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JPS6461732A - Optical modulating element - Google Patents

Optical modulating element

Info

Publication number
JPS6461732A
JPS6461732A JP21795587A JP21795587A JPS6461732A JP S6461732 A JPS6461732 A JP S6461732A JP 21795587 A JP21795587 A JP 21795587A JP 21795587 A JP21795587 A JP 21795587A JP S6461732 A JPS6461732 A JP S6461732A
Authority
JP
Japan
Prior art keywords
columns
time
optical modulating
modulating element
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21795587A
Other languages
Japanese (ja)
Other versions
JP2604597B2 (en
Inventor
Hideyuki Kawagishi
Yutaka Inaba
Shuzo Kaneko
Makoto Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62217955A priority Critical patent/JP2604597B2/en
Publication of JPS6461732A publication Critical patent/JPS6461732A/en
Application granted granted Critical
Publication of JP2604597B2 publication Critical patent/JP2604597B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)

Abstract

PURPOSE:To obtain the optical modulating element which has a fast printing speed and makes a gradational display by making a shutter part consisting of plural columns different in the quantity of transmitted light at the time of opening by the columns. CONSTITUTION:A liquid crystal shutter array 10 as the optical modulating element has a cell structure formed by sandwiching ferroelectric liquid crystal between a couple of substrates 14 provided with scanning electrodes 16 and signal electrodes 15 and providing plural columns of shutters 11 where picture elements are formed at intersections of the electrodes. Then the opening area of a picture element is prescribed by a light shield mask 12 and the quantity of transmitted light at the time of opening is different by the columns. For the purpose, the same position is exposed to passing light beams of shutters in each array at a time or separately plural times to make the desired gradational display corresponding to the number of gradations.
JP62217955A 1987-09-02 1987-09-02 Image forming device Expired - Lifetime JP2604597B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62217955A JP2604597B2 (en) 1987-09-02 1987-09-02 Image forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62217955A JP2604597B2 (en) 1987-09-02 1987-09-02 Image forming device

Publications (2)

Publication Number Publication Date
JPS6461732A true JPS6461732A (en) 1989-03-08
JP2604597B2 JP2604597B2 (en) 1997-04-30

Family

ID=16712336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62217955A Expired - Lifetime JP2604597B2 (en) 1987-09-02 1987-09-02 Image forming device

Country Status (1)

Country Link
JP (1) JP2604597B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006191119A (en) * 2005-01-06 2006-07-20 Asml Holding Nv Method and device for minimizing scattered light of multi-slm maskless lithography
JP2007329455A (en) * 2006-04-13 2007-12-20 Asml Holding Nv Optical system for improving efficiency in irradiation on patterning device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61221727A (en) * 1985-03-27 1986-10-02 Hitachi Ltd Liquid crystal optical switch element
JPS6227716A (en) * 1985-07-29 1987-02-05 Fuji Photo Film Co Ltd Light valve for meshed-dot formation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61221727A (en) * 1985-03-27 1986-10-02 Hitachi Ltd Liquid crystal optical switch element
JPS6227716A (en) * 1985-07-29 1987-02-05 Fuji Photo Film Co Ltd Light valve for meshed-dot formation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006191119A (en) * 2005-01-06 2006-07-20 Asml Holding Nv Method and device for minimizing scattered light of multi-slm maskless lithography
JP2007329455A (en) * 2006-04-13 2007-12-20 Asml Holding Nv Optical system for improving efficiency in irradiation on patterning device
US8634064B2 (en) 2006-04-13 2014-01-21 Asml Holding N.V. Optical system for increasing illumination efficiency of a patterning device by producing a plurality of beams

Also Published As

Publication number Publication date
JP2604597B2 (en) 1997-04-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term
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