JPS60219637A - Surface smoothing method of magnetic disc - Google Patents

Abstract

PURPOSE:To improve the head floating performance without deteriorating the durability and corrosionproof performance by floating burnish head having a condensing transparent body with a minute gap on a turning disc and eliminating a minute projection while irradiating a ray to smooth the surface of the magnetic disc in a short time. CONSTITUTION:A flat convex lens 4 (focal point f=2mm.) is provided as a transparent body condensing the ray in the burnish head 3 made of an alumina material. Argon laser light 6 (power 0.1w) irradiated through an optical fiber 5 is condensed a spot (phi 10mum) by the flat convex lens 4. The argon laser light 6 is irradiated on the magnetic disc 1 through the flat convex lens 4 while the burnish head 3 provided with the flat convex lens 4 in this way is floated on the turning magnetic disc 1 at a value smaller than minute projections. Thus, the minute projections 2 are melted and softened, collide with the slider face of the burnish head 3 and are eliminated and then the surface of the magnetic disc 1 is smoothed.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention is applicable to magnetic disks, particularly magnetic disks that require a high-precision surface, such as high-density magnetic disks (for example, thin-film magnetic disks made by plating or sputtering). The present invention relates to a method for smoothing the surface of a disk substrate.

(Prior art and its problems) In general, thin film media magnetic disks are made of polished N1-P
A medium (Ni-C) is formed as a magnetic thin film on the underlayer.

-P) or by sputtering a medium (α-Fe, 03) and applying a protective film (for example, 5ffiO).In this case, the surface of the magnetic disk on which the protective film is formed has a height of 0. The presence of minute protrusions of .1 μm or more causes the magnetic head to deteriorate due to wear and tear, resulting in adverse effects such as deterioration of the head's flying ability.

In order to solve this problem, a method was proposed in which the abrasive grain surface of the lapping film was brought into contact with the surface of the rotating magnetic disk to remove minute protrusions on the surface of the magnetic disk.
46768) was conventionally adopted.

However, in the conventional method, the abrasive grain surface of the lapping film comes into contact with the magnetic disk surface under pressure and polishes the magnetic disk surface, so it is not possible to selectively remove only minute protrusions1. This method has the disadvantage that it polishes and removes parts of the protective film where there are no microscopic protrusions.This causes unevenness in the thickness of the protective film on the magnetic disk, resulting in a decrease in the durability and corrosion resistance of the magnetic disk. .

(Object of the Invention) In view of these conventional drawbacks, it is an object of the present invention to provide a method for smoothing the surface of a magnetic disk that can selectively and efficiently remove only minute protrusions on the surface of the magnetic disk. Structure of the Invention) According to the present invention, a magnetic disk is rotated, and a Verniracy head having a transparent body that focuses a light beam on the disk surface is floated to a minute gap to irradiate a single beam onto the disk surface. However, a method for smoothing the surface of a magnetic disk is obtained, which is characterized by removing minute protrusions on the disk surface.

(Summary of the invention) The present invention solves the conventional problems by the method described above.

That is, a magnetic disk is rotated, and a Bernico head having a transparent body that focuses light beams on the disk surface is floated at a height smaller than the height of the minute projections existing on the disk surface, and the transparent body is The setting is made such that the light beam is focused on the apex of the minute protrusion on the disk surface. By being irradiated with light, the microprotrusions are melted and softened, and immediately collide with the slider surface of the Burnisher head, and the microprotrusions are removed. In this case, the light beam is irradiated onto the disk surface where there are no microprotrusions, but since the verniracy head is floating above the magnetic disk surface to a microscopic gap, the disc surface where there are no microprotrusions is the verniracy head. do not touch. Therefore, by the method for smoothing the surface of a magnetic disk according to the present invention, only the minute protrusions on the surface of the magnetic disk can be selectively removed.

(Example) An embodiment of the present invention will be described below with reference to the drawings.

After plating the magnetic disk I with a thin film medium (Ni-Co-P), a retention film of 8i0. The burnish head 3 has a thickness of 0.08 μm and has minute projections 2 on its surface. A convex lens 4 (fish collection distance f22111) is provided. ) Argon laser beam 6 (power 0.IW) irradiated through fiber 5 Spot j111 by plano-convex lens 4
To the Nokuichi Nishi equipped with such a plano-convex lens 4, the argon laser beam 6 is focused to a plane of 0 μm while floating the nod 3 above the surface of the rotating magnetic disk 1 at a value smaller than the height of the minute protrusion. Magnetic disk 1 through convex lens 4
When irradiated onto the surface, the microprotrusions 2 are melted and softened, and are removed by colliding with the slider surface of the throat 3 into the throat niche, and the surface of the magnetic disk l is smoothed. In this case, while reciprocating the burnish head 3 several times, the flying height of the burnish head 3 is gradually reduced. According to experiments,
The height of the microprotrusions on the magnetic disk surface before Bernilacy is (
1.1~0.25μm=% After burnishing, the microprotrusion height force i is less than 0.05μff1, and the minimum flying height is less than 0.1μm. Only the minute protrusions on the disk surface are removed, and the portion of the magnetic disk surface where no minute protrusions are present is not burnished, resulting in non-uniformity in the thickness of the protective film on the magnetic disk 7! Magnetic disk strength with excellent layer resistance and corrosion resistance without any effort;
The microprotrusions on the magnetic disk surface are melted and softened, and the microprotrusions whose strength has decreased due to melting and softening are removed by colliding with the slider surface of the burnish head, so no light is irradiated. In addition to being able to significantly shorten the surface smoothing time (by about half in the case of this example), it also has the advantage that hard microprotrusions that could not be removed conventionally can be easily removed.

(Effects of the Invention) As explained above, a magnetic disk is rotated, a burnish head having a transparent body that focuses a light beam on the magnetic disk surface is floated to a minute gap, and a light beam is directed onto the disk surface. By removing minute protrusions on the disk surface while irradiating the disk, the surface of the magnetic disk can be smoothed in a short time, and the head flying ability can be significantly improved without reducing the durability and corrosion resistance of the magnetic disk. There is 0
In one embodiment of the present invention, a transparent body was provided in the burnishing head to condense the light beam, but the burnishing head itself may be made of a hard transparent body.Also, argon laser light may be used as the light beam. However, carbon dioxide laser light, YAG laser light, etc. may also be used.

[Brief explanation of drawings]

Claims (1)

[Claims] The magnetic disk is rotated, and a burnish head having a transparent body that focuses light beams on the disk surface is floated up to a minute gap, and while the light beams are directed onto the disk surface, minute protrusions on the disk surface are formed. A method for smoothing the surface of a magnetic disk, the method comprising: removing the surface of the magnetic disk;