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JPS6434108A - Magnetic levitation type noncontact guiding device - Google Patents

Magnetic levitation type noncontact guiding device

Info

Publication number
JPS6434108A
JPS6434108A JP18698687A JP18698687A JPS6434108A JP S6434108 A JPS6434108 A JP S6434108A JP 18698687 A JP18698687 A JP 18698687A JP 18698687 A JP18698687 A JP 18698687A JP S6434108 A JPS6434108 A JP S6434108A
Authority
JP
Japan
Prior art keywords
moving table
guiding
guiding device
magnetic levitation
levitation type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18698687A
Other languages
Japanese (ja)
Inventor
Hitoshi Sugiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP18698687A priority Critical patent/JPS6434108A/en
Publication of JPS6434108A publication Critical patent/JPS6434108A/en
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)

Abstract

PURPOSE:To miniaturize and simplify a moving table, by a method wherein guiding coils are provided at opposing positions, pinching a permanent magnet for guiding, respectively while the guiding coils are connected by yokes. CONSTITUTION:A moving table 1 is levitated by a repulsive force, generated by plate type permanent magnets 3, 4 for levitation, which are provided on the lower surface of the moving table 1 and the upper surface of a fixed table 2. Permanent magnets 5 for guiding are provided at both left and right ends of the moving table 1 while magnetism generators 6 are provided at the left and right sides of the fixed table 2 symmetrically. The magnetism generator 6 is composed of a horizontal U-shaped yoke 7, provided on the fixed table 1 so as to pinch the permanent magnet 5 for guiding the moving table 1 from upper and lower direction, and windings 8, attached to respective tip ends of the yoke 7. According to this constitution, the moving table can be miniaturized and the weight reduced.
JP18698687A 1987-07-27 1987-07-27 Magnetic levitation type noncontact guiding device Pending JPS6434108A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18698687A JPS6434108A (en) 1987-07-27 1987-07-27 Magnetic levitation type noncontact guiding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18698687A JPS6434108A (en) 1987-07-27 1987-07-27 Magnetic levitation type noncontact guiding device

Publications (1)

Publication Number Publication Date
JPS6434108A true JPS6434108A (en) 1989-02-03

Family

ID=16198199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18698687A Pending JPS6434108A (en) 1987-07-27 1987-07-27 Magnetic levitation type noncontact guiding device

Country Status (1)

Country Link
JP (1) JPS6434108A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007310302A (en) * 2006-05-22 2007-11-29 Pentax Corp Moving unit support device
NL2002670C2 (en) * 2009-03-26 2010-09-28 Crealev B V MOVEMENT SYSTEM.
WO2015056847A1 (en) * 2013-10-16 2015-04-23 Korea Electrotechnology Research Institute Magnetically levitated transportation apparatus
CN112996620A (en) * 2018-10-31 2021-06-18 丰和工业株式会社 Connecting mechanism for chuck jaws
JP2021102495A (en) * 2019-12-24 2021-07-15 キヤノン株式会社 Carrier and method for manufacturing article

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007310302A (en) * 2006-05-22 2007-11-29 Pentax Corp Moving unit support device
NL2002670C2 (en) * 2009-03-26 2010-09-28 Crealev B V MOVEMENT SYSTEM.
WO2015056847A1 (en) * 2013-10-16 2015-04-23 Korea Electrotechnology Research Institute Magnetically levitated transportation apparatus
KR101531656B1 (en) * 2013-10-16 2015-06-25 한국전기연구원 Magnetically levitated transportation apparatus
JP2016532308A (en) * 2013-10-16 2016-10-13 コリア エレクトロテクノロジー リサーチ インスティテュートKorea Electrotechnology Research Institute Magnetic levitation transport device
CN112996620A (en) * 2018-10-31 2021-06-18 丰和工业株式会社 Connecting mechanism for chuck jaws
JP2021102495A (en) * 2019-12-24 2021-07-15 キヤノン株式会社 Carrier and method for manufacturing article

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