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JPS6482570A - Manufacture of photoelectric conversion device - Google Patents

Manufacture of photoelectric conversion device

Info

Publication number
JPS6482570A
JPS6482570A JP62241816A JP24181687A JPS6482570A JP S6482570 A JPS6482570 A JP S6482570A JP 62241816 A JP62241816 A JP 62241816A JP 24181687 A JP24181687 A JP 24181687A JP S6482570 A JPS6482570 A JP S6482570A
Authority
JP
Japan
Prior art keywords
hole
semiconductor substrate
plating
manufacture
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62241816A
Other languages
Japanese (ja)
Inventor
Takashi Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62241816A priority Critical patent/JPS6482570A/en
Publication of JPS6482570A publication Critical patent/JPS6482570A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

PURPOSE:To introduce a surface side electrode to a rear side, and enable leading out two electrodes from the same surface, by forming the through hole of a semiconductor substrate, and forming electrode metal via the through hole. CONSTITUTION:After a through hole 7 having a necessary shape is formed on an N-type semiconductor substrate 1, a P-type semiconductor layer 2 is formed. An SiN film 3 serving as an antireflection film and an insulating film is formed on both surfaces of the semiconductor substrate 1. Contact holes 4 are made on both surfaces. Next, after plating metal is vapor-deposited on the whole surface by sputtering, unnecessary parts on both surfaces are eliminated by etching. Electrode metal 6 of necessary thickness is formed on the plating metal 5 by plating.
JP62241816A 1987-09-24 1987-09-24 Manufacture of photoelectric conversion device Pending JPS6482570A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62241816A JPS6482570A (en) 1987-09-24 1987-09-24 Manufacture of photoelectric conversion device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62241816A JPS6482570A (en) 1987-09-24 1987-09-24 Manufacture of photoelectric conversion device

Publications (1)

Publication Number Publication Date
JPS6482570A true JPS6482570A (en) 1989-03-28

Family

ID=17079922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62241816A Pending JPS6482570A (en) 1987-09-24 1987-09-24 Manufacture of photoelectric conversion device

Country Status (1)

Country Link
JP (1) JPS6482570A (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5100480A (en) * 1990-04-18 1992-03-31 Mitsubishi Denki Kabushiki Kaisha Solar cell and method for manufacturing the same
US5425816A (en) * 1991-08-19 1995-06-20 Spectrolab, Inc. Electrical feedthrough structure and fabrication method
JP2008270743A (en) * 2007-03-29 2008-11-06 Kyocera Corp Solar cell module
JP2008294080A (en) * 2007-05-22 2008-12-04 Sanyo Electric Co Ltd Solar cell and manufacturing method of same
EP2043161A2 (en) 2007-09-28 2009-04-01 Sanyo Electric Co., Ltd. Solar cell, solar cell module, and method of manufacturing the solar cell
EP2065941A2 (en) 2007-11-30 2009-06-03 SANYO Electric Co., Ltd. Solar cell and a manufacturing method of the solar cell
JP2009158575A (en) * 2007-12-25 2009-07-16 Sharp Corp Photoelectric conversion device and method for manufacturing photoelectric conversion device
JP2009177109A (en) * 2008-01-25 2009-08-06 Samsung Sdi Co Ltd Solar battery and method of manufacturing same
JP2011505704A (en) * 2007-12-03 2011-02-24 アイメック Photovoltaic cell with metal wrap-through and improved passivation
EP2371010A1 (en) * 2009-06-22 2011-10-05 LG Electronics Inc. Solar cell and method of manufacturing the same
EP2404328A2 (en) * 2009-03-02 2012-01-11 LG Electronics Inc. Solar cell and method of manufacturing the same
CN102487090A (en) * 2010-12-01 2012-06-06 财团法人工业技术研究院 Solar cell
US8253013B2 (en) * 2009-06-04 2012-08-28 Lg Electronics Inc. Solar cell and method of manufacturing the same
US8399760B2 (en) 2008-01-11 2013-03-19 Samsung Sdi Co., Ltd. Solar cell having improved electrode structure reducing shading loss
CN107924958A (en) * 2015-08-31 2018-04-17 夏普株式会社 Photo-electric conversion element

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5100480A (en) * 1990-04-18 1992-03-31 Mitsubishi Denki Kabushiki Kaisha Solar cell and method for manufacturing the same
US5425816A (en) * 1991-08-19 1995-06-20 Spectrolab, Inc. Electrical feedthrough structure and fabrication method
JP2008270743A (en) * 2007-03-29 2008-11-06 Kyocera Corp Solar cell module
JP2008294080A (en) * 2007-05-22 2008-12-04 Sanyo Electric Co Ltd Solar cell and manufacturing method of same
US7902454B2 (en) 2007-09-28 2011-03-08 Sanyo Electric Co., Ltd. Solar cell, solar cell module, and method of manufacturing the solar cell
EP2043161A2 (en) 2007-09-28 2009-04-01 Sanyo Electric Co., Ltd. Solar cell, solar cell module, and method of manufacturing the solar cell
JP2009088203A (en) * 2007-09-28 2009-04-23 Sanyo Electric Co Ltd Solar cell, solar cell module, and manufacturing method for solar cell
EP2065941A2 (en) 2007-11-30 2009-06-03 SANYO Electric Co., Ltd. Solar cell and a manufacturing method of the solar cell
JP2011505704A (en) * 2007-12-03 2011-02-24 アイメック Photovoltaic cell with metal wrap-through and improved passivation
JP2009158575A (en) * 2007-12-25 2009-07-16 Sharp Corp Photoelectric conversion device and method for manufacturing photoelectric conversion device
US8399760B2 (en) 2008-01-11 2013-03-19 Samsung Sdi Co., Ltd. Solar cell having improved electrode structure reducing shading loss
JP2009177109A (en) * 2008-01-25 2009-08-06 Samsung Sdi Co Ltd Solar battery and method of manufacturing same
EP2404328A4 (en) * 2009-03-02 2013-08-14 Lg Electronics Inc Solar cell and method of manufacturing the same
US8569614B2 (en) 2009-03-02 2013-10-29 Lg Electronics Inc. Solar cell and method of manufacturing the same
EP2404328A2 (en) * 2009-03-02 2012-01-11 LG Electronics Inc. Solar cell and method of manufacturing the same
US8253013B2 (en) * 2009-06-04 2012-08-28 Lg Electronics Inc. Solar cell and method of manufacturing the same
EP2371010A4 (en) * 2009-06-22 2013-10-09 Lg Electronics Inc Solar cell and method of manufacturing the same
EP2371010A1 (en) * 2009-06-22 2011-10-05 LG Electronics Inc. Solar cell and method of manufacturing the same
CN102487090A (en) * 2010-12-01 2012-06-06 财团法人工业技术研究院 Solar cell
CN107924958A (en) * 2015-08-31 2018-04-17 夏普株式会社 Photo-electric conversion element
EP3346506A4 (en) * 2015-08-31 2018-09-12 Sharp Kabushiki Kaisha Photoelectric conversion element
US10505055B2 (en) 2015-08-31 2019-12-10 Sharp Kabushiki Kaisha Photoelectric conversion element
CN107924958B (en) * 2015-08-31 2020-02-04 夏普株式会社 Photoelectric conversion element

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