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JPS6432607A - Magnetic alloy film - Google Patents

Magnetic alloy film

Info

Publication number
JPS6432607A
JPS6432607A JP4267688A JP4267688A JPS6432607A JP S6432607 A JPS6432607 A JP S6432607A JP 4267688 A JP4267688 A JP 4267688A JP 4267688 A JP4267688 A JP 4267688A JP S6432607 A JPS6432607 A JP S6432607A
Authority
JP
Japan
Prior art keywords
alloy film
magnetic alloy
composition
kinds
elements selected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4267688A
Other languages
Japanese (ja)
Other versions
JPH0817129B2 (en
Inventor
Koichi Osano
Hiroshi Sakakima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63042676A priority Critical patent/JPH0817129B2/en
Publication of JPS6432607A publication Critical patent/JPS6432607A/en
Publication of JPH0817129B2 publication Critical patent/JPH0817129B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To increase saturation magnetization, corrosion resistance and abrasion resistance, by stacking specific nitride magnetic alloy films and specific nitride films to make up a multilayer structure. CONSTITUTION:A nitride magnetic alloy film A having a composition of TaXbNc in atomic composition %, and an alloy film B having a composition of Ta'Xb' are alternately stacked one upon another. T is one or more kinds of elements selected out of a group copmased of Fe, Co, and Ni. X is one or more kinds of elements selected out of a group composed of Si, Ge, Ga, Ni, and N is nitrogen. 71<=a<=97, 2<=b<=28, 1<=c<=20, a+b+c=100, 72<=a'<=98, 2<=b'<=28, a'+b'=100. When the thicknesses of the alloy film A and the alloy film B are t and t' (Angstrom ), respectively, t<=1000Angstrom , t>=t'/2 hold. Thereby, saturation magnetization, corrosion resistance and abrasion resistance can be increased.
JP63042676A 1987-04-23 1988-02-25 Magnetic alloy film and manufacturing method thereof Expired - Lifetime JPH0817129B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63042676A JPH0817129B2 (en) 1987-04-23 1988-02-25 Magnetic alloy film and manufacturing method thereof

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62-100400 1987-04-23
JP10040087 1987-04-23
JP63042676A JPH0817129B2 (en) 1987-04-23 1988-02-25 Magnetic alloy film and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JPS6432607A true JPS6432607A (en) 1989-02-02
JPH0817129B2 JPH0817129B2 (en) 1996-02-21

Family

ID=26382399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63042676A Expired - Lifetime JPH0817129B2 (en) 1987-04-23 1988-02-25 Magnetic alloy film and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JPH0817129B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6442108A (en) * 1987-08-10 1989-02-14 Hitachi Ltd Heat-resisting magnetic film
JPH03239312A (en) * 1990-02-16 1991-10-24 Victor Co Of Japan Ltd Magnetic alloy

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494428A (en) * 1977-12-30 1979-07-26 Ibm Amorphous metal layer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494428A (en) * 1977-12-30 1979-07-26 Ibm Amorphous metal layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6442108A (en) * 1987-08-10 1989-02-14 Hitachi Ltd Heat-resisting magnetic film
JPH03239312A (en) * 1990-02-16 1991-10-24 Victor Co Of Japan Ltd Magnetic alloy

Also Published As

Publication number Publication date
JPH0817129B2 (en) 1996-02-21

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