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JPS6454214A - Shape measuring apparatus - Google Patents

Shape measuring apparatus

Info

Publication number
JPS6454214A
JPS6454214A JP21045487A JP21045487A JPS6454214A JP S6454214 A JPS6454214 A JP S6454214A JP 21045487 A JP21045487 A JP 21045487A JP 21045487 A JP21045487 A JP 21045487A JP S6454214 A JPS6454214 A JP S6454214A
Authority
JP
Japan
Prior art keywords
light
objective lens
change
measured
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21045487A
Other languages
Japanese (ja)
Inventor
Masahiro Nakashiro
Seiichi Uchimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21045487A priority Critical patent/JPS6454214A/en
Publication of JPS6454214A publication Critical patent/JPS6454214A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To enable the setting of detection sensitivity for the optimum detection range and resolutions required for measurement, by varying a decentering value of light incident into an objective lens with the movement of a reflecting surface or an opening to change the detection sensitivity. CONSTITUTION:After reflected on a reflecting surface 2, a parallel beam emitted from a light source 1 is decentered to be incident into an objective lens 3. The reflected light from an object 4 to be measured is received with the objective lens 3 again and the transmission light is reflected with a beam splitter 5. An angle of the reflected light is converted with a detection lens 6 into a change in a spot position and a displacement is calculated with an arithmetic processing section 8 by measuring the spot position with a light position detector 7. With such an arrangement, as the reflecting surface 2 moves parallel, the reflected light also moves parallel to change a decentering value of the light from the optical axis of the objective lens 3. Thus, an angle of irradiation to the object 4 being measured changes to vary the ratio of an angular change of the reflected light on the object being measured after the transmission thereof through the objective lens 3 with respect to a vertical displacement of the object 4 being measured, thereby causing a change in detection sensitivity.
JP21045487A 1987-08-25 1987-08-25 Shape measuring apparatus Pending JPS6454214A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21045487A JPS6454214A (en) 1987-08-25 1987-08-25 Shape measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21045487A JPS6454214A (en) 1987-08-25 1987-08-25 Shape measuring apparatus

Publications (1)

Publication Number Publication Date
JPS6454214A true JPS6454214A (en) 1989-03-01

Family

ID=16589601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21045487A Pending JPS6454214A (en) 1987-08-25 1987-08-25 Shape measuring apparatus

Country Status (1)

Country Link
JP (1) JPS6454214A (en)

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