JPS6474789A - Semiconductor laser device - Google Patents
Semiconductor laser deviceInfo
- Publication number
- JPS6474789A JPS6474789A JP23312487A JP23312487A JPS6474789A JP S6474789 A JPS6474789 A JP S6474789A JP 23312487 A JP23312487 A JP 23312487A JP 23312487 A JP23312487 A JP 23312487A JP S6474789 A JPS6474789 A JP S6474789A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor laser
- photodetector
- wavelength
- oscillation wavelength
- diffraction grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Lasers (AREA)
Abstract
PURPOSE:To control the oscillation wavelength of a semiconductor laser in accuracy of 2Angstrom or less by operating a temperature control element, to which the semiconductor laser is fused, by using a detecting signal in a monitor photodetecting section composed of a wavelength dispersion element and a photodetector to which a plurality of photodetectors are arranged. CONSTITUTION:The rear output beams of a semiconductor laser 11 are reflected by a diffraction grating 17 on a pedestal 18, and converted into an electric signal by a photodetector 19 to which a plurality of minute photodetectors such as a charge- coupled device are disposed. Since the angles of diffraction differ according to wavelength in the rear output beams of the semiconductor laser 11 reflected by the diffraction grating 17, the position of irradiation on the photodetector 19 is varied in response to the change of the oscillation wavelength of the semiconductor laser 11. Consequently, the temperature of a Peltier element 13 is controlled by the transmission signal of the photodetector 19, thus controlling the oscillation wavelength of the semiconductor laser 11. When the diffraction grating 17 having resolution of 10<5> or more and the photodetector 19 with a detecting element in 100mum or less are used, the oscillation wavelength of the semiconductor laser can be controlled in wavelength accuracy of approximately 2Angstrom or less.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23312487A JPS6474789A (en) | 1987-09-16 | 1987-09-16 | Semiconductor laser device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23312487A JPS6474789A (en) | 1987-09-16 | 1987-09-16 | Semiconductor laser device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6474789A true JPS6474789A (en) | 1989-03-20 |
Family
ID=16950131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23312487A Pending JPS6474789A (en) | 1987-09-16 | 1987-09-16 | Semiconductor laser device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6474789A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05190985A (en) * | 1992-01-14 | 1993-07-30 | Fujitsu Ltd | Optical semiconductor module |
JP2001244544A (en) * | 2000-02-22 | 2001-09-07 | Lucent Technol Inc | Optical assembly |
US8618970B2 (en) | 2012-04-13 | 2013-12-31 | Advantest Corp. | DA conversion device and electron beam exposure system using the same |
-
1987
- 1987-09-16 JP JP23312487A patent/JPS6474789A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05190985A (en) * | 1992-01-14 | 1993-07-30 | Fujitsu Ltd | Optical semiconductor module |
JP2001244544A (en) * | 2000-02-22 | 2001-09-07 | Lucent Technol Inc | Optical assembly |
US8618970B2 (en) | 2012-04-13 | 2013-12-31 | Advantest Corp. | DA conversion device and electron beam exposure system using the same |
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