JPS6463698A - Turbo vacuum pump - Google Patents
Turbo vacuum pumpInfo
- Publication number
- JPS6463698A JPS6463698A JP21783987A JP21783987A JPS6463698A JP S6463698 A JPS6463698 A JP S6463698A JP 21783987 A JP21783987 A JP 21783987A JP 21783987 A JP21783987 A JP 21783987A JP S6463698 A JPS6463698 A JP S6463698A
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- rotors
- rotor
- axial flow
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Abstract
PURPOSE:To contrive at enhancing the capacity of a turbo vacuum pump composed of a multi-stage impeller, by using a bearing composed of piezoelectric elements, resilient members and a voltage applying part, as a high vacuum side bearing, and by disposing the bearing in a discharge air passage. CONSTITUTION:A plurality of rotors 2, 3 are disposed in a casing 1. Further, one 2 of the rotors is provided therein with an axial flow rotor 4, and an axial flow stator 6 is provided in a stator ring 5, facing the axial flow rotor 4. Further, the other rotor 3 is provided therein with a centrifugal rotor 7 and a vortex flow stator 8. In this arrangement, the rotors 2, 3 and a shaft 11 fitted thereon with one 2 of the rotors, are supported by an ultrasonic bearing 12 and a ball bearing 13, respectively. Further, the ultrasonic bearing 12 is composed of a plurality of piezoelectric elements 14, support plates 15, 16, lead wires 17, 18, a resilient member 19 and fastening bolts 20. With this arrangement, it is possible to obtain a high performance pump suitable for discharging air from a semiconductor producing apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21783987A JPS6463698A (en) | 1987-09-02 | 1987-09-02 | Turbo vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21783987A JPS6463698A (en) | 1987-09-02 | 1987-09-02 | Turbo vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6463698A true JPS6463698A (en) | 1989-03-09 |
Family
ID=16710564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21783987A Pending JPS6463698A (en) | 1987-09-02 | 1987-09-02 | Turbo vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6463698A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4929151A (en) * | 1988-07-27 | 1990-05-29 | Societe Anonyme Dite: Alcatel Cit | Vacuum pump |
| US5217346A (en) * | 1988-07-13 | 1993-06-08 | Osaka Vacuum, Ltd. | Vacuum pump |
| US5219269A (en) * | 1988-07-13 | 1993-06-15 | Osaka Vacuum, Ltd. | Vacuum pump |
| US5553998A (en) * | 1992-05-16 | 1996-09-10 | Leybold Ag | Gas friction vacuum pump having at least three differently configured pump stages releasably connected together |
| EP1508700A2 (en) * | 2003-08-21 | 2005-02-23 | Ebara Corporation | Turbo molecular pump |
| US7645116B2 (en) * | 2005-04-28 | 2010-01-12 | Ebara Corporation | Turbo vacuum pump |
| JP2011521161A (en) * | 2008-05-23 | 2011-07-21 | オーリコン レイボルド バキューム ゲーエムベーハー | Multistage vacuum pump |
| CN106122015A (en) * | 2016-08-25 | 2016-11-16 | 深圳沃海森科技有限公司 | Supersonic wave suspended oil-free frequency converting air-conditioner compressor |
-
1987
- 1987-09-02 JP JP21783987A patent/JPS6463698A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5217346A (en) * | 1988-07-13 | 1993-06-08 | Osaka Vacuum, Ltd. | Vacuum pump |
| US5219269A (en) * | 1988-07-13 | 1993-06-15 | Osaka Vacuum, Ltd. | Vacuum pump |
| US4929151A (en) * | 1988-07-27 | 1990-05-29 | Societe Anonyme Dite: Alcatel Cit | Vacuum pump |
| US5553998A (en) * | 1992-05-16 | 1996-09-10 | Leybold Ag | Gas friction vacuum pump having at least three differently configured pump stages releasably connected together |
| EP1508700A2 (en) * | 2003-08-21 | 2005-02-23 | Ebara Corporation | Turbo molecular pump |
| EP1508700A3 (en) * | 2003-08-21 | 2012-02-22 | Ebara Corporation | Turbo molecular pump |
| US7645116B2 (en) * | 2005-04-28 | 2010-01-12 | Ebara Corporation | Turbo vacuum pump |
| JP2011521161A (en) * | 2008-05-23 | 2011-07-21 | オーリコン レイボルド バキューム ゲーエムベーハー | Multistage vacuum pump |
| CN106122015A (en) * | 2016-08-25 | 2016-11-16 | 深圳沃海森科技有限公司 | Supersonic wave suspended oil-free frequency converting air-conditioner compressor |
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