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JPS6488448A - Photosensitive composition - Google Patents

Photosensitive composition

Info

Publication number
JPS6488448A
JPS6488448A JP62245498A JP24549887A JPS6488448A JP S6488448 A JPS6488448 A JP S6488448A JP 62245498 A JP62245498 A JP 62245498A JP 24549887 A JP24549887 A JP 24549887A JP S6488448 A JPS6488448 A JP S6488448A
Authority
JP
Japan
Prior art keywords
group
formula
composition
substd
rie
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62245498A
Other languages
Japanese (ja)
Inventor
Kiyonobu Onishi
Rumiko Horiguchi
Shuji Hayase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62245498A priority Critical patent/JPS6488448A/en
Publication of JPS6488448A publication Critical patent/JPS6488448A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

PURPOSE:To improve the RIE of the titled composition against oxygen, and to enable the alkaline development of said composition by incorporating a polysiloxane having a specified structural unit in the titled composition, as an essential component. CONSTITUTION:The composition contains the polysiloxane having the structural unit shown by formula I, as the essential component. In formula I, R1 is 1-10C an optionally substd. alkyl group, an optionally substd. aryl group, etc., at least one of R2-R6 groups is a substd. aryl group shown by formula II, a residual group of said group is hydrogen or halogen atom., etc. In formula II, R7 is a group shown by formula III or IV, etc., R8 is 1-10C an optionally substd. alkyl group or hydroxy group, etc. Thus, the excellent durability of the titled composition against the oxygen plasma (the RIE against oxygen) is obtd., and the alkaline development of said composition is possible.
JP62245498A 1987-09-29 1987-09-29 Photosensitive composition Pending JPS6488448A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62245498A JPS6488448A (en) 1987-09-29 1987-09-29 Photosensitive composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62245498A JPS6488448A (en) 1987-09-29 1987-09-29 Photosensitive composition

Publications (1)

Publication Number Publication Date
JPS6488448A true JPS6488448A (en) 1989-04-03

Family

ID=17134563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62245498A Pending JPS6488448A (en) 1987-09-29 1987-09-29 Photosensitive composition

Country Status (1)

Country Link
JP (1) JPS6488448A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11873587B2 (en) 2019-03-28 2024-01-16 Southern Mills, Inc. Flame resistant fabrics
US11891731B2 (en) 2021-08-10 2024-02-06 Southern Mills, Inc. Flame resistant fabrics

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11873587B2 (en) 2019-03-28 2024-01-16 Southern Mills, Inc. Flame resistant fabrics
US11891731B2 (en) 2021-08-10 2024-02-06 Southern Mills, Inc. Flame resistant fabrics

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