するため、これまでにもCrを添加して合金
表面に不働態皮膜を形成させるようにしたものやTi
、 Zr 、希土類元素等を添加したもの等が提案され
ている。しかしながら、これらの方法では、耐摩耗性が
やや向上するものの、安定な長期間の使用のためにはな
お十分満足し得るものではなかった。To deal with this, so far, Cr has been added to form a passive film on the alloy surface, and Ti
, Zr, rare earth elements, etc. have been proposed. However, although these methods slightly improve wear resistance, they are still not fully satisfactory for stable long-term use.
本発明はかかる従来の問題点に鑑みなされたもので、優
れた耐摩耗性を有するセンダスト系合金−およびその製
造方法を提供するものである。The present invention was made in view of these conventional problems, and provides a sendust alloy having excellent wear resistance and a method for producing the same.
本発明に用いるセンダスト系合金の代表組成としては1
重量比でケイ素9.6%、アルミニウム5.4%、残部
鉄からなるものであるがケイ素、アルミニウムの組成を
若干変化させたものあるいはCr 、Zrなどの第3元
素を添加したものでもよい。The typical composition of the sendust alloy used in the present invention is 1
Although it is composed of 9.6% silicon, 5.4% aluminum, and the balance iron in weight ratio, it may be possible to slightly change the composition of silicon and aluminum, or to add a third element such as Cr or Zr.
本発明は硬質カーボンもしくはダイヤモンドが極めて硬
く、しかも比較的容易に膜状のものが合成できる事実に
着目してなされたものである。センタスト系合金の表面
に硬質カーボンもしくはダイヤモンドのうち少なくとも
一種がら成る薄膜な形成すると該薄膜の硬度が極めて大
きく1通常の使用条件下では該薄膜の摩耗は殆ど見られ
ない。The present invention was made by focusing on the fact that hard carbon or diamond is extremely hard and can be synthesized into a film-like material relatively easily. When a thin film made of at least one of hard carbon and diamond is formed on the surface of a Centast alloy, the hardness of the thin film is extremely high, and almost no wear is observed under normal usage conditions.
従ってセンダスト系合金基体も摩耗を受けない。Therefore, the sendust alloy substrate is also not subject to wear.
一般に摩耗の発生機構としては原子あるいは分子レベル
で考えると物体の表面の広い面積にわたって強い摩擦力
が作用した時に摩耗に到るのであるから、上記薄膜もセ
ンダスト系合金表面全面にわたって微視的に緊密に形成
されている必要はなく、巨視的な意味で全面に形成され
ておれば、充分その機能を発揮するものの、相手材の損
耗を最小にするためには、微視的に緊密な方が望ましい
。In general, when considering the mechanism of wear at the atomic or molecular level, wear occurs when a strong frictional force acts over a wide area of the surface of an object, so the thin film mentioned above also microscopically closes over the entire surface of the sendust alloy. It does not have to be formed on the entire surface in a macroscopic sense, and the function will be fully exerted if it is formed on the entire surface, but in order to minimize wear and tear on the mating material, it is better to be microscopically tight. desirable.
次に本発明に係る耐摩耗センダスト系合金の製造方法に
ついて述べる。メタンやベンゼンなどの炭化水素ガスや
炭素を熱、マイク日波放電もしくはイオンビーム等によ
って活性化し、センダスト系合金に作用させると前記セ
ンダスト系合金の表面に硬質カーボンもしくはダイヤモ
ンドのうち少なくとも一種が蒸着する。この場合、前記
センダスト系合金表面上で蒸着が一様に進行して、硬質
カーボンもしくはダイヤそンドのうち少なくとも一種か
ら成る薄膜が均一に成長するように、前記活性化された
炭化水素ガスもしくは炭素とセンダスト系合金との相対
位置を変えるようにする。前記活性化された炭化水素ガ
スもしくは炭素からの硬質カーボンもしくはダイヤモン
ドのうち少なくとも一種が析出する機構は現在の所、明
らかではないが、おそらく炭化水素ガスや炭素を前記手
段で活性化するとsP3混成軌道を有する原子状炭素が
生成し、センダスト系合金などの基体の柚媒作用により
、該基体の表面にSP8混成軌道を保持したまま析出す
るものと思われる。現存する物質の中で最も硬いダイヤ
モンドがsPs混成軌道炭素の集積体であることから推
定されるように、sP3混成軌道の炭素同士の結合は一
般に硬度の大きい物質になるものと考えられる。Next, a method for manufacturing a wear-resistant sendust alloy according to the present invention will be described. When hydrocarbon gas such as methane or benzene or carbon is activated by heat, microwave solar discharge, ion beam, etc. and allowed to act on the sendust alloy, at least one of hard carbon or diamond is deposited on the surface of the sendust alloy. . In this case, the activated hydrocarbon gas or carbon is used so that the vapor deposition progresses uniformly on the surface of the sendust-based alloy and a thin film of at least one of hard carbon and diamond grows uniformly. and the relative position of the sendust alloy. At present, the mechanism by which at least one of hard carbon or diamond is precipitated from the activated hydrocarbon gas or carbon is not clear, but it is probably that when the hydrocarbon gas or carbon is activated by the above method, the sP3 hybrid orbital is formed. It is thought that atomic carbon having the following properties is generated, and is precipitated on the surface of the substrate while maintaining the SP8 hybrid orbital due to the medium action of the substrate such as the sendust alloy. As estimated from the fact that diamond, the hardest existing material, is an aggregate of sPs hybrid orbital carbons, it is thought that bonds between carbons in the sP3 hybrid orbital generally result in a material with high hardness.
本発明により、耐摩耗性が優れたセ゛′ンダスト系合金
が得られることは明らかである。従って該センダスト系
合金の寿命ψ性能は大幅に向上する。It is clear that the present invention provides a dust-based alloy with excellent wear resistance. Therefore, the life ψ performance of the sendust alloy is greatly improved.
製造方法も極めて簡単であり、従来のセンダスト系合金
部品の製造工程後に本発明に係る製造方法を施工するこ
ともできるので、従来の工程を大幅に変更する必要はな
い。The manufacturing method is also extremely simple, and the manufacturing method according to the present invention can be implemented after the manufacturing process of conventional sendust-based alloy parts, so there is no need to significantly change the conventional process.
硬質カーボンもしくはダイヤモンドのうち少なくとも一
種から成る薄膜は大気中での耐食性も優れているので、
本発明に係るセンダスト系合金は。Thin films made of at least one of hard carbon or diamond have excellent corrosion resistance in the atmosphere, so
The sendust alloy according to the present invention is.
従来のセンダスト系合金に比し、大気中耐食性の観点で
ほぼ同等である。Compared to conventional sendust alloys, it has almost the same corrosion resistance in the atmosphere.
センダスト系合金の主たる用途の一つである磁気へラド
コアとしての使用において、該磁気ヘッドコアは、磁気
テープ(通常、有機系合成樹脂製であり、塩素イオンC
I−を溶出するととが多い)と接触し溶出CI−によっ
て腐食されるが1本発明に係るセンダスト系合金は、
CI−に対する耐食性にも優れており、実使用条件下で
卓越した性能を保持する。In the use as a magnetic head core, which is one of the main uses of Sendust alloys, the magnetic head core is made of magnetic tape (usually made of organic synthetic resin, containing chloride ions, carbon dioxide, etc.).
The sendust alloy according to the present invention is corroded by the eluted CI- when it comes into contact with the eluted CI-.
It also has excellent corrosion resistance against CI- and maintains excellent performance under actual usage conditions.
以下、実施例を用いて本発明を説明するがとの実施例は
本発明を何ら制約するものではない。Hereinafter, the present invention will be explained using Examples, but the Examples are not intended to limit the present invention in any way.
センダスト系合金の表面を#:10,000の酸化鉄粉
で仕上げ研摩したのち水、エタノールで洗浄後。After finishing and polishing the surface of the Sendust alloy with #10,000 iron oxide powder, it was washed with water and ethanol.
乾燥した。こうして得られたセンダスト系合金の表面に
第1図に示す装置系を用いて硬質カーボンもしくはダイ
ヤモンドのうち少なくとも一種から成る薄膜を次の如く
形成した。センダスト系合金1を容器6に入れ、該セン
ダスト合金の両端を可動支持棒2で担持してから容器6
の内部を排気口4から排気した。次に可動支持往2を通
じて電流を流すことにより、センダスト系合金1を約2
0θ〜700℃に通電加熱した。次いでタングステンフ
ィラメント5に電流を通じて約2200 ”Ol二加熱
後、ガス人口3からメタンを送入した。メタンはタング
ステンフィラメント5によって加熱活性化され、センダ
スト系合金1上に硬質カーボンもしくはダイヤモンドと
して膜状に析出した。この析出過程中、可動支持棒2を
用いて例えば平板状のセンダスト系合金ならばy−z平
面でゆっくりと移動することにより所定の表面全体に薄
い硬質カーボンもしくはダイヤモンドのうち少なくとも
一種から成る薄膜を形成した(とこで、センダスト系合
金lとタングステンフィラメント5とを結、ぶ軸をX軸
、二つの可動支持棒2を結ぶ軸をy軸、X軸とy軸との
両軸に対して垂直な軸を2軸とする)。Dry. A thin film made of at least one of hard carbon and diamond was formed on the surface of the Sendust alloy thus obtained using the apparatus shown in FIG. 1 in the following manner. The sendust alloy 1 is placed in a container 6, both ends of the sendust alloy are supported by the movable support rods 2, and then the sendust alloy is placed in the container 6.
The inside of the was exhausted from the exhaust port 4. Next, by passing an electric current through the movable support 2, the sendust alloy 1 is
Electrical heating was carried out at 0θ to 700°C. Next, an electric current was passed through the tungsten filament 5 to heat it to about 2,200" O2, and then methane was introduced from the gas port 3. The methane was heated and activated by the tungsten filament 5, and formed into a film as hard carbon or diamond on the sendust alloy 1. During this precipitation process, the movable support rod 2 is used to slowly move, for example, a flat plate-shaped sendust alloy in the y-z plane, so that at least one of thin hard carbon or diamond is deposited over the entire predetermined surface. (Here, the axis connecting the sendust alloy l and the tungsten filament 5 is the X axis, the axis connecting the two movable support rods 2 is the y axis, and both the X and y axes are The axis perpendicular to this is the 2nd axis).
他の形状のセンダスト系合金でも適切な方法により均一
な薄膜の形成が可能である。例えば丸棒状のセンダスト
系合金の場合は、可動支持棒2を用いて該センダスト系
合金をその長袖回りにゆっくりと回転しながら、長軸方
向と平行にゆっくりと移動することにより該センダスト
系合金の外面全体に薄い硬質カーボンもしくはダイヤモ
ンドのうち少なくとも一種から成る薄膜を形成すること
ができる。薄膜が硬質カーボンもしくはダイヤモンドの
うち少なくとも一種から成ることは、オージェ電子分光
、電子線回折等によって確認した。こうして得られた本
発明に係るセンダスト系合金の耐摩耗性を調べるため市
販の磁気テープに対する大気中での耐摩耗性を、接触圧
力0.5 MPa、速度7 m/ s 、摩擦距離30
00 kmの条件下で試験した。Even with other shapes of sendust alloys, it is possible to form a uniform thin film using an appropriate method. For example, in the case of a round rod-shaped Sendust alloy, the Sendust alloy is slowly rotated around its long sleeve using the movable support rod 2, and slowly moved parallel to the long axis direction. A thin film of at least one of hard carbon and diamond can be formed over the entire outer surface. It was confirmed by Auger electron spectroscopy, electron beam diffraction, etc. that the thin film was made of at least one of hard carbon and diamond. In order to investigate the wear resistance of the Sendust alloy according to the present invention thus obtained, the wear resistance in the atmosphere against a commercially available magnetic tape was measured at a contact pressure of 0.5 MPa, a speed of 7 m/s, and a friction distance of 30.
Tested under conditions of 0.00 km.
その結果、摩耗量は1 mg/dm2で、ありまた該セ
ンダスト系合金の表面状態は試験前後で殆ど変化せず、
優れた耐摩耗性を示すことが明らかになった。As a result, the amount of wear was 1 mg/dm2, and the surface condition of the sendust alloy hardly changed before and after the test.
It has been revealed that it exhibits excellent wear resistance.
比較のため、従来のセンダスト系合金の耐摩耗性を同様
に調べた所摩耗量は800 mg/dm2であった。For comparison, the wear resistance of a conventional sendust alloy was similarly investigated and the wear amount was 800 mg/dm2.
さらに本発明に係るセンダスト系合金の磁気特性は、従
来の一般センダスト系合金とほぼ同等のレベルにあり例
えば1 kHzにおける実効透磁率は51.000の値
を示した。Furthermore, the magnetic properties of the sendust alloy according to the present invention are at a level almost equivalent to that of conventional general sendust alloys, and the effective magnetic permeability at 1 kHz, for example, showed a value of 51.000.
以上のことから明らかなように本発明に係る耐摩耗セン
ダスト系合金の製造方法は極めて簡単でかつ安価である
。また本発明によって得られる耐摩耗センダスト系合金
は優れた耐摩耗性を発揮し例えばステレオやVTRなど
の高度な耐摩耗性を要求される磁気へラドコア用の材料
として好適である。As is clear from the above, the method for manufacturing the wear-resistant sendust alloy according to the present invention is extremely simple and inexpensive. Further, the wear-resistant sendust alloy obtained by the present invention exhibits excellent wear resistance and is suitable as a material for magnetic helad cores that require high wear resistance, such as stereos and VTRs.
なお、上記実施例において、可動支持棒2を通じて電流
を流すことにより、センダスト系合金1を約200〜7
00℃に通電加熱したのは、硬質カーボンもしくはダイ
ヤモンドが該センダスト系合金表面上に均一かつ迅速に
析出するのを促進するためである。また温度を200℃
〜700℃に限定したのは200℃未満の温度では所望
の厚さの薄膜を得るのに長時間かかり、 700℃を越
えると副生成物の混入や膜厚の不所望な増大が見られ、
得られるセンダスト系合金の磁気特性が低下することが
認められたためである。In the above example, by passing an electric current through the movable support rod 2, the sendust alloy 1 was heated to about 200 to 7
The reason for heating with electricity to 00° C. is to promote uniform and rapid precipitation of hard carbon or diamond on the surface of the sendust alloy. Also, increase the temperature to 200℃
The reason for limiting the temperature to ~700°C is that at temperatures below 200°C, it takes a long time to obtain a thin film of the desired thickness, and when it exceeds 700°C, by-products may be mixed in and the film thickness may increase undesirably.
This is because it was observed that the magnetic properties of the resulting sendust alloy were reduced.
以上、センダスト系合金について述べてきたが。So far, I have talked about sendust alloys.
その化パーマロイフェライトなど耐摩耗性を要求される
磁気材料についても本発明に係る製造方法を適用し、耐
摩耗性が優れたものを得ることができる。また結晶質合
金に限らず、非晶質合金についても1本発明に係る製造
方法により、耐摩耗性が優れたものが得られる。The manufacturing method of the present invention can also be applied to magnetic materials that require wear resistance, such as permalloy ferrite, to obtain materials with excellent wear resistance. Moreover, not only crystalline alloys but also amorphous alloys can be produced with excellent wear resistance by the manufacturing method according to the present invention.
第1図は本発明に係る耐摩耗センダスト系合金を製造す
るための装置系統を示す概略図である。
1・・センダスト系合金2・・可動支持棒3・・ガス入
口 4・排気口FIG. 1 is a schematic diagram showing an apparatus system for producing a wear-resistant sendust alloy according to the present invention. 1. Sendust alloy 2. Movable support rod 3. Gas inlet 4. Exhaust port
Claims (2)
はダイヤモンドのうち少なくとも一種から成る薄膜を具
備したことを特徴とする耐摩耗センダスト系合金。(1) A wear-resistant Sendust alloy characterized by having a thin film made of at least one of hard carbon and diamond on the surface of the Sendust alloy.
なくとも一種をセンダスト系合金に作用させながら、該
作用地点を変えることにより、前記センダスト系合金の
表面に硬質カーボンもしくはダイヤモンドのうち少なく
とも一種から成る゛薄膜を均−C二形成することを特徴
とする耐摩耗センダスト系合金の製造方法。(2) By applying at least one of activated hydrocarbon gas or carbon to the sendust alloy and changing the point of action, the surface of the sendust alloy is made of at least one of hard carbon or diamond.゛A method for producing a wear-resistant sendust alloy, which comprises uniformly forming a thin film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58148826A JPS6043486A (en) | 1983-08-16 | 1983-08-16 | Wear-resistant "sendust(r)" alloy and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58148826A JPS6043486A (en) | 1983-08-16 | 1983-08-16 | Wear-resistant "sendust(r)" alloy and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6043486A true JPS6043486A (en) | 1985-03-08 |
Family
ID=15461589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58148826A Pending JPS6043486A (en) | 1983-08-16 | 1983-08-16 | Wear-resistant "sendust(r)" alloy and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6043486A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02300569A (en) * | 1989-05-16 | 1990-12-12 | Eagle Ind Co Ltd | Mechanical seal |
EP0421276A2 (en) * | 1989-09-30 | 1991-04-10 | Nukem GmbH | Process and apparatus for coating parts with cubic bornitride or diamond |
JPH06220829A (en) * | 1993-01-22 | 1994-08-09 | Masaki Nonaka | Dam with scouring sluice and scouring path flashing sediment of buried dam |
JP2018142618A (en) * | 2017-02-28 | 2018-09-13 | 山陽特殊製鋼株式会社 | Soft magnetic flat powder with high magnetic permeability and high weather resistance and soft magnetic resin composition containing the same |
-
1983
- 1983-08-16 JP JP58148826A patent/JPS6043486A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02300569A (en) * | 1989-05-16 | 1990-12-12 | Eagle Ind Co Ltd | Mechanical seal |
EP0421276A2 (en) * | 1989-09-30 | 1991-04-10 | Nukem GmbH | Process and apparatus for coating parts with cubic bornitride or diamond |
JPH06220829A (en) * | 1993-01-22 | 1994-08-09 | Masaki Nonaka | Dam with scouring sluice and scouring path flashing sediment of buried dam |
JP2018142618A (en) * | 2017-02-28 | 2018-09-13 | 山陽特殊製鋼株式会社 | Soft magnetic flat powder with high magnetic permeability and high weather resistance and soft magnetic resin composition containing the same |
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