JPS60154435A - Housing of extra high pressure mercury lamp - Google Patents

Abstract

PURPOSE:To provide a stable lighting even under a severe condition by shielding the base of an extra high pressure mercury lamp with a cover, detecting the temprature of the exhaust air ejected from a part of the cover, and regulating the amount of the exhaust air according to the air temperature. CONSTITUTION:The base 23 of a lamp 21 at an anode side is shielded by cover 28 with some clearance between the base and the cover, while air is exhaused from a part of the cover. the temperature of the exhaust is detected by a sensor 25, and amount of the exhaust is regulated at a control section 26 by a controllor 27 according to the exhaust air temperature. In this manner, by controlling abnormal overheating of the base, an imperfect contact of the base zone and a strain of the glass are prevented, and the lamp operates constantly in good stability.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a housing for an ultra-high pressure mercury lamp for a device (1) that irradiates ultraviolet rays in the manufacturing process of semiconductor devices (1).

In order to manufacture semiconductor devices, seven fine patterns are required.
Such a pattern, which needs to be formed precisely at the position of the Ft foot, is generally formed by photolithography.

Photolithography is typically performed in the following manner.

A photosensitive photoresist is applied onto a silicon wafer or a substrate supplied with a metal plate for a photomask on which a pattern is to be formed, and after baking, this photoresist is subjected to dense y# exposure, gloximity exposure, and projection exposure method. Exposure by,.

Next, when the above-mentioned 7-photoresist is imaged, a resist pattern is formed on the substrate and a desired portion of the substrate is supplied, so that this portion is etched to form a desired pattern.

Here, the exposure apparatuses for each of the upper F phases and the exposure method usually use an ultra-high pressure mercury lamp having a large output at a known wavelength as a light source.

Figure 1 shows a typical optical system using an ultra-high pressure mercury lamp. In Fig. 1, an ultra-high pressure mercury lamp 11 (hereinafter abbreviated as lamp) is normally held with the cathode side up and the anode side down, and the lamps 12 and 13 at both ends of the lamp are traced from the ultra-high pressure mercury lamp lighting device. It is lit by 1 ki energy applied to the lamp. The light beam emitted from the lamp is reflected by the reflector 14 and focused on the cold mirror 15. Only the required wavelength is reflected by the cold mirror, and then passes to the lens or acid mirror to expose the photoresist. 4. From the reflector The shape of the reflector is designed so that the reflected light does not converge on the lamp.

However, sometimes the lamps are installed in a distorted manner, and the reflectors are
If there is a scratch or distortion on the
- Season! A part of the luminous flux is focused on the base 13 of No. 1 and heated. When the lamp is lit, an arc discharge of 30,000 to -10,000 degrees Celsius occurs between the poles, and the lamp itself gets heated, and if the base is not at the required temperature, the temperature of the base may become unstable or the temperature of the base may be too high. If the temperature exceeds a certain level due to light, etc., the joint between the outer electrode inside the cap and the cap will melt, resulting in poor contact, causing the display not to light up, and causing distortion in the glass, causing cracks to occur. will result in a lamp explosion. When the lamp explodes, it is not only expensive and destroys the frefter, cold mirror, etc., but also has the disadvantage that the mercury sealed in the lamp scatters and pollutes the atmosphere.

The present invention provides a housing for an ultra-high-pressure mercury lamp that allows stable lighting even when the ultra-high-pressure mercury lamp is lit under the above-mentioned severe conditions.

That is, the object of the present invention is an ultra-high-pressure mercury lamp that covers the base of an ultra-high pressure mercury lamp with a cover, detects the exhaust temperature by discharging red from a part of the cover, and adjusts the exhaust receiving vessel according to the exhaust temperature. Located in the housing for high pressure mercury lamps.

Hereinafter, this work will be explained in detail with reference to the drawings.

FIG. 2 is a diagram showing the principal part of an embodiment of the present invention. In the figure, the base n on the anode side of the lamp 21 is covered with a cover 28 with a gap of 0.5 to 1Q mm, and air is exhausted from a part of the cover. The exhaust temperature is detected by the sensor 25 and the controller 9-27 Kj,
*i,ir*°[111F1526f#0″.

Adjust. Fresh air I control is performed, for example, by automatically opening and closing a damper. If the base 1 temperature is low at the beginning of lamp lighting! Alternatively, when there is no abnormality in the optical system lamp and the base and sensitivity are at appropriate values, turn down the exhaust 1 to the minimum to prevent the lamp from operating or becoming unstable due to overcooling.
If a part of the luminous flux is focused on the lamp due to distortion of the optical system and the temperature of the base 23 increases, the exhaust volume is increased in accordance with the rise in exhaust temperature, and the temperature of the base hot water is adjusted to an appropriate level due to the heat generated by the lamp. Make sure not to exceed the candy level. By suppressing abnormal overheating of the cap, poor contact at the cap and distortion of the glass can be prevented, and the lamp always operates stably.

As described above, according to the present invention, the exhaust angle can be adjusted according to the condition of the lamp, that is, the lamp cooling can be adjusted without cooling the mercury in the form of vapor, so the lamp can be lit in the optimal condition for hunting. However, it is not possible to safely light the lamp even if the optical system is incorrectly adjusted or the rector is defective, and it may not be possible to safely light the lamp due to the size of the lamp housing. Even if this happens, if we use this method, we can easily make the rung housing smaller than its cousin.

[Brief explanation of the drawing]

FIG. 1 shows the optical system of a typical conventional ultra-high pressure mercury lamp, and FIG. 2 is a principle diagram of the main parts showing an embodiment of the present invention. 11.21... Ultra-high pressure mercury lamp, 12.13
,22゜23...Base,14,24...
・Ref Refuku, 15... Call □ Domi 2-1
25...Sensor, 26...Displacement control section, 27...Controller, 28-Kamii・
...Cover 0 Ka l Closed 27 Horse 2 Seki

Claims (1)

[Claims] A housing that houses an ultra-high-pressure mercury lamp with a strong flow line spectrum in the ultraviolet region includes a member that holds the base of the ultra-high-pressure mercury lamp, a mechanism that exhausts air from the skeleton member, a detection member that detects the mixed layer of exhaust gas, and a member that detects the haiku temperature. 9. A housing for an ultra-high pressure mercury lamp, characterized in that the housing is equipped with a cylindrical tube that adjusts the negative exhaust gas accordingly.