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JPS60167382A - Internal matching type fet circuit - Google Patents

Internal matching type fet circuit

Info

Publication number
JPS60167382A
JPS60167382A JP2318684A JP2318684A JPS60167382A JP S60167382 A JPS60167382 A JP S60167382A JP 2318684 A JP2318684 A JP 2318684A JP 2318684 A JP2318684 A JP 2318684A JP S60167382 A JPS60167382 A JP S60167382A
Authority
JP
Japan
Prior art keywords
fet
wire
phi
circuit
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2318684A
Other languages
Japanese (ja)
Inventor
Koji Tsukada
浩司 塚田
Kazuhide Goda
郷田 和秀
Masahiro Hagio
萩尾 正博
Shutaro Nanbu
修太郎 南部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP2318684A priority Critical patent/JPS60167382A/en
Publication of JPS60167382A publication Critical patent/JPS60167382A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/80Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE:To match the input side easily by constituting the titled FET circuit by an FET and a matching circuit fitted on the output side of the FET. CONSTITUTION:A GaAs FET in 4.8mm. gate width is used as a semiconductor chip 1 and an MOS capacitor having 10pF capacitance as a capacitor 7. All wires consist of Au wires having 20mumphi, and the drain wire 2 has 0.5mm.phi up to an MOS capacitor 7 from the semiconductor chip 1 and 0.7mm.phi up to a drain electrode 3 from the MOS capacitor 7, the source wire 4 0.3mm.phi, and the gate wire 6 1.3mm.phi.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は内部整合型FET回路に関するものである。[Detailed description of the invention] Industrial applications The present invention relates to an internally matched FET circuit.

従来例の構成とその問題点 近年マイクロ波帯におけるFETの開発は目ざましいも
のである。ところで、とのFETは大出力化のため、ゲ
ート幅が大きくせねばならず、FETの入力インピーダ
ンスが低くなる。更にまた、使用周波数が高い程入力イ
ンピーダンスは低くなる。従って、パッケージの寄生容
量やリードのインダクタンスの影響が大きくなシ、パッ
ケージ外部に整合回路をつけても、整合の帯域がせまく
なシ、整合がと9にくくなる。このためパッケージ内部
に整合回路をつけた内部整合FE、Tが使用されてきた
。このような整合回路は、特に入力インピーダンスが低
くなるため従来入力側に設けられるのが常である。
Conventional configuration and its problems In recent years, the development of FETs in the microwave band has been remarkable. By the way, in order to increase the output of the FET, the gate width must be increased, and the input impedance of the FET becomes low. Furthermore, the higher the frequency used, the lower the input impedance. Therefore, the effects of the parasitic capacitance of the package and the inductance of the leads are large, and even if a matching circuit is provided outside the package, the matching band will be narrow and matching will become difficult. For this reason, internally matched FEs and Ts with a matching circuit inside the package have been used. Conventionally, such a matching circuit is usually provided on the input side because the input impedance is particularly low.

第1図は従来の内部整合型FET回路である。FIG. 1 shows a conventional internally matched FET circuit.

半導体チップ1のドレイン、ソースおよびゲートがそれ
ぞれドレインワイヤ2.ソースワイヤ4゜ゲートワイヤ
6によって、ドレイン電極3.パッケージのベース5.
ゲート電極8にそれぞれボンディングされている。また
ゲートワイヤ6にはキャパシタンス7が接続されている
。これは入力側にキャパシタンスを入れてリードワイヤ
のインダクタンスとの組み合せで、半導体チップ10入
力インピーダンスの複素共役にすることが図られたもの
である。しかしながら、単導体チップ1自体がユニラテ
ラル素子ではなく、パワーFETのようなゲート幅の広
い素子では、特に大出力をはかってゲートI扁をかを多
大きくしていくと入力と出力の間の帰還量もそれに比例
して大きくなる。その結果入力側に整合回路を入れても
、入力の整合がほとんどとれなくなってしまうという問
題があった0 発明の目的 本発明は上記欠点に鑑みなされたもので、入力側の整合
をとることのできる内部整合型FET回路を提供するも
のである。
The drain, source and gate of the semiconductor chip 1 are each connected to a drain wire 2. Source wire 4° and gate wire 6 connect drain electrode 3. Package base 5.
They are bonded to the gate electrodes 8, respectively. Further, a capacitance 7 is connected to the gate wire 6. This is intended to create a complex conjugate of the input impedance of the semiconductor chip 10 by inserting a capacitance on the input side and combining it with the inductance of the lead wire. However, the single conductor chip 1 itself is not a unilateral device, and in devices with wide gate widths such as power FETs, especially when aiming for high output and increasing the gate width, the distance between input and output increases. The amount of feedback also increases proportionally. As a result, even if a matching circuit is installed on the input side, there is a problem in that input matching is almost impossible.Objective of the Invention The present invention was made in view of the above disadvantages, and it is difficult to match the input side. The present invention provides an internally matched FET circuit that can perform the following functions.

発明の構成 この目的を達成するだめに、本発明の内部整合型FET
回路は、FETと前記FETの出力側に設けられた整合
回路とから構成されている。このことにより、容易に入
力側の整合をとることが可能となる。
Structure of the Invention In order to achieve this object, an internally matched FET of the present invention is used.
The circuit is composed of a FET and a matching circuit provided on the output side of the FET. This makes it possible to easily match the input side.

実施例の説明 以下本発明の一実施例を図面を参照しながら説明する。Description of examples An embodiment of the present invention will be described below with reference to the drawings.

第2図は本発明の一実施例における内部整合型FET回
路の回路図である。第2図において、半導体チップ1と
して、ゲート幅4.8闇のG a A 5FET、キャ
パシタンス7は容量1opFのMOSキャパシタを使用
した。ワイヤはすべて20μmφのAu線で、ドレイン
ワイヤ2は半導体チップ1からMOSキャパシタ7まで
0.5瑞、MOSキャパシタ7からドレイン電極3まで
0.7mm、ソースワイヤ4は0.3rnrn、ゲート
ワイヤ6は1.3胴である0 次に、計算機7”/−ミレージョンと測定の結果を次表
に示す。尚、7−ミレージョンはFETの等節回路モデ
ルに、各デバイスパラメータの値を代入しSパラメータ
を計算させた。
FIG. 2 is a circuit diagram of an internally matched FET circuit in one embodiment of the present invention. In FIG. 2, a Ga A 5FET with a gate width of 4.8 mm was used as the semiconductor chip 1, and a MOS capacitor with a capacitance of 1 opF was used as the capacitance 7. The wires are all Au wires with a diameter of 20 μm, the drain wire 2 has a wire length of 0.5 mm from the semiconductor chip 1 to the MOS capacitor 7, the length from the MOS capacitor 7 to the drain electrode 3 is 0.7 mm, the source wire 4 has a wire length of 0.3 rnrn, and the gate wire 6 has a wire length of 0.5 mm. 1.3 cylinder 0 Next, the results of the measurement using the calculator 7''/-mileage are shown in the table below.The 7-mileage is calculated by substituting the values of each device parameter into the isochoric circuit model of the FET. S-parameters were calculated.

同表において、S11は周波数1GHz における値で
ある。FETのみのときと入力側にC−10pFのキャ
パシタを入れたときと、出力側にキャパシタC=10p
Fのキャパシタを入れたときの811を示している。出
力側にキャパシタを入れると811が小さくなり、整合
がとりやすくなることがわかる。測定の結果もシュミレ
ーションの通り、出力側にキャパシタを入れると811
が小さくなシ、スミスチャートでは内側にはいってくる
ことがわかった。また、S11は出力側にキャパシタを
入れると入力側に入れたときよシも小さくできることも
確かめられた。
In the same table, S11 is a value at a frequency of 1 GHz. When only FET is used, when a C-10pF capacitor is inserted on the input side, and when a capacitor C=10p is placed on the output side.
811 is shown when a F capacitor is inserted. It can be seen that when a capacitor is inserted on the output side, 811 becomes smaller and matching becomes easier. As per the simulation, the measurement result is 811 when a capacitor is inserted on the output side.
It turns out that the smaller the C, the smaller it will be on the inside of the Smith chart. It has also been confirmed that if a capacitor is placed on the output side of S11, it can be made smaller than when it is placed on the input side.

発明の効果 以上のように構成された出力内部整合型FET回路は、
入力インピーダンスが特性インピーダンスに近いので、
外部回路との整合がとりゃすくなシ、整合の帯域も広が
るので、実装時の組立のばらつきによるミスマツチング
を少なくできる。
The output internal matching type FET circuit configured as above the effects of the invention,
Since the input impedance is close to the characteristic impedance,
Since matching with external circuits is easy and the matching band is widened, mismatching due to assembly variations during mounting can be reduced.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の内部整合型FET回路図、第2図は本発
明の一実施例における内部整合型FET回路図を示す。 1・・・・−・半導体チップ、2・・・・・・ドレイン
ワイヤ、3・・・・・・ドレイン電極、4・・・・・・
ソースワイヤ、5・・・・・・パッケージベース、6・
・・・・・ケートワイヤ、7・・・・・・キャパシタン
ス、8・・・・・・ゲートt!。
FIG. 1 shows a conventional internally matched FET circuit diagram, and FIG. 2 shows an internally matched FET circuit diagram according to an embodiment of the present invention. 1... Semiconductor chip, 2... Drain wire, 3... Drain electrode, 4...
Source wire, 5...Package base, 6.
...Kate wire, 7...Capacitance, 8...Gate t! .

Claims (1)

【特許請求の範囲】[Claims] FETと、前記FETの出力側に設けられた整合回路と
が同一パッケージ内に封入されていることを特徴とする
内部整合型FET回路。
An internal matching type FET circuit characterized in that an FET and a matching circuit provided on the output side of the FET are enclosed in the same package.
JP2318684A 1984-02-09 1984-02-09 Internal matching type fet circuit Pending JPS60167382A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2318684A JPS60167382A (en) 1984-02-09 1984-02-09 Internal matching type fet circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2318684A JPS60167382A (en) 1984-02-09 1984-02-09 Internal matching type fet circuit

Publications (1)

Publication Number Publication Date
JPS60167382A true JPS60167382A (en) 1985-08-30

Family

ID=12103619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2318684A Pending JPS60167382A (en) 1984-02-09 1984-02-09 Internal matching type fet circuit

Country Status (1)

Country Link
JP (1) JPS60167382A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0626028A (en) * 1992-06-22 1994-02-01 Kowa Kikai Sekkei Kogyo Kk Sucking up device for surface layer liquid

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0626028A (en) * 1992-06-22 1994-02-01 Kowa Kikai Sekkei Kogyo Kk Sucking up device for surface layer liquid

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