[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPS60198517A - Partial plating method of liquid crystal panel - Google Patents

Partial plating method of liquid crystal panel

Info

Publication number
JPS60198517A
JPS60198517A JP5505284A JP5505284A JPS60198517A JP S60198517 A JPS60198517 A JP S60198517A JP 5505284 A JP5505284 A JP 5505284A JP 5505284 A JP5505284 A JP 5505284A JP S60198517 A JPS60198517 A JP S60198517A
Authority
JP
Japan
Prior art keywords
liquid crystal
crystal panel
plating
film
partial plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5505284A
Other languages
Japanese (ja)
Inventor
Sadasumi Uchiyama
内山 貞住
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP5505284A priority Critical patent/JPS60198517A/en
Publication of JPS60198517A publication Critical patent/JPS60198517A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1345Conductors connecting electrodes to cell terminals

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Liquid Crystal (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

PURPOSE:To subject a liquid crystal panel to partial plating selectively to only the lead terminal parts and transparent electrodes requiring low resistance on the substrate thereof by using an SiO2 film as a plating mask. CONSTITUTION:An SiO2 film 4 is sputtered over the entire surface and is then patterned by photoetching to form said film to 1,000-2,000Angstrom thickness on lead terminals 1 and the other transparent electrode patterns 3 except wiring parts 2 which are required to be low in resistance. Only the transparent electrodes requiring metallizing are thereafter plated thereon by SnCl2 sensitizing, PdCl2 activating, immersion into an aq. soln. of NaOH, KOH, potassium borofluoride, etc. and further immersion in an electroless plating bath of an Ni-base alloy such as Ni-P, Ni-B, Ni-Co-P or the like.

Description

【発明の詳細な説明】 〔技術分野〕 本発明は液晶パネルの部分メッキ方法に関するものであ
り、特vc−810.膜をメッキマスクとして透明電極
の必要部分にのみメッキすることヲ特徴としたものであ
る。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a method for partial plating of liquid crystal panels, and particularly relates to a method for partial plating of liquid crystal panels. This method is characterized by plating only the necessary portions of the transparent electrode using the film as a plating mask.

〔従来技術〕[Prior art]

従来液晶パネルと回路基板との接続方法としては、導電
ゴムやコネクタービンを用いる方法が主であつfcが、
液晶パネル端子間ピッチの細密化に伴ないフレキシブル
接続基板?用いたはんだ付けが使用されている。その1
ζめ液晶パネル端子にははんだ付は可能な金属によるメ
タライズが必要であり、その方法としてはOr−へU等
のスパッタ、蒸着が一般的である。しかしながらこれら
の方法は被覆コストが高く、シ〃・もパターン状にエツ
チングしなければならないという欠点があるため、最近
これにかわって液晶パネル基板上のリード端子の透明電
極の上にのみ選択的に無電極N1基合金等接合金属會メ
ッキする方法が考グされている。
Conventionally, the main method of connecting the liquid crystal panel and circuit board is to use conductive rubber or connector pins.
Flexible connection board due to finer pitch between LCD panel terminals? soldering is used. Part 1
ζ-sized liquid crystal panel terminals require metallization using a metal that can be soldered, and the common method for this is sputtering or vapor deposition of U or the like onto Or-. However, these methods have the drawbacks of high coating costs and the need to etch the film into a pattern. A method of plating bonded metals such as electrodeless N1-based alloys has been considered.

その具体的方法は、まず液晶パネル基板のメツキネ要部
をメツキレシストで薇った後、S n OIl、2 セ
ンシタイジング、 Pt1Ojjl アクチベイテイン
グを経て基板1NaOH,KOH,ホウフッ化カリウム
等の水溶液に浸漬し、更にこれ?N L−P 、 N 
l−B 。
The specific method is to first cover the essential parts of the liquid crystal panel substrate with a metskiresist, and then immerse the substrate in an aqueous solution of NaOH, KOH, potassium borofluoride, etc. through S n OIl, 2 sensitizing, and Pt1Ojjl activation. And this? NLP, N
l-B.

IJI−Co−P等々のN1基合金の無亀解メッキ浴に
浸漬し、メツキレシストを剥離して得られる。
It is obtained by immersing it in a non-dissolving plating bath of an N1-based alloy such as IJI-Co-P and peeling off the metal resist.

第2図はこの場合のマスキング方法を示す図で、リード
端子1′のみを露出させ、他の透明電極パター、ン3′
上はレジスト5で覆っている。
FIG. 2 is a diagram showing the masking method in this case, in which only the lead terminal 1' is exposed and other transparent electrode patterns, contacts 3'
The top is covered with resist 5.

一方液晶パネル基板の内部配線が細密化し、さらに液晶
パネル基板上にトランジスタ等の素子が形成されるよう
になると透明電極による配線では抵抗が高いため、それ
らの上にもメタライズの要求が生じてくる。
On the other hand, as the internal wiring of liquid crystal panel substrates becomes finer and elements such as transistors are formed on the liquid crystal panel substrate, the resistance of wiring using transparent electrodes is high, so metallization will also be required on top of them. .

しかしながら現在のメツキレシストのメッキマスクによ
る部分メッキでは、メッキ工程中に酸。
However, in partial plating using the current Metsuki Resist plating mask, acid is released during the plating process.

アルカリの両方の溶液を用い、しかも両液に耐えるフォ
トレジストがないためフォトエツチング工程を使うこと
ができず、従って細密なマスキングができないという欠
点がある。さらに現在の方法では、メツキレシストの周
囲に沿ってメッキが付着してしまうためメツキレシスト
の境界部にある透明電極上に絶縁層を形成しなければな
らないという欠点もある。
Since both alkaline solutions are used and there is no photoresist that can withstand both solutions, a photoetching process cannot be used, and therefore detailed masking cannot be performed. Furthermore, the current method has the disadvantage that the plating adheres along the periphery of the mesh resist, requiring an insulating layer to be formed on the transparent electrode at the boundary of the mesh resist.

〔目的〕〔the purpose〕

そこで本発明はかかる欠点を除去し、液晶パネル基板上
の、・キ明電極のメタライジングが必要な部分のみに部
分メツキラ称す方法を与えるものである。
SUMMARY OF THE INVENTION The present invention eliminates such drawbacks and provides a method for partially plating only the areas on a liquid crystal panel substrate where clear electrode metallization is required.

〔概要〕〔overview〕

本発明は透明電極付液晶パネル基板において、基板上の
リード端子部および低抵抗を必要とする配線部の透明電
極のみに選択的に部分メッキをする方法を与えるもので
、従来のメツキレシストのかわりに、8102膜をメッ
キマスクとして用いることを特徴としている。
The present invention provides a method for selectively plating only the transparent electrodes in the lead terminal portions and wiring portions that require low resistance on the substrate in a liquid crystal panel substrate with transparent electrodes, and is an alternative to the conventional metal plating method. , 8102 film is used as a plating mask.

〔実抱例〕[Actual example]

第1図は本発明の一実柚例を示す図であり、リード端子
1および低抵抗であることが必要な配線部2を除いて他
の透明成極パターン5上に8102膜4を形成しである
。この日102膜は厚さ1000〜zoooXであり、
全面スパッタ後フォトエツチングに工りパターニングし
て形成している。またそのパターンが簡単な場合にはマ
スクスパンタで形成することも可能である。
FIG. 1 is a diagram showing a practical example of the present invention, in which an 8102 film 4 is formed on the transparent polarization pattern 5 except for the lead terminal 1 and the wiring section 2 which is required to have low resistance. It is. On this day, the 102 membrane was 1000~zoooX thick,
It is formed by sputtering the entire surface and then patterning it by photo etching. Further, if the pattern is simple, it can also be formed using a mask spunter.

このようにして810?膜を形成した後、8nO11セ
ンシタイジング、pacn、アクチベイテイング、Na
OH,KOH,ホウフッ化カリウム等の水溶液への浸漬
、更にN1−P、Ni =B、N1−Co−P等々のN
1基合金の無電解メッキ浴への浸漬によってメタライジ
ングが必要な透明電極上のみにメッキが可能となる。ま
たこの場合StO,膜の縁にメッキが付着することはな
い。
810 like this? After forming the film, 8nO11 sensitizing, pacn, activating, Na
Immersion in aqueous solutions such as OH, KOH, potassium borofluoride, etc., and N1-P, Ni = B, N1-Co-P, etc.
Immersion of a single alloy into an electroless plating bath allows plating only on transparent electrodes that require metallization. Further, in this case, no plating adheres to the edges of the StO film.

〔効果〕〔effect〕

このように、8101膜全メツキマスクとす゛る方法は
、マスク形成に時間はかかるが、8102膜はフォトエ
ッチによって微細にパターニングできるため細密な部分
メッキ用のマスクとしては最適でありまたその縁にメッ
キが付着することがないため短絡の心配もない。
In this way, the method of using an 8101 film full plating mask takes time to form the mask, but since the 8102 film can be finely patterned by photoetching, it is ideal as a mask for detailed partial plating, and the edges of the 8102 film can be plated. Since there is no adhesion, there is no need to worry about short circuits.

一方TPT基板(Th1n Flln Transis
tor )などでは画素に流れる直流電流をカットする
いわゆるDCカット膜として810!膜を透明電極上に
形成しているため、メッキマスクをその′4まD0カッ
ト膜として利用することも可能である。
On the other hand, TPT substrate (Th1n Fln Transis
810 as a so-called DC cut film that cuts the DC current flowing to pixels! Since the film is formed on the transparent electrode, the plating mask can also be used as a D0 cut film.

従って本発明による部分メッキ法は液晶テレビ用パネル
基板への応用が有効であるほか、トランジスタ等の素子
内蔵の細密液晶パネル基板への応用が有効である。
Therefore, the partial plating method according to the present invention is not only effective in application to panel substrates for liquid crystal televisions, but also effective in application to minute liquid crystal panel substrates with built-in elements such as transistors.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明によるマスキング方法を示す平m IW
 、 M 2図は従来の部分メッキにおけるマスキング
方法を示す平面図である。 1.1′・・・リード端子 2・・・低抵抗を必要とする配線部 5.6′・・・メツキネ要の透明電極パターン4・・・
8t08膜 5・・・レジスト 以上 出願人株式会社 諏訪精工舎
FIG. 1 shows the masking method according to the present invention.
, M2 is a plan view showing a conventional masking method in partial plating. 1.1'...Lead terminal 2...Wiring part requiring low resistance 5.6'...Transparent electrode pattern 4...
8t08 Membrane 5...Resist or above Applicant: Suwa Seikosha Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 液晶パネルの透明屯蜆付基板において、前記基板上のリ
ード端子部および低抵抗乏必要とする配線部を除< n
il記1h明電極上にS“1021莫を形成し、前記8
102膜をメッキ用マスクとして前記リード端子訃よび
前記配線部となる透明電極上のみに選択的に部分メッキ
することを特徴とする液晶パネルの部分メッキ方法。
In a transparent transparent substrate for a liquid crystal panel, excluding lead terminal portions and wiring portions that require low resistance on the substrate, < n
Step 1: Form S"1021 on the bright electrode, and
1. A partial plating method for a liquid crystal panel, characterized in that partial plating is performed selectively only on the lead terminal ends and the transparent electrodes serving as the wiring portions using a No. 102 film as a plating mask.
JP5505284A 1984-03-22 1984-03-22 Partial plating method of liquid crystal panel Pending JPS60198517A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5505284A JPS60198517A (en) 1984-03-22 1984-03-22 Partial plating method of liquid crystal panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5505284A JPS60198517A (en) 1984-03-22 1984-03-22 Partial plating method of liquid crystal panel

Publications (1)

Publication Number Publication Date
JPS60198517A true JPS60198517A (en) 1985-10-08

Family

ID=12987901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5505284A Pending JPS60198517A (en) 1984-03-22 1984-03-22 Partial plating method of liquid crystal panel

Country Status (1)

Country Link
JP (1) JPS60198517A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01304427A (en) * 1988-06-02 1989-12-08 Mitsubishi Electric Corp Formation of terminal
WO2002044805A3 (en) * 2000-12-01 2002-11-28 Koninkl Philips Electronics Nv Method of increasing the conductivity of a transparent conductive layer
WO2002044804A3 (en) * 2000-12-02 2002-12-27 Koninkl Philips Electronics Nv Pixellated devices such as active matrix liquid crystal displays

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01304427A (en) * 1988-06-02 1989-12-08 Mitsubishi Electric Corp Formation of terminal
WO2002044805A3 (en) * 2000-12-01 2002-11-28 Koninkl Philips Electronics Nv Method of increasing the conductivity of a transparent conductive layer
WO2002044804A3 (en) * 2000-12-02 2002-12-27 Koninkl Philips Electronics Nv Pixellated devices such as active matrix liquid crystal displays

Similar Documents

Publication Publication Date Title
US7993509B2 (en) Manufacturing method of double-sided wiring glass substrate
US6127052A (en) Substrate and method for producing it
US4572925A (en) Printed circuit boards with solderable plating finishes and method of making the same
JPH0575246A (en) Printed-circuit forming method
US5302492A (en) Method of manufacturing printing circuit boards
WO2009132581A1 (en) Method for manufacturing an electro nickel and gold printed circuit board
US4666078A (en) Electroless plated terminals of display panel
CN112672529A (en) Method suitable for forming precise flexible circuit
US4824693A (en) Method for depositing a solderable metal layer by an electroless method
JPS60198517A (en) Partial plating method of liquid crystal panel
KR20010090726A (en) Method for assembling metal printed conductors as electrodes on a channel plate for ultrawide flat screens
CN111315148A (en) Rework method for gold plating plate or gold plating plate lead metal infiltration short circuit
EP0402811A2 (en) Method of manufacturing printed circuit boards
JPS60245781A (en) Plating method onto transparent conductive film pattern
JPH0563340A (en) Manufacture of wiring board provided with functional element
GB1410780A (en) Through-hole plated printed circuits
JPS59106181A (en) Method of producing printed circuit board
JPH02250211A (en) Transparent conductive film wiring circuit board
JPS59129766A (en) Electroless plating method
JPH0555727A (en) Manufacture of printed circuit board
JPH0585637B2 (en)
JPH11284316A (en) Formation of conductor pattern of wiring board
JPH04363093A (en) Manufacture of printed board
JPH01169811A (en) Electrode structure
JPS60121615A (en) Method of forming transparent conductive film