JPS60111046U - wafer holder - Google Patents
wafer holderInfo
- Publication number
- JPS60111046U JPS60111046U JP20133683U JP20133683U JPS60111046U JP S60111046 U JPS60111046 U JP S60111046U JP 20133683 U JP20133683 U JP 20133683U JP 20133683 U JP20133683 U JP 20133683U JP S60111046 U JPS60111046 U JP S60111046U
- Authority
- JP
- Japan
- Prior art keywords
- support rod
- wafer holder
- support plates
- wafer
- upper support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のウェハホルダの斜視図、第２図はウェハ
ホルダの上方支持棒に形成された溝の平面図、第３図は
ウェハプロセスにおけるウェハホルダとウェハの状態を
示す模式的正面図、第４図と第５図は本考案の第１実施
例と第２実施例の正面図である。
５・・・ウェハ、２１．３１・・・ウェハホルダ、２２
ａ、 ２２ ｃ、 ３２ ａ、 ３２ ｃ・・・支持
棒、２３ａ。
２３ ｂ＊ ３３ ａ、３３ ｂ”・支持板、２４．
３４−・・溝、３５・・・平衡ブ葡ツク。FIG. 1 is a perspective view of a conventional wafer holder, FIG. 2 is a plan view of a groove formed in the upper support rod of the wafer holder, FIG. 3 is a schematic front view showing the state of the wafer holder and wafer in the wafer process, and FIG. 5 and 5 are front views of the first and second embodiments of the present invention. 5... Wafer, 21.31... Wafer holder, 22
a, 22 c, 32 a, 32 c...support rod, 23a. 23 b* 33 a, 33 b”・Support plate, 24.
34--Groove, 35--Equilibrium block.
Claims (1)
延び支持板に固定された上方支持棒と下方支持棒から成
るウェハホルダにして、上方支持棒と下方支持棒は支持
板に対して斜角をもって延び、上方支持棒と下方支持棒
にはウェハ受は溝が垂直方向に一致して設けられたこと
を特徴とするウェハホルダ。The wafer holder consists of two support plates arranged in parallel, an upper support rod and a lower support rod that extend parallel between the support plates and are fixed to the support plates, and the upper support rod and the lower support rod are connected to the support plates. What is claimed is: 1. A wafer holder, characterized in that the wafer holders extend at an oblique angle and are provided with grooves aligned vertically in the upper support rod and the lower support rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20133683U JPS60111046U (en) | 1983-12-28 | 1983-12-28 | wafer holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20133683U JPS60111046U (en) | 1983-12-28 | 1983-12-28 | wafer holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60111046U true JPS60111046U (en) | 1985-07-27 |
Family
ID=30763032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20133683U Pending JPS60111046U (en) | 1983-12-28 | 1983-12-28 | wafer holder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60111046U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0314255A (en) * | 1989-06-13 | 1991-01-22 | Fujitsu Ltd | Wafer carrier |
-
1983
- 1983-12-28 JP JP20133683U patent/JPS60111046U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0314255A (en) * | 1989-06-13 | 1991-01-22 | Fujitsu Ltd | Wafer carrier |
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