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JPS6466506A - Surface inspecting device - Google Patents

Surface inspecting device

Info

Publication number
JPS6466506A
JPS6466506A JP22330587A JP22330587A JPS6466506A JP S6466506 A JPS6466506 A JP S6466506A JP 22330587 A JP22330587 A JP 22330587A JP 22330587 A JP22330587 A JP 22330587A JP S6466506 A JPS6466506 A JP S6466506A
Authority
JP
Japan
Prior art keywords
max
high frequency
values
detection
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22330587A
Other languages
Japanese (ja)
Inventor
Yoshihisa Morioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22330587A priority Critical patent/JPS6466506A/en
Publication of JPS6466506A publication Critical patent/JPS6466506A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To enable accurate detection of a surface roughness of a surface to be measured, by sampling a high frequency signal contained in detection signal by a reference frequency to determine an amplitude value of a high frequency component corresponding to the surface roughness. CONSTITUTION:A surface detector comprising a projector 11, a scanner 12 and a light receiver 14 is provided and a detection signal of an output therefrom is sampled by a reference frequency and converted with an A/D converter 16 into a digital data value train. A data value train of an output from the converter 16 is divided by a wider cycle than the reference frequency and max. data values in sections divided are detected with a max. data values in sections divided are detected with a max. detection circuit 18 (min. data values with a min. detection circuit 19). Moreover, high frequency component values are calculated with a subtraction circuit in sections indicated by a difference between the max. and min. values as output from both the detection circuits 18 and 19. High frequency component values outputted from the circuit are averaged by a specified number while a roughness evaluation value is obtained with an evaluation value computing device 22 for a surface 13 to be measured.
JP22330587A 1987-09-07 1987-09-07 Surface inspecting device Pending JPS6466506A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22330587A JPS6466506A (en) 1987-09-07 1987-09-07 Surface inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22330587A JPS6466506A (en) 1987-09-07 1987-09-07 Surface inspecting device

Publications (1)

Publication Number Publication Date
JPS6466506A true JPS6466506A (en) 1989-03-13

Family

ID=16796066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22330587A Pending JPS6466506A (en) 1987-09-07 1987-09-07 Surface inspecting device

Country Status (1)

Country Link
JP (1) JPS6466506A (en)

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