JPS645012A - Vapor growth equipment - Google Patents
Vapor growth equipmentInfo
- Publication number
- JPS645012A JPS645012A JP16036587A JP16036587A JPS645012A JP S645012 A JPS645012 A JP S645012A JP 16036587 A JP16036587 A JP 16036587A JP 16036587 A JP16036587 A JP 16036587A JP S645012 A JPS645012 A JP S645012A
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- central part
- thermal conductivity
- casing
- small
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To make the temperature distribution of a susceptor surface uniform, and grow stably a crystal, by making the thickness of the susceptor mounted on a casing surface gradually thin toward the central part, in order that the thermal conductivity may become small toward the central part. CONSTITUTION:In a casing made of quartz, the following are sealed: a heat- insulating material 4 to prevent the downward heat dissipation, a resistor heating element 1 made of tantalum, and electric power supplying terminals 2 to supply electric power to the resistor heating element 1. On the upper sur face of the casing 3, a susceptor 5 is mounted whose thickness becomes thin from the peripheral part toward the central part, and thereon a substrate 6 to be heated is mounted. As the shape of the susceptor 5 becomes thin in thick ness toward the central part, its thermal conductivity is small, so that the tem perature distribution for the substrate 6 to be heated becomes uniform. The same effect can be obtained by a method wherein the thermal conductivity is made small from the peripheral part toward the central part, by making the material of the susceptor 5 composite.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16036587A JPS645012A (en) | 1987-06-26 | 1987-06-26 | Vapor growth equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16036587A JPS645012A (en) | 1987-06-26 | 1987-06-26 | Vapor growth equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS645012A true JPS645012A (en) | 1989-01-10 |
Family
ID=15713399
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16036587A Pending JPS645012A (en) | 1987-06-26 | 1987-06-26 | Vapor growth equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS645012A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0855735A2 (en) * | 1997-01-24 | 1998-07-29 | Applied Materials, Inc. | A high temperature, high flow rate chemical vapor deposition apparatus and related methods |
US6035101A (en) * | 1997-02-12 | 2000-03-07 | Applied Materials, Inc. | High temperature multi-layered alloy heater assembly and related methods |
US6616767B2 (en) | 1997-02-12 | 2003-09-09 | Applied Materials, Inc. | High temperature ceramic heater assembly with RF capability |
-
1987
- 1987-06-26 JP JP16036587A patent/JPS645012A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0855735A2 (en) * | 1997-01-24 | 1998-07-29 | Applied Materials, Inc. | A high temperature, high flow rate chemical vapor deposition apparatus and related methods |
EP0855735A3 (en) * | 1997-01-24 | 2001-10-17 | Applied Materials, Inc. | A high temperature, high flow rate chemical vapor deposition apparatus and related methods |
US6035101A (en) * | 1997-02-12 | 2000-03-07 | Applied Materials, Inc. | High temperature multi-layered alloy heater assembly and related methods |
US6616767B2 (en) | 1997-02-12 | 2003-09-09 | Applied Materials, Inc. | High temperature ceramic heater assembly with RF capability |
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