JPS60146339U - Semiconductor wafer heat treatment equipment - Google Patents
Semiconductor wafer heat treatment equipmentInfo
- Publication number
- JPS60146339U JPS60146339U JP3444984U JP3444984U JPS60146339U JP S60146339 U JPS60146339 U JP S60146339U JP 3444984 U JP3444984 U JP 3444984U JP 3444984 U JP3444984 U JP 3444984U JP S60146339 U JPS60146339 U JP S60146339U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- heat treatment
- treatment furnace
- semiconductor wafer
- treatment equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は先行技術を示す図、第２図は本考案の一実施例
の側面図、第３図はボート１１およびボート受け１２の
斜視図、第４図は車輪１７ａ、１７ｂがストッパとして
の突起１５ａ、１５ｂ間に嵌り込んだ状態を示す断面図
、第５図は案内Ｌ／’−ル１４に車輪１８ａ、１８ｂが
係止した状態を示す断面図、第６図はボート受け１２の
他の実施例の斜視図、第７図はストッパの他の実施例の
断面図である。
１０・・・熱処理炉、１１・・・ボート、１２．１２ａ
・・・ボート受け、１３・・・移送定設、１４・・・案
内レール、１５・・・突起、１９〜２６・・・案内突起
。
第６図
第７図FIG. 1 is a diagram showing the prior art, FIG. 2 is a side view of an embodiment of the present invention, FIG. 3 is a perspective view of the boat 11 and the boat receiver 12, and FIG. 4 is a diagram showing the wheels 17a and 17b as stoppers. 5 is a sectional view showing the state in which the wheels 18a and 18b are locked to the guide L/'-ru 14; FIG. FIG. 7 is a perspective view of an embodiment of the stopper, and FIG. 7 is a sectional view of another embodiment of the stopper. 10... Heat treatment furnace, 11... Boat, 12.12a
... Boat receiver, 13... Transfer setting, 14... Guide rail, 15... Projection, 19-26... Guide projection. Figure 6 Figure 7
Claims (1)
と、 ボート受けに設けられ、ボートをその移動方向に沿って
案内する案内部材と、 熱処理炉から出ている状態にあるボートを予め定めた位
置で停止するためのストッパと、前記ストッパによって
停止している位置にあるボート上に半導体ウェハを載置
し、およびボート上から取出す手段とを含むことを特徴
とする半導体ウェハの熱処理装置。[Scope of Claim for Utility Model Registration] A heat treatment furnace, a boat support extending outward from an insertion port of the heat treatment furnace, a boat movable between the heat treatment furnace and the boat support, and a boat provided in the boat support, a guide member for guiding the boat along its movement direction; a stopper for stopping the boat exiting the heat treatment furnace at a predetermined position; 1. A heat processing apparatus for semiconductor wafers, comprising means for placing the wafers and taking out the wafers from the boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3444984U JPS60146339U (en) | 1984-03-09 | 1984-03-09 | Semiconductor wafer heat treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3444984U JPS60146339U (en) | 1984-03-09 | 1984-03-09 | Semiconductor wafer heat treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60146339U true JPS60146339U (en) | 1985-09-28 |
Family
ID=30537827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3444984U Pending JPS60146339U (en) | 1984-03-09 | 1984-03-09 | Semiconductor wafer heat treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60146339U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015046610A (en) * | 2014-10-02 | 2015-03-12 | 光洋サーモシステム株式会社 | Continuous diffusion processing apparatus |
| JP2015188095A (en) * | 2015-05-20 | 2015-10-29 | 光洋サーモシステム株式会社 | Continuous diffusion processing apparatus |
| JP2015201650A (en) * | 2015-05-20 | 2015-11-12 | 光洋サーモシステム株式会社 | Continuous diffusion processing apparatus |
| JP2015201651A (en) * | 2015-05-20 | 2015-11-12 | 光洋サーモシステム株式会社 | Continuous diffusion processing apparatus |
| JP2017005176A (en) * | 2015-06-12 | 2017-01-05 | 三菱電機株式会社 | Carriage transfer member and heat treatment furnace |
-
1984
- 1984-03-09 JP JP3444984U patent/JPS60146339U/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015046610A (en) * | 2014-10-02 | 2015-03-12 | 光洋サーモシステム株式会社 | Continuous diffusion processing apparatus |
| JP2015188095A (en) * | 2015-05-20 | 2015-10-29 | 光洋サーモシステム株式会社 | Continuous diffusion processing apparatus |
| JP2015201650A (en) * | 2015-05-20 | 2015-11-12 | 光洋サーモシステム株式会社 | Continuous diffusion processing apparatus |
| JP2015201651A (en) * | 2015-05-20 | 2015-11-12 | 光洋サーモシステム株式会社 | Continuous diffusion processing apparatus |
| JP2017005176A (en) * | 2015-06-12 | 2017-01-05 | 三菱電機株式会社 | Carriage transfer member and heat treatment furnace |
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