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JPS60115014A - Magnetic head for vertical magnetization - Google Patents

Magnetic head for vertical magnetization

Info

Publication number
JPS60115014A
JPS60115014A JP22250583A JP22250583A JPS60115014A JP S60115014 A JPS60115014 A JP S60115014A JP 22250583 A JP22250583 A JP 22250583A JP 22250583 A JP22250583 A JP 22250583A JP S60115014 A JPS60115014 A JP S60115014A
Authority
JP
Japan
Prior art keywords
magnetic
thin film
magnetic thin
film
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22250583A
Other languages
Japanese (ja)
Inventor
Nobumasa Kaminaka
紙中 伸征
Kiyoshi Sasaki
清志 佐々木
Hiroshi Yoda
養田 広
Kazuo Nakamura
和夫 中村
Takeshi Takahashi
健 高橋
Hiroaki Muraoka
裕明 村岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP22250583A priority Critical patent/JPS60115014A/en
Publication of JPS60115014A publication Critical patent/JPS60115014A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/1278Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To attain both recording and reproducing functions by filling a nonmagnetic insulated material into a cut groove formed at a part of a magnetic substrate to form a coil layer on said insulated material and then forming an MR element via an insulated layer to provide the 1st and 2nd magnetic thin films on the MR element. CONSTITUTION:A coil layer 12 is formed on a single side of a magnetic substrate 10 where a nonmagnetic insulated material 11 is filled. An MR element film 14 is formed via an insulated layer 13, and conductor layers are provided at both ends of the MR element 14 for supply of current. Then the 1st magnetic thin film 16 having an end exposed, an insulated layer 17 and the 2nd magnetic thin film 18 are formed on the driving surface of a recording medium 4. The reluctance force of the film 18 is set larger than that of the film 16. The magnetic fluxes flow through the 1st and 2nd magnetic films in a record mode when a record current is flowed to a coil layer 12. These magnetic fluxes are concentrated to the tip of the film 18. Thus the vertical recording is possible. While the signal magnetic flux detected by the film 16 does not leak out so much to the film 18 in a reproeuction mode.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、垂直磁気記録方式の磁気記録装置、例えば電
算機用ディスク、テープ装置、フロッピィディスク装置
、ディジタルPCMレコーダ、ディジタルVTRなどに
使用される垂直磁化用磁気ヘッドに関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to vertical magnetic recording devices used in perpendicular magnetic recording type magnetic recording devices, such as computer disks, tape devices, floppy disk devices, digital PCM recorders, digital VTRs, etc. This invention relates to a magnetic head for magnetization.

従来例の構成とその問題点 従来、第1図に示すようにベースフィルム1上にパーマ
ロイ等の高透磁率層2とCo −Cr垂直蒸着層3とを
設けた記録媒体4に垂直記録された信号を読み出す磁気
ヘッドとして、磁気抵抗効果素子(以下略してMR素子
とよぶ)6を用いた垂直磁化用ヘッドが提案されている
。このタイプのヘッドは磁性基板6の一部に切り欠き満
了があって、その溝は非磁性絶縁体で充填されており、
その上形成された構造である。信号磁束がその磁束誘導
部8、MR素子5、磁束帰還部9を通って記録媒体4の
高進磁率層2に帰還する一種の閉磁気回路が構成され、
効率よく信号再生を行わしめることが可能なヘッドであ
る。ところがこのようなヘッドでは、基本的に記録機能
がなく、記録ヘッドは別に設けるなどしなければならな
かった。このように記録、再生を分離すると、機器自身
の小型化の障害の一要因になる事、および安価な機器を
実現する点で問題であり、又、記録媒体との接触具合な
どいわゆる良好なあた9を実現する点でも問題となって
おシ、効率の良い記録機能を附勢した録再兼用の磁気ヘ
ッドが望まれていた。
Conventional Structure and Problems Conventionally, as shown in FIG. 1, perpendicular recording was performed on a recording medium 4 having a high magnetic permeability layer 2 such as permalloy and a Co--Cr vertically deposited layer 3 on a base film 1. As a magnetic head for reading signals, a perpendicular magnetization head using a magnetoresistive element (hereinafter simply referred to as an MR element) 6 has been proposed. This type of head has a notch in a part of the magnetic substrate 6, and the groove is filled with a non-magnetic insulator.
Moreover, it is a formed structure. A kind of closed magnetic circuit is constituted in which the signal magnetic flux passes through the magnetic flux guide section 8, the MR element 5, and the magnetic flux return section 9 and returns to the high magnetic flux layer 2 of the recording medium 4.
This head is capable of efficiently reproducing signals. However, such a head basically does not have a recording function, and a recording head must be provided separately. If recording and playback are separated in this way, it becomes one of the obstacles to miniaturization of the device itself, and it is a problem in terms of realizing inexpensive devices. However, there was a need for a recording/reproducing magnetic head with an efficient recording function.

発明の目的 本発明は高効率な録再機能を有する新規な垂直磁化用磁
気ヘッドを提供することを目的とする。
OBJECTS OF THE INVENTION An object of the present invention is to provide a novel perpendicular magnetization magnetic head having highly efficient recording and reproducing functions.

発明の構成 本発明においては、磁性基板の一部に非磁性絶縁材が充
填された切り欠き溝を配し、記録媒体走行面とは異る面
上に所定の巻数のコイル層を形成し、ついで絶縁層を介
してMR素子が記録媒体走行面から離間した位置に配置
され、その一端は磁性基板と磁気的に結合する。MR素
子の両端には電流が供給されるような端子層が形成され
、電流供給の手段が付加される。その上部に第1.第2
の磁性薄膜が形成される。第1の磁性薄膜はその一端が
記録媒体走行面に露呈し、他端はMR素子と磁気的に結
合し磁束誘導部となる。第2の磁性薄膜はその一端が第
1の磁性薄膜と磁気的に結合するか、あるいは物理的に
連続しているかしておシ、他端は磁性基板の磁束帰還部
と対向し、磁気的に結合して磁気ヨーク部となる。第2
の磁性薄膜の抗磁力は第1の磁性薄膜より犬であるよう
にする。
Structure of the Invention In the present invention, a cutout groove filled with a non-magnetic insulating material is arranged in a part of a magnetic substrate, and a coil layer with a predetermined number of turns is formed on a surface different from the recording medium running surface. Next, an MR element is placed at a position separated from the recording medium running surface via an insulating layer, and one end of the MR element is magnetically coupled to the magnetic substrate. Terminal layers to which current is supplied are formed at both ends of the MR element, and means for supplying current is added. At the top is the first. Second
A magnetic thin film is formed. One end of the first magnetic thin film is exposed to the recording medium running surface, and the other end is magnetically coupled to the MR element and serves as a magnetic flux guiding section. The second magnetic thin film has one end that is magnetically coupled or physically continuous with the first magnetic thin film, and the other end that faces the magnetic flux return portion of the magnetic substrate and is magnetically coupled to the first magnetic thin film or is physically continuous with the first magnetic thin film. The magnetic yoke is combined with the magnetic yoke. Second
The coercive force of the first magnetic thin film is made to be stronger than that of the first magnetic thin film.

実施例の説明 第2図に第1の実施例を説明する。フェライトなどの磁
性基板10に溝を設けて、ガラスあるいはチタン酸バリ
ウム等の非磁性絶縁材11を充填し、一つの面上に、A
l、Cu、 Au/Crといった導電体薄膜よりなるコ
イル層12(第2図では4ターンの例を示“している。
DESCRIPTION OF THE EMBODIMENTS A first embodiment will be explained with reference to FIG. A groove is provided in a magnetic substrate 10 such as ferrite and filled with a non-magnetic insulating material 11 such as glass or barium titanate.
A coil layer 12 (FIG. 2 shows an example of 4 turns) is made of a conductive thin film such as L, Cu, or Au/Cr.

)を形成、ついでS 102 +A22o3などの非磁
性絶縁層13を、ついで、Fe−Niめ(図では紙面に
垂直方向に電流を流す。紙面に垂直方向がトラック巾方
向となる。)MR素子14の両端にAn、Cu、Au/
Cr等の導体層が付与される。
), then a non-magnetic insulating layer 13 such as S 102 +A22o3, and then a Fe-Ni film (in the figure, a current is passed in a direction perpendicular to the plane of the paper. The direction perpendicular to the plane of the paper is the track width direction) MR element 14 An, Cu, Au/
A conductor layer such as Cr is applied.

(図示しティない。)?イテ、5iO2Sio2.AL
203といっだ非磁性絶縁層16が、真空蒸着法かるい
はスパッタリング法で形成される。ついで、記録媒体走
行面に一端が露呈するよう第1の磁性薄膜16が形成さ
れ、非磁性絶縁層17で若干層間絶縁が行われ、第2の
磁性薄膜18が形成される。
(Not shown.)? Ite, 5iO2Sio2. AL
The nonmagnetic insulating layer 16 203 is formed by vacuum evaporation or sputtering. Next, the first magnetic thin film 16 is formed so that one end thereof is exposed on the recording medium running surface, the non-magnetic insulating layer 17 provides some interlayer insulation, and the second magnetic thin film 18 is formed.

なお、ここで記録媒体走行面とは、記録媒体4に当接も
しくは近接して用いられる面のことである。
Note that the recording medium running surface herein refers to a surface that is used in contact with or in close proximity to the recording medium 4.

サラニ、s io2.Af)、203. S io等の
保護層19が積層され、ガラス等あるいは外部ノイズ軽
減のためにフェライト等の保護板20が接着される。
Sarani, s io2. Af), 203. A protective layer 19 such as Sio is laminated, and a protective plate 20 made of glass or the like or ferrite or the like is adhered to reduce external noise.

第1.第2の磁性薄膜16.18としては、Fe−Ni
合金膜、あるいはCo −Nb −Z r系、 C。
1st. The second magnetic thin film 16.18 is made of Fe-Ni.
Alloy film or Co-Nb-Zr system, C.

−Nb −Fe 系のアモルファス膜を用いることがで
きる。製法は電子ビーム蒸着法、メッキ法、スノくツタ
法等が材質に合わせて選択される。第1の磁性薄膜16
の厚みは高密度記録に対応していくにつれ薄くする。通
常0.1〜1μm程度が選択される。第2の磁性薄膜1
8はMR素子14の磁気特性との兼ねあいで決定される
が例えばMR素子14の厚み、初透磁率をそれぞれ50
0人、2000とすると、第2の磁性薄膜のそれは〜1
μm、10以下が選択される。これにより磁気抵抗的な
意味では第2の磁性薄膜18への磁束の分流は1割程度
に抑える事が出来、感度をそれほど落とさずにすむ。第
1の磁性薄膜16の磁気特性は可能な限りソフトである
方が好ましく、そういう意味では第2の磁性薄膜18の
抗磁力は第1のそれより太きいように選択される。一般
的には第1の磁性薄膜16の抗磁力数Oe以下に対し、
第2の磁性薄膜18の抗磁力を10数oe〜数1008
が選択さ以上のような構成において、コイル層に記録電
流を流したいわゆる記録時には、磁束レベルが極めて大
きくその時第2”の磁性薄膜、第1の磁性薄膜を通じて
磁束が流れ、第2の磁性薄膜の先端に磁束が集中して垂
直記録が可能となる。一方、再生時は磁束レベルが小さ
いだめ、第1の磁性薄膜で検知された信号磁束が、第2
の磁性薄膜へあ1シ洩れる事な(MR素子へ流れこむた
め効率のよい状態を維持することが可能となる。
An amorphous film based on -Nb-Fe can be used. Manufacturing methods such as electron beam evaporation, plating, and snow ivy are selected depending on the material. First magnetic thin film 16
The thickness of the disc will become thinner as it becomes compatible with high-density recording. Usually about 0.1 to 1 μm is selected. Second magnetic thin film 1
8 is determined in consideration of the magnetic properties of the MR element 14, but for example, if the thickness and initial permeability of the MR element 14 are each 50.
Assuming 0 people and 2000 people, that of the second magnetic thin film is ~1
μm, 10 or less is selected. As a result, in terms of magnetoresistance, the branching of the magnetic flux to the second magnetic thin film 18 can be suppressed to about 10%, and the sensitivity does not need to drop much. It is preferable that the magnetic properties of the first magnetic thin film 16 be as soft as possible, and in that sense, the coercive force of the second magnetic thin film 18 is selected to be greater than that of the first. Generally, for the coercive force number Oe or less of the first magnetic thin film 16,
The coercive force of the second magnetic thin film 18 is from several 10 oe to several 1008 oe.
In the above configuration, during so-called recording when a recording current is passed through the coil layer, the magnetic flux level is extremely high. At that time, the magnetic flux flows through the second magnetic thin film and the first magnetic thin film, and the magnetic flux flows through the second magnetic thin film and the first magnetic thin film. Magnetic flux concentrates at the tip of the magnetic thin film, making perpendicular recording possible.On the other hand, during playback, the magnetic flux level is small, so the signal magnetic flux detected by the first magnetic thin film is transferred to the second magnetic thin film.
Since the liquid flows into the MR element without leaking into the magnetic thin film of the magnetic thin film, it is possible to maintain an efficient state.

第3図には別の実施例が示される。はとんど第2図の実
施例と同様であり同一の部分には同一の番号を付して説
明を省略する。相違は、MR素子14上に形成された非
磁性絶縁層15を部分的に表面を粗すことによシ、その
上部に形成される磁性薄膜の抗磁力を部分的に大きくす
ることである。それによって物理的に連続した第1の磁
性薄膜部21(この下地面の表面粗さは充分小さく、こ
の上部では抗磁力も小さいものが得られる事がわかった
。)と第2の磁性薄膜部22を構成する。表面粗さと抗
磁力の関係は、磁性薄膜の厚みによっても変化するが、
相関があり、所定の抗磁力を得る事は下地面の表面粗さ
を決める事で可能となる。
Another embodiment is shown in FIG. This embodiment is almost the same as the embodiment shown in FIG. 2, and the same parts are given the same numbers and their explanations will be omitted. The difference is that by partially roughening the surface of the nonmagnetic insulating layer 15 formed on the MR element 14, the coercive force of the magnetic thin film formed thereon is partially increased. As a result, the first magnetic thin film part 21 (the surface roughness of this base surface is sufficiently small and the coercive force is also small in this upper part) and the second magnetic thin film part are physically continuous. 22. The relationship between surface roughness and coercive force changes depending on the thickness of the magnetic thin film, but
There is a correlation, and it is possible to obtain a predetermined coercive force by determining the surface roughness of the underlying surface.

発明の効果 以上のように本発明によれば、基板上にコイル層を介在
して記録媒体走行面から離れた位置にMR素子が積層形
成され、更にその上に、記録媒体走行面に一端を露呈す
る第1の磁性薄膜と、その第1の磁性薄膜と磁気的に結
合されるとともに前記コイル層を包む第2の磁性薄膜と
が設けられ、第2の磁性薄膜の方が第1の磁性薄膜より
抗磁力が犬である。それにより、記録時には第1及び第
2の磁性薄膜により大レベルの磁束を通し、再生時には
第1の磁性薄膜からMR累子へ効率良く再生磁束を通す
ことができ、記録と再生の機能を併せもつ小型高効率な
垂直磁化用磁気ヘッドを実現することができる。
Effects of the Invention As described above, according to the present invention, an MR element is laminated on a substrate at a position away from the recording medium running surface with a coil layer interposed therebetween, and furthermore, one end is placed on the recording medium running surface. A first magnetic thin film to be exposed and a second magnetic thin film magnetically coupled to the first magnetic thin film and surrounding the coil layer are provided, and the second magnetic thin film has a higher magnetic property than the first magnetic thin film. The coercive force is stronger than that of a thin film. As a result, a large level of magnetic flux can be passed through the first and second magnetic thin films during recording, and a reproduction magnetic flux can be efficiently passed from the first magnetic thin film to the MR transponder during reproduction, combining the functions of recording and reproduction. A small, highly efficient magnetic head for perpendicular magnetization can be realized.

【図面の簡単な説明】[Brief explanation of the drawing]

甲 第1図は、従来例の垂直記6有生へ丹゛を示方断面図、
第2図は本発明の第1実施例における垂直磁化用磁気ヘ
ッドを示す断面図、第3図は本発明の他の実施例を示す
断面図である。 1o・・・・・磁性基板、11・・・・・・非磁性絶縁
材、12・・・・・・コイル層、13,15.17・・
・・・・非磁性絶縁層、14・・・・・・MR素子膜、
16・・・・・・第1の磁性薄膜、18・・・・・・第
2の磁性薄膜。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
Figure A 1 is a sectional view showing the vertical direction of the conventional example;
FIG. 2 is a sectional view showing a perpendicular magnetization magnetic head according to a first embodiment of the invention, and FIG. 3 is a sectional view showing another embodiment of the invention. 1o...Magnetic substrate, 11...Nonmagnetic insulating material, 12...Coil layer, 13,15.17...
...Nonmagnetic insulating layer, 14...MR element film,
16...First magnetic thin film, 18... Second magnetic thin film. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
figure

Claims (3)

【特許請求の範囲】[Claims] (1)基板上に形成されたコイル層の上部に非磁性絶縁
層が積層され、前記コイル層の上部で且つ記録媒体走行
面から離間する位置に磁気抵抗効果素子が配置され、前
記磁気抵抗効果素子に、電流供給する手段を有し、前記
磁気抵抗効果素子の上部に、記録媒体走行面にその一端
を露呈する第1の磁性薄膜とその第1の磁性薄膜と磁気
的に結合し、且つ前記コイル層を包むごとく第2の磁性
薄膜が配置さ些、第2の磁性薄膜の抗磁力が第1の磁性
−薄膜の抗磁力より犬である事を特徴とする垂直磁化用
磁気ヘッド。
(1) A non-magnetic insulating layer is laminated on top of a coil layer formed on a substrate, and a magnetoresistive element is disposed above the coil layer and at a position away from the recording medium running surface, and the magnetoresistive effect a first magnetic thin film having one end exposed to the recording medium running surface on the upper part of the magnetoresistive element; and magnetically coupled to the first magnetic thin film; A magnetic head for perpendicular magnetization, characterized in that a second magnetic thin film is arranged to surround the coil layer, and the coercive force of the second magnetic thin film is stronger than the coercive force of the first magnetic thin film.
(2)基板は磁性体であって、その一部に非磁性体で溝
が形成され、前記非磁性体上にコイル層が配置された事
を特徴とする特許請求の範囲第1項記載の垂直磁化用磁
気ヘッド。
(2) The substrate is a magnetic material, a groove is formed in a part of the non-magnetic material, and a coil layer is disposed on the non-magnetic material. Magnetic head for perpendicular magnetization.
(3)第1.第2の磁性薄膜が物理的に連続した一体の
膜であって、第2の磁性薄膜が形成される下地面の表面
粗さが第1の磁性薄膜の下地面の表面粗さよりも粗い事
を特徴とする特許請求の範囲第1項記載の垂直磁化用磁
気ヘッド。
(3) First. The second magnetic thin film is a physically continuous integral film, and the surface roughness of the underlying surface on which the second magnetic thin film is formed is rougher than the surface roughness of the underlying surface of the first magnetic thin film. A magnetic head for perpendicular magnetization according to claim 1.
JP22250583A 1983-11-26 1983-11-26 Magnetic head for vertical magnetization Pending JPS60115014A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22250583A JPS60115014A (en) 1983-11-26 1983-11-26 Magnetic head for vertical magnetization

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22250583A JPS60115014A (en) 1983-11-26 1983-11-26 Magnetic head for vertical magnetization

Publications (1)

Publication Number Publication Date
JPS60115014A true JPS60115014A (en) 1985-06-21

Family

ID=16783476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22250583A Pending JPS60115014A (en) 1983-11-26 1983-11-26 Magnetic head for vertical magnetization

Country Status (1)

Country Link
JP (1) JPS60115014A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0411915A2 (en) * 1989-08-04 1991-02-06 Matsushita Electric Industrial Co., Ltd. Thin film magnetic head
US5726839A (en) * 1993-12-08 1998-03-10 Fujitsu Limited Magnetic head having bypass magnetic path and set magnetic reluctance relationship

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0411915A2 (en) * 1989-08-04 1991-02-06 Matsushita Electric Industrial Co., Ltd. Thin film magnetic head
US5726839A (en) * 1993-12-08 1998-03-10 Fujitsu Limited Magnetic head having bypass magnetic path and set magnetic reluctance relationship

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