JPS6473071A - Continuous vacuum deposition device - Google Patents

Abstract

PURPOSE:To deposit a metal by evaporation continuously on a long-sized traveling substrate at a high equipment operating rate by providing plural sealing parts consisting of sheet rolls and casings before and behind a vacuum deposition chamber at the time of depositing the metal by vacuum evaporation on the surface of the above-mentioned substrate. CONSTITUTION:While the long-sized traveling substrate such as paper or film is run in an arrow direction, the substrate is wound around a winding roll 6 in the vacuum deposition chamber 1 and the vapor 11 of the molten metal 9 in a crucible 8 provided in the lower part of the chamber is stuck as a vapor deposited film on the surface of the substrate 3. The substrate 3 enters a vacuum sealing device consisting of the plural differential pressure chambers 18 constituted of a pair of the sealing rolls 15, partition walls 30 and the casing 16. The substrate passes again through the vacuum sealing device 17 consisting of the plural differential pressure chambers 18 having the similar construction after the vapor deposition of the metallic film thereon and is taken out into the atm. While the traveling substrate 1 is wound around one of the sealing rolls, the substrate travels and since the vacuum deposition is thereby continuously executed, the working rate of the vacuum deposition device is extremely higher than the working rate of a batch system.